NL2004753C - Mirror system and lithographic projection device comprising such a mirror system. - Google Patents

Mirror system and lithographic projection device comprising such a mirror system.

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Publication number
NL2004753C
NL2004753C NL2004753A NL2004753A NL2004753C NL 2004753 C NL2004753 C NL 2004753C NL 2004753 A NL2004753 A NL 2004753A NL 2004753 A NL2004753 A NL 2004753A NL 2004753 C NL2004753 C NL 2004753C
Authority
NL
Grant status
Grant
Patent type
Prior art keywords
mirror
characterized
system according
thermo
mirror system
Prior art date
Application number
NL2004753A
Other languages
Dutch (nl)
Inventor
Petrus Carolus Johannes Nicolaas Rosielle
Original Assignee
Univ Eindhoven Tech
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Grant date

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0024Transducers for transforming thermal into mechanical energy or vice versa, e.g. thermal or bimorph actuators
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F03MACHINES OR ENGINES FOR LIQUIDS; WIND, SPRING WEIGHT AND MISCELLANEOUS MOTORS; PRODUCING MECHANICAL POWER; OR A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR
    • F03GSPRING, WEIGHT, INERTIA OR LIKE MOTORS; MECHANICAL-POWER PRODUCING DEVICES OR MECHANISMS, NOT OTHERWISE PROVIDED FOR OR USING ENERGY SOURCES NOT OTHERWISE PROVIDED FOR
    • F03G7/00Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for
    • F03G7/06Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for using expansion or contraction of bodies due to heating, cooling, moistening, drying or the like
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B26/00Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating
    • G02B26/06Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the phase of light
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B26/00Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating
    • G02B26/08Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light
    • G02B26/0816Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0825Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light by means of one or more reflecting elements the reflecting element being a flexible sheet or membrane, e.g. for varying the focus
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B26/00Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating
    • G02B26/08Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light
    • G02B26/0816Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0866Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by thermal means
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70Exposure apparatus for microlithography
    • G03F7/70216Systems for imaging mask onto workpiece

Description

Title : Mirror system and lithographic projection device comprising such a mirror system.

DESCRIPTION

5 The present invention relates to a mirror system comprising a mirror body having at its front a mirroring face and at its back projections extending away from the mirroring face, and deforming means for deforming the mirroring face, the deforming means having actuators being present between neighbouring projections.

In extreme ultraviolet (EUV) lithography, mirror bodies have to be 10 used instead of lenses. The output intensity is specified by the process requirements including the required productivity. The mirror reflectivity is less than with visible light. Because the multiple reflection (e.g. 6x) requires sufficiently high exposure intensity, the exposure pattern determines the location of the absorbed thermal energy (heat input) to the mirror body.

15 In time, local distortion of the mirror body occurs, causing sub nm to several nm warp and waviness on the initial high quality shape of the mirroring face. The mirror material can be characterised as a low expansion coefficient material with poor thermal diffusivity. The latter means a local problem. Despite of the low expansion coefficient, the effect is not negligible, as short wavelengths require 20 accurate mirror shapes (sub-nm). Subsequent exposures to downstream mirrors may cause undesired patterns due to the distortion of the mirroring face.

To compensate for the distortion of the mirroring face it is suggested in EP-A2-1174770 to make use of projections on the backside of a mirror body. More in particular reference is made to the description of the third embodiment therein. 25 Several voltage driven actuators acting along their lengths are inserted in between neighbouring projections. Contraction of such an actuator will induce an outward directed (convex) curvature of the mirroring face, whereas expansion of such an actuator will induce an inward directed (concave) curvature of the mirroring face in between and around those projections on which the actuator is acting. EP-A2-30 1174770 describes actuators of the piezoelectric type as the preferred actuators to be used although also actuators of any of the following actuating principles are mentioned: electrostriction, magnetostriction or by use of permanent magnet and coil, either moving magnet or moving coil. Very fast actuators in the kHz region e.g.

2 piezoelectric actuators are likely to introduce noise in the mirror body.

The present invention aims at providing an active mirror system in which undesired distortion of the mirroring face can be corrected using only relatively small correction forces. The present invention aims at incurring those small correction 5 forces by actuators which are energized in such a way that no noise is likely to be introduced and no hysteresis is likely to occur. For providing a solution or at least an improvement with respect to aspects presented above the actuators according to the invention are thermo-mechanical actuators and the deforming means also have heating means for heating the thermo-mechanical actuators. The present invention is 10 based on the understanding that the actuators do not have to be particularly fast. The actuating effect of the thermo-mechanical actuators takes some seconds to develop. This is however not a drawback. Since thermo-mechanical actuators can be operated at very low frequencies such as 0,1 Hz or 0,02 Hz, noise is not likely to be introduced. Furthermore thermo-mechanical actuators are less prone to hysteresis. 15 Thermo-mechanical actuators, such as consisting of a high conductivity, high expansion coefficient, good stiffness solid metal bar (e.g. Aluminium 6062), require minimal energy input (microwatts) for high resolution in the pm-range.

The heating means may be adapted to heat the thermo-mechanical actuator wirelessly. Wireless heating provides the benefit of getting energy to and 20 from the actuators without contact which might cause noise distortion.

The thermo-mechanical actuators may each comprise a heat transfer element which is physically coupled to a part of the thermo-mechanical actuator, which heat transfer element is to be heated and transfers its thermal energy to the associated rod-like part of the thermo-mechanical actuator. The part of the 25 thermo-mechanical actuator to which the heat transfer element may be coupled, may be rod-like. The use of such transfer elements enable efficient heating of the actuators which are heated by conduction between the transfer elements and the associated actuators.

The conduction may be improved in case each heat transfer element 30 is monolithic with the associated part of the thermo-mechanical actuator.

Each heat transfer element may comprise a recess with an entrance. Energy to heat the heat transfer element and consequently to heat the associated part of the thermo-mechanical actuator may be introduced via the recess. Energy 3 loss may be minimized if the entrance is narrowed.

A very suitable embodiment of heating means may be obtained if the heating means comprise a radiation source for heating the thermo-mechanical actuators by radiation. This radiation source may be a light source, more in particular 5 an IR light source and/or a laser source.

In particular in the latter case the heating means may be provided with mirrors each for an associated thermo-mechanical actuator for directing a laser beam towards the associated thermo-mechanical actuator. Mirrors allow a very efficient way of directing a laser beam towards the associated actuator.

10 In case the thermo-mechanical actuators are provided with heat transfer elements as suggested above, the mirrors may be adapted for directing a laser beam through the entrance in the recess of the heat transfer element of the associated thermo-mechanical actuator. In particular if the recess is absorbent the laser beam will be absorbed within the recess and will transfer its energy to the heat 15 transfer element efficiently.

At least part of the entrances may be directed away from the mirroring face and/or at least part of the entrances is directed towards the mirroring face. Such orientation of the entrances allow relatively easily the direction of a laser beam to the respective recesses.

20 The mirrors with which the heat transfer elements are associated which have an entrance which is directed towards the mirroring face, may very efficiently be located between the associated heat transfer elements and the mirroring face as well as between the projections between which the associated heat transfer elements are provided.

25 At least some of the mirrors may be steps of a stepped mirror body thus providing a very compact way of enabling directing laser beams to the actuators.

In order to prevent mechanical load on the mirror body the mirrors may be free from the mirror body. This way the mirrors do not contact the mirror body directly.

30 As an alternative for the use of a laser source, the radiation source may comprise a resistance heating element for each thermo-mechanical actuator in the direct vicinity thereof. By individually providing each resistance heating element to each of the resistance heating elements, actuators can be controlled individually.

4

To limit energy loss of the resistance heating element and in case transfer elements with a recess are used as suggested above, each resistance heating element may be located within the recess of the heat transfer element wherein the heating element is contactlessly suspended within the recess.

5 It may be necessary to not only once in a while heat the thermo mechanical actuators but also to cool these actuators such that their respective lengths become shorter. For this purpose the mirror system may comprise cooling means for cooling the mirror body. This will also have a cooling effect on the thermomechanical actuators. The cooling means may comprise a plate-like cooling element 10 extending along the free ends of the projections parallel to the mirroring face. This already can provide sufficient cooling capacity since the energy input to the mirror body by the thermo-mechanical actuators can be relatively limited.

In case laser beams are used to energize the thermo-mechanical actuators the plate-like cooling element may comprise holes for allowing respective 15 laser radiation beams to pass there through to heat an associated thermomechanical actuator. This way the cooling element can be located relatively close to the outer ends of the projections.

In case mirrors are used for directing laser beams towards the thermo-mechanical actuators the mirrors may be connected to the cooling element. 20 The cooling element thus also has a constructional function. No disadvantageous contact between the mirrors and the mirror body is necessary.

The advantages of the invention in particular apply in case the mirror system is located within a low pressure space and/or in case the mirror body is magnetically suspended. This may be the case if the mirror system is applied within a 25 lithographic projection device.

Within the latter context the present invention also relates to a lithographic projection device comprising a projection radiation system for providing a projection beam of radiation, a support structure for supporting patterning means, the patterning means serving to pattern the projection beam according to a desired 30 pattern, a substrate table for holding a substrate, a projection system for projecting the patterned beam onto a target portion of the substrate, and a mirror system comprised in an optical system being either one or both of said radiation system and said projection system, whereby said mirror system is according to the invention as 5 described above.

The present invention will now be explained in more detail in following description of a possible embodiment of a mirror system according to the present invention, in which reference is made to the following figures: 5 Figure 1 shows schematically and in isometric view of an embodiment of part of a mirror system according to the present invention;

Figure 2 shows schematically and in isometric view a part of the mirror system according to figure 1;

Figure 3 shows schematically and in isometric view a part of the 10 mirror system according to figures 1 and 2, and

Figure 4 shows schematically and in isometric view a part of the mirror system according to figures 1 and 2.

The mirror system 1 as shown in the figures is adapted for use in a lithographic projection device comprising a projection radiation system for providing a 15 projection beam of radiation, a support structure for supporting patterning means, the patterning means serving to pattern the projection beam according to a desired pattern, a substrate table for holding a substrate, and a projection system for projecting the patterned beam onto a target portion of the substrate. The mirror system is comprised in an optical system being either one or both of said radiation 20 system and said projection system. A more detailed description of an example of such a lithographic projection system is disclosed in EP-A2-1174770. A further example of such a system is disclosed in US 2010/0033704 A1.

The part of the mirror system 1 as shown in figure 1 comprises a monolithic mirror body 2 which is magnetically suspended and has at its front a 25 mirroring face 4 (being the face directed downwards in figure 1) and at its back, i.e. the upper side in figure 1, projections formed as posts 6 that extend away from the mirroring face 4. Posts 6 are provided in a matrix-like pattern along the back surface of the mirror body 2. Posts 6 have a rectangular, more in particular square cross-section although it is also possible to have posts having a non-rectangular cross-30 section. The pattern in which the posts are provided may furthermore be different from the matrix-like pattern as shown in figure 1. At the base of posts 6 the edges between each post 6 and the back face of the mirror body 2 are provided with a radius in order to decrease stress-concentrations at the base of posts 6 in case a 6 force acts on a side face of a post 6, which will be explained below..

In the present exemplary embodiment the posts 6 are grouped in four clusters of four neighbouring posts 6 forming a square with on each corner a post 6. Hence, in total sixteen posts 6 are provided on the mirror body 2. Provision of 5 more or less posts 6 is however also possible. More in particular in practice it can be advantageous if some more posts 6 would be provided not necessarily in a square configuration.

Each two directly adjacent posts 6 within a cluster are mutually coupled via an actuator 8. Actuators 8 are made of a metal, preferably aluminium, 10 and comprise a rod-like part that is on its both free edges integrally connected to a cone-shaped attachment part by means of which the actuator 8 is fixed, for instance by glueing, to the two directly adjacent posts 6. Hence a square-shaped cluster of four posts 6 is formed with posts 6 on the corners and actuators 8 as edges of the square.

15 Onto each rod-like part of the respective actuators 8 a heat transfer element 12 is attached. Actuators 8 constitute thermo-mechanical actuators. By heating a heat transfer element 12 attached to a actuator 8 thermal energy is transferred to the associated rod-like part of actuator 8 which will lengthen in its longitudinal direction due to this heating and forces the two directly adjacent posts 6 20 in between which the actuator 8 is present away from each other. Due to this bending of the posts 6 also the mirroring face 4 will undergo a (in practice very slight) bending. Each heat transfer element 12 is monolithic with the associated rod-like part of the actuator 8. However this is not essential and heat transfer elements 12 could also be separate parts from the rod-like part and closely fitted thereon.

25 The actuators 8 may be made of any material which has a high conductivity, high expansion coefficient and good stiffness (e.g. Aluminium 6062). Such materials require minimal power input (microwatts) for high resolution in the pm-range. Overall total actuator energy input can remain well below 10 mW.

In figure 3 two directly adjacent posts 6 are shown in between which 30 an actuator 8 is present. The heat transfer element 12 of actuator 8 has a recess 14 with an entrance 16 at its lower side, i.e. the side facing towards the mirror body 2. Entrance 16 is narrowed with respect to the cross-sectional area of recess 14.

As schematically shown in figure 2 a laser radiation source 18 is 7 positioned in the vicinity of mirror body 2. On a side of the mirror body 2, which side is parallel to direction 3, a stepped mirror body 30 that extends vertically alongside the mirror body 2 is provided. Stepped mirror body 30 has six mirror faces 20 which are positioned under an angle such that laser beams 50, emerged by the laser 5 source 18 parallel to direction 3 are reflected by mirrors 20 to become reflected laser beams 52 parallel to mirroring face 4 which are directed into the area of the posts 6.

In between posts 6 of parallel rows of posts 6, which rows extend perpendicular to direction 3, stepped mirror bodies 24 and 26 are provided underneath the actuators 8, i.e. on the side of the mirroring face 4. Stepped mirror 10 bodies 24 and 26 each are provided with four mirrors 22, which mirrors 22 are placed under an angle such as to reflect reflected laser beams 52 to become further (upwardly) reflected laser beams 54 perpendicular to mirroring face 4 which further reflected laser beams 54 are directed upwards into recesses 14 of heat transfer elements 12 of actuators 8 that are located in between the rows of posts 6. By 15 directing laser beams 54 in each of the recesses 14 as explained above each of that heat transfer elements 12 can be heated individually. Due to the narrowed entrance 16 the respective laser beam 54 that enters a recess 14 can transfer its heat with high efficiency to the material of the heat transfer element 12 in which the recess 14 is provided causing also the rod-like part of the actuator 8 to be heated and 20 consequently to increase the length thereof.

In order to reach actuators 8 that are present in between directly adjacent posts 6 within the rows of posts 6 stepped mirror bodies 28 (figure 4) like mirror bodies 24 and 26 are also provided on the upper side of posts 6 and actuators 8. In the present example these stepped mirror bodies each only have two mirror 25 faces 44 The recess 14 and entrance 16 of the heat transfer elements 12 that can be reached by laser beams 32 through stepped mirror bodies 28 on the upper side are positioned on the upper side of the heat transfer element 12, so the side facing away from mirror body 2. In such a manner all heat transfer elements 12 can be reached by laser beams 54, 64 which are multiple reflected beams of beams 50, 60 emerging 30 from laser source 18.

Figure 4 shows such a last mentioned heat transfer element 12 that can be reached by refection of laser beam 60 against a mirror 20 of vertical stepped mirror body 30 at its upper side in figure 2, which mirror 20 is in line with an 8 associated stepped mirror body 28 to become reflected laser beam 62. This reflected laser beam 62 is further reflected by a mirror 44 of the associated stepped mirror body 28 to become further (downwardly) reflected laser beam 64 perpendicular to mirroring face 4 which further reflected laser beam 64 is directed downwardly into an 5 upwardly directed recess 14 via entrance 16.

In between the posts 6 and the stepped mirror bodies 28 present at the upper side a plate-like cooling element 40 is provided extending along the free ends of the posts 6 parallel to the mirroring face 4. This cooling plate 40 is externally cooled in a manner known per se by the skilled person. In this way posts 6 can 10 (continuously) be cooled via cooling of cooling plate 40 by means that are not shown in the figures. The temperature difference between cooling plate 40 and posts 6 can for instance be limited to 1 or 2 degrees Celsius. The energy input by the actuators 8 is easily extractable with cooling plate 40 close to but not in contact with the tops of the posts on the rear of the mirror. The post top’s surface is more than enough to 15 extract the energy.

Cooling plate 40 is provided with holes 42 such that further reflected laser beams 64 can reach the relevant heat transfer elements 12. The stepped mirror bodies 24 and 26 as well as the stepped mirror bodies 28 are totally isolated from the material of mirror body 2 and are mechanically connected to cooling plate 20 40,

In practice the shape of the mirroring face (distortion thereof) can very effectively be influenced by controlling laser beams towards each one of the thermo-mechanical actuators 8. Due to heating of a heat transfer element 12 of an actuator 8 two directly adjacent posts 6 can be deflected away from each other in 25 order to thereby correctively bend the surface shape of the mirroring body 4 in a very accurate way. The use of thermo-mechanical actuators is in particular advantageous since they can be axially stiff and adapted for low force operation. Such actuators have a well defined length themselves to ease predictable modelling. They consist of a high expansion coefficient material of excellent thermal diffusivity and are thereby 30 more effective i.e. require less energy input and consequently very limited cooling capacity. The mirror system as described above is completely insensitive to electrical and electromechanical disturbance which is likely to occur in the vacuum environment. It has the proper time constant for correction instead of the too fast 9 piezo actuators and electrical noise prone piezo circuitry and cabling causing undesirable displacement noise, instead of smooth gradual corrective motion.

As an alternative for the use of a laser source for heating the thermo-mechanical actuators 8, it is also possible within the framework of the present 5 invention to make use of resistance heating elements for each thermo-mechanical actuator 8. Such resistance heating elements may advantageously be in the direct vicinity thereof for instance in recesses like recesses 14 of heat transfer elements . Other than in the above described embodiment those recesses 14 may all be oriented similarly for instance with their entrances directed upwardly. Those 10 resistance heating elements can be controlled individually for individually controlling the actuators 8. Clearly the resistance heating elements need some wiring to be electrically fed. Such wiring may extend through the associated entrance of the recess without contacting the associated actuator. As a further alternative a heat transfer element may be omitted and instead the resistance heating element has the 15 shape of a spool which extends around a rod-like part of the thermo-mechanical actuator.

Claims (26)

  1. 1. Spiegelsysteem omvattende een spiegellichaam met aan diens voorzijde een spiegelvlak en aan diens achterzijde uitsteeksels die zich van het 5 spiegelvlak of gericht uitstrekken, en vervormingsmiddelen voor het vervormen van het spiegelvlak, waarbij de vervormingsmiddelen actuatoren hebben die tussen naburige uitsteeksels zijn voorzien, met het kenmerk, dat de actuatoren thermo-mechanische actuatoren zijn, waarbij de vervormingsmiddelen tevens verwarmingsmiddelen hebben voor het verwarmen van de thermo-mechanische actuatoren. 1. A mirror system comprising a mirror body having at its front side a mirror surface, and at its rear side projections which extend from the 5 mirror surface, or oriented, and deforming means for deforming the mirror surface, in which the deforming means of actuators which are provided between adjacent protuberances, with the characterized in that the actuators are thermo-mechanical actuators, wherein the deformation means further having heating means for the heating of the thermo-mechanical actuators.
  2. 2. Spiegelsysteem volgens conclusie 1, met het kenmerk, dat de verwarmingsmiddelen zijn ingericht voor het langs draadloze weg verwarmen van de thermo-mechanische actuatoren. 2. A mirror system according to claim 1, characterized in that the heating means are adapted for heating by wireless means of the thermo-mechanical actuators.
  3. 3. Spiegelsysteem volgens conclusie 1 of 2, met het kenmerk, dat de thermo-mechanische actuatoren elk een warmteoverdrachtselement omvatten dat 15 fysiek aan een gedeelte, bij voorkeur een staafvormig gedeelte, van de thermo-mechanische actuator is gekoppeld, welk warmteoverdrachtselement dient te worden verwarmd en welke diens thermische energie overdraagt aan het bijbehorend gedeelte van de thermo-mechanische actuator. 3. A mirror system according to claim 1 or 2, characterized in that the thermo-mechanical actuators each comprise a heat transfer element 15 physically to a part, preferably a rod-shaped portion, of the thermo-mechanical actuator is coupled, said heat transfer element is to be heated and which transfers its thermal energy to the associated portion of the thermo-mechanical actuator.
  4. 4. Spiegelsysteem volgens conclusie 3, met het kenmerk, dat elk 20 warmteoverdrachtselement monolithisch is met het bijbehorend gedeelte van de thermo-mechanische actuator. 4. A mirror system according to claim 3, characterized in that each heat transfer element 20 is monolithic with the corresponding portion of the thermo-mechanical actuator.
  5. 5. Spiegelsysteem volgens conclusie 4, met het kenmerk, dat elk warmteoverdrachtselement een uitsparing met een ingangsopening omvat. 5. A mirror system according to claim 4, characterized in that each heat transfer element comprises a recess having a mouth opening.
  6. 6. Spiegelsysteem volgens conclusie 5, met het kenmerk, dat de 25 ingangsopening vernauwd is. 6. A mirror system according to claim 5, characterized in that the inlet opening 25 is constricted.
  7. 7. Spiegelsysteem volgens conclusie 2, met het kenmerk, dat de verwarmingsmiddelen een stralingsbron voor het door straling verwarmen van de thermo-mechanische actuatoren omvatten. 7. A mirror system according to claim 2, characterized in that the heating means comprise a radiation source for heating by radiation from the thermo-mechanical actuators.
  8. 8. Spiegelsysteem volgens conclusie 7, met het kenmerk, dat de 30 stralingsbron een lichtbron is. 8. A mirror system according to claim 7, characterized in that the radiation source 30 is a light source.
  9. 9. Spiegelsysteem volgens conclusie 8, met het kenmerk, dat de stralingsbron een infraroodlichtbron is. 9. A mirror system according to claim 8, characterized in that the radiation source is an infrared light source.
  10. 10. Spiegelsysteem volgens conclusie 8 of 9, met het kenmerk, dat de 200*753 t1 --* stralingsbron een laserbron is. 10. A mirror system according to claim 8 or 9, characterized in that the t1 200 * 753 - * radiation source is a laser source.
  11. 11. Spiegelsysteem volgens conclusie 10, met het kenmerk, dat de verwarmingsmiddelen van spiegels zijn voorzien elk voor een bijbehorende thermo-mechanische actuator voor het naar de bijbehorende thermo-mechanische actuator 5 leiden van een laserstraal. 11. A mirror system according to claim 10, characterized in that the heating means of mirrors are provided each for an associated thermo-mechanical actuator for transmitting to the associated thermo-mechanical actuator 5 leading a laser beam.
  12. 12. Spiegelsysteem volgens conclusie 5 en 11, met het kenmerk, dat de spiegels zijn ingericht voor het door de ingangsopening in de uitsparing van het overdrachtselement van de bijbehorende thermo-mechanische actuator leiden van een laserstraal. 12. A mirror system according to claim 5 and 11, characterized in that the mirrors are arranged for through the entrance opening in the recess of the transfer element of the associated thermo-mechanical actuator directing a laser beam.
  13. 13. Spiegelsysteem volgens conclusie 12, met het kenmerk, dat ten minste een deel van de ingangsopeningen van het spiegelvlak af is gericht. 13. A mirror-system according to claim 12, characterized in that at least a part is directed away from the entrance openings of the mirror surface.
  14. 14. Spiegelsysteem volgens conclusie 12 of 13, met het kenmerk, dat ten minste een deel van de ingangsopeningen naar het spiegelvlak toe is gericht. 14. A mirror system according to claim 12 or 13, characterized in that at least a part of the entrance openings to the mirror surface is directed.
  15. 15. Spiegelsysteem volgens conclusie 14, met het kenmerk, dat de 15 spiegels waarbij de warmteoverdrachtselementen horen die een ingangsopening hebben die naar het spiegelvlak toe is gericht, zich tussen de bijbehorende warmteoverdrachtselementen en het spiegelvlak in zijn geplaatst en tussen de uitsteeksels waartussen de bijbehorende warmteoverdrachtselementen zijn verschaft. 15. A mirror-system according to claim 14, characterized in that the 15 mirrors, wherein the heat transfer elements belong that have an entry opening that is directed toward the reflecting surface, located between the corresponding heat transfer elements, and the mirror surface in are placed, and between the projections, between which the respective heat transfer elements are provided.
  16. 16. Spiegelsysteem volgens één van de conclusies 11 tot en met 15, met het kenmerk, dat ten minste enige van de spiegels trappen zijn van een getrapt spiegellichaam. 16. A mirror-system according to any one of claims 11 to 15, characterized in that at least some of the mirrors stairs are of a stepped mirror body.
  17. 17. Spiegelsysteem volgens één van de conclusies 11 tot en met 16, met het kenmerk, dat de spiegels vrij zijn van het spiegellichaam. 17. A mirror-system according to any one of claims 11 to 16, characterized in that the mirrors are free of the mirror body.
  18. 18. Spiegelsysteem volgens conclusie 7, met het kenmerk, dat de stralingsbron een weerstandsverwarmingselement voor elke thermo-mechanische actuator in de directe nabijheid daarvan omvat. 18. A mirror system according to claim 7, characterized in that the radiation source comprises a resistive heating element for each thermo-mechanical actuator in the immediate vicinity thereof.
  19. 19. Spiegelsysteem volgens conclusies 5 en 18, met het kenmerk, dat elk weerstandsverwarmingselement binnenin de uitsparing van het 30 warmteoverdrachtselement is geplaatst waarbij het verwarmingselement contactloos in de uitsparing is opgehangen. 19. Mirror system according to claims 5 and 18, characterized in that each resistive heating element is disposed within the recess of the heat transfer element 30 in which the heating element is suspended without contact in the recess.
  20. 20. Spiegelsysteem volgens één van de voorgaande conclusies, met het kenmerk, dat het spiegelsysteem koelmiddelen voor het koelen van het r spiegellichaam omvat. 20. The mirror-system according to any one of the preceding claims, characterized in that the mirror system comprises cooling means for cooling the r mirror body.
  21. 21. Spiegelsysteem volgens conclusie 20, met het kenmerk, dat de koelmiddelen een plaat vormig koelelement omvatten dat zich parallel aan het spiegelvlak langs de vrije uiteinden van de uitsteeksels uitstrekt. 21. The mirror-system according to claim 20, characterized in that the cooling means comprise a plate-shaped cooling element which extends parallel to the mirror plane along the free ends of the projections.
  22. 22. Spiegelsysteem volgens conclusies 10 en 21, met het kenmerk, dat het plaat vormig koelelement gaten omvat voor het mogelijk maken dat respectievelijke laserstralen daardoorheen passeren om een bijbehorende thermo-mechanische actuator te verwarmen. 22. Mirror system according to claims 10 and 21, characterized in that the plate-shaped cooling element comprises holes for allowing respective laser beams to pass therethrough in order to heat an associated thermo-mechanical actuator.
  23. 23. Spiegelsysteem volgens conclusies 11 en 21, met het kenmerk, dat 10 de spiegels met het koelelement zijn verbonden. 23. Mirror system according to claims 11 and 21, characterized in that the mirrors 10 to the cooling element are associated.
  24. 24. Spiegelsysteem volgens één van de voorgaande conclusies, met het kenmerk, dat het spiegelsysteem zich binnenin een lagedrukruimte bevindt. 24. The mirror-system according to any one of the preceding claims, characterized in that the mirror system is located within a low-pressure space.
  25. 25. Spiegelsysteem volgens één van de voorgaande conclusies, met het kenmerk, dat het spiegellichaam magnetisch is opgehangen. 25. The mirror-system according to any one of the preceding claims, characterized in that the mirror body is suspended magnetically.
  26. 26. Lithografische projectie-inrichting omvattende een stralings- projectiesysteem voor het verschaffen van een projectiebundel van straling, een ondersteuningsgestel voor het ondersteunen van patroonvormmiddelen, waarbij de patroonvormmiddelen fungeren om volgens een gewenst patroon een patroon te vormen van de projectiebundel, een substraattafel voor het vasthouden van een 20 substraat, een projectiesysteem voor het projecteren van de patroon gevormde bundel op een doelgedeelte van het substraat, en een spiegelsysteem dat is omvat in een optisch systeem zijnde één of beide van het stralingssysteem en het projectiesysteem, met het kenmerk, dat het spiegelsysteem een spiegelsysteem volgens één van de voorgaande conclusies is. 26. A lithographic projection apparatus comprising a radiation-projection system for providing a projection beam of radiation, a support frame for supporting patterning means, the patterning means act in order to form the projection beam, a substrate table for holding a cartridge according to a desired pattern of a 20 substrate, a projection system for projecting the patterned beam onto a target portion of the substrate, and a mirror system which is included in an optical system having one or both of the radiation system and the projection system, characterized in that the mirror system a mirror system according to any one of the preceding claims. 25 ^-7 5*5 25 ^ -7 5 * 5
NL2004753A 2010-05-20 2010-05-20 Mirror system and lithographic projection device comprising such a mirror system. NL2004753C (en)

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