SE363699B - - Google Patents
Info
- Publication number
- SE363699B SE363699B SE03237/70A SE323770A SE363699B SE 363699 B SE363699 B SE 363699B SE 03237/70 A SE03237/70 A SE 03237/70A SE 323770 A SE323770 A SE 323770A SE 363699 B SE363699 B SE 363699B
- Authority
- SE
- Sweden
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/40—Treatment after imagewise removal, e.g. baking
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W20/00—Interconnections in chips, wafers or substrates
- H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Drying Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- ing And Chemical Polishing (AREA)
- Weting (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL6903930A NL6903930A (https=) | 1969-03-14 | 1969-03-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SE363699B true SE363699B (https=) | 1974-01-28 |
Family
ID=19806409
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SE03237/70A SE363699B (https=) | 1969-03-14 | 1970-03-11 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US3695955A (https=) |
| BE (1) | BE747285A (https=) |
| CH (1) | CH544158A (https=) |
| FR (1) | FR2034943B1 (https=) |
| GB (1) | GB1297203A (https=) |
| NL (1) | NL6903930A (https=) |
| SE (1) | SE363699B (https=) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3997380A (en) * | 1970-04-17 | 1976-12-14 | Compagnie Internationale Pour L'informatique | Method of engraving a conductive layer |
| BE789498A (fr) * | 1971-09-29 | 1973-01-15 | Siemens Ag | Contact metal-semiconducteur de faible superficie |
| US3883947A (en) * | 1971-11-05 | 1975-05-20 | Bosch Gmbh Robert | Method of making a thin film electronic circuit unit |
| US4045310A (en) * | 1976-05-03 | 1977-08-30 | Teletype Corporation | Starting product for the production of a read-only memory and a method of producing it and the read-only memory |
| JPS56114319A (en) * | 1980-02-14 | 1981-09-08 | Fujitsu Ltd | Method for forming contact hole |
| US4350564A (en) * | 1980-10-27 | 1982-09-21 | General Electric Company | Method of etching metallic materials including a major percentage of chromium |
| JPS58204176A (ja) * | 1982-05-24 | 1983-11-28 | Kangiyou Denki Kiki Kk | 化学的蝕刻方法 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1369601A (fr) * | 1962-07-31 | 1964-08-14 | Rca Corp | Procédé perfectionné de fabrication de semi-conducteurs |
| FR1437781A (fr) * | 1964-04-21 | 1966-05-06 | Philips Nv | Procédé pour appliquer sur un support des couches métalliques séparées par un interstice |
| FR1480962A (fr) * | 1965-05-28 | 1967-05-12 | Rca Corp | Procédé de fabrication de dispositifs semi-conducteurs |
-
1969
- 1969-03-14 NL NL6903930A patent/NL6903930A/xx unknown
-
1970
- 1970-03-10 US US18197A patent/US3695955A/en not_active Expired - Lifetime
- 1970-03-11 CH CH360770A patent/CH544158A/de not_active IP Right Cessation
- 1970-03-11 SE SE03237/70A patent/SE363699B/xx unknown
- 1970-03-11 GB GB1297203D patent/GB1297203A/en not_active Expired
- 1970-03-12 BE BE747285D patent/BE747285A/xx unknown
- 1970-03-13 FR FR707009070A patent/FR2034943B1/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| CH544158A (de) | 1973-11-15 |
| NL6903930A (https=) | 1970-09-16 |
| DE2010701B2 (de) | 1976-07-29 |
| FR2034943B1 (https=) | 1974-03-01 |
| BE747285A (fr) | 1970-09-14 |
| US3695955A (en) | 1972-10-03 |
| GB1297203A (https=) | 1972-11-22 |
| FR2034943A1 (https=) | 1970-12-18 |
| DE2010701A1 (de) | 1970-10-01 |