SG135007A1 - High-resolution gas gauge proximity sensor - Google Patents

High-resolution gas gauge proximity sensor

Info

Publication number
SG135007A1
SG135007A1 SG200307488-7A SG2003074887A SG135007A1 SG 135007 A1 SG135007 A1 SG 135007A1 SG 2003074887 A SG2003074887 A SG 2003074887A SG 135007 A1 SG135007 A1 SG 135007A1
Authority
SG
Singapore
Prior art keywords
proximity sensor
gas gauge
resolution gas
gauge proximity
resolution
Prior art date
Application number
SG200307488-7A
Inventor
Boguslaw F Gajdeczko
Kenneth M Bogursky
Daniel N Galburt
Willy M Sander
Kevin J Violette
Original Assignee
Asml Holding Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asml Holding Nv filed Critical Asml Holding Nv
Publication of SG135007A1 publication Critical patent/SG135007A1/en

Links

SG200307488-7A 2002-12-19 2003-12-16 High-resolution gas gauge proximity sensor SG135007A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US33276802A 2002-12-19 2002-12-19

Publications (1)

Publication Number Publication Date
SG135007A1 true SG135007A1 (en) 2007-09-28

Family

ID=38800861

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200307488-7A SG135007A1 (en) 2002-12-19 2003-12-16 High-resolution gas gauge proximity sensor

Country Status (1)

Country Link
SG (1) SG135007A1 (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2571557A (en) * 1947-09-04 1951-10-16 Etavex S A Pneumatic size gauging device
GB1399397A (en) * 1972-10-05 1975-07-02 Pye Ltd Fluid flow control arrangements
US4953388A (en) * 1989-01-25 1990-09-04 The Perkin-Elmer Corporation Air gauge sensor
US5181532A (en) * 1988-09-16 1993-01-26 Lage Brodefors Flow control

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2571557A (en) * 1947-09-04 1951-10-16 Etavex S A Pneumatic size gauging device
GB1399397A (en) * 1972-10-05 1975-07-02 Pye Ltd Fluid flow control arrangements
US5181532A (en) * 1988-09-16 1993-01-26 Lage Brodefors Flow control
US4953388A (en) * 1989-01-25 1990-09-04 The Perkin-Elmer Corporation Air gauge sensor

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