KR940000388A - Sol-gel process according to the photo sensitive Sung Yu-ri and a method of manufacturing the same - Google Patents

Sol-gel process according to the photo sensitive Sung Yu-ri and a method of manufacturing the same Download PDF

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Publication number
KR940000388A
KR940000388A KR1019920010451A KR920010451A KR940000388A KR 940000388 A KR940000388 A KR 940000388A KR 1019920010451 A KR1019920010451 A KR 1019920010451A KR 920010451 A KR920010451 A KR 920010451A KR 940000388 A KR940000388 A KR 940000388A
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South Korea
Prior art keywords
ri
method
sensitive
characterized
light
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KR1019920010451A
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Korean (ko)
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KR100201867B1 (en
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박태호
박주옥
조규성
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안재학
삼성코닝 주식회사
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Publication of KR940000388A publication Critical patent/KR940000388A/en
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Publication of KR100201867B1 publication Critical patent/KR100201867B1/en

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Abstract

졸-겔법에 의해 제조되는 광감응성유리와 그 제조방법에 관한 것으로서, 더욱 상세하게는 예컨대 반도체나 LCD (liquid crystal display)등의 패턴을 형성하기 위해 유리 가판에 광감응성 졸(Sol)을 피복시키는 단순공정으로 제조되는 광감응성 유리와 그 제조방법, 그리고 여기에 패턴을 형성하는 방법에 관한 것이다. Sol-relates to a photo sensitive Sung Yu-ri and its manufacturing method which is produced by the gel process, and more particularly, for example to form a pattern such as a semiconductor or LCD (liquid crystal display) of coating a photosensitive sol (Sol) in a glass gapan photosensitive glass to be produced in a simple process and a method of manufacturing the same, and to a method of forming a pattern here.

Description

졸-겔법에 의한 광감응성유리와 그 제조방법 Sol-gel process according to the photo sensitive Sung Yu-ri and a method of manufacturing the same

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음 This information did not disclose more professional information because lumbar Articles

제1도는 졸-겔(Sol-Gel)법에 의한 광감응성 유리의 제조 및 패턴(pattern)형성의 공정을 나타낸 공정도이다. A process chart showing a gel (Sol-Gel) production and the pattern of photosensitive glass by a method (pattern) of the forming process - to turn the first sol.

Claims (5)

  1. 광감응성 유리에 있어서, SiO 2 -망상조직형성 물질인 SiO 2 -알콕시드 화합물 69.45내지 90.5몰%, 알칼리 화합물 9.45내지 30.5몰%, 광감응 제0.003내지 0.7몰%및 광감응화제 0.01내지 1.5몰%과 상기 알콕시드 화합물을 기준으로 2.2배의 에탄올과 10배의 H 2 O가 혼합되어 있는 광감응성 졸에 기판이 침지 피복되과 건조 및 소결되어 이루어진 것을 특징으로 하는 광감응성유리. In photosensitive glass, SiO 2 - network-forming material is SiO 2 - alkoxide compound 69.45 to 90.5 mol%, the alkali compound 9.45 to 30.5 mol%, the light-sensitive claim 0.003 to 0.7 mol%, and a light-sensitive agent from 0.01 to 1.5 mol, %, and the light-sensitive Sung Yu-ri, characterized in that the alkoxysilane, based on the imide compound is made 2.2 times of ethanol, and 10 times in H 2 O to a photosensitive substrate, which is a mixed sol is dip coating doegwa drying and sintering.
  2. 제1항에 있어서, 상기 알콕시드 화합물이 테트라에틸 오르토실리케이트인 것을 특징으로 하는 광감응성유리. The method of claim 1 wherein the photo sensitive Sung Yu-ri, characterized in that the alkoxide compound is tetraethyl silicate.
  3. 제1항에 있어서, 상기 알칼리 화합물은 리튬이소프로폭시드 또는 리튬아세테이트인 것을 특징으로 하는 고순도 광감응성유리. The method of claim 1, wherein the alkali compound is lithium isopropoxide highly pure light-sensitive characterized in that the oxide or lithium acetate Sung Yu-ri.
  4. 제1항에 있어서, 상기 광감응제가 질산세륨(Ⅲ)·6수화물[Ce(NO 3 ) 2 ·6H 2 0]또는 염화세륨인 것을 특징으로 하는 광감응성유리. The method of claim 1 wherein the photo sensitive agent cerium nitrate (Ⅲ) · 6 hydrate [Ce (NO 3) 2 · 6H 2 0] or a light-sensitive characterized in that the cerium chloride Sung Yu-ri.
  5. 제1항에 있어서, 상기 광감응화제가 질산은(AgN0 3 )인 것을 특징으로하는 광감응성유리. The method of claim 1 wherein the photo sensitive Sung Yu-ri, characterized in that the photosensitive agent is a silver nitrate (AgN0 3).
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임. ※ Note: Will you disclose by the first application information.
KR1019920010451A 1992-06-16 1992-06-16 Manufacturing method of ray-sensitive glass by sol-gel method KR100201867B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019920010451A KR100201867B1 (en) 1992-06-16 1992-06-16 Manufacturing method of ray-sensitive glass by sol-gel method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019920010451A KR100201867B1 (en) 1992-06-16 1992-06-16 Manufacturing method of ray-sensitive glass by sol-gel method

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KR940000388A true KR940000388A (en) 1994-01-03
KR100201867B1 KR100201867B1 (en) 1999-06-15

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KR1019920010451A KR100201867B1 (en) 1992-06-16 1992-06-16 Manufacturing method of ray-sensitive glass by sol-gel method

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9793335B2 (en) 2000-12-21 2017-10-17 Semiconductor Energy Laboratory Co., Ltd. Light emitting device and method of manufacturing the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9793335B2 (en) 2000-12-21 2017-10-17 Semiconductor Energy Laboratory Co., Ltd. Light emitting device and method of manufacturing the same

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KR100201867B1 (en) 1999-06-15

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