LU75087A1LU75087ALU75087ALU75087A1LU 75087 A1LU75087 A1LU 75087A1LU 75087 ALU75087 ALU 75087ALU 75087 ALU75087 ALU 75087ALU 75087 A1LU75087 A1LU 75087A1
Authority
LU
Luxembourg
Application number
LU75087A
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Publication date
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Publication of LU75087A1publicationCriticalpatent/LU75087A1/xx
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/02—Details
H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
H01J37/06—Electron sources; Electron guns
H01J37/067—Replacing parts of guns; Mutual adjustment of electrodes
H—ELECTRICITY
H01—ELECTRIC ELEMENTS
H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/02—Details
H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
H01J37/06—Electron sources; Electron guns
H01J37/07—Eliminating deleterious effects due to thermal effects or electric or magnetic fields
