TW200505051A - Light emitting device and its manufacturing method - Google Patents

Light emitting device and its manufacturing method

Info

Publication number
TW200505051A
TW200505051A TW093107630A TW93107630A TW200505051A TW 200505051 A TW200505051 A TW 200505051A TW 093107630 A TW093107630 A TW 093107630A TW 93107630 A TW93107630 A TW 93107630A TW 200505051 A TW200505051 A TW 200505051A
Authority
TW
Taiwan
Prior art keywords
light
layer
metal layer
emitting
diffusion
Prior art date
Application number
TW093107630A
Other languages
Chinese (zh)
Other versions
TWI318462B (en
Inventor
Kazunori Hagimoto
Masato Yamada
Jyun Ikeda
Masanobu Takahashi
Original Assignee
Shin Etsu Handotai Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Handotai Kk filed Critical Shin Etsu Handotai Kk
Publication of TW200505051A publication Critical patent/TW200505051A/en
Application granted granted Critical
Publication of TWI318462B publication Critical patent/TWI318462B/zh

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/44Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the coatings, e.g. passivation layer or anti-reflective coating
    • H01L33/46Reflective coating, e.g. dielectric Bragg reflector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/005Processes
    • H01L33/0093Wafer bonding; Removal of the growth substrate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/36Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
    • H01L33/38Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes with a particular shape
    • H01L33/387Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes with a particular shape with a plurality of electrode regions in direct contact with the semiconductor body and being electrically interconnected by another electrode layer

Abstract

A light-emitting device (100) in which between a compound semiconductor layer (60) and a main metal layer (10), a contact metal layer (32) is disposed to reduce the contact resistance between the main metal layer (10) and the compound semiconductor layer (60). In the compound semiconductor layer (60), the region between the contact metal layer (32) and a light-emitting layer section (24) is transparent to the light emitted from the light-emitting layer section (24) and serves as a diffusion blocking semiconductor layer (25) to suppress the diffusion of components from the contact metal layer (32) to the light-emitting layer section (24). If the diffusion blocking semiconductor layer (25) is made of AlGaAs, it produces an effect of suppressing the diffusion of Ge, Ni, and Au from the contact metal layer (32) to the light-emitting layer section (24). Since the device substrate of the light-emitting device is joined to a light-emitting layer through a contact metal layer and a reflection metal layer, even if the light-emitting device is subjected to alloying heating treatment, the diffusion of components from the contact metal layer hardly influences the light-emitting layer section.
TW093107630A 2003-04-28 2004-03-22 Light emitting device and its manufacturing method TW200505051A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003123379 2003-04-28
JP2003155921A JP4140007B2 (en) 2003-04-28 2003-05-30 Light emitting device and method for manufacturing light emitting device

Publications (2)

Publication Number Publication Date
TW200505051A true TW200505051A (en) 2005-02-01
TWI318462B TWI318462B (en) 2009-12-11

Family

ID=33422061

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093107630A TW200505051A (en) 2003-04-28 2004-03-22 Light emitting device and its manufacturing method

Country Status (3)

Country Link
JP (1) JP4140007B2 (en)
TW (1) TW200505051A (en)
WO (1) WO2004097948A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI399865B (en) * 2005-04-05 2013-06-21 Philips Lumileds Lighting Co Allngap led having reduced temperature dependence

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4731180B2 (en) * 2005-02-21 2011-07-20 三洋電機株式会社 Nitride semiconductor device manufacturing method
DE102005020908A1 (en) 2005-02-28 2006-08-31 Osram Opto Semiconductors Gmbh Lighting device for back lighting of liquid crystal display, has optical unit with radiation emission surface which has convex curved partial region that partially surrounds concave curved partial region in distance to optical axis
JP4935136B2 (en) * 2006-03-22 2012-05-23 パナソニック株式会社 Light emitting element
JP2008288248A (en) * 2007-05-15 2008-11-27 Hitachi Cable Ltd Semiconductor light-emitting element
JP5228595B2 (en) * 2008-04-21 2013-07-03 ソニー株式会社 SEMICONDUCTOR LIGHT EMITTING ELEMENT AND METHOD FOR MANUFACTURING SAME, LAMINATED STRUCTURE AND METHOD FOR FORMING THE SAME
KR101543328B1 (en) 2008-11-18 2015-08-11 삼성전자주식회사 Light emitting device and method of fabricating light emitting device
JP2010186829A (en) 2009-02-10 2010-08-26 Toshiba Corp Method for manufacturing light emitting element
JP2011129724A (en) * 2009-12-18 2011-06-30 Dowa Electronics Materials Co Ltd Semiconductor light-emitting element and method of manufacturing the same
KR102075132B1 (en) * 2013-06-03 2020-02-10 엘지이노텍 주식회사 Light emitting device
JP2014204095A (en) * 2013-04-10 2014-10-27 信越半導体株式会社 Semiconductor light emitting element and manufacturing method of the same
KR102045989B1 (en) 2018-03-14 2019-11-18 한국과학기술연구원 Semiconductor device using interdiffusion and method for manufacturing the same

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3230638B2 (en) * 1993-02-10 2001-11-19 シャープ株式会社 Light emitting diode manufacturing method
US5376580A (en) * 1993-03-19 1994-12-27 Hewlett-Packard Company Wafer bonding of light emitting diode layers
JPH0766455A (en) * 1993-08-24 1995-03-10 Shin Etsu Handotai Co Ltd Semiconductor light emitting device
JP4050444B2 (en) * 2000-05-30 2008-02-20 信越半導体株式会社 Light emitting device and manufacturing method thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI399865B (en) * 2005-04-05 2013-06-21 Philips Lumileds Lighting Co Allngap led having reduced temperature dependence

Also Published As

Publication number Publication date
JP4140007B2 (en) 2008-08-27
JP2005019424A (en) 2005-01-20
WO2004097948A1 (en) 2004-11-11
TWI318462B (en) 2009-12-11

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