KR850002595A - 금속의 용해방법 - Google Patents
금속의 용해방법 Download PDFInfo
- Publication number
- KR850002595A KR850002595A KR1019840000907A KR840000907A KR850002595A KR 850002595 A KR850002595 A KR 850002595A KR 1019840000907 A KR1019840000907 A KR 1019840000907A KR 840000907 A KR840000907 A KR 840000907A KR 850002595 A KR850002595 A KR 850002595A
- Authority
- KR
- South Korea
- Prior art keywords
- promoter
- metal
- diol
- gram
- concentration
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims 16
- 229910052751 metal Inorganic materials 0.000 title claims 6
- 239000002184 metal Substances 0.000 title claims 6
- 238000002844 melting Methods 0.000 title 1
- 230000008018 melting Effects 0.000 title 1
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims 6
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 claims 4
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims 4
- 239000000460 chlorine Substances 0.000 claims 4
- 229910052801 chlorine Inorganic materials 0.000 claims 4
- CPELXLSAUQHCOX-UHFFFAOYSA-M Bromide Chemical compound [Br-] CPELXLSAUQHCOX-UHFFFAOYSA-M 0.000 claims 2
- 239000007864 aqueous solution Substances 0.000 claims 2
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 claims 2
- -1 bromine ions Chemical class 0.000 claims 2
- 229910052794 bromium Inorganic materials 0.000 claims 2
- QSINFUNOPINNRB-UHFFFAOYSA-N 1,4-diethoxybut-2-yne-1,4-diol Chemical group CCOC(O)C#CC(O)OCC QSINFUNOPINNRB-UHFFFAOYSA-N 0.000 claims 1
- YDVYSCCQIHSTMK-UHFFFAOYSA-N 1-propoxybut-2-yne-1,4-diol Chemical group CCCOC(O)C#CCO YDVYSCCQIHSTMK-UHFFFAOYSA-N 0.000 claims 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
- 229910000881 Cu alloy Inorganic materials 0.000 claims 1
- DLDJFQGPPSQZKI-UHFFFAOYSA-N but-2-yne-1,4-diol Chemical group OCC#CCO DLDJFQGPPSQZKI-UHFFFAOYSA-N 0.000 claims 1
- 230000015556 catabolic process Effects 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 239000010949 copper Substances 0.000 claims 1
- 238000006731 degradation reaction Methods 0.000 claims 1
- 150000002009 diols Chemical class 0.000 claims 1
- 238000004090 dissolution Methods 0.000 claims 1
- 229910001385 heavy metal Inorganic materials 0.000 claims 1
- 150000002500 ions Chemical class 0.000 claims 1
- 150000002739 metals Chemical class 0.000 claims 1
- 229940087596 sodium phenolsulfonate Drugs 0.000 claims 1
- BLXAGSNYHSQSRC-UHFFFAOYSA-M sodium;2-hydroxybenzenesulfonate Chemical compound [Na+].OC1=CC=CC=C1S([O-])(=O)=O BLXAGSNYHSQSRC-UHFFFAOYSA-M 0.000 claims 1
- 239000000243 solution Substances 0.000 claims 1
- 239000003381 stabilizer Substances 0.000 claims 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/10—Etching compositions
- C23F1/14—Aqueous compositions
- C23F1/16—Acidic compositions
Abstract
내용 없음
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
Claims (13)
- 금속들을 용해시키는 방법에 있어서, 금속을 유리 염소 또는 브롬이온, 황산 약 0.2 내지 4.5 그람몰/ℓ, 과산화수소 약 0.25 내지 8그람몰/ℓ를 함유하는 수용액과 접촉시키고, 하기 일반식을 가진 디올촉진제의 유효량을 첨가시킴을 특징으로 하는 염소 또는 브롬이온들이 존재하는 용액 중에서 금속의 용해속도를 증가시키는 방법.상기 일반식에서, ,R1,R2,R3및 R4는 H,CH3,OC2H5또는 OC3H8에서 선택할 수 있다.
- 제1항에 있어서, 상기 촉진제를 0.01그람몰/ℓ이상의 농도로 공급함을 특징으로 하는 방법.
- 제1항에 있어서, 상기 촉진제를 약 0.1 내지 0.5그람몰/ℓ범위내의 농도로 공급함을 특징으로 하는 방법.
- 제1항에 있어서, 수용액에 과산화수소에 대한 중금속이온들의 분해작용을 감소시키기 위한 안정제로 페놀 술폰산나트륨을 첨가시킴을 특징으로 하는 방법.
- 제1항에 있어서, 과산화수소의 농도를 약 1 내지 4그람몰/ℓ로 유지시킴을 특징으로 하는 방법.
- 제1항에 있어서, 황산농도를 약 0.3 내지 4그람몰/ℓ로 유지시킴을 특징으로 하는 방법.
- 제1항에 있어서, 촉진제가 2-부틴-1,4-디올인 것을 특징으로 하는 방법.
- 제1항에 있어서, 촉진제가 3-헥신-2,5-디올인 것을 특징으로 하는 방법.
- 제1항에 있어서, 촉진제가 모노프로폭실-2-부틴-1,4-디올인 것을 특징으로 하는 방법.
- 제1항에 있어서, 촉진제가 디에톡실-2-부틴-1,4-디올인 것을 특징으로 하는 방법.
- 제1항에 있어서, 금속이 구리 또는 구리합금인 것을 특징으로 하는 방법.
- 제1항에 있어서, 유리 염소 또는 브롬화물의 2ppm 이상 존재하에 수행함을 특징으로 하는 방법.
- 제1항에 있어서, 촉진제의 농도가 0.2그람몰/ℓ이상이고 유리 염소 또는 브롬화물 25ppm 이상 존재하에 금속을 용해시킴을 특징으로 하는 방법.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US525,078 | 1983-08-22 | ||
| US06/525,078 US4437931A (en) | 1983-08-22 | 1983-08-22 | Dissolution of metals |
| US525078 | 1983-08-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR850002595A true KR850002595A (ko) | 1985-05-15 |
| KR920006352B1 KR920006352B1 (ko) | 1992-08-03 |
Family
ID=24091823
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1019840000907A KR920006352B1 (ko) | 1983-08-22 | 1984-02-24 | 금속의 용해방법 |
Country Status (11)
| Country | Link |
|---|---|
| US (1) | US4437931A (ko) |
| JP (1) | JPS6050184A (ko) |
| KR (1) | KR920006352B1 (ko) |
| CA (1) | CA1194388A (ko) |
| CH (1) | CH666056A5 (ko) |
| DE (1) | DE3430345A1 (ko) |
| FR (1) | FR2551081B1 (ko) |
| GB (1) | GB2147543B (ko) |
| IT (1) | IT1176623B (ko) |
| MX (1) | MX162662A (ko) |
| NL (1) | NL8401751A (ko) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4522683A (en) * | 1984-01-12 | 1985-06-11 | Plastic Specialties And Technologies, Inc. | Dissolution of metals utilizing tungsten-diol combinations |
| US4875972A (en) * | 1988-07-27 | 1989-10-24 | E. I. Du Pont De Nemours And Company | Hydrogen peroxide compositions containing a substituted oxybenzene compound |
| US4915781A (en) * | 1988-07-27 | 1990-04-10 | E. I. Du Pont De Nemours And Company | Stabilized hydrogen peroxide compositions |
| US4875973A (en) * | 1988-07-27 | 1989-10-24 | E. I. Du Pont De Nemours And Company | Hydrogen peroxide compositions containing a substituted aminobenzaldehyde |
| US4952275A (en) * | 1989-12-15 | 1990-08-28 | Microelectronics And Computer Technology Corporation | Copper etching solution and method |
| GB9425090D0 (en) * | 1994-12-12 | 1995-02-08 | Alpha Metals Ltd | Copper coating |
| JP2002322577A (ja) * | 2001-04-23 | 2002-11-08 | Yamatoya & Co Ltd | 銅張積層板用ソフトエッチング剤 |
| JP4763519B2 (ja) * | 2006-06-07 | 2011-08-31 | 株式会社トーモク | 仕切り付き包装箱 |
| US8211617B2 (en) | 2009-08-17 | 2012-07-03 | Palo Alto Research Center Incorporated | Solid inks for printed masks |
| US8303832B2 (en) * | 2009-08-17 | 2012-11-06 | Palo Alto Research Center Incorporated | Solid inks for masks for printed circuit boards and other electronic devices |
| US11678433B2 (en) | 2018-09-06 | 2023-06-13 | D-Wave Systems Inc. | Printed circuit board assembly for edge-coupling to an integrated circuit |
| CN109972144A (zh) * | 2019-04-10 | 2019-07-05 | 深圳市松柏实业发展有限公司 | 铜蚀刻液及其废液的再生利用方法和循环再生利用系统 |
| US11647590B2 (en) | 2019-06-18 | 2023-05-09 | D-Wave Systems Inc. | Systems and methods for etching of metals |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BE758162A (fr) * | 1969-10-28 | 1971-04-01 | Fmc Corp | Stabilisation de solutions acidifiees d'eau |
| US3869401A (en) * | 1972-12-04 | 1975-03-04 | Du Pont | Stabilized acidic hydrogen peroxide solutions |
| US4174253A (en) | 1977-11-08 | 1979-11-13 | Dart Industries Inc. | Dissolution of metals utilizing a H2 O2 -H2 SO4 solution catalyzed with hydroxy substituted cycloparaffins |
| US4141850A (en) | 1977-11-08 | 1979-02-27 | Dart Industries Inc. | Dissolution of metals |
-
1983
- 1983-08-22 US US06/525,078 patent/US4437931A/en not_active Expired - Lifetime
-
1984
- 1984-02-23 CA CA000448145A patent/CA1194388A/en not_active Expired
- 1984-02-24 KR KR1019840000907A patent/KR920006352B1/ko not_active IP Right Cessation
- 1984-03-15 GB GB08406794A patent/GB2147543B/en not_active Expired
- 1984-04-03 FR FR848405239A patent/FR2551081B1/fr not_active Expired - Fee Related
- 1984-04-30 MX MX201186A patent/MX162662A/es unknown
- 1984-05-11 JP JP59093053A patent/JPS6050184A/ja active Granted
- 1984-05-30 NL NL8401751A patent/NL8401751A/nl not_active Application Discontinuation
- 1984-08-15 CH CH3918/84A patent/CH666056A5/de not_active IP Right Cessation
- 1984-08-17 DE DE19843430345 patent/DE3430345A1/de not_active Withdrawn
- 1984-08-21 IT IT22380/84A patent/IT1176623B/it active
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0429744B2 (ko) | 1992-05-19 |
| FR2551081B1 (fr) | 1991-02-15 |
| NL8401751A (nl) | 1985-03-18 |
| MX162662A (es) | 1991-06-13 |
| CA1194388A (en) | 1985-10-01 |
| GB8406794D0 (en) | 1984-04-18 |
| GB2147543A (en) | 1985-05-15 |
| US4437931A (en) | 1984-03-20 |
| IT8422380A0 (it) | 1984-08-21 |
| FR2551081A1 (fr) | 1985-03-01 |
| DE3430345A1 (de) | 1985-04-04 |
| JPS6050184A (ja) | 1985-03-19 |
| KR920006352B1 (ko) | 1992-08-03 |
| GB2147543B (en) | 1987-02-25 |
| IT1176623B (it) | 1987-08-18 |
| CH666056A5 (de) | 1988-06-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A201 | Request for examination | ||
| E902 | Notification of reason for refusal | ||
| G160 | Decision to publish patent application | ||
| E701 | Decision to grant or registration of patent right | ||
| GRNT | Written decision to grant | ||
| FPAY | Annual fee payment |
Payment date: 19950630 Year of fee payment: 4 |
|
| LAPS | Lapse due to unpaid annual fee |