PL1705687T3 - Sposób wykrywania łuku - Google Patents

Sposób wykrywania łuku

Info

Publication number
PL1705687T3
PL1705687T3 PL05006680T PL05006680T PL1705687T3 PL 1705687 T3 PL1705687 T3 PL 1705687T3 PL 05006680 T PL05006680 T PL 05006680T PL 05006680 T PL05006680 T PL 05006680T PL 1705687 T3 PL1705687 T3 PL 1705687T3
Authority
PL
Poland
Prior art keywords
arc detection
output signal
signal
duration
arc
Prior art date
Application number
PL05006680T
Other languages
English (en)
Inventor
Sven Axenbeck
Markus Bannwarth
Martin Steuber
Alfred Trusch
Lothar Wolf
Peter Wiedemuth
Gerhard Zähringer
Original Assignee
Huettinger Elektronik Gmbh Co Kg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Huettinger Elektronik Gmbh Co Kg filed Critical Huettinger Elektronik Gmbh Co Kg
Publication of PL1705687T3 publication Critical patent/PL1705687T3/pl

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32623—Mechanical discharge control means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/02—Details
    • H01J2237/0203—Protection arrangements
    • H01J2237/0206—Extinguishing, preventing or controlling unwanted discharges

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Plasma Technology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Arc Welding Control (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
PL05006680T 2005-03-26 2005-03-26 Sposób wykrywania łuku PL1705687T3 (pl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP05006680A EP1705687B1 (de) 2005-03-26 2005-03-26 Verfahren zur Arcerkennung

Publications (1)

Publication Number Publication Date
PL1705687T3 true PL1705687T3 (pl) 2007-09-28

Family

ID=35044559

Family Applications (1)

Application Number Title Priority Date Filing Date
PL05006680T PL1705687T3 (pl) 2005-03-26 2005-03-26 Sposób wykrywania łuku

Country Status (6)

Country Link
EP (1) EP1705687B1 (pl)
JP (1) JP4523564B2 (pl)
KR (1) KR100783454B1 (pl)
AT (1) ATE362194T1 (pl)
DE (1) DE502005000705D1 (pl)
PL (1) PL1705687T3 (pl)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004015090A1 (de) 2004-03-25 2005-11-03 Hüttinger Elektronik Gmbh + Co. Kg Bogenentladungserkennungseinrichtung
DE502005006550D1 (de) 2005-12-22 2009-03-12 Huettinger Elektronik Gmbh Verfahren und Vorrichtung zur Arcerkennung in einem Plasmaprozess
EP1926122B1 (de) 2006-11-23 2009-11-11 HÜTTINGER Elektronik GmbH + Co. KG Verfahren zum Erkennen einer Bogenentladung in einem Plasmaprozess und Bogenentladungserkennungsvorrichtung
US7795817B2 (en) 2006-11-24 2010-09-14 Huettinger Elektronik Gmbh + Co. Kg Controlled plasma power supply
EP1928009B1 (de) 2006-11-28 2013-04-10 HÜTTINGER Elektronik GmbH + Co. KG Bogenentladungs-Erkennungseinrichtung, Plasma-Leistungsversorgung und Verfahren zum Erkennen von Bogenentladungen
EP1933362B1 (de) 2006-12-14 2011-04-13 HÜTTINGER Elektronik GmbH + Co. KG Bogenentladungs-Erkennungseinrichtung, Plasma-Leistungsversorgung und Verfahren zum Erkennen von Bogenentladungen
DE502007006093D1 (de) 2007-03-08 2011-02-10 Huettinger Elektronik Gmbh Verfahren und Vorrichtung zum Unterdrücken von Bogenentladungen beim Betreiben eines Plasmaprozesses
DE102011112434A1 (de) * 2011-01-05 2012-07-05 Oerlikon Trading Ag, Trübbach Blitzdetektion in Beschichtungsanlagen
US8779928B2 (en) * 2012-05-03 2014-07-15 General Electric Company Systems and methods to detect generator collector flashover
JP5679241B1 (ja) * 2013-09-27 2015-03-04 株式会社京三製作所 電圧形直流電源装置および電圧形直流電源装置の制御方法
DE102013110883B3 (de) 2013-10-01 2015-01-15 TRUMPF Hüttinger GmbH + Co. KG Vorrichtung und Verfahren zur Überwachung einer Entladung in einem Plasmaprozess
EP2905801B1 (en) 2014-02-07 2019-05-22 TRUMPF Huettinger Sp. Z o. o. Method of monitoring the discharge in a plasma process and monitoring device for monitoring the discharge in a plasma
EP3054472A1 (en) * 2015-02-03 2016-08-10 TRUMPF Huettinger Sp. Z o. o. Arc treatment device and method therefor
CN110463353B (zh) * 2017-04-04 2022-01-11 株式会社富士 等离子体产生装置
KR102208819B1 (ko) * 2020-12-09 2021-01-28 주식회사 더블유지에스 플라즈마 공정 중 발생하는 아크 현상을 모니터링하기 위한 rf 신호 모니터링 장치 및 시스템

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4326100B4 (de) * 1993-08-04 2006-03-23 Unaxis Deutschland Holding Gmbh Verfahren und Vorrichtung zum Beschichten von Substraten in einer Vakuumkammer, mit einer Einrichtung zur Erkennung und Unterdrückung von unerwünschten Lichtbögen
DE4441206C2 (de) * 1994-11-19 1996-09-26 Leybold Ag Einrichtung für die Unterdrückung von Überschlägen in Kathoden-Zerstäubungseinrichtungen
JP2001516940A (ja) * 1997-09-17 2001-10-02 東京エレクトロン株式会社 Ｒｆプラズマシステムにおけるアーキングを検出しかつ防止するための装置および方法
DE19848636C2 (de) * 1998-10-22 2001-07-26 Fraunhofer Ges Forschung Verfahren zur Überwachung einer Wechselspannungs-Entladung an einer Doppelelektrode
KR100615962B1 (ko) * 2001-10-22 2006-08-28 시바우라 메카트로닉스 가부시키가이샤 글로 방전 장치의 아크 판정 방법 및 고주파 아크 방전억제 장치
KR100785865B1 (ko) * 2005-02-24 2007-12-21 이엔테크놀로지 주식회사 플라즈마 전원장치용 아크 검출 및 아크 에너지 저감 회로

Also Published As

Publication number Publication date
EP1705687B1 (de) 2007-05-09
JP4523564B2 (ja) 2010-08-11
KR100783454B1 (ko) 2007-12-07
DE502005000705D1 (de) 2007-06-21
JP2006278335A (ja) 2006-10-12
EP1705687A1 (de) 2006-09-27
KR20060103404A (ko) 2006-09-29
ATE362194T1 (de) 2007-06-15

Similar Documents

Publication Publication Date Title
PL1705687T3 (pl) Sposób wykrywania łuku
TW200628759A (en) Position detecting system and apparatuses and methods for use and control thereof
EA200802378A1 (ru) Обнаружение и мониторинг частичного разряда в линии электропередачи
WO2008051790A3 (en) Magnetic field generator, method of generating a pulsed sinusoidal magnetic wave and magnetic field generator system
WO2008052223A3 (en) Apparatus and method for mapping a wired network
AU2009331596A8 (en) Method for detecting an electric arc in photovoltaic equipment
MX2012013214A (es) Aparato configurado para detectar uso de gas, metodo para proporcionarlo, y metodo para detectar el uso de gas.
WO2005124966A3 (en) Method and apparatus for detecting impedance
WO2009069818A3 (en) Inspection apparatus and inspection method using electromagnetic wave
ATE498188T1 (de) Induktiver drehübertrager
WO2014109982A3 (en) Cadence detection based on inertial harmonics
TW200951451A (en) An apparatus and a method for detecting a switching current of a power converter
TW200632297A (en) Knocking detection
TW200737730A (en) Pulse width modulation circuit
EP2543996A3 (en) Surface acoustic wave sensor system and measurement method using multiple-transit-echo wave
AU2003291933A1 (en) Method for determining acoustic features of acoustic signals for the analysis of unknown acoustic signals and for modifying sound generation
DE50213952D1 (de) Sensoranordnung
TW200631315A (en) Channel detection device and tuner inspection device equipped with same
NO20076459L (no) Signalprosesseringsanordning
EP2112515A3 (en) Device and method for detecting zero crossing and voltage amplitude from single pulse signal
WO2007072394A3 (en) Audio structure analysis
TW200640213A (en) Clock generation circuit and teletext broadcasting data sampling circuit
TW200726980A (en) Detection device and method for detecting capacito
WO2006061758A3 (en) Ignition control apparatus for an engine
CA2497220A1 (en) Method and apparatus to detect an external source