SU574172A3 - Спектрометр ионного рассе ни - Google Patents

Спектрометр ионного рассе ни

Info

Publication number
SU574172A3
SU574172A3 SU7502172007A SU2172007A SU574172A3 SU 574172 A3 SU574172 A3 SU 574172A3 SU 7502172007 A SU7502172007 A SU 7502172007A SU 2172007 A SU2172007 A SU 2172007A SU 574172 A3 SU574172 A3 SU 574172A3
Authority
SU
USSR - Soviet Union
Prior art keywords
ions
energy
analyzer
primary
signal
Prior art date
Application number
SU7502172007A
Other languages
English (en)
Russian (ru)
Inventor
Леон Эриксон Роберт
Филип Смит Дэвид
Original Assignee
Миннесота Майнинг Энд Мануфакчуринг Компани (Фирма)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Миннесота Майнинг Энд Мануфакчуринг Компани (Фирма) filed Critical Миннесота Майнинг Энд Мануфакчуринг Компани (Фирма)
Application granted granted Critical
Publication of SU574172A3 publication Critical patent/SU574172A3/ru

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/295Electron or ion diffraction tubes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/203Measuring back scattering
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/022Circuit arrangements, e.g. for generating deviation currents or voltages ; Components associated with high voltage supply
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/10Ion sources; Ion guns
    • H01J49/14Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/142Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/26Mass spectrometers or separator tubes
    • H01J49/28Static spectrometers
    • H01J49/282Static spectrometers using electrostatic analysers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/44Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46Static spectrometers
    • H01J49/48Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Engineering & Computer Science (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
SU7502172007A 1974-09-20 1975-09-19 Спектрометр ионного рассе ни SU574172A3 (ru)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US507713A US3920989A (en) 1974-09-20 1974-09-20 Ion scattering spectrometer utilizing charge exchange processes

Publications (1)

Publication Number Publication Date
SU574172A3 true SU574172A3 (ru) 1977-09-25

Family

ID=24019819

Family Applications (1)

Application Number Title Priority Date Filing Date
SU7502172007A SU574172A3 (ru) 1974-09-20 1975-09-19 Спектрометр ионного рассе ни

Country Status (9)

Country Link
US (1) US3920989A (enrdf_load_stackoverflow)
JP (1) JPS5435957B2 (enrdf_load_stackoverflow)
CA (1) CA1021882A (enrdf_load_stackoverflow)
CH (1) CH594249A5 (enrdf_load_stackoverflow)
DE (1) DE2542362C3 (enrdf_load_stackoverflow)
FR (1) FR2285610A1 (enrdf_load_stackoverflow)
GB (1) GB1526787A (enrdf_load_stackoverflow)
NL (1) NL7508730A (enrdf_load_stackoverflow)
SU (1) SU574172A3 (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0722011B2 (ja) * 1983-03-30 1995-03-08 日新電機株式会社 高分解能イオン散乱分析装置
IT1246375B (it) * 1990-04-11 1994-11-18 Consiglio Nazionale Ricerche Apparecchiatura e metodo per la determinazione assoluta dell'energia di un fascio di ioni
JP2642881B2 (ja) * 1994-09-28 1997-08-20 東京大学長 低速多価イオンによる超高感度水素検出法
US10206273B2 (en) * 2017-01-18 2019-02-12 Phoenix Llc High power ion beam generator systems and methods
CN114252653B (zh) * 2021-01-06 2023-12-12 中国科学院物理研究所 超快成像装置及其方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3480774A (en) * 1967-05-26 1969-11-25 Minnesota Mining & Mfg Low-energy ion scattering apparatus and method for analyzing the surface of a solid
US3665182A (en) * 1969-08-18 1972-05-23 Minnesota Mining & Mfg Elemental analyzing apparatus
US3665185A (en) * 1970-10-19 1972-05-23 Minnesota Mining & Mfg Ion scattering spectrometer with neutralization

Also Published As

Publication number Publication date
GB1526787A (en) 1978-09-27
DE2542362C3 (de) 1980-01-17
JPS5157494A (enrdf_load_stackoverflow) 1976-05-19
FR2285610A1 (fr) 1976-04-16
NL7508730A (nl) 1976-03-23
DE2542362A1 (de) 1976-04-01
DE2542362B2 (de) 1979-05-23
FR2285610B1 (enrdf_load_stackoverflow) 1981-08-07
CA1021882A (en) 1977-11-29
JPS5435957B2 (enrdf_load_stackoverflow) 1979-11-06
US3920989A (en) 1975-11-18
CH594249A5 (enrdf_load_stackoverflow) 1977-12-30

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