SE408483B - Sett och anordning for att faststella leget av pa en malskiva befintliga inrettningsmarkeringar - Google Patents

Sett och anordning for att faststella leget av pa en malskiva befintliga inrettningsmarkeringar

Info

Publication number
SE408483B
SE408483B SE7507110A SE7507110A SE408483B SE 408483 B SE408483 B SE 408483B SE 7507110 A SE7507110 A SE 7507110A SE 7507110 A SE7507110 A SE 7507110A SE 408483 B SE408483 B SE 408483B
Authority
SE
Sweden
Prior art keywords
doctor
determining
existing installation
male disc
installation markings
Prior art date
Application number
SE7507110A
Other languages
English (en)
Swedish (sv)
Other versions
SE7507110L (sv
Inventor
M A Habegger
D E Davis
R D Moore
E V Weber
O C Woodard
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Publication of SE7507110L publication Critical patent/SE7507110L/
Publication of SE408483B publication Critical patent/SE408483B/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Control Of Position Or Direction (AREA)
SE7507110A 1974-06-27 1975-06-19 Sett och anordning for att faststella leget av pa en malskiva befintliga inrettningsmarkeringar SE408483B (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US483509A US3901814A (en) 1974-06-27 1974-06-27 Method and apparatus for detecting a registration mark on a target such as a semiconductor wafer

Publications (2)

Publication Number Publication Date
SE7507110L SE7507110L (sv) 1975-12-29
SE408483B true SE408483B (sv) 1979-06-11

Family

ID=23920345

Family Applications (1)

Application Number Title Priority Date Filing Date
SE7507110A SE408483B (sv) 1974-06-27 1975-06-19 Sett och anordning for att faststella leget av pa en malskiva befintliga inrettningsmarkeringar

Country Status (12)

Country Link
US (1) US3901814A (da)
JP (1) JPS5114272A (da)
BR (1) BR7504006A (da)
CA (1) CA1027255A (da)
CH (1) CH588066A5 (da)
DE (1) DE2525235C2 (da)
ES (1) ES438877A1 (da)
FR (1) FR2276689A1 (da)
GB (1) GB1508903A (da)
IT (1) IT1038109B (da)
NL (1) NL7506590A (da)
SE (1) SE408483B (da)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4039810A (en) * 1976-06-30 1977-08-02 International Business Machines Corporation Electron projection microfabrication system
US4056730A (en) * 1976-07-12 1977-11-01 International Business Machines Corporation Apparatus for detecting registration marks on a target such as a semiconductor wafer
DE2726173C2 (de) * 1977-06-08 1982-05-27 Siemens AG, 1000 Berlin und 8000 München Verfahren und Schaltung zur automatischen Positionierung eines Werkstückes relativ zu einem Abtastfeld bzw. zu einer Maske, sowie Verwendung des Verfahrens
JPS5585028A (en) * 1978-12-22 1980-06-26 Hitachi Ltd Mark detecting signal amplifier
EP0054710B1 (de) * 1980-12-19 1986-02-05 International Business Machines Corporation Verfahren zum Ausrichten und Prüfen eines mit Mustern versehenen Werkstücks, z.B. einer Maske für die Herstellung von Halbleiterelementen
US4357540A (en) * 1980-12-19 1982-11-02 International Business Machines Corporation Semiconductor device array mask inspection method and apparatus
JPS5946025A (ja) * 1982-09-09 1984-03-15 Hitachi Ltd パタ−ンエツジの検出方法及び装置
JPS6066428A (ja) * 1983-09-21 1985-04-16 Fujitsu Ltd 電子ビ−ム露光方法
US4803644A (en) * 1985-09-20 1989-02-07 Hughes Aircraft Company Alignment mark detector for electron beam lithography
US4977328A (en) * 1989-03-02 1990-12-11 U.S. Philips Corporation Method of detecting a marker provided on a specimen
JP3453009B2 (ja) * 1995-07-20 2003-10-06 富士通株式会社 電子ビーム露光装置及びこの装置に於けるマーク位置検出方法
US5734594A (en) * 1996-09-25 1998-03-31 Chartered Semiconductor Manufacturing Pte Ltd. Method and system for enhancement of wafer alignment accuracy
US5838013A (en) * 1996-11-13 1998-11-17 International Business Machines Corporation Method for monitoring resist charging in a charged particle system
CN102159120B (zh) 2008-11-28 2014-03-12 山崎将史 桌面电动搅拌器

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1804646B2 (de) * 1968-10-18 1973-03-22 Siemens AG, 1000 Berlin u. 8000 München Korpuskularstrahl-bearbeitungsgeraet
US3644700A (en) * 1969-12-15 1972-02-22 Ibm Method and apparatus for controlling an electron beam
US3745358A (en) * 1971-05-10 1973-07-10 Radiant Energy Systems Alignment method and apparatus for electron projection systems
US3832561A (en) * 1973-10-01 1974-08-27 Westinghouse Electric Corp Method and apparatus for electron beam alignment with a substrate by schottky barrier contacts

Also Published As

Publication number Publication date
US3901814A (en) 1975-08-26
JPS5114272A (en) 1976-02-04
GB1508903A (en) 1978-04-26
FR2276689A1 (fr) 1976-01-23
SE7507110L (sv) 1975-12-29
CH588066A5 (da) 1977-05-31
IT1038109B (it) 1979-11-20
ES438877A1 (es) 1977-01-16
DE2525235C2 (de) 1984-06-28
BR7504006A (pt) 1976-07-06
JPS5333474B2 (da) 1978-09-14
FR2276689B1 (da) 1977-04-15
DE2525235A1 (de) 1976-01-15
CA1027255A (en) 1978-02-28
NL7506590A (nl) 1975-12-30

Similar Documents

Publication Publication Date Title
DK642874A (da) Fremgangsmade til fremstilling af en gel pa grundlag af carragen
NO753549L (no) Anordning til overfoering av informasjon
NO145699C (no) Innretning for haandtering av foringsroer
PL199527A1 (pl) Zawor wyrownujacy cisnienie dla piecow szybowych
SE408483B (sv) Sett och anordning for att faststella leget av pa en malskiva befintliga inrettningsmarkeringar
SE7508145L (sv) Forfarande och anordning for bestemning av z-potentalen i en fluid
SE422158B (sv) Sett och anordning for avvattning medelst en rorfilterpress
SE417785B (sv) Forfarande for framstellning och inpassning av tandregleringsanordning samt forformad tandregleringsanordning
SE7405346L (sv) Anordning for bestemning av optimalt uttagbara ytan av en breda.
NO150915C (no) Fremgangsmaate for fremstilling av uorganiske polymerkomplekser
BR7500797A (pt) Dispositivo para a deteccao de quedas de sinal
SE7508731L (sv) Anordning for forankring av beslag pa veggelement
SE412679B (sv) Anordning for avspelning av en skiva med pa varandra foljande fergbilder
BR7507754A (pt) Po tonalizador para a revelacao de imagens eletrostaticas
NO139681C (no) Fremgangsmaate for oppnaaelse av en metalloksydfilm paa en glassoverflate
SE395743B (sv) Forfarande och anordning for instellning av en bergborrmaskin
SE423369B (sv) Anordning for legesbestemning av en felaktigt fungerande bromsmanoverventil
FR2280831A1 (fr) Freins a disques et disques pour ces freins
SE7410027L (sv) Forfarande for metning av en ytas topografi
SE7413068L (sv) Sett och anordning for bestrykning av en pappersbana
SE7505612L (sv) Sett och anordning for bestemnning av egensvengningstal.
FI56575B (fi) Anordning foer byte av borrkronor pao en borrstaong
SE413810B (sv) Anordning for bildande av en metstorhets aritmetiska medelverden
SE409661B (sv) Sett och anordning att reglera och bestemma instellningen av pendeldelen av kettarna pa en svengkross
SE7504521L (sv) Anordning for merkning av provkerl.

Legal Events

Date Code Title Description
NUG Patent has lapsed

Ref document number: 7507110-0

Effective date: 19940110

Format of ref document f/p: F