KR880002821A - O-나프토퀴논디아지드 설폰산 에스테르를 제조하는 방법 및 이들을 함유하는 감광성 혼합물 - Google Patents
O-나프토퀴논디아지드 설폰산 에스테르를 제조하는 방법 및 이들을 함유하는 감광성 혼합물 Download PDFInfo
- Publication number
- KR880002821A KR880002821A KR870009311A KR870009311A KR880002821A KR 880002821 A KR880002821 A KR 880002821A KR 870009311 A KR870009311 A KR 870009311A KR 870009311 A KR870009311 A KR 870009311A KR 880002821 A KR880002821 A KR 880002821A
- Authority
- KR
- South Korea
- Prior art keywords
- carried out
- esterification reaction
- sulfonic acid
- range
- mixture containing
- Prior art date
Links
- 239000000203 mixture Substances 0.000 title claims 2
- 150000003459 sulfonic acid esters Chemical class 0.000 title claims 2
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000005886 esterification reaction Methods 0.000 claims 6
- 238000000034 method Methods 0.000 claims 6
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims 4
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 claims 3
- 229910021529 ammonia Inorganic materials 0.000 claims 2
- 150000003863 ammonium salts Chemical class 0.000 claims 2
- 150000002148 esters Chemical class 0.000 claims 2
- 150000002989 phenols Chemical class 0.000 claims 2
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 claims 1
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 claims 1
- 239000002253 acid Substances 0.000 claims 1
- 125000001931 aliphatic group Chemical group 0.000 claims 1
- 239000003513 alkali Substances 0.000 claims 1
- 239000011230 binding agent Substances 0.000 claims 1
- 125000004432 carbon atom Chemical group C* 0.000 claims 1
- 150000001735 carboxylic acids Chemical class 0.000 claims 1
- ZBCBWPMODOFKDW-UHFFFAOYSA-N diethanolamine Chemical compound OCCNCCO ZBCBWPMODOFKDW-UHFFFAOYSA-N 0.000 claims 1
- 238000001035 drying Methods 0.000 claims 1
- 238000001556 precipitation Methods 0.000 claims 1
- 239000002904 solvent Substances 0.000 claims 1
- -1 sulfonic acid halide Chemical class 0.000 claims 1
- 150000003461 sulfonyl halides Chemical class 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C309/00—Sulfonic acids; Halides, esters, or anhydrides thereof
- C07C309/63—Esters of sulfonic acids
- C07C309/72—Esters of sulfonic acids having sulfur atoms of esterified sulfo groups bound to carbon atoms of six-membered aromatic rings of a carbon skeleton
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C303/00—Preparation of esters or amides of sulfuric acids; Preparation of sulfonic acids or of their esters, halides, anhydrides or amides
- C07C303/26—Preparation of esters or amides of sulfuric acids; Preparation of sulfonic acids or of their esters, halides, anhydrides or amides of esters of sulfonic acids
- C07C303/28—Preparation of esters or amides of sulfuric acids; Preparation of sulfonic acids or of their esters, halides, anhydrides or amides of esters of sulfonic acids by reaction of hydroxy compounds with sulfonic acids or derivatives thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/022—Quinonediazides
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
Abstract
내용 없음
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
Claims (7)
- O-나프토퀴논디아지드 설폰산 할라이드를 염기성 성분의 존재하에 용매중에서 일가-또는 다가 페놀 화합물을 사용하여 에스테르화 시킨 다음, 에스테르를 침전시키고 건조시켜O-나프토퀴논디아지드 설폰산 에스테르를 제조하는 방법에 있어서, 에스테르화 반응을 약 1.5 내지 약 8.5 범위내의 pH 및 약 15℃ 내지 약 40℃ 범위내의 온도에서 암모니아, 약산의 암모늄염 또는 탄소수 1 내지 3의 암모니아의 지방족 유도체의 존재하에 수행하는 방법.
- 제1항에 있어서, 에스테프화 반응을 수성 암모니아의 존재하에 수행하는 방법.
- 제1항에 있어서, 에스테르화 반응을 카본산 또는 아세트산의 암모늄염의 존재하에 수행하는 방법.
- 제1항에 있어서, 에스테르화 반응을 모노 에탄올아민 또는 디에탄올아민의 존재하에 수행하는 방법.
- 제1항 내지 제4항중 어느 한 항에 있어서, 에스테르화 반응을 약 6 내지 약 8의 pH 범위내에서 수행하는 방법.
- 제1항 내지 제5항 중 어느 한 항에 있어서, 에스테르화 반응을 약 20℃ 내지 약 35℃의 온도 범위내에서 수행하는 방법.
- 수불용성이며 알칼리 수용액에 가용성인 결합제, 및 제1항 내지 제6항중 어느 한 항에 따라O-나프토퀴논디아지드 설포닐 할라이드 및 일가-또는 다가 페놀 화합물로부터 수득한 에스테르를 함유하는 감광성 혼합물.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19863629122 DE3629122A1 (de) | 1986-08-27 | 1986-08-27 | Verfahren zur herstellung eines o-naphthochinondiazidsulfonsaeureesters und diesen enthaltendes lichtempfindliches gemisch |
DEP3629122.6 | 1986-08-27 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR880002821A true KR880002821A (ko) | 1988-05-11 |
KR950005773B1 KR950005773B1 (ko) | 1995-05-30 |
Family
ID=6308285
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019870009311A KR950005773B1 (ko) | 1986-08-27 | 1987-08-26 | O-나프토퀴논디아지드 설폰산 에스테르를 제조하는 방법 및 이들을 함유하는 감광성 혼합물 |
Country Status (5)
Country | Link |
---|---|
US (1) | US4873169A (ko) |
EP (1) | EP0258727B1 (ko) |
JP (1) | JPH0710826B2 (ko) |
KR (1) | KR950005773B1 (ko) |
DE (2) | DE3629122A1 (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20160003418U (ko) | 2015-03-26 | 2016-10-06 | 이정훈 | 입자 비료 주입기의 주입구 구조 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5290656A (en) * | 1988-05-07 | 1994-03-01 | Sumitomo Chemical Company, Limited | Resist composition, novel phenol compound and quinone diazide sulfonic acid ester of novel phenol compound |
US5169741A (en) * | 1988-10-11 | 1992-12-08 | Matsushita Electric Industrial Co., Ltd. | Method for forming high sensitivity positive patterns employing a material containing a photosensitive compound having a diazo group, an alkaline-soluble polymer, a compound capable of adjusting the pH to 4 or less and a solvent |
DE3837499A1 (de) * | 1988-11-04 | 1990-05-23 | Hoechst Ag | Verfahren zur herstellung von substituierten 1,2-naphthochinon-(2)-diazid-4-sulfonsaeureestern und deren verwendung in einem strahlungsempfindlichen gemisch |
US5362599A (en) * | 1991-11-14 | 1994-11-08 | International Business Machines Corporations | Fast diazoquinone positive resists comprising mixed esters of 4-sulfonate and 5-sulfonate compounds |
JP4895329B2 (ja) * | 2007-01-12 | 2012-03-14 | 日本精工株式会社 | ボールねじ機構 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BE506677A (ko) * | 1950-10-31 | |||
NL129162C (ko) * | 1959-01-17 | |||
GB1113759A (en) * | 1965-12-17 | 1968-05-15 | Fuji Photo Film Co Ltd | Lithographic printing plates |
US3647443A (en) * | 1969-09-12 | 1972-03-07 | Eastman Kodak Co | Light-sensitive quinone diazide polymers and polymer compositions |
JPS505084B1 (ko) * | 1970-09-16 | 1975-02-28 | ||
JPS5280022A (en) * | 1975-12-26 | 1977-07-05 | Fuji Photo Film Co Ltd | Light solubilizable composition |
DE2828037A1 (de) * | 1978-06-26 | 1980-01-10 | Hoechst Ag | Lichtempfindliches gemisch |
DE2847878A1 (de) * | 1978-11-04 | 1980-05-22 | Hoechst Ag | Lichtempfindliches gemisch |
DE3100077A1 (de) * | 1981-01-03 | 1982-08-05 | Hoechst Ag, 6000 Frankfurt | Lichtempfindliches gemisch, das einen naphthochinondiazidsulfonsaeureester enthaelt, und verfahren zur herstellung des naphthochinondiazidsulfonsaeureesters |
US4397937A (en) * | 1982-02-10 | 1983-08-09 | International Business Machines Corporation | Positive resist compositions |
JPS59219743A (ja) * | 1983-05-28 | 1984-12-11 | Tokyo Ohka Kogyo Co Ltd | ポジ型レジスト現像液 |
GB8505402D0 (en) * | 1985-03-02 | 1985-04-03 | Ciba Geigy Ag | Modified phenolic resins |
-
1986
- 1986-08-27 DE DE19863629122 patent/DE3629122A1/de not_active Withdrawn
-
1987
- 1987-08-18 EP EP87111920A patent/EP0258727B1/de not_active Expired - Lifetime
- 1987-08-18 DE DE8787111920T patent/DE3765370D1/de not_active Expired - Lifetime
- 1987-08-20 US US07/087,599 patent/US4873169A/en not_active Expired - Lifetime
- 1987-08-26 KR KR1019870009311A patent/KR950005773B1/ko not_active IP Right Cessation
- 1987-08-26 JP JP62210380A patent/JPH0710826B2/ja not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20160003418U (ko) | 2015-03-26 | 2016-10-06 | 이정훈 | 입자 비료 주입기의 주입구 구조 |
Also Published As
Publication number | Publication date |
---|---|
JPS6368555A (ja) | 1988-03-28 |
EP0258727A1 (de) | 1988-03-09 |
KR950005773B1 (ko) | 1995-05-30 |
US4873169A (en) | 1989-10-10 |
DE3629122A1 (de) | 1988-03-10 |
DE3765370D1 (de) | 1990-11-08 |
JPH0710826B2 (ja) | 1995-02-08 |
EP0258727B1 (de) | 1990-10-03 |
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