KR950029029U - 마그네틱을 이용한 정적 푸싱장치 - Google Patents

마그네틱을 이용한 정적 푸싱장치

Info

Publication number
KR950029029U
KR950029029U KR2019940005126U KR19940005126U KR950029029U KR 950029029 U KR950029029 U KR 950029029U KR 2019940005126 U KR2019940005126 U KR 2019940005126U KR 19940005126 U KR19940005126 U KR 19940005126U KR 950029029 U KR950029029 U KR 950029029U
Authority
KR
South Korea
Prior art keywords
magnetic
pushing device
static pushing
static
pushing
Prior art date
Application number
KR2019940005126U
Other languages
English (en)
Other versions
KR970006416Y1 (ko
Inventor
송희민
Original Assignee
현대전자산업 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자산업 주식회사 filed Critical 현대전자산업 주식회사
Priority to KR2019940005126U priority Critical patent/KR970006416Y1/ko
Publication of KR950029029U publication Critical patent/KR950029029U/ko
Application granted granted Critical
Publication of KR970006416Y1 publication Critical patent/KR970006416Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Special Conveying (AREA)
KR2019940005126U 1994-03-15 1994-03-15 마그네틱을 이용한 정적 푸싱장치 KR970006416Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940005126U KR970006416Y1 (ko) 1994-03-15 1994-03-15 마그네틱을 이용한 정적 푸싱장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940005126U KR970006416Y1 (ko) 1994-03-15 1994-03-15 마그네틱을 이용한 정적 푸싱장치

Publications (2)

Publication Number Publication Date
KR950029029U true KR950029029U (ko) 1995-10-20
KR970006416Y1 KR970006416Y1 (ko) 1997-06-24

Family

ID=19378928

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940005126U KR970006416Y1 (ko) 1994-03-15 1994-03-15 마그네틱을 이용한 정적 푸싱장치

Country Status (1)

Country Link
KR (1) KR970006416Y1 (ko)

Also Published As

Publication number Publication date
KR970006416Y1 (ko) 1997-06-24

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Legal Events

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