LU50235A1LU50235ALU50235ALU50235A1LU 50235 A1LU50235 A1LU 50235A1LU 50235 ALU50235 ALU 50235ALU 50235 ALU50235 ALU 50235ALU 50235 A1LU50235 A1LU 50235A1
Authority
LU
Luxembourg
Application number
LU50235A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filedfiledCritical
Publication of LU50235A1publicationCriticalpatent/LU50235A1/xx
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/02—Details
H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
H—ELECTRICITY
H01—ELECTRIC ELEMENTS
H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/02—Details
H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
Landscapes
Chemical & Material Sciences
(AREA)
Analytical Chemistry
(AREA)
Adornments
(AREA)
Microscoopes, Condenser
(AREA)
Analysing Materials By The Use Of Radiation
(AREA)
