SG77677A1 - A novel structural design for improving the sensitivity of a surface-micromachined vibratory gyroscope - Google Patents

A novel structural design for improving the sensitivity of a surface-micromachined vibratory gyroscope

Info

Publication number
SG77677A1
SG77677A1 SG1999001912A SG1999001912A SG77677A1 SG 77677 A1 SG77677 A1 SG 77677A1 SG 1999001912 A SG1999001912 A SG 1999001912A SG 1999001912 A SG1999001912 A SG 1999001912A SG 77677 A1 SG77677 A1 SG 77677A1
Authority
SG
Singapore
Prior art keywords
sensitivity
improving
structural design
novel structural
vibratory gyroscope
Prior art date
Application number
SG1999001912A
Other languages
English (en)
Inventor
Wang Zhe
Uppili Shridhar
Lin Rong Ming
Lim Mong King
Original Assignee
Inst Of Microelectronics
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inst Of Microelectronics filed Critical Inst Of Microelectronics
Priority to SG1999001912A priority Critical patent/SG77677A1/en
Priority to US09/453,112 priority patent/US6293148B1/en
Publication of SG77677A1 publication Critical patent/SG77677A1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
SG1999001912A 1999-04-30 1999-04-30 A novel structural design for improving the sensitivity of a surface-micromachined vibratory gyroscope SG77677A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
SG1999001912A SG77677A1 (en) 1999-04-30 1999-04-30 A novel structural design for improving the sensitivity of a surface-micromachined vibratory gyroscope
US09/453,112 US6293148B1 (en) 1999-04-30 1999-12-02 Structural design for improving the sensitivity of a surface-micromachined vibratory gyroscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SG1999001912A SG77677A1 (en) 1999-04-30 1999-04-30 A novel structural design for improving the sensitivity of a surface-micromachined vibratory gyroscope

Publications (1)

Publication Number Publication Date
SG77677A1 true SG77677A1 (en) 2001-01-16

Family

ID=20430337

Family Applications (1)

Application Number Title Priority Date Filing Date
SG1999001912A SG77677A1 (en) 1999-04-30 1999-04-30 A novel structural design for improving the sensitivity of a surface-micromachined vibratory gyroscope

Country Status (2)

Country Link
US (1) US6293148B1 (US06293148-20010925-M00005.png)
SG (1) SG77677A1 (US06293148-20010925-M00005.png)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6516666B1 (en) * 2000-09-19 2003-02-11 Motorola, Inc. Yaw rate motion sensor
US6859542B2 (en) 2001-05-31 2005-02-22 Sonion Lyngby A/S Method of providing a hydrophobic layer and a condenser microphone having such a layer
GB2377494B (en) * 2001-07-09 2004-07-28 Autoliv Dev "Improvements in or relating to an off-set elimination system for a vibrating gyroscope"
US6928874B2 (en) * 2002-11-15 2005-08-16 The Regents Of The University Of California Dynamically amplified micromachined vibratory angle measuring gyroscopes, micromachined inertial sensors and method of operation for the same
US7124634B2 (en) * 2003-07-29 2006-10-24 The Boeing Company Single plate capacitive acceleration derivative detector
US6785975B1 (en) * 2003-08-05 2004-09-07 The Boeing Company Accelerometer augmented precision compass
US7310577B2 (en) * 2004-09-29 2007-12-18 The Boeing Company Integrated capacitive bridge and integrated flexure functions inertial measurement unit
US7360425B2 (en) * 2004-11-22 2008-04-22 The Boeing Company Compensated composite structure
US7228739B2 (en) 2004-11-23 2007-06-12 The Boeing Company Precision flexure plate
US7331229B2 (en) * 2004-12-09 2008-02-19 The Boeing Company Magnetic null accelerometer
US7137208B2 (en) * 2004-12-14 2006-11-21 The Boeing Company Leveling device
US7296470B2 (en) 2005-04-14 2007-11-20 The Boeing Company Extended accuracy flexured plate dual capacitance accelerometer
US7284430B2 (en) * 2005-08-15 2007-10-23 The Regents Of The University Of California Robust micromachined gyroscopes with two degrees of freedom sense-mode oscillator
WO2008039378A2 (en) * 2006-09-22 2008-04-03 Cornell Research Foundation, Inc. Coupled mems structure for motion amplification
US8563909B2 (en) 2010-04-09 2013-10-22 Bae Systems Information And Electronic Systems Integration Inc. Automatic re-initialization of resonant sensors in rocket and missile guidance systems
EP2963387B1 (en) * 2014-06-30 2019-07-31 STMicroelectronics Srl Micro-electro-mechanical device with compensation of errors due to disturbance forces, such as quadrature components
WO2017183537A1 (ja) * 2016-04-19 2017-10-26 日本電信電話株式会社 擬似力覚発生装置
US10234477B2 (en) * 2016-07-27 2019-03-19 Google Llc Composite vibratory in-plane accelerometer

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5205171A (en) 1991-01-11 1993-04-27 Northrop Corporation Miniature silicon accelerometer and method
DE4414237A1 (de) * 1994-04-23 1995-10-26 Bosch Gmbh Robert Mikromechanischer Schwinger eines Schwingungsgyrometers
WO1995034798A1 (de) 1994-06-16 1995-12-21 Robert Bosch Gmbh Beschleunigungssensor
DE4428405A1 (de) 1994-08-11 1996-02-15 Karlsruhe Forschzent Drehratensensor
WO1996024652A1 (en) 1995-02-08 1996-08-15 Research Octane, Inc. Refining process and apparatus
KR100363246B1 (ko) * 1995-10-27 2003-02-14 삼성전자 주식회사 진동구조물및진동구조물의고유진동수제어방법
US5992233A (en) 1996-05-31 1999-11-30 The Regents Of The University Of California Micromachined Z-axis vibratory rate gyroscope
FR2770899B1 (fr) 1997-11-07 1999-12-10 Commissariat Energie Atomique Microgyrometre vibrant
US5979246A (en) * 1998-02-09 1999-11-09 Micro Motion, Inc. Spring rate balancing of the flow tube and a balance bar in a straight tube Coriolis flowmeter

Also Published As

Publication number Publication date
US6293148B1 (en) 2001-09-25

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