KR910013484A - Silicon oxide film formation method using non-reactive gas - Google Patents
Silicon oxide film formation method using non-reactive gas Download PDFInfo
- Publication number
- KR910013484A KR910013484A KR1019890018836A KR890018836A KR910013484A KR 910013484 A KR910013484 A KR 910013484A KR 1019890018836 A KR1019890018836 A KR 1019890018836A KR 890018836 A KR890018836 A KR 890018836A KR 910013484 A KR910013484 A KR 910013484A
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- KR
- South Korea
- Prior art keywords
- oxide film
- silicon oxide
- reactive gas
- film formation
- formation method
- Prior art date
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- Formation Of Insulating Films (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
내용 없음.No content.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.
제1도는 본 발명의 실리콘 산화막을 형성하기 위한 장치의 개략 구성도,1 is a schematic configuration diagram of an apparatus for forming a silicon oxide film of the present invention,
제2도는 본발명과 종래의 방법과의 실리콘 표면도를 비교한 비교그래프.Figure 2 is a comparison graph comparing the silicon surface of the present invention and the conventional method.
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019890018836A KR0156102B1 (en) | 1989-12-18 | 1989-12-18 | Oxidation method using inert gas |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019890018836A KR0156102B1 (en) | 1989-12-18 | 1989-12-18 | Oxidation method using inert gas |
Publications (2)
Publication Number | Publication Date |
---|---|
KR910013484A true KR910013484A (en) | 1991-08-08 |
KR0156102B1 KR0156102B1 (en) | 1998-12-01 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019890018836A KR0156102B1 (en) | 1989-12-18 | 1989-12-18 | Oxidation method using inert gas |
Country Status (1)
Country | Link |
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KR (1) | KR0156102B1 (en) |
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1989
- 1989-12-18 KR KR1019890018836A patent/KR0156102B1/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
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KR0156102B1 (en) | 1998-12-01 |
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