SG11202003132PA - A nozzle for conveying a plasma stream for plasma abatment and related method - Google Patents

A nozzle for conveying a plasma stream for plasma abatment and related method

Info

Publication number
SG11202003132PA
SG11202003132PA SG11202003132PA SG11202003132PA SG11202003132PA SG 11202003132P A SG11202003132P A SG 11202003132PA SG 11202003132P A SG11202003132P A SG 11202003132PA SG 11202003132P A SG11202003132P A SG 11202003132PA SG 11202003132P A SG11202003132P A SG 11202003132PA
Authority
SG
Singapore
Prior art keywords
plasma
abatment
conveying
nozzle
related method
Prior art date
Application number
SG11202003132PA
Other languages
English (en)
Inventor
Simone Magni
Yun Soo Choi
Chan Kyoo Ko
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Publication of SG11202003132PA publication Critical patent/SG11202003132PA/en

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • A—HUMAN NECESSITIES
    • A62—LIFE-SAVING; FIRE-FIGHTING
    • A62D—CHEMICAL MEANS FOR EXTINGUISHING FIRES OR FOR COMBATING OR PROTECTING AGAINST HARMFUL CHEMICAL AGENTS; CHEMICAL MATERIALS FOR USE IN BREATHING APPARATUS
    • A62D3/00—Processes for making harmful chemical substances harmless or less harmful, by effecting a chemical change in the substances
    • A62D3/10—Processes for making harmful chemical substances harmless or less harmful, by effecting a chemical change in the substances by subjecting to electric or wave energy or particle or ionizing radiation
    • A62D3/19—Processes for making harmful chemical substances harmless or less harmful, by effecting a chemical change in the substances by subjecting to electric or wave energy or particle or ionizing radiation to plasma
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D11/00—Burners using a direct spraying action of liquid droplets or vaporised liquid into the combustion space
    • F23D11/10—Burners using a direct spraying action of liquid droplets or vaporised liquid into the combustion space the spraying being induced by a gaseous medium, e.g. water vapour
    • F23D11/18—Burners using a direct spraying action of liquid droplets or vaporised liquid into the combustion space the spraying being induced by a gaseous medium, e.g. water vapour the gaseous medium being water vapour generated at the nozzle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H05H1/3468—Vortex generators
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H2245/00—Applications of plasma devices
    • H05H2245/10—Treatment of gases
    • H05H2245/15—Ambient air; Ozonisers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Environmental & Geological Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Toxicology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Business, Economics & Management (AREA)
  • Emergency Management (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Plasma Technology (AREA)
  • Treating Waste Gases (AREA)
  • Telephone Function (AREA)
SG11202003132PA 2017-10-04 2018-10-01 A nozzle for conveying a plasma stream for plasma abatment and related method SG11202003132PA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB1716185.2A GB2567168A (en) 2017-10-04 2017-10-04 Nozzle and method
PCT/GB2018/052804 WO2019069066A1 (en) 2017-10-04 2018-10-01 NOZZLE FOR TRANSPORTING A PLASMA FLOW FOR PLASMA ABATEMENT AND METHOD THEREOF

Publications (1)

Publication Number Publication Date
SG11202003132PA true SG11202003132PA (en) 2020-05-28

Family

ID=60270267

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11202003132PA SG11202003132PA (en) 2017-10-04 2018-10-01 A nozzle for conveying a plasma stream for plasma abatment and related method

Country Status (7)

Country Link
EP (1) EP3692770B1 (zh)
KR (1) KR102676559B1 (zh)
CN (1) CN111149437B (zh)
GB (1) GB2567168A (zh)
SG (1) SG11202003132PA (zh)
TW (1) TWI796368B (zh)
WO (1) WO2019069066A1 (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113908482A (zh) * 2021-11-11 2022-01-11 应急管理部上海消防研究所 一种消防应急救援用免水洗消技术装备

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6187226B1 (en) * 1995-03-14 2001-02-13 Bechtel Bwxt Idaho, Llc Thermal device and method for production of carbon monoxide and hydrogen by thermal dissociation of hydrocarbon gases
KR19990017420A (ko) * 1997-08-23 1999-03-15 김징완 플라즈마를 이용한 난분해성 가스 처리방법
JP2000334294A (ja) * 1999-05-31 2000-12-05 Shinmeiwa Auto Engineering Ltd 代替フロンのプラズマアーク分解方法及び装置
JP2001009233A (ja) * 1999-06-30 2001-01-16 Daihen Corp フロン等のプラズマアーク分解無害化装置
GB0403797D0 (en) * 2004-02-20 2004-03-24 Boc Group Plc Gas abatement
KR100822048B1 (ko) * 2006-06-07 2008-04-15 주식회사 글로벌스탠다드테크놀로지 플라즈마 토치를 이용한 폐가스 처리장치
US20100258510A1 (en) * 2009-04-10 2010-10-14 Applied Materials, Inc. Methods and apparatus for treating effluent
US20140262033A1 (en) * 2013-03-13 2014-09-18 Applied Materials, Inc. Gas sleeve for foreline plasma abatement system
CN103354695B (zh) * 2013-07-25 2016-02-24 安徽省新能电气科技有限公司 一种电弧通道直径异形的电弧等离子体炬
CN104302086A (zh) * 2014-10-31 2015-01-21 四川大学 具有气压缩效应的等离子发生器进气结构
GB2534890A (en) * 2015-02-03 2016-08-10 Edwards Ltd Thermal plasma torch
GB2540992A (en) * 2015-08-04 2017-02-08 Edwards Ltd Control of gas flow and power supplied to a plasma torch in a multiple process chamber gas treatment system

Also Published As

Publication number Publication date
WO2019069066A1 (en) 2019-04-11
TWI796368B (zh) 2023-03-21
TW201922353A (zh) 2019-06-16
KR20200062218A (ko) 2020-06-03
GB2567168A (en) 2019-04-10
GB201716185D0 (en) 2017-11-15
KR102676559B1 (ko) 2024-06-18
EP3692770B1 (en) 2023-03-22
CN111149437A (zh) 2020-05-12
EP3692770A1 (en) 2020-08-12
CN111149437B (zh) 2023-08-15

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