KR930020224A - 기판 경사식 노광장치 - Google Patents

기판 경사식 노광장치 Download PDF

Info

Publication number
KR930020224A
KR930020224A KR1019930001619A KR930001619A KR930020224A KR 930020224 A KR930020224 A KR 930020224A KR 1019930001619 A KR1019930001619 A KR 1019930001619A KR 930001619 A KR930001619 A KR 930001619A KR 930020224 A KR930020224 A KR 930020224A
Authority
KR
South Korea
Prior art keywords
substrate
vacuum frame
exposure apparatus
vacuum
ultraviolet light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
KR1019930001619A
Other languages
English (en)
Korean (ko)
Inventor
와타누키 미노루
Original Assignee
야자끼 요시오
오알씨 메뉴팩처링 컴퍼니 리미티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 야자끼 요시오, 오알씨 메뉴팩처링 컴퍼니 리미티드 filed Critical 야자끼 요시오
Publication of KR930020224A publication Critical patent/KR930020224A/ko
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2022—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure
    • G03F7/2032—Simultaneous exposure of the front side and the backside
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0073—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces
    • H05K3/0082—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces characterised by the exposure method of radiation-sensitive masks
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0094—Filling or covering plated through-holes or blind plated vias, e.g. for masking or for mechanical reinforcement

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Projection-Type Copiers In General (AREA)
KR1019930001619A 1992-03-19 1993-02-06 기판 경사식 노광장치 Ceased KR930020224A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP4-62971 1992-03-19
JP4062971A JPH05265220A (ja) 1992-03-19 1992-03-19 基板傾斜式露光装置

Publications (1)

Publication Number Publication Date
KR930020224A true KR930020224A (ko) 1993-10-19

Family

ID=13215746

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019930001619A Ceased KR930020224A (ko) 1992-03-19 1993-02-06 기판 경사식 노광장치

Country Status (5)

Country Link
EP (1) EP0561486B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPH05265220A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
KR (1) KR930020224A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE69314684T2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
TW (1) TW235346B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6214525B1 (en) 1996-09-06 2001-04-10 International Business Machines Corp. Printed circuit board with circuitized cavity and methods of producing same
US7008483B2 (en) * 2002-04-19 2006-03-07 Hewlett-Packard Development Company, L.P. Curing printed circuit board coatings
JP2007142265A (ja) * 2005-11-21 2007-06-07 Fuji Koken Kk 露光装置及び露光方法
TW201015230A (en) 2008-10-03 2010-04-16 Univ Nat Chiao Tung Immersion inclined lithography apparatus and tank thereof
JP6149214B2 (ja) * 2013-03-26 2017-06-21 サンエー技研株式会社 露光装置、露光方法
JP6053154B2 (ja) * 2013-03-28 2016-12-27 リンテック株式会社 光照射装置および光照射方法
JP7383341B2 (ja) * 2019-11-27 2023-11-20 株式会社オーク製作所 ダイレクト露光装置および基板の露光方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6340157A (ja) * 1986-08-06 1988-02-20 Mitsubishi Electric Corp 露光機
JPH02254456A (ja) * 1989-03-29 1990-10-15 Orc Mfg Co Ltd フォトレジスト露光方法およびその装置
JPH07111583B2 (ja) * 1989-04-21 1995-11-29 株式会社オーク製作所 入射角可変用露光装置
US5147760A (en) * 1989-07-21 1992-09-15 Mitsubishi Denki Kabushiki Kaisha Method of exposing printed wiring boards having through holes

Also Published As

Publication number Publication date
TW235346B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1994-12-01
DE69314684T2 (de) 1998-02-19
JPH05265220A (ja) 1993-10-15
EP0561486A1 (en) 1993-09-22
DE69314684D1 (de) 1997-11-27
EP0561486B1 (en) 1997-10-22

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Patent event code: PA01091R01D

Comment text: Patent Application

Patent event date: 19930206

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Patent event code: PA02012R01D

Patent event date: 19950919

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Patent event code: PA02011R01I

Patent event date: 19930206

Comment text: Patent Application

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Patent event date: 19980323

Patent event code: PE09021S01D

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Patent event date: 19980617

Comment text: Decision to Refuse Application

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Patent event date: 19980323

Comment text: Notification of reason for refusal

Patent event code: PE06011S01I