SG135993A1 - Components having a film structure and methods of forming components having a film structure - Google Patents

Components having a film structure and methods of forming components having a film structure

Info

Publication number
SG135993A1
SG135993A1 SG200601751-1A SG2006017511A SG135993A1 SG 135993 A1 SG135993 A1 SG 135993A1 SG 2006017511 A SG2006017511 A SG 2006017511A SG 135993 A1 SG135993 A1 SG 135993A1
Authority
SG
Singapore
Prior art keywords
layer
film structure
components
methods
nickel
Prior art date
Application number
SG200601751-1A
Inventor
Hiroyuki Okita
Ching Biing Yeo
Jianmin Miao
Xiaofeng Chen
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to SG200601751-1A priority Critical patent/SG135993A1/en
Publication of SG135993A1 publication Critical patent/SG135993A1/en

Links

Abstract

A method of forming a component having a film structure comprises thermally oxidising a first layer of a silicon substrate to form a compressive thermal oxidization silicon dioxide layer; and applying a layer comprising a nickel-titanium alloy to the first layer such that the first layer is located between the layer comprising a nickel- titanium alloy and the substrate. There is also disclosed a method of forming a component having a film structure comprising applying a first layer to a substrate to form an adhesive layer and applying a layer comprising a nickel-titanium alloy to the first layer such that the first layer is located between the layer comprising a nickel-titanium alloy and the substrate. There is further disclosed a component formed according to these methods and MEMS devices formed according to these methods.
SG200601751-1A 2006-03-20 2006-03-20 Components having a film structure and methods of forming components having a film structure SG135993A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SG200601751-1A SG135993A1 (en) 2006-03-20 2006-03-20 Components having a film structure and methods of forming components having a film structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SG200601751-1A SG135993A1 (en) 2006-03-20 2006-03-20 Components having a film structure and methods of forming components having a film structure

Publications (1)

Publication Number Publication Date
SG135993A1 true SG135993A1 (en) 2007-10-29

Family

ID=38805531

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200601751-1A SG135993A1 (en) 2006-03-20 2006-03-20 Components having a film structure and methods of forming components having a film structure

Country Status (1)

Country Link
SG (1) SG135993A1 (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040252164A1 (en) * 2003-06-10 2004-12-16 Samsung Electronics Co., Ltd. Microactuator and fluid transfer apparatus using the same
US20060038643A1 (en) * 2004-08-20 2006-02-23 Palo Alto Research Center Incorporated Stressed material and shape memory material MEMS devices and methods for manufacturing

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040252164A1 (en) * 2003-06-10 2004-12-16 Samsung Electronics Co., Ltd. Microactuator and fluid transfer apparatus using the same
US20060038643A1 (en) * 2004-08-20 2006-02-23 Palo Alto Research Center Incorporated Stressed material and shape memory material MEMS devices and methods for manufacturing

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