KR20260002839A - 측정 장치, 측정 방법 및 교정 방법 - Google Patents

측정 장치, 측정 방법 및 교정 방법

Info

Publication number
KR20260002839A
KR20260002839A KR1020257036954A KR20257036954A KR20260002839A KR 20260002839 A KR20260002839 A KR 20260002839A KR 1020257036954 A KR1020257036954 A KR 1020257036954A KR 20257036954 A KR20257036954 A KR 20257036954A KR 20260002839 A KR20260002839 A KR 20260002839A
Authority
KR
South Korea
Prior art keywords
substrate
suction
unit
force
adsorption
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020257036954A
Other languages
English (en)
Korean (ko)
Inventor
다카오 오카베
신이치 다나베
도시카즈 아키모토
나오키 우메시타
Original Assignee
고쿠리츠다이가쿠호우진 도쿄다이가쿠
도쿄엘렉트론가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 고쿠리츠다이가쿠호우진 도쿄다이가쿠, 도쿄엘렉트론가부시키가이샤 filed Critical 고쿠리츠다이가쿠호우진 도쿄다이가쿠
Publication of KR20260002839A publication Critical patent/KR20260002839A/ko
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/72—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using electrostatic chucks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/0028—Force sensors associated with force applying means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/15—Devices for holding work using magnetic or electric force acting directly on the work
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L25/00—Testing or calibrating of apparatus for measuring force, torque, work, mechanical power, or mechanical efficiency
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/0061—Force sensors associated with industrial machines or actuators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N19/00—Investigating materials by mechanical methods
    • G01N19/02—Measuring coefficient of friction between materials

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Mechanical Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR1020257036954A 2023-05-11 2024-04-30 측정 장치, 측정 방법 및 교정 방법 Pending KR20260002839A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2023-078642 2023-05-11
JP2023078642 2023-05-11
PCT/JP2024/016631 WO2024232306A1 (ja) 2023-05-11 2024-04-30 測定装置、測定方法及び校正方法

Publications (1)

Publication Number Publication Date
KR20260002839A true KR20260002839A (ko) 2026-01-06

Family

ID=93430189

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020257036954A Pending KR20260002839A (ko) 2023-05-11 2024-04-30 측정 장치, 측정 방법 및 교정 방법

Country Status (5)

Country Link
US (1) US20260056114A1 (https=)
JP (1) JPWO2024232306A1 (https=)
KR (1) KR20260002839A (https=)
TW (1) TW202501702A (https=)
WO (1) WO2024232306A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN120293385B (zh) * 2025-06-16 2025-08-12 无锡卓瓷科技有限公司 一种陶瓷吸盘吸力测试装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012204447A (ja) 2011-03-24 2012-10-22 Covalent Materials Corp 静電チャック

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6225706Y2 (https=) * 1981-06-25 1987-07-01
JPS5957446A (ja) * 1982-09-28 1984-04-03 Kokusai Electric Co Ltd 静電吸着式基板保持装置
JP2648766B2 (ja) * 1989-03-23 1997-09-03 東陶機器株式会社 静電チャックの吸着力評価方法及び評価装置
JPH06119637A (ja) * 1992-10-02 1994-04-28 Sumitomo Metal Mining Co Ltd 磁気ディスクの製造方法
JPH06170670A (ja) * 1992-12-08 1994-06-21 Fuji Electric Co Ltd 静電チャック装置およびその運転方法
JP2003110012A (ja) * 2001-09-28 2003-04-11 Nissin Electric Co Ltd 基板保持方法およびその装置
CN103698068B (zh) * 2013-12-06 2014-11-12 清华大学 一种静电卡盘基本性能检测装置及其检测方法
US10879094B2 (en) * 2016-11-23 2020-12-29 Applied Materials, Inc. Electrostatic chucking force measurement tool for process chamber carriers

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012204447A (ja) 2011-03-24 2012-10-22 Covalent Materials Corp 静電チャック

Also Published As

Publication number Publication date
JPWO2024232306A1 (https=) 2024-11-14
WO2024232306A1 (ja) 2024-11-14
US20260056114A1 (en) 2026-02-26
TW202501702A (zh) 2025-01-01

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