SG11202112348PA - Method for evaluating pickup performance, integrated dicing/die-bonding film, method for evaluating and selecting integrated dicing/die-bonding film, and method for manufacturing semiconductor device - Google Patents
Method for evaluating pickup performance, integrated dicing/die-bonding film, method for evaluating and selecting integrated dicing/die-bonding film, and method for manufacturing semiconductor deviceInfo
- Publication number
- SG11202112348PA SG11202112348PA SG11202112348PA SG11202112348PA SG11202112348PA SG 11202112348P A SG11202112348P A SG 11202112348PA SG 11202112348P A SG11202112348P A SG 11202112348PA SG 11202112348P A SG11202112348P A SG 11202112348PA SG 11202112348P A SG11202112348P A SG 11202112348PA
- Authority
- SG
- Singapore
- Prior art keywords
- evaluating
- die
- bonding film
- integrated dicing
- semiconductor device
- Prior art date
Links
- 238000000034 method Methods 0.000 title 3
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
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- C09J5/00—Adhesive processes in general; Adhesive processes not provided for elsewhere, e.g. relating to primers
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- G01N19/00—Investigating materials by mechanical methods
- G01N19/04—Measuring adhesive force between materials, e.g. of sealing tape, of coating
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- H01L2224/834—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
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- H01L2225/06555—Geometry of the stack, e.g. form of the devices, geometry to facilitate stacking
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- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L24/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
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- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
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Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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PCT/JP2019/018812 WO2020230209A1 (ja) | 2019-05-10 | 2019-05-10 | ピックアップ性の評価方法、ダイシング・ダイボンディング一体型フィルム、ダイシング・ダイボンディング一体型フィルムの評価方法及び選別方法、並びに半導体装置の製造方法 |
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SG11202112348PA true SG11202112348PA (en) | 2021-12-30 |
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SG11202112348PA SG11202112348PA (en) | 2019-05-10 | 2019-05-10 | Method for evaluating pickup performance, integrated dicing/die-bonding film, method for evaluating and selecting integrated dicing/die-bonding film, and method for manufacturing semiconductor device |
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US (1) | US20220216114A1 (zh) |
JP (1) | JP6860122B1 (zh) |
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CN (1) | CN113366621B (zh) |
SG (1) | SG11202112348PA (zh) |
WO (1) | WO2020230209A1 (zh) |
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CN114287054A (zh) * | 2019-08-26 | 2022-04-05 | 琳得科株式会社 | 层叠体的制造方法 |
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JP4443962B2 (ja) | 2004-03-17 | 2010-03-31 | 日東電工株式会社 | ダイシング・ダイボンドフィルム |
JP2007285795A (ja) * | 2006-04-14 | 2007-11-01 | Toppan Printing Co Ltd | 被膜の密着性評価方法 |
JP2009130332A (ja) * | 2007-11-28 | 2009-06-11 | Oki Semiconductor Co Ltd | 半導体装置の製造方法 |
JP5456441B2 (ja) * | 2009-01-30 | 2014-03-26 | 日東電工株式会社 | ダイシングテープ一体型ウエハ裏面保護フィルム |
JP2010263041A (ja) * | 2009-05-01 | 2010-11-18 | Nitto Denko Corp | ダイアタッチフィルム付きダイシングテープおよび半導体装置の製造方法 |
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JP2012069586A (ja) | 2010-09-21 | 2012-04-05 | Nitto Denko Corp | ダイシング・ダイボンドフィルム、ダイシング・ダイボンドフィルムの製造方法、及び、半導体装置の製造方法 |
JP2012153819A (ja) * | 2011-01-27 | 2012-08-16 | Lintec Corp | 接着剤組成物および接着シート |
JP5802396B2 (ja) * | 2011-01-27 | 2015-10-28 | 株式会社オートネットワーク技術研究所 | 紫外線硬化性組成物およびこれを用いた硬化物 |
JP6028461B2 (ja) * | 2012-08-24 | 2016-11-16 | 日立化成株式会社 | 半導体装置の製造方法及び半導体装置 |
JP2014135469A (ja) | 2012-12-10 | 2014-07-24 | Nitto Denko Corp | 接着シート、ダイシングテープ一体型接着シート、半導体装置の製造方法、及び、半導体装置 |
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JP6656222B2 (ja) * | 2015-03-03 | 2020-03-04 | リンテック株式会社 | 半導体加工用シート |
JP6926473B2 (ja) * | 2016-12-28 | 2021-08-25 | 昭和電工マテリアルズ株式会社 | ダイシング用粘着シート及びその製造方法、ダイシングダイボンディング一体型シート、並びに、半導体装置の製造方法 |
JP6667468B2 (ja) * | 2017-03-10 | 2020-03-18 | 古河電気工業株式会社 | 半導体加工用粘着テープ |
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CN113366621B (zh) | 2021-12-31 |
JP6860122B1 (ja) | 2021-04-14 |
TW202121512A (zh) | 2021-06-01 |
KR20210111330A (ko) | 2021-09-10 |
JPWO2020230209A1 (ja) | 2021-06-03 |
US20220216114A1 (en) | 2022-07-07 |
CN113366621A (zh) | 2021-09-07 |
WO2020230209A1 (ja) | 2020-11-19 |
KR102417467B1 (ko) | 2022-07-06 |
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