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Priority claimed from JP2605365Aexternal-prioritypatent/JPS494571B1/ja
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Publication of NL6605803ApublicationCriticalpatent/NL6605803A/xx
H01J33/00—Discharge tubes with provision for emergence of electrons or ions from the vessel; Lenard tubes
H—ELECTRICITY
H01—ELECTRIC ELEMENTS
H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
H01J3/02—Electron guns
H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
H—ELECTRICITY
H01—ELECTRIC ELEMENTS
H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/02—Details
H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
H01J37/06—Electron sources; Electron guns
H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
