SG11201913051UA - Substrate storage container - Google Patents

Substrate storage container

Info

Publication number
SG11201913051UA
SG11201913051UA SG11201913051UA SG11201913051UA SG11201913051UA SG 11201913051U A SG11201913051U A SG 11201913051UA SG 11201913051U A SG11201913051U A SG 11201913051UA SG 11201913051U A SG11201913051U A SG 11201913051UA SG 11201913051U A SG11201913051U A SG 11201913051UA
Authority
SG
Singapore
Prior art keywords
storage container
substrate storage
substrate
container
storage
Prior art date
Application number
SG11201913051UA
Other languages
English (en)
Inventor
Osamu Ogawa
Original Assignee
Shin Etsu Polymer Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Polymer Co Ltd filed Critical Shin Etsu Polymer Co Ltd
Publication of SG11201913051UA publication Critical patent/SG11201913051UA/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K17/00—Safety valves; Equalising valves, e.g. pressure relief valves
    • F16K17/18—Safety valves; Equalising valves, e.g. pressure relief valves opening on surplus pressure on either side
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67389—Closed carriers characterised by atmosphere control
    • H01L21/67393—Closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K15/00—Check valves
    • F16K15/02—Check valves with guided rigid valve members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K24/00—Devices, e.g. valves, for venting or aerating enclosures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/02—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with tubular diaphragm

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
SG11201913051UA 2017-07-14 2018-06-19 Substrate storage container SG11201913051UA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017138014 2017-07-14
PCT/JP2018/023312 WO2019012926A1 (ja) 2017-07-14 2018-06-19 基板収納容器

Publications (1)

Publication Number Publication Date
SG11201913051UA true SG11201913051UA (en) 2020-01-30

Family

ID=65002422

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201913051UA SG11201913051UA (en) 2017-07-14 2018-06-19 Substrate storage container

Country Status (8)

Country Link
US (1) US11209093B2 (ko)
JP (1) JP6849180B2 (ko)
KR (1) KR102469954B1 (ko)
CN (1) CN110870056B (ko)
DE (1) DE112018003608T5 (ko)
SG (1) SG11201913051UA (ko)
TW (1) TWI760528B (ko)
WO (1) WO2019012926A1 (ko)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7125000B2 (ja) * 2018-03-13 2022-08-24 信越ポリマー株式会社 基板収納容器
US12017841B2 (en) 2019-07-13 2024-06-25 Gudeng Precision Industrial Co., Ltd Substrate container system
CN114080666A (zh) * 2019-07-30 2022-02-22 未来儿股份有限公司 基板收纳容器及过滤部
US11104496B2 (en) * 2019-08-16 2021-08-31 Gudeng Precision Industrial Co., Ltd. Non-sealed reticle storage device
JP7351681B2 (ja) * 2019-09-05 2023-09-27 信越ポリマー株式会社 基板収納容器
CN114667599A (zh) * 2020-10-23 2022-06-24 未来儿股份有限公司 基板收纳容器及其制造方法以及过滤器部
CN113937041A (zh) * 2021-06-30 2022-01-14 家登精密工业股份有限公司 基板容器系统
TWI782689B (zh) * 2021-09-02 2022-11-01 家登精密工業股份有限公司 快拆式氣閥、具有快拆式氣閥的基板容器及快拆式氣閥的安裝和拆卸方法
TWI817828B (zh) 2022-08-11 2023-10-01 家登精密工業股份有限公司 內建負壓氣室之基板容器

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3298391A (en) * 1967-01-17 Two way flow anti-siphon valve assembly
US6319297B1 (en) * 1998-03-27 2001-11-20 Asyst Technologies, Inc. Modular SMIF pod breather, adsorbent, and purge cartridges
US6848471B2 (en) * 2002-09-09 2005-02-01 Hercules Valve Inc. In-line check valve
EP1555689B1 (en) * 2002-10-25 2010-05-19 Shin-Etsu Polymer Co., Ltd. Substrate storage container
JP4201583B2 (ja) 2002-11-28 2008-12-24 信越ポリマー株式会社 基板収納容器
US7201276B2 (en) * 2003-11-07 2007-04-10 Entegris, Inc. Front opening substrate container with bottom plate
US7328727B2 (en) * 2004-04-18 2008-02-12 Entegris, Inc. Substrate container with fluid-sealing flow passageway
US7400383B2 (en) * 2005-04-04 2008-07-15 Entegris, Inc. Environmental control in a reticle SMIF pod
JP4800155B2 (ja) 2006-09-04 2011-10-26 信越ポリマー株式会社 基板収納容器及び逆止弁
JP5674314B2 (ja) * 2007-02-28 2015-02-25 インテグリス・インコーポレーテッド レチクルｓｍｉｆポッド又は基板コンテナ及びそのパージ方法
JP4898740B2 (ja) 2008-05-12 2012-03-21 信越ポリマー株式会社 バルブ機構及び基板収納容器
TWI346638B (en) * 2008-12-26 2011-08-11 Gudeng Prec Industral Co Ltd A purging valve and a wafer container having the purging valve
JP5241607B2 (ja) 2009-05-21 2013-07-17 信越ポリマー株式会社 基板収納容器
NL2003676C2 (en) * 2009-10-20 2011-04-21 Sara Lee De Nv Fluid packaging container.
JP5887719B2 (ja) * 2011-05-31 2016-03-16 シンフォニアテクノロジー株式会社 パージ装置、ロードポート、ボトムパージノズル本体、ボトムパージユニット
TWM449886U (zh) * 2012-09-26 2013-04-01 Gudeng Prec Ind Co Ltd 充氣逆止閥及具有充氣逆止閥的精密元件收納裝置
TWI642605B (zh) * 2012-11-20 2018-12-01 恩特葛瑞斯股份有限公司 具有清洗埠的基板收納盒
TWM482844U (zh) * 2013-08-23 2014-07-21 Gudeng Prec Ind Co Ltd 氣壓閥件結構及應用彼之充氣座以及充氣櫃
JP6217281B2 (ja) 2013-09-25 2017-10-25 村田機械株式会社 自動倉庫、及びガス供給方法
CN107110389A (zh) * 2014-12-01 2017-08-29 恩特格里斯公司 衬底容器阀组合件
JP6455261B2 (ja) * 2015-03-20 2019-01-23 シンフォニアテクノロジー株式会社 ノズルの先端構造、パージ装置およびロードポート
JP6451453B2 (ja) * 2015-03-31 2019-01-16 Tdk株式会社 ガスパージ装置、ロードポート装置、パージ対象容器の設置台およびガスパージ方法

Also Published As

Publication number Publication date
US11209093B2 (en) 2021-12-28
US20210148479A1 (en) 2021-05-20
TW201909318A (zh) 2019-03-01
TWI760528B (zh) 2022-04-11
DE112018003608T5 (de) 2020-04-16
CN110870056A (zh) 2020-03-06
KR20200028992A (ko) 2020-03-17
WO2019012926A1 (ja) 2019-01-17
KR102469954B1 (ko) 2022-11-23
CN110870056B (zh) 2023-07-07
JP6849180B2 (ja) 2021-03-24
JPWO2019012926A1 (ja) 2020-05-07

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