KR950030383A - Source / drain structure to prevent punchthrough - Google Patents
Source / drain structure to prevent punchthrough Download PDFInfo
- Publication number
- KR950030383A KR950030383A KR1019940007103A KR19940007103A KR950030383A KR 950030383 A KR950030383 A KR 950030383A KR 1019940007103 A KR1019940007103 A KR 1019940007103A KR 19940007103 A KR19940007103 A KR 19940007103A KR 950030383 A KR950030383 A KR 950030383A
- Authority
- KR
- South Korea
- Prior art keywords
- source
- channel
- doped
- drain structure
- region
- Prior art date
Links
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- Insulated Gate Type Field-Effect Transistor (AREA)
Abstract
본 발명은 트랜지스터의 소스/드레인 구조에 관한 것으로, 특히 전반적인 소스와 드레인영역(10)은 강하게 도핑 하고, 채널에 인접한 영역(20)은 약하게 도핑한 구조상에 상기 채널에 인접한 영역(20) 사이에 기판과 동일한 형의 불순물이 고농도로 도핑된 영역(30)이 형성되는 것을 특징으로 함으로써 본 발명은 단채널에 기인한 펀치스루 현상을 방지함으로써 소자의 전기적 특성 향상 및 수율 증대의 효과를 얻을 수 있다.The present invention relates to the source / drain structure of a transistor, in particular the overall source and drain regions 10 are strongly doped, and the region 20 adjacent to the channel is between the regions 20 adjacent to the channel on the slightly doped structure. By forming a region 30 doped with a high concentration of impurities of the same type as the substrate, the present invention can prevent the punch-through phenomenon caused by the short channel, thereby improving the electrical characteristics of the device and increasing the yield. .
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
제2도는 종래의 소스/드레인 구조 트랜지스터의 단면도.2 is a cross-sectional view of a conventional source / drain structure transistor.
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019940007103A KR950030383A (en) | 1994-04-04 | 1994-04-04 | Source / drain structure to prevent punchthrough |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019940007103A KR950030383A (en) | 1994-04-04 | 1994-04-04 | Source / drain structure to prevent punchthrough |
Publications (1)
Publication Number | Publication Date |
---|---|
KR950030383A true KR950030383A (en) | 1995-11-24 |
Family
ID=66677696
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019940007103A KR950030383A (en) | 1994-04-04 | 1994-04-04 | Source / drain structure to prevent punchthrough |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR950030383A (en) |
-
1994
- 1994-04-04 KR KR1019940007103A patent/KR950030383A/en not_active Application Discontinuation
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Legal Events
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WITN | Withdrawal due to no request for examination |