KR970072129A - Substrate cleaning apparatus - Google Patents
Substrate cleaning apparatus Download PDFInfo
- Publication number
- KR970072129A KR970072129A KR1019960010990A KR19960010990A KR970072129A KR 970072129 A KR970072129 A KR 970072129A KR 1019960010990 A KR1019960010990 A KR 1019960010990A KR 19960010990 A KR19960010990 A KR 19960010990A KR 970072129 A KR970072129 A KR 970072129A
- Authority
- KR
- South Korea
- Prior art keywords
- substrate
- cleaning apparatus
- roller
- substrate cleaning
- cleaning
- Prior art date
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- Cleaning Or Drying Semiconductors (AREA)
Abstract
본 발명은 FPD 및 반도체 제조 과정에서 사용되는 종래의 기판 세정 장치가 상ㆍ하측 기어의 치합 관계로 인해 기판의 두께 변화에 대응하지 못하고, 기판을 이송시키는 롤러의 지지부가 다수의 부품으로 구성되어 구조가 복잡하고 그 틈 사이로 세정액이 누설될 위험이 있기 때문에, 상기 롤러는 유연한 재질의 재료로 구성되어 서로 면 접촉된 상태로 회전되고 상기 롤러를 지지하는 지지부가 일체형의 지지 베어링 블록으로 구성되어, 다양한 두께의 기판 세정이 가능하고 세정액의 누설 위험이 없는 기판 세정 장치에 관한 것이다.The present invention is based on the fact that the conventional substrate cleaning apparatus used in FPD and semiconductor manufacturing processes does not correspond to the thickness variation of the substrate due to the engagement relationship of the upper and lower gears, The roller is made of a flexible material and rotates in a state of being in face-to-face contact with each other, and the supporting part for supporting the roller is constituted by an integral support bearing block, To a substrate cleaning apparatus capable of cleaning a substrate with a reduced thickness and without a risk of leakage of a cleaning liquid.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is a trivial issue, I did not include the contents of the text.
제3도는 본 발명에 의한 기판 세정 장치의 사시도.FIG. 3 is a perspective view of the substrate cleaning apparatus according to the present invention; FIG.
Claims (3)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019960010990A KR970072129A (en) | 1996-04-12 | 1996-04-12 | Substrate cleaning apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019960010990A KR970072129A (en) | 1996-04-12 | 1996-04-12 | Substrate cleaning apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970072129A true KR970072129A (en) | 1997-11-07 |
Family
ID=66223422
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019960010990A KR970072129A (en) | 1996-04-12 | 1996-04-12 | Substrate cleaning apparatus |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970072129A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100433452B1 (en) * | 2001-07-03 | 2004-05-31 | 주식회사 케이씨텍 | Cleaning apparatus for Brush |
KR100893503B1 (en) * | 2007-09-19 | 2009-04-16 | 주식회사 케이씨텍 | Dry cleaner |
-
1996
- 1996-04-12 KR KR1019960010990A patent/KR970072129A/en not_active Application Discontinuation
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100433452B1 (en) * | 2001-07-03 | 2004-05-31 | 주식회사 케이씨텍 | Cleaning apparatus for Brush |
KR100893503B1 (en) * | 2007-09-19 | 2009-04-16 | 주식회사 케이씨텍 | Dry cleaner |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E601 | Decision to refuse application |