TR201008570A1 - Surface roughness measurement method and apparatus - Google Patents

Surface roughness measurement method and apparatus

Info

Publication number
TR201008570A1
TR201008570A1 TR2010/08570A TR201008570A TR201008570A1 TR 201008570 A1 TR201008570 A1 TR 201008570A1 TR 2010/08570 A TR2010/08570 A TR 2010/08570A TR 201008570 A TR201008570 A TR 201008570A TR 201008570 A1 TR201008570 A1 TR 201008570A1
Authority
TR
Turkey
Prior art keywords
surface roughness
measurement method
roughness measurement
examined
present
Prior art date
Application number
TR2010/08570A
Other languages
Turkish (tr)
Inventor
Dursunkaya Zafer
Yildirim Murat
Original Assignee
Dursunkaya Zafer
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dursunkaya Zafer filed Critical Dursunkaya Zafer
Priority to TR2010/08570A priority Critical patent/TR201008570A1/en
Priority to PCT/TR2011/000231 priority patent/WO2012053998A1/en
Publication of TR201008570A1 publication Critical patent/TR201008570A1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
    • G01B9/02019—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations contacting different points on same face of object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02027—Two or more interferometric channels or interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02057—Passive reduction of errors by using common path configuration, i.e. reference and object path almost entirely overlapping
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02083—Interferometers characterised by particular signal processing and presentation
    • G01B9/02084—Processing in the Fourier or frequency domain when not imaged in the frequency domain

Abstract

Bu buluş, girişimden yararlanarak yüzey pürüzlülüğü ve dalgalanmasını, ölçüm düzeneğinden kaynaklanan ilerleticinin sapması ve diğer etkenler de belirlenerek, ölçen bir yöntem ve düzenek ile ilgilidir. Bu buluş kapsamında, birbirlerine göre yer değiştiren incelenecek bir yüzey ve bu yüzey ile etkileşen bir girişimölçerden yararlanılmıştır. Belirli bir doğrultu boyunca gerçekleştirilen yer değiştirme sırasında girişim deseninin değişiminden yararlanılarak, incelenecek yüzeyin biçiminin söz konusu doğrultunun yüzey üzerindeki izdüşümü boyunca belirlenmesi sağlanmıştır.The present invention relates to a method and apparatus for measuring surface roughness and fluctuation using the interference, as well as determining the deflection of the advancer from the measuring device and other factors. Within the scope of the present invention, a surface to be examined and an interferometer interacting with this surface are utilized which are displaced with respect to each other. By changing the interference pattern during displacement along a certain direction, the shape of the surface to be examined is determined to be determined along the projection of said direction on the surface.

TR2010/08570A 2010-10-19 2010-10-19 Surface roughness measurement method and apparatus TR201008570A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TR2010/08570A TR201008570A1 (en) 2010-10-19 2010-10-19 Surface roughness measurement method and apparatus
PCT/TR2011/000231 WO2012053998A1 (en) 2010-10-19 2011-10-17 A surface roughness measurement method and setup

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TR2010/08570A TR201008570A1 (en) 2010-10-19 2010-10-19 Surface roughness measurement method and apparatus

Publications (1)

Publication Number Publication Date
TR201008570A1 true TR201008570A1 (en) 2012-05-21

Family

ID=45065950

Family Applications (1)

Application Number Title Priority Date Filing Date
TR2010/08570A TR201008570A1 (en) 2010-10-19 2010-10-19 Surface roughness measurement method and apparatus

Country Status (2)

Country Link
TR (1) TR201008570A1 (en)
WO (1) WO2012053998A1 (en)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050018199A1 (en) 2003-07-24 2005-01-27 Leblanc Philip R. Fiber array interferometer for inspecting glass sheets

Also Published As

Publication number Publication date
WO2012053998A1 (en) 2012-04-26

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