KR900700849A - 레이저 길이 측정 방법 - Google Patents

레이저 길이 측정 방법

Info

Publication number
KR900700849A
KR900700849A KR1019890701914A KR890701914A KR900700849A KR 900700849 A KR900700849 A KR 900700849A KR 1019890701914 A KR1019890701914 A KR 1019890701914A KR 890701914 A KR890701914 A KR 890701914A KR 900700849 A KR900700849 A KR 900700849A
Authority
KR
South Korea
Prior art keywords
wave
pulse
phase
measurement
frequency
Prior art date
Application number
KR1019890701914A
Other languages
English (en)
Inventor
고이치로오 기타무라
Original Assignee
고이치로오 기타무라
기타무라 기카이 가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 고이치로오 기타무라, 기타무라 기카이 가부시끼가이샤 filed Critical 고이치로오 기타무라
Publication of KR900700849A publication Critical patent/KR900700849A/ko

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Measuring instruments characterised by the use of optical techniques
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/002Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/002Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

내용 없음

Description

레이저 길이 측정 방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 레이저 길이 측정방법을 실시하는 머시닝 센터를 나타내는 도면이다,
제2도는 동 머시닝 센터의 측면도이다,
제3도는 머시닝센터의 일부를 나타내는 도면이다.

Claims (1)

  1. 레이저 광원(46)에서 출력되는 레이저광의 기준파와, 측정물로부터 오는 이 레이저광의 측정파를 받아서, 이 기준파와 측정파를 간섭시켜 간섭파를 만들고, 이 간섭파로부터 정현파를 만들로, 이 정현파를 펄스파로 하여, 이 펄스파로부터 위상이 어긋난 A상의 펄스파와 B상이 펄스파를 얻고, A상의 펄스파와 B상의 펄스파가 올라가고 내려올때에 측정물의 이동량에 대응하는 카운트용의 펄스파를 발생하고, 측정파의 주파수가 기준파의 주파수보다 높을때에는 이 발생펄스를 가산하고, 낮을때에는 이 발생펄스를 감산하여 길이를 측정하는 레이저 길이측정방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019890701914A 1988-02-19 1989-02-20 레이저 길이 측정 방법 KR900700849A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP63035040A JPH01210803A (ja) 1988-02-19 1988-02-19 レーザ測長方法
JP35040 1988-02-19
PCT/JP1989/000165 WO1989007383A2 (fr) 1988-02-19 1989-02-20 Procede de mesure de longueurs a l'aide de faisceaux lasers

Publications (1)

Publication Number Publication Date
KR900700849A true KR900700849A (ko) 1990-08-17

Family

ID=12430932

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019890701914A KR900700849A (ko) 1988-02-19 1989-02-20 레이저 길이 측정 방법

Country Status (4)

Country Link
EP (1) EP0408747A1 (ko)
JP (1) JPH01210803A (ko)
KR (1) KR900700849A (ko)
WO (1) WO1989007383A2 (ko)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5164602A (en) * 1991-08-23 1992-11-17 Westinghouse Electric Corp. Machine guidance system utilizing fiber optics
CN1304814C (zh) * 2005-02-25 2007-03-14 清华大学 具有方向识别功能的自混合干涉HeNe激光位移传感器
CN1317543C (zh) * 2005-10-21 2007-05-23 清华大学 猫眼折叠腔位移自传感氦氖激光器系统

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58169004A (ja) * 1982-03-31 1983-10-05 Agency Of Ind Science & Technol 大気中での高精度干渉測長法
JPS58191906A (ja) * 1982-05-04 1983-11-09 Canon Inc 基準尺を用いた測長方法
JPS6110707A (ja) * 1984-06-26 1986-01-18 Norito Suzuki 光ビ−ト測長装置
JPS61175505A (ja) * 1985-01-31 1986-08-07 Toshiba Corp マイクロメ−タ

Also Published As

Publication number Publication date
EP0408747A1 (en) 1991-01-23
JPH01210803A (ja) 1989-08-24
JPH0585001B2 (ko) 1993-12-06
WO1989007383A2 (fr) 1989-08-24

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Legal Events

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E902 Notification of reason for refusal
E601 Decision to refuse application