KR920019732A - 산-분해성 감조사선성 화합물, 이를 함유하는 감조사선성 혼합물 및 당해 혼합물로 제조한 감조사선성 기록물질 - Google Patents

산-분해성 감조사선성 화합물, 이를 함유하는 감조사선성 혼합물 및 당해 혼합물로 제조한 감조사선성 기록물질 Download PDF

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KR920019732A
KR920019732A KR1019920006519A KR920006519A KR920019732A KR 920019732 A KR920019732 A KR 920019732A KR 1019920006519 A KR1019920006519 A KR 1019920006519A KR 920006519 A KR920006519 A KR 920006519A KR 920019732 A KR920019732 A KR 920019732A
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radiation sensitive
compound
alkyl
group
carbon atoms
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파블로브스키 게오르크
담멜 랄프
뢰쉐르트 호르스트
스피이스 발터
엑케스 카를로체
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칼 헤르만 마이어-돌호이어·베른하르트 엠. 벡크
훽스트 아크티엔게젤샤프트
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Publication of KR920019732A publication Critical patent/KR920019732A/ko

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    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C309/00—Sulfonic acids; Halides, esters, or anhydrides thereof
    • C07C309/01—Sulfonic acids
    • C07C309/02—Sulfonic acids having sulfo groups bound to acyclic carbon atoms
    • C07C309/03—Sulfonic acids having sulfo groups bound to acyclic carbon atoms of an acyclic saturated carbon skeleton
    • C07C309/07—Sulfonic acids having sulfo groups bound to acyclic carbon atoms of an acyclic saturated carbon skeleton containing oxygen atoms bound to the carbon skeleton
    • C07C309/09—Sulfonic acids having sulfo groups bound to acyclic carbon atoms of an acyclic saturated carbon skeleton containing oxygen atoms bound to the carbon skeleton containing etherified hydroxy groups bound to the carbon skeleton
    • C07C309/11—Sulfonic acids having sulfo groups bound to acyclic carbon atoms of an acyclic saturated carbon skeleton containing oxygen atoms bound to the carbon skeleton containing etherified hydroxy groups bound to the carbon skeleton with the oxygen atom of at least one of the etherified hydroxy groups further bound to a carbon atom of a six-membered aromatic ring
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    • C07C309/00—Sulfonic acids; Halides, esters, or anhydrides thereof
    • C07C309/63—Esters of sulfonic acids
    • C07C309/64—Esters of sulfonic acids having sulfur atoms of esterified sulfo groups bound to acyclic carbon atoms
    • C07C309/65—Esters of sulfonic acids having sulfur atoms of esterified sulfo groups bound to acyclic carbon atoms of a saturated carbon skeleton
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    • C07C309/64—Esters of sulfonic acids having sulfur atoms of esterified sulfo groups bound to acyclic carbon atoms
    • C07C309/65—Esters of sulfonic acids having sulfur atoms of esterified sulfo groups bound to acyclic carbon atoms of a saturated carbon skeleton
    • C07C309/66—Methanesulfonates
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    • C07C309/00—Sulfonic acids; Halides, esters, or anhydrides thereof
    • C07C309/63—Esters of sulfonic acids
    • C07C309/72—Esters of sulfonic acids having sulfur atoms of esterified sulfo groups bound to carbon atoms of six-membered aromatic rings of a carbon skeleton
    • C07C309/73—Esters of sulfonic acids having sulfur atoms of esterified sulfo groups bound to carbon atoms of six-membered aromatic rings of a carbon skeleton to carbon atoms of non-condensed six-membered aromatic rings
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C309/00—Sulfonic acids; Halides, esters, or anhydrides thereof
    • C07C309/63—Esters of sulfonic acids
    • C07C309/72—Esters of sulfonic acids having sulfur atoms of esterified sulfo groups bound to carbon atoms of six-membered aromatic rings of a carbon skeleton
    • C07C309/74—Esters of sulfonic acids having sulfur atoms of esterified sulfo groups bound to carbon atoms of six-membered aromatic rings of a carbon skeleton to carbon atoms of six-membered aromatic rings being part of condensed ring systems
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
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    • C07C309/72—Esters of sulfonic acids having sulfur atoms of esterified sulfo groups bound to carbon atoms of six-membered aromatic rings of a carbon skeleton
    • C07C309/75—Esters of sulfonic acids having sulfur atoms of esterified sulfo groups bound to carbon atoms of six-membered aromatic rings of a carbon skeleton containing singly-bound oxygen atoms bound to the carbon skeleton
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    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
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    • C07C309/63—Esters of sulfonic acids
    • C07C309/72—Esters of sulfonic acids having sulfur atoms of esterified sulfo groups bound to carbon atoms of six-membered aromatic rings of a carbon skeleton
    • C07C309/77—Esters of sulfonic acids having sulfur atoms of esterified sulfo groups bound to carbon atoms of six-membered aromatic rings of a carbon skeleton containing carboxyl groups bound to the carbon skeleton
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
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    • C07C2601/00—Systems containing only non-condensed rings
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    • C07C2601/14—The ring being saturated
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    • C07C2602/14—All rings being cycloaliphatic
    • C07C2602/26—All rings being cycloaliphatic the ring system containing ten carbon atoms
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    • C07C2603/60—Ring systems containing bridged rings containing three rings containing at least one ring with less than six members
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    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
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    • Y10S430/114—Initiator containing
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    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
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  • Materials For Photolithography (AREA)
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Abstract

내용 없음

Description

산-분해성 감조사선성 화합물, 이를 함유하는 감조사선성 혼합물 및 당해 혼합물로 제조한 감조사선성 기록물질
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음

Claims (10)

  1. 다음 일반식(I)의 화합물.
    상기식에서, R1은 알킬, 할로게노알킬 또는 아릴 라디칼이고, R2는 수소원자, 알킬, 알케닐 또는 아릴 라디칼이거나, 그룹(R1-SO2-O)nX-이고, R3은 사이클로알킬렌디알킬, 사이클로알케닐렌디알킬, 아릴렌디알킬 또는 헤테로아릴렌디알킬 그룹이거나, 알킬렌, 알케닐렌, 알키닐렌, 사이클로알킬렌 또는 아릴렌 그룹이고, X는 설포닐옥시 그룹 R1-SO2-O 1 내지 3개에 의해 치환된 알킬, 사이클로알킬 또는 아릴 그룹이고, Y는 O, S, CO, CO-O, SO2, SO2-O, NR4, CO-NH, O-CO-NR5, NH-CO-NR5또는 NR5-CO-O(여기서, R4는 아실 라디칼이고, R5는 수소원자이거나, 알킬, 사이클로알킬, 알케닐, 알키닐 또는 아릴라디칼이다)이고, Z는O, CO-NR6, O-CO-NR6또는 NH-CO-NR6(여기서, R6은 알킬, 사이클로알킬, 알케닐, 알키닐 또는 아릴라디칼이다)이고, k는 0 내지 4의 정수이고, m은 1보다 큰 정수이고, n은 1 내지 3의 정수이고, 반복그룹(R3-Y-)에서 R3및 Y는 정의가 동일하거나 상이하다.
  2. 제1항에 있어서, R1이 알킬, 탄소수 1 내지 6의 고도로 불소화된 알킬 또는 퍼플루오로알킬 라디칼 또는 탄소수 6 내지 12의 아릴 라디칼인 화합물.
  3. 제1항에 있어서, X가 설포닐옥시 그룹 R1-SO2-O- 1 내지 3개에 의해 치환된 탄소수 2 내지 10의 알킬 또는 사이클로알킬 그룹이거나, 설포닐옥시 그룹 R1-SO2-O 1 내지 3개에 의해 치환된 탄소수 6 내지 12의 아릴 그룹인 화합물.
  4. 수불용성이고 알칼리성 수용액에 가용성이거나 적어도 팽윤성인 결합제(a)와 화학선의 작용하에 강산을 생산하고 하나 이상의 산 분해성 C-O-C결합을 가지며 제1항 내지 제3항중의 어느 한 항에서 청구한 화합물인 화합물(b)를 필수적으로 함유하는 포지티브 작용성 감조사선성 화합물.
  5. 제4항에 있어서, 화합물(b)가 파장이 190 내지 350nm인 빛에 민감한 감조사선성 혼합물.
  6. 제4항에 있어서, 화합물(b)가 2 내지 60중량%의 농도로 함유하는 감조사선성 혼합물.
  7. 제4항에 있어서, 결합제(a)의 흡광이 화합물(b)가 민감한 파장영역에서 0.5μm-1미만인 감조사선성 화합물.
  8. 제7항에 있어서, 결합제가 페놀성 하이드록시 그룹을 갖는 중합체인 감조사선성 혼합물.
  9. 제4항에 있어서, 결합제(a)를 40 내지 98중량%의 농도로 함유하는 감조사선성 혼합물.
  10. 층 지지체와 감조사선성 층(여기서, 층은 제4항 내지 제9항중의 어느 한 항에 청구한 감조사선성 혼합물로 구성된다)을 포함하는 감조사선성 기록물질.
    ※ 참고사항 : 최초출원 내용에 의하여 공개되는 것임.
KR1019920006519A 1991-04-20 1992-04-18 산-분해성 감조사선성 화합물, 이를 함유하는 감조사선성 혼합물 및 당해 혼합물로 제조한 감조사선성 기록물질 KR920019732A (ko)

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DE4112969A DE4112969A1 (de) 1991-04-20 1991-04-20 Saeurespaltbare strahlungsempflindliche verbindungen, diese enthaltendes strahlungsempfindliches gemisch und daraus hergestelltes strahlungsempfindliches aufzeichnungsmaterial
DEP4112969.5 1991-04-20

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US (1) US5346806A (ko)
EP (1) EP0510444B1 (ko)
JP (1) JPH05221954A (ko)
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DE (2) DE4112969A1 (ko)
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DE4302681A1 (de) * 1993-02-01 1994-08-04 Hoechst Ag Sulfonsäureester, damit hergestellte strahlungsempfindliche Gemische und deren Verwendung
US6060222A (en) * 1996-11-19 2000-05-09 Kodak Polcyhrome Graphics Llc 1Postitve-working imaging composition and element and method of forming positive image with a laser
US6143467A (en) * 1998-10-01 2000-11-07 Arch Specialty Chemicals, Inc. Photosensitive polybenzoxazole precursor compositions
JP3895945B2 (ja) * 2001-04-24 2007-03-22 ソニーケミカル＆インフォメーションデバイス株式会社 樹脂組成物及び樹脂組成物製造方法
TW200403523A (en) 2002-03-22 2004-03-01 Shinetsu Chemical Co Photoacid generators, chemically amplified resist compositions, and patterning process

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CH621416A5 (ko) * 1975-03-27 1981-01-30 Hoechst Ag
DE2718254C3 (de) * 1977-04-25 1980-04-10 Hoechst Ag, 6000 Frankfurt Strahlungsempfindliche Kopiermasse
DE3721741A1 (de) * 1987-07-01 1989-01-12 Basf Ag Strahlungsempfindliches gemisch fuer lichtempfindliche beschichtungsmaterialien

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DE59201316D1 (de) 1995-03-16
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US5346806A (en) 1994-09-13
HK18996A (en) 1996-02-09
JPH05221954A (ja) 1993-08-31

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