SG11201705287WA - Improvements in or relating to vacuum pumping arrangements - Google Patents
Improvements in or relating to vacuum pumping arrangementsInfo
- Publication number
- SG11201705287WA SG11201705287WA SG11201705287WA SG11201705287WA SG11201705287WA SG 11201705287W A SG11201705287W A SG 11201705287WA SG 11201705287W A SG11201705287W A SG 11201705287WA SG 11201705287W A SG11201705287W A SG 11201705287WA SG 11201705287W A SG11201705287W A SG 11201705287WA
- Authority
- SG
- Singapore
- Prior art keywords
- relating
- vacuum pumping
- pumping arrangements
- arrangements
- vacuum
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
- C23C16/4405—Cleaning of reactor or parts inside the reactor by using reactive gases
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
- F04C23/003—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle having complementary function
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
- H01L21/205—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy using reduction or decomposition of a gaseous compound yielding a solid condensate, i.e. chemical deposition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/30—Use in a chemical vapor deposition [CVD] process or in a similar process
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K15/00—Check valves
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1500133.2A GB2533933A (en) | 2015-01-06 | 2015-01-06 | Improvements in or relating to vacuum pumping arrangements |
PCT/GB2016/050018 WO2016110694A1 (en) | 2015-01-06 | 2016-01-06 | Improvements in or relating to vacuum pumping arrangements |
GB1600201.6A GB2536336B (en) | 2015-01-06 | 2016-01-06 | Improvements in or relating to vacuum pumping arrangements |
Publications (1)
Publication Number | Publication Date |
---|---|
SG11201705287WA true SG11201705287WA (en) | 2017-07-28 |
Family
ID=55129989
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG11201705287WA SG11201705287WA (en) | 2015-01-06 | 2016-01-06 | Improvements in or relating to vacuum pumping arrangements |
Country Status (8)
Country | Link |
---|---|
US (2) | US20170350395A1 (en) |
EP (2) | EP3247907B1 (en) |
JP (2) | JP6924147B2 (en) |
KR (2) | KR20170102256A (en) |
CN (2) | CN107110162B (en) |
GB (2) | GB2533933A (en) |
SG (1) | SG11201705287WA (en) |
WO (2) | WO2016110695A1 (en) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5808454B1 (en) | 2014-04-25 | 2015-11-10 | 株式会社日立国際電気 | Substrate processing apparatus, semiconductor device manufacturing method, program, and recording medium |
US10978315B2 (en) * | 2014-05-30 | 2021-04-13 | Ebara Corporation | Vacuum evacuation system |
GB201620225D0 (en) * | 2016-11-29 | 2017-01-11 | Edwards Ltd | Vacuum pumping arrangement |
GB2561899B (en) | 2017-04-28 | 2020-11-04 | Edwards Ltd | Vacuum pumping system |
GB2564399A (en) * | 2017-07-06 | 2019-01-16 | Edwards Ltd | Improvements in or relating to pumping line arrangements |
DE102017214687A1 (en) * | 2017-08-22 | 2019-02-28 | centrotherm international AG | Processing apparatus for substrates and method for operating such a treatment apparatus |
CN107799445A (en) * | 2017-11-01 | 2018-03-13 | 德淮半导体有限公司 | Pumping system for technological cavities of semiconductor |
GB201718752D0 (en) | 2017-11-13 | 2017-12-27 | Edwards Ltd | Vacuum and abatement systems |
CN108486543A (en) * | 2018-03-02 | 2018-09-04 | 惠科股份有限公司 | Substrate film forming board and application method |
US11031215B2 (en) * | 2018-09-28 | 2021-06-08 | Lam Research Corporation | Vacuum pump protection against deposition byproduct buildup |
GB2579360A (en) * | 2018-11-28 | 2020-06-24 | Edwards Ltd | Multiple chamber vacuum exhaust system |
GB2581503A (en) * | 2019-02-20 | 2020-08-26 | Edwards Ltd | Vacuum pumping |
GB2584881B (en) * | 2019-06-19 | 2022-01-05 | Edwards Vacuum Llc | Multiple vacuum chamber exhaust system and method of evacuating multiple chambers |
CN110435190A (en) * | 2019-06-26 | 2019-11-12 | 中复连众风电科技有限公司 | Mold vacuum heating apparatus with vacuum unit |
KR102329548B1 (en) * | 2019-10-17 | 2021-11-24 | 무진전자 주식회사 | Chamber Exhaust Automatic Control System |
GB2592346B (en) * | 2020-01-09 | 2022-11-02 | Edwards Ltd | Vacuum pump and vacuum pump set for evacuating a semiconductor processing chamber |
GB2592043A (en) * | 2020-02-13 | 2021-08-18 | Edwards Ltd | Axial flow vacuum pump |
FR3112086B1 (en) * | 2020-07-09 | 2022-07-08 | Pfeiffer Vacuum | Gas treatment device and vacuum line |
FR3112177B1 (en) * | 2020-07-09 | 2022-07-08 | Pfeiffer Vacuum | Vacuum line and method for controlling a vacuum line |
GB2606193B (en) * | 2021-04-29 | 2023-09-06 | Edwards Ltd | A valve module for a vacuum pumping system |
Family Cites Families (33)
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US4021898A (en) * | 1976-05-20 | 1977-05-10 | Timex Corporation | Method of adjusting the frequency of vibration of piezoelectric resonators |
JPS564069A (en) | 1979-06-22 | 1981-01-16 | Mitsubishi Electric Corp | Test of semiconductor device |
US5010035A (en) * | 1985-05-23 | 1991-04-23 | The Regents Of The University Of California | Wafer base for silicon carbide semiconductor device |
JPH07107388B2 (en) * | 1987-12-16 | 1995-11-15 | 株式会社日立製作所 | Exhaust method for multiple vacuum containers |
JPH02185681A (en) * | 1989-01-11 | 1990-07-20 | Mitsubishi Electric Corp | Vacuum exhausting device |
JPH03258976A (en) * | 1990-03-08 | 1991-11-19 | Mitsubishi Electric Corp | Reproducing method of vacuum in vacuum device |
US5733104A (en) * | 1992-12-24 | 1998-03-31 | Balzers-Pfeiffer Gmbh | Vacuum pump system |
GB9614849D0 (en) * | 1996-07-15 | 1996-09-04 | Boc Group Plc | Processes for the scubbing of noxious substances |
US6277347B1 (en) * | 1997-02-24 | 2001-08-21 | Applied Materials, Inc. | Use of ozone in process effluent abatement |
JP4112659B2 (en) * | 1997-12-01 | 2008-07-02 | 大陽日酸株式会社 | Noble gas recovery method and apparatus |
US6383300B1 (en) * | 1998-11-27 | 2002-05-07 | Tokyo Electron Ltd. | Heat treatment apparatus and cleaning method of the same |
JP2004218648A (en) * | 1999-03-05 | 2004-08-05 | Tadahiro Omi | Vacuum device |
TW482871B (en) | 1999-03-05 | 2002-04-11 | Tadahiro Ohmi | Vacuum device |
JP2003083248A (en) * | 2001-09-06 | 2003-03-19 | Ebara Corp | Evacuation system |
JP4180265B2 (en) * | 2001-10-31 | 2008-11-12 | 株式会社アルバック | Operation method of vacuum exhaust system |
DE10159835B4 (en) * | 2001-12-06 | 2012-02-23 | Pfeiffer Vacuum Gmbh | Vacuum pumping system |
KR101151954B1 (en) * | 2002-10-14 | 2012-06-01 | 에드워즈 리미티드 | Rotary piston vacuum pump with washing installation |
US6761135B1 (en) * | 2003-08-27 | 2004-07-13 | Bryon Edward Becktold | Multipurpose assembly |
US7278831B2 (en) * | 2003-12-31 | 2007-10-09 | The Boc Group, Inc. | Apparatus and method for control, pumping and abatement for vacuum process chambers |
GB0505500D0 (en) | 2005-03-17 | 2005-04-27 | Boc Group Plc | Vacuum pumping arrangement |
US20070189356A1 (en) * | 2006-02-13 | 2007-08-16 | Jonathan Pettit | Exhaust buildup monitoring in semiconductor processing |
GB2437968A (en) * | 2006-05-12 | 2007-11-14 | Boc Group Plc | Vacuum pumping arrangement for evacuating a plurality of process chambers |
GB0615722D0 (en) * | 2006-08-08 | 2006-09-20 | Boc Group Plc | Apparatus for conveying a waste stream |
US20090242046A1 (en) * | 2008-03-31 | 2009-10-01 | Benjamin Riordon | Valve module |
JP2010161150A (en) * | 2009-01-07 | 2010-07-22 | Shimadzu Corp | Gas exhaust line switching mechanism, and gas exhaust line switching method |
JP2010167338A (en) * | 2009-01-20 | 2010-08-05 | Renesas Electronics Corp | Device and method for vacuum processing |
KR101327715B1 (en) * | 2009-12-28 | 2013-11-11 | 가부시키가이샤 알박 | Vacuum exhaust device and vacuum exhaust method, and substrate treatment device |
CN101922437B (en) * | 2010-08-05 | 2012-05-23 | 友达光电股份有限公司 | Vacuum device |
KR101427726B1 (en) * | 2011-12-27 | 2014-08-07 | 가부시키가이샤 히다치 고쿠사이 덴키 | Substrate processing apparatus and method of manufacturing semiconductor device |
KR101427719B1 (en) * | 2012-07-16 | 2014-09-30 | (주)트리플코어스코리아 | Equipment for controlling by-product in exhaustion line and pump used for process chamber in semiconductor field and control method for the same |
JP5808454B1 (en) * | 2014-04-25 | 2015-11-10 | 株式会社日立国際電気 | Substrate processing apparatus, semiconductor device manufacturing method, program, and recording medium |
US10978315B2 (en) * | 2014-05-30 | 2021-04-13 | Ebara Corporation | Vacuum evacuation system |
JP6522892B2 (en) * | 2014-05-30 | 2019-05-29 | 株式会社荏原製作所 | Evacuation system |
-
2015
- 2015-01-06 GB GB1500133.2A patent/GB2533933A/en not_active Withdrawn
-
2016
- 2016-01-06 CN CN201680005146.2A patent/CN107110162B/en active Active
- 2016-01-06 US US15/541,083 patent/US20170350395A1/en not_active Abandoned
- 2016-01-06 WO PCT/GB2016/050019 patent/WO2016110695A1/en active Application Filing
- 2016-01-06 EP EP16700506.5A patent/EP3247907B1/en active Active
- 2016-01-06 US US15/541,085 patent/US10309401B2/en active Active
- 2016-01-06 JP JP2017553465A patent/JP6924147B2/en active Active
- 2016-01-06 CN CN201680005140.5A patent/CN107110161B/en active Active
- 2016-01-06 SG SG11201705287WA patent/SG11201705287WA/en unknown
- 2016-01-06 KR KR1020177018523A patent/KR20170102256A/en unknown
- 2016-01-06 JP JP2017553464A patent/JP2018503027A/en active Pending
- 2016-01-06 WO PCT/GB2016/050018 patent/WO2016110694A1/en active Application Filing
- 2016-01-06 KR KR1020177018524A patent/KR102504078B1/en active IP Right Grant
- 2016-01-06 EP EP16700505.7A patent/EP3243005B1/en active Active
- 2016-01-06 GB GB1600201.6A patent/GB2536336B/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US20180003178A1 (en) | 2018-01-04 |
EP3243005A1 (en) | 2017-11-15 |
KR102504078B1 (en) | 2023-02-24 |
GB2536336B (en) | 2018-06-20 |
WO2016110694A1 (en) | 2016-07-14 |
KR20170102256A (en) | 2017-09-08 |
JP6924147B2 (en) | 2021-08-25 |
WO2016110695A1 (en) | 2016-07-14 |
CN107110161A (en) | 2017-08-29 |
KR20170102257A (en) | 2017-09-08 |
JP2018503027A (en) | 2018-02-01 |
US10309401B2 (en) | 2019-06-04 |
GB201600201D0 (en) | 2016-02-17 |
GB2536336A (en) | 2016-09-14 |
GB2533933A (en) | 2016-07-13 |
CN107110162A (en) | 2017-08-29 |
JP2018501437A (en) | 2018-01-18 |
CN107110161B (en) | 2019-09-13 |
CN107110162B (en) | 2019-07-16 |
EP3243005B1 (en) | 2019-08-28 |
US20170350395A1 (en) | 2017-12-07 |
EP3247907B1 (en) | 2019-05-01 |
EP3247907A1 (en) | 2017-11-29 |
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