KR950018784U - 연속 진공증착 장치용 강판 이송안내 장치 - Google Patents

연속 진공증착 장치용 강판 이송안내 장치

Info

Publication number
KR950018784U
KR950018784U KR2019930030057U KR930030057U KR950018784U KR 950018784 U KR950018784 U KR 950018784U KR 2019930030057 U KR2019930030057 U KR 2019930030057U KR 930030057 U KR930030057 U KR 930030057U KR 950018784 U KR950018784 U KR 950018784U
Authority
KR
South Korea
Prior art keywords
steel plate
vacuum deposition
conveying guide
plate conveying
continuous vacuum
Prior art date
Application number
KR2019930030057U
Other languages
English (en)
Other versions
KR960003146Y1 (ko
Inventor
김영기
Original Assignee
포항종합제철 주식회사
재단법인 산업과학기술연구소
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 포항종합제철 주식회사, 재단법인 산업과학기술연구소 filed Critical 포항종합제철 주식회사
Priority to KR2019930030057U priority Critical patent/KR960003146Y1/ko
Publication of KR950018784U publication Critical patent/KR950018784U/ko
Application granted granted Critical
Publication of KR960003146Y1 publication Critical patent/KR960003146Y1/ko

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/568—Transferring the substrates through a series of coating stations
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
KR2019930030057U 1993-12-28 1993-12-28 연속 진공증착 장치용 강판 이송안내 장치 KR960003146Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019930030057U KR960003146Y1 (ko) 1993-12-28 1993-12-28 연속 진공증착 장치용 강판 이송안내 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019930030057U KR960003146Y1 (ko) 1993-12-28 1993-12-28 연속 진공증착 장치용 강판 이송안내 장치

Publications (2)

Publication Number Publication Date
KR950018784U true KR950018784U (ko) 1995-07-24
KR960003146Y1 KR960003146Y1 (ko) 1996-04-16

Family

ID=19373069

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019930030057U KR960003146Y1 (ko) 1993-12-28 1993-12-28 연속 진공증착 장치용 강판 이송안내 장치

Country Status (1)

Country Link
KR (1) KR960003146Y1 (ko)

Also Published As

Publication number Publication date
KR960003146Y1 (ko) 1996-04-16

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