KR970072129A - Substrate cleaning apparatus - Google Patents

Substrate cleaning apparatus Download PDF

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Publication number
KR970072129A
KR970072129A KR1019960010990A KR19960010990A KR970072129A KR 970072129 A KR970072129 A KR 970072129A KR 1019960010990 A KR1019960010990 A KR 1019960010990A KR 19960010990 A KR19960010990 A KR 19960010990A KR 970072129 A KR970072129 A KR 970072129A
Authority
KR
South Korea
Prior art keywords
substrate
cleaning apparatus
roller
substrate cleaning
cleaning
Prior art date
Application number
KR1019960010990A
Other languages
Korean (ko)
Inventor
박민호
Original Assignee
구자홍
Lg 전자주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 구자홍, Lg 전자주식회사 filed Critical 구자홍
Priority to KR1019960010990A priority Critical patent/KR970072129A/en
Publication of KR970072129A publication Critical patent/KR970072129A/en

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Abstract

본 발명은 FPD 및 반도체 제조 과정에서 사용되는 종래의 기판 세정 장치가 상ㆍ하측 기어의 치합 관계로 인해 기판의 두께 변화에 대응하지 못하고, 기판을 이송시키는 롤러의 지지부가 다수의 부품으로 구성되어 구조가 복잡하고 그 틈 사이로 세정액이 누설될 위험이 있기 때문에, 상기 롤러는 유연한 재질의 재료로 구성되어 서로 면 접촉된 상태로 회전되고 상기 롤러를 지지하는 지지부가 일체형의 지지 베어링 블록으로 구성되어, 다양한 두께의 기판 세정이 가능하고 세정액의 누설 위험이 없는 기판 세정 장치에 관한 것이다.The present invention is based on the fact that the conventional substrate cleaning apparatus used in FPD and semiconductor manufacturing processes does not correspond to the thickness variation of the substrate due to the engagement relationship of the upper and lower gears, The roller is made of a flexible material and rotates in a state of being in face-to-face contact with each other, and the supporting part for supporting the roller is constituted by an integral support bearing block, To a substrate cleaning apparatus capable of cleaning a substrate with a reduced thickness and without a risk of leakage of a cleaning liquid.

Description

기판 세정 장치Substrate cleaning apparatus

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is a trivial issue, I did not include the contents of the text.

제3도는 본 발명에 의한 기판 세정 장치의 사시도.FIG. 3 is a perspective view of the substrate cleaning apparatus according to the present invention; FIG.

Claims (3)

기판을 이송시키는 상부 롤러 및 하부 롤러와, 상기 하부 롤로를 회전시키는 동력 전달부와, 상기 롤러를 모두 지지하는 지지 베어링 블록과, 상기 기판을 세정하는 샤워 노즐 및 세정 브러시를 포함하여 구성되는 것을 특징으로 하는 기판 세정 장치.A power transmission portion for rotating the lower roller; a support bearing block for supporting both the rollers; and a shower nozzle for cleaning the substrate and a cleaning brush. . 제1항에 있어서, 상기 상부 롤러는 상기 하부 롤러에 면 접촉되도록 설치되고, 그 마찰력에 의해 회전되는 것을 특징으로 하는 기판 세정 장치.The substrate cleaning apparatus according to claim 1, wherein the upper roller is provided so as to be in surface contact with the lower roller, and is rotated by the frictional force. 제1항에 있어서, 상기 상부 롤러와 상기 하부 롤러는 낮은 경도의 연질 재료로 형성된 것을 특징으로 하는 기판 세정 장치.The substrate cleaning apparatus of claim 1, wherein the upper roller and the lower roller are formed of a soft material having a low hardness. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: It is disclosed by the contents of the first application.
KR1019960010990A 1996-04-12 1996-04-12 Substrate cleaning apparatus KR970072129A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019960010990A KR970072129A (en) 1996-04-12 1996-04-12 Substrate cleaning apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019960010990A KR970072129A (en) 1996-04-12 1996-04-12 Substrate cleaning apparatus

Publications (1)

Publication Number Publication Date
KR970072129A true KR970072129A (en) 1997-11-07

Family

ID=66223422

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960010990A KR970072129A (en) 1996-04-12 1996-04-12 Substrate cleaning apparatus

Country Status (1)

Country Link
KR (1) KR970072129A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100433452B1 (en) * 2001-07-03 2004-05-31 주식회사 케이씨텍 Cleaning apparatus for Brush
KR100893503B1 (en) * 2007-09-19 2009-04-16 주식회사 케이씨텍 Dry cleaner

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100433452B1 (en) * 2001-07-03 2004-05-31 주식회사 케이씨텍 Cleaning apparatus for Brush
KR100893503B1 (en) * 2007-09-19 2009-04-16 주식회사 케이씨텍 Dry cleaner

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E601 Decision to refuse application