NO930681L - Fremgangsmaate og anordning for ikke-kontakt plasma-polering og utjevning av ensartet tynnede substrater - Google Patents

Fremgangsmaate og anordning for ikke-kontakt plasma-polering og utjevning av ensartet tynnede substrater

Info

Publication number
NO930681L
NO930681L NO93930681A NO930681A NO930681L NO 930681 L NO930681 L NO 930681L NO 93930681 A NO93930681 A NO 93930681A NO 930681 A NO930681 A NO 930681A NO 930681 L NO930681 L NO 930681L
Authority
NO
Norway
Prior art keywords
equalization
thined
substrates
uniform
procedure
Prior art date
Application number
NO93930681A
Other languages
English (en)
Other versions
NO930681D0 (no
Inventor
Charles B Zarowin
Original Assignee
Hughes Aircraft Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hughes Aircraft Co filed Critical Hughes Aircraft Co
Publication of NO930681D0 publication Critical patent/NO930681D0/no
Publication of NO930681L publication Critical patent/NO930681L/no

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/334—Etching
    • H01J2237/3341—Reactive etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/334—Etching
    • H01J2237/3343—Problems associated with etching
    • H01J2237/3344—Problems associated with etching isotropy

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)

Abstract

Et plasma anvendes i forbindelse med et materialfJer-ningsverktøy (10) som gjør bruk av plasmahjulpet, kjemisk etsning for hurtig og nøyaktig å polere og utjevne et substrat uten mekanisk å danne kontakt med overflaten. Trykket i en prosessgass, som disassosi-erer til reaktive plasmaarter i nærværet av et tilført radiofrekvensfelt, styres for derved å tillate valget av en primært enveis eller en primært rundtstrålende polerings- og utjevningsmekanisme.
NO93930681A 1992-02-27 1993-02-25 Fremgangsmaate og anordning for ikke-kontakt plasma-polering og utjevning av ensartet tynnede substrater NO930681L (no)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/842,936 US5376224A (en) 1992-02-27 1992-02-27 Method and apparatus for non-contact plasma polishing and smoothing of uniformly thinned substrates

Publications (2)

Publication Number Publication Date
NO930681D0 NO930681D0 (no) 1993-02-25
NO930681L true NO930681L (no) 1993-08-30

Family

ID=25288621

Family Applications (1)

Application Number Title Priority Date Filing Date
NO93930681A NO930681L (no) 1992-02-27 1993-02-25 Fremgangsmaate og anordning for ikke-kontakt plasma-polering og utjevning av ensartet tynnede substrater

Country Status (5)

Country Link
US (1) US5376224A (no)
EP (1) EP0558327A1 (no)
JP (1) JPH065571A (no)
IL (1) IL104662A0 (no)
NO (1) NO930681L (no)

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US5647911A (en) * 1993-12-14 1997-07-15 Sony Corporation Gas diffuser plate assembly and RF electrode
US5567255A (en) * 1994-10-13 1996-10-22 Integrated Process Equipment Corp. Solid annular gas discharge electrode
US5795493A (en) * 1995-05-01 1998-08-18 Motorola, Inc. Laser assisted plasma chemical etching method
JP3877082B2 (ja) * 1995-08-10 2007-02-07 東京エレクトロン株式会社 研磨装置及び研磨方法
JP3620554B2 (ja) * 1996-03-25 2005-02-16 信越半導体株式会社 半導体ウェーハ製造方法
JP3612158B2 (ja) * 1996-11-18 2005-01-19 スピードファム株式会社 プラズマエッチング方法及びその装置
JP3917703B2 (ja) * 1997-02-18 2007-05-23 スピードファム株式会社 プラズマエッチング方法及びその装置
US6030887A (en) * 1998-02-26 2000-02-29 Memc Electronic Materials, Inc. Flattening process for epitaxial semiconductor wafers
US8779322B2 (en) 1997-06-26 2014-07-15 Mks Instruments Inc. Method and apparatus for processing metal bearing gases
US7569790B2 (en) 1997-06-26 2009-08-04 Mks Instruments, Inc. Method and apparatus for processing metal bearing gases
JPH1180975A (ja) 1997-09-04 1999-03-26 Speedfam Co Ltd プラズマエッチング装置の耐食システム及びその方法
US6207006B1 (en) * 1997-09-18 2001-03-27 Tokyo Electron Limited Vacuum processing apparatus
JP3606422B2 (ja) * 1998-03-18 2005-01-05 株式会社荏原製作所 ガスポリッシング方法及びポリッシング装置
US6074947A (en) * 1998-07-10 2000-06-13 Plasma Sil, Llc Process for improving uniform thickness of semiconductor substrates using plasma assisted chemical etching
EP0989595A3 (en) * 1998-09-18 2001-09-19 Ims-Ionen Mikrofabrikations Systeme Gmbh Device for processing a surface of a substrate
JP2000186000A (ja) 1998-12-22 2000-07-04 Speedfam-Ipec Co Ltd シリコンウェーハ加工方法およびその装置
JP4169854B2 (ja) * 1999-02-12 2008-10-22 スピードファム株式会社 ウエハ平坦化方法
US6294469B1 (en) 1999-05-21 2001-09-25 Plasmasil, Llc Silicon wafering process flow
US6200908B1 (en) 1999-08-04 2001-03-13 Memc Electronic Materials, Inc. Process for reducing waviness in semiconductor wafers
US7510664B2 (en) 2001-01-30 2009-03-31 Rapt Industries, Inc. Apparatus and method for atmospheric pressure reactive atom plasma processing for shaping of damage free surfaces
US7591957B2 (en) * 2001-01-30 2009-09-22 Rapt Industries, Inc. Method for atmospheric pressure reactive atom plasma processing for surface modification
US20030042227A1 (en) * 2001-08-29 2003-03-06 Tokyo Electron Limited Apparatus and method for tailoring an etch profile
US6858537B2 (en) * 2001-09-11 2005-02-22 Hrl Laboratories, Llc Process for smoothing a rough surface on a substrate by dry etching
US6660177B2 (en) 2001-11-07 2003-12-09 Rapt Industries Inc. Apparatus and method for reactive atom plasma processing for material deposition
DE10239083B4 (de) * 2002-08-26 2009-09-03 Schott Ag Vorrichtung zum Versorgen einer Prozesskammer mit fluiden Medien und deren Verwendung
US7371992B2 (en) 2003-03-07 2008-05-13 Rapt Industries, Inc. Method for non-contact cleaning of a surface
CN101417578B (zh) * 2007-10-24 2011-12-14 比亚迪股份有限公司 一种不锈钢表面装饰方法
JP5567392B2 (ja) * 2010-05-25 2014-08-06 東京エレクトロン株式会社 プラズマ処理装置
US8445386B2 (en) 2010-05-27 2013-05-21 Cree, Inc. Smoothing method for semiconductor material and wafers produced by same

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Publication number Priority date Publication date Assignee Title
US3943047A (en) * 1974-05-10 1976-03-09 Bell Telephone Laboratories, Incorporated Selective removal of material by sputter etching
US4253907A (en) * 1979-03-28 1981-03-03 Western Electric Company, Inc. Anisotropic plasma etching
AU546816B2 (en) * 1981-03-11 1985-09-19 Andreas Hassler Cassette and method for firing ceramic forms
US4668366A (en) * 1984-08-02 1987-05-26 The Perkin-Elmer Corporation Optical figuring by plasma assisted chemical transport and etching apparatus therefor
US4874460A (en) * 1987-11-16 1989-10-17 Seiko Instruments Inc. Method and apparatus for modifying patterned film
US4874459A (en) * 1988-10-17 1989-10-17 The Regents Of The University Of California Low damage-producing, anisotropic, chemically enhanced etching method and apparatus
FR2639567B1 (fr) * 1988-11-25 1991-01-25 France Etat Machine a microfaisceau laser d'intervention sur des objets a couche mince, en particulier pour la gravure ou le depot de matiere par voie chimique en presence d'un gaz reactif
DE3914065A1 (de) * 1989-04-28 1990-10-31 Leybold Ag Vorrichtung zur durchfuehrung von plasma-aetzverfahren
JPH0758708B2 (ja) * 1989-05-18 1995-06-21 松下電器産業株式会社 ドライエッチング装置

Also Published As

Publication number Publication date
NO930681D0 (no) 1993-02-25
IL104662A0 (en) 1993-06-10
US5376224A (en) 1994-12-27
EP0558327A1 (en) 1993-09-01
JPH065571A (ja) 1994-01-14

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