KR870008783A - 저탄소함량 질화규소의 제조방법 - Google Patents

저탄소함량 질화규소의 제조방법 Download PDF

Info

Publication number
KR870008783A
KR870008783A KR870002202A KR870002202A KR870008783A KR 870008783 A KR870008783 A KR 870008783A KR 870002202 A KR870002202 A KR 870002202A KR 870002202 A KR870002202 A KR 870002202A KR 870008783 A KR870008783 A KR 870008783A
Authority
KR
South Korea
Prior art keywords
silicon nitride
containing atmosphere
treatment
carried out
chlorine gas
Prior art date
Application number
KR870002202A
Other languages
English (en)
Other versions
KR950001033B1 (ko
Inventor
쇤펠더 로타르
프란쯔 게르하르트
Original Assignee
칼-루드비그 슈미트
바이엘 아크티엔게젤샤프트
에리히 데브리츠
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 칼-루드비그 슈미트, 바이엘 아크티엔게젤샤프트, 에리히 데브리츠 filed Critical 칼-루드비그 슈미트
Publication of KR870008783A publication Critical patent/KR870008783A/ko
Application granted granted Critical
Publication of KR950001033B1 publication Critical patent/KR950001033B1/ko

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon
    • C01B21/0685—Preparation by carboreductive nitridation
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon
    • C01B21/0687—After-treatment, e.g. grinding, purification
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2006/00—Physical properties of inorganic compounds
    • C01P2006/80—Compositional purity

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Products (AREA)
  • Silicon Compounds (AREA)
  • Carbon And Carbon Compounds (AREA)

Abstract

내용 없음

Description

저탄소함량 질화규소의 제조방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음

Claims (8)

  1. 질화규소 분말을 염소기체 함유 대기로 처리하여 저탄소 함량의 질화규소 분말을 제조하는 방법에 있어서, 질화규소 분말을 600 내지 1050℃에서 염소기체 함유대기로 처리한 후, 이 질화규소를 기체상 산소 함유-대기로 처림함을 특징으로 하는 방법.
  2. 제 1 항에 있어서, 염소기체 함유 대기중의 처리를 800 내지 1050℃에서 수행하는 방법.
  3. 제 1 항에 있어서, 기체상 산소함유 대기중의 처리를 500 내지 1000℃에서 수행하는 방법.
  4. 제 3 항에 있어서, 염소 기체함유 대기중의 처리를 800 내지 1050℃에서 수행하는 방법.
  5. 제 1 항에 있어서, 산소함유 대기중의 처리를 600 내지 800℃에서 수행하는 방법.
  6. 제 5 항에 있어서, 염소 기체함유 대기중의 처리를 800 내지 1050℃에서 수행하는 방법.
  7. 제 1 항에 있어서, 처리된 질화규소 분말을 이산화규소의 탄화열 질화 방법으로 수득하는 방법.
  8. 제 1 항에 있어서, 처리된 질화규소 분말을 규소의 직접 질화 방법으로 수득하는 방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019870002202A 1986-03-13 1987-03-12 저탄소 함량 질화규소의 제조방법 KR950001033B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19863608352 DE3608352A1 (de) 1986-03-13 1986-03-13 Verfahren zur herstellung von kohlenstoffarmem siliciumnitrid
DE3608352 1986-03-13
DEP3608352.6 1986-03-13

Publications (2)

Publication Number Publication Date
KR870008783A true KR870008783A (ko) 1987-10-20
KR950001033B1 KR950001033B1 (ko) 1995-02-08

Family

ID=6296235

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019870002202A KR950001033B1 (ko) 1986-03-13 1987-03-12 저탄소 함량 질화규소의 제조방법

Country Status (6)

Country Link
US (1) US4798714A (ko)
EP (1) EP0237860B1 (ko)
JP (1) JPS62216907A (ko)
KR (1) KR950001033B1 (ko)
DE (2) DE3608352A1 (ko)
NO (1) NO169062C (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101467438B1 (ko) * 2013-01-10 2014-12-03 조항선 질화규소 분말의 제조방법

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5219537A (en) * 1990-04-03 1993-06-15 Phillips Petroleum Company Production of nitride products
US5538675A (en) * 1994-04-14 1996-07-23 The Dow Chemical Company Method for producing silicon nitride/silicon carbide composite

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5290499A (en) * 1976-01-27 1977-07-29 Toshiba Ceramics Co Process for preparing siliconnitride having high alphaaphase content
JPS53102300A (en) * 1977-02-18 1978-09-06 Toshiba Corp Preparation of type silicon nitride powders
JPS57135704A (en) * 1981-02-10 1982-08-21 Ube Ind Ltd Preparation of crystalline silicon nitride powder
JPS5935008A (ja) * 1982-08-20 1984-02-25 Onoda Cement Co Ltd 窒化珪素の精製方法
JPS60112607A (ja) * 1983-11-18 1985-06-19 Denki Kagaku Kogyo Kk 白色窒化けい素粉末の製造方法
JPS60171282A (ja) * 1984-02-10 1985-09-04 黒崎窯業株式会社 Ｓｉ↓３Ν↓４−ＳｉＣ系セラミツクス焼結体の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101467438B1 (ko) * 2013-01-10 2014-12-03 조항선 질화규소 분말의 제조방법

Also Published As

Publication number Publication date
US4798714A (en) 1989-01-17
JPS62216907A (ja) 1987-09-24
EP0237860B1 (de) 1990-08-29
EP0237860A2 (de) 1987-09-23
DE3764499D1 (de) 1990-10-04
DE3608352A1 (de) 1987-09-17
NO870775D0 (no) 1987-02-25
KR950001033B1 (ko) 1995-02-08
EP0237860A3 (en) 1988-03-02
NO169062C (no) 1992-05-06
NO169062B (no) 1992-01-27
NO870775L (no) 1987-09-14

Similar Documents

Publication Publication Date Title
WO1991005735A3 (en) Active carbon
KR880005064A (ko) 고순도 테레프탈산의 제조방법
MX9802344A (es) Metodo y aparato para producir bioxido de titanio.
CA2061151A1 (en) Treatment of gases
ES520824A0 (es) Procedimiento de endurecimiento superficial de piezas metalicas.
ATE88988T1 (de) Verfahren und vorrichtung zur herstellung von ozonhaeltigen gasen und loesungen.
GB2173780B (en) Treatment of gases
KR870008783A (ko) 저탄소함량 질화규소의 제조방법
GB1448558A (en) Gas pruification liquors
ATE106854T1 (de) Verfahren zur herstellung von siliziumnitrid.
JPS5541809A (en) Production of oxygen-enriched air
KR900004632A (ko) 이산화우라늄의 생산방법
ES399594A1 (es) Procedimiento para la combustion de sulfato amonico.
RU94046339A (ru) Способ обработки органических отходов и устройство для его осуществления
KR910004247A (ko) 금속촉매용 지지물로서 촉매효과를 향상시키는 새로운 또는 노후된 흑연 분말의 처리방법
KR900001318A (ko) 자연수의 탈개스 처리에 의한 고농도 산소 음료 제조법
SE8505468D0 (sv) Avgasbehandlingsforfarande
BE887060A (fr) Procede d'obtention d'un moyen therapeutique sous forme gazeuse, dispositif pour sa mise en oeuvre, moyen therapeutique ainsi obtenu
GB1470171A (en) Method of producing silicon nitride
KR920000124A (ko) 반도체 기판 표면 처리 방법
JPS5453699A (en) Production of hydrocyanic acid
SU1462578A1 (ru) Способ получения кремнийорганических покрытий
JPS5461297A (en) Production of silicone rubber
Garg et al. Atmospheres for decarburize annealing steels
KR920011966A (ko) 다공질 RB-SiC의 제조방법

Legal Events

Date Code Title Description
A201 Request for examination
G160 Decision to publish patent application
E701 Decision to grant or registration of patent right
NORF Unpaid initial registration fee