TW200508657A - Electrostatically driven latchable actuator system - Google Patents

Electrostatically driven latchable actuator system

Info

Publication number
TW200508657A
TW200508657A TW093125543A TW93125543A TW200508657A TW 200508657 A TW200508657 A TW 200508657A TW 093125543 A TW093125543 A TW 093125543A TW 93125543 A TW93125543 A TW 93125543A TW 200508657 A TW200508657 A TW 200508657A
Authority
TW
Taiwan
Prior art keywords
actuator
side effectors
effectors
attracted
electrostatically driven
Prior art date
Application number
TW093125543A
Other languages
English (en)
Other versions
TWI235849B (en
Inventor
Hiroshi Harada
Naomasa Oka
Yuji Suzuki
Hiroshi Fukshima
Hiroshi Noge
Ogihara Jun
Kawano Kiyohiko
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd
Publication of TW200508657A publication Critical patent/TW200508657A/zh
Application granted granted Critical
Publication of TWI235849B publication Critical patent/TWI235849B/zh

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/3564Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/358Latching of the moving element, i.e. maintaining or holding the moving element in place once operation has been performed; includes a mechanically bistable system
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/02Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/351Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/354Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/35442D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/35481xN switch, i.e. one input and a selectable single output of N possible outputs
    • G02B6/3551x2 switch, i.e. one input and a selectable single output of two possible outputs
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/3564Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357Electrostatic force
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/3564Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3584Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/3596With planar waveguide arrangement, i.e. in a substrate, regardless if actuating mechanism is outside the substrate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00Electrostatic relays; Electro-adhesion relays
    • H01H59/0009Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00Contacts
    • H01H1/0036Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0042Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet
    • H01H2001/0047Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet operable only by mechanical latching

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Micromachines (AREA)
  • Lock And Its Accessories (AREA)
  • Manipulator (AREA)
  • Push-Button Switches (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
TW093125543A 2003-08-26 2004-08-26 Electrostatically driven latchable actuator system TWI235849B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003301549 2003-08-26

Publications (2)

Publication Number Publication Date
TW200508657A true TW200508657A (en) 2005-03-01
TWI235849B TWI235849B (en) 2005-07-11

Family

ID=34213902

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093125543A TWI235849B (en) 2003-08-26 2004-08-26 Electrostatically driven latchable actuator system

Country Status (8)

Country Link
US (1) US7468571B2 (zh)
EP (1) EP1676287B1 (zh)
KR (1) KR100796305B1 (zh)
CN (1) CN1842885B (zh)
CA (1) CA2536579C (zh)
DE (1) DE602004005065T2 (zh)
TW (1) TWI235849B (zh)
WO (1) WO2005020262A1 (zh)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE602004005065T2 (de) * 2003-08-26 2007-06-06 Matsushita Electric Works, Ltd., Kadoma Elektrostatisch gesteuertes verriegelbares stellgliedsystem und optischer schalter mit einem solchen stellgliedsystem
US7863799B1 (en) * 2007-03-02 2011-01-04 AG Microsystems Inc. Micro electro mechanical system using comb and parallel plate actuation
EP2017949A1 (en) * 2007-07-16 2009-01-21 Interuniversitair Microelektronica Centrum (IMEC) Stepping actuator and method of fabrication
DE102008040854A1 (de) * 2008-07-30 2010-02-04 Robert Bosch Gmbh Mikromechanische Struktur sowie Verfahren zum Einstellen der Arbeitsspaltbreite einer mikromechanischen Struktur
US8436698B2 (en) * 2009-11-02 2013-05-07 Harris Corporation MEMS-based tunable filter
US8373522B2 (en) * 2010-02-03 2013-02-12 Harris Corporation High accuracy MEMS-based varactors
US20110198202A1 (en) * 2010-02-18 2011-08-18 Harris Corporation Mems-based ultra-low power devices
CN101834097A (zh) * 2010-05-15 2010-09-15 大连理工大学 一种基于双稳态柔性机构的静电微继电器
US8947797B2 (en) 2010-11-15 2015-02-03 DigitalOptics Corporation MEMS Miniature MEMS actuator assemblies
US8803256B2 (en) * 2010-11-15 2014-08-12 DigitalOptics Corporation MEMS Linearly deployed actuators
US8657352B2 (en) 2011-04-11 2014-02-25 International Business Machines Corporation Robotic device for substrate transfer applications
US8936293B2 (en) 2011-12-21 2015-01-20 International Business Machines Corporation Robotic device for substrate transfer applications
US9093975B2 (en) 2013-08-19 2015-07-28 Harris Corporation Microelectromechanical systems comprising differential inductors and methods for making the same
US9136822B2 (en) 2013-08-19 2015-09-15 Harris Corporation Microelectromechanical system with a micro-scale spring suspension system and methods for making the same
US9172352B2 (en) 2013-08-19 2015-10-27 Harris Corporation Integrated microelectromechanical system devices and methods for making the same
US9123493B2 (en) 2014-01-23 2015-09-01 Harris Corporation Microelectromechanical switches for steering of RF signals
CN104241035B (zh) * 2014-09-01 2016-08-24 清华大学 一种双段式静电驱动微机械开关

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5214727A (en) * 1992-01-16 1993-05-25 The Trustees Of Princeton University Electrostatic microactuator
US5998906A (en) * 1998-01-13 1999-12-07 Seagate Technology, Inc. Electrostatic microactuator and method for use thereof
US6428173B1 (en) * 1999-05-03 2002-08-06 Jds Uniphase, Inc. Moveable microelectromechanical mirror structures and associated methods
KR100312432B1 (ko) * 1999-11-25 2001-11-05 오길록 마이크로 구조체를 이용한 광스위치
US6396975B1 (en) * 2000-01-21 2002-05-28 Jds Uniphase Corporation MEMS optical cross-connect switch
DE50101190D1 (de) * 2000-01-31 2004-01-29 Sercalo Microtechnology Ltd Schalteranordnung für strahlungsleiter
US6388359B1 (en) 2000-03-03 2002-05-14 Optical Coating Laboratory, Inc. Method of actuating MEMS switches
US6520777B2 (en) 2001-01-26 2003-02-18 Chromux Technologies, Inc. Micro-machined silicon on-off fiber optic switching system
US6801682B2 (en) * 2001-05-18 2004-10-05 Adc Telecommunications, Inc. Latching apparatus for a MEMS optical switch
US6996306B2 (en) * 2003-08-25 2006-02-07 Asia Pacific Microsystems, Inc. Electrostatically operated micro-optical devices and method for manufacturing thereof
DE602004005065T2 (de) * 2003-08-26 2007-06-06 Matsushita Electric Works, Ltd., Kadoma Elektrostatisch gesteuertes verriegelbares stellgliedsystem und optischer schalter mit einem solchen stellgliedsystem
JP2005074561A (ja) * 2003-08-29 2005-03-24 Matsushita Electric Works Ltd 静電マイクロアクチュエータ及び光スイッチ
JP4407312B2 (ja) * 2004-02-24 2010-02-03 パナソニック電工株式会社 アクチュエータ及び光デバイス
JP2005271187A (ja) * 2004-03-26 2005-10-06 Matsushita Electric Works Ltd マイクロデバイス及び光スイッチ

Also Published As

Publication number Publication date
CN1842885A (zh) 2006-10-04
US20060261702A1 (en) 2006-11-23
WO2005020262A1 (en) 2005-03-03
CN1842885B (zh) 2011-08-03
DE602004005065D1 (de) 2007-04-12
TWI235849B (en) 2005-07-11
EP1676287B1 (en) 2007-02-28
DE602004005065T2 (de) 2007-06-06
US7468571B2 (en) 2008-12-23
KR20060087532A (ko) 2006-08-02
KR100796305B1 (ko) 2008-01-21
EP1676287A1 (en) 2006-07-05
CA2536579C (en) 2011-02-15
CA2536579A1 (en) 2005-03-03

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees