KR20250057125A - 가스 전달을 위한 모듈형 컴포넌트 시스템 - Google Patents

가스 전달을 위한 모듈형 컴포넌트 시스템 Download PDF

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Publication number
KR20250057125A
KR20250057125A KR1020257012589A KR20257012589A KR20250057125A KR 20250057125 A KR20250057125 A KR 20250057125A KR 1020257012589 A KR1020257012589 A KR 1020257012589A KR 20257012589 A KR20257012589 A KR 20257012589A KR 20250057125 A KR20250057125 A KR 20250057125A
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KR
South Korea
Prior art keywords
gas
primitive
port
substrate
primitive substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020257012589A
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English (en)
Korean (ko)
Inventor
존 폴든 스텀프
데미안 롱
노르만 나카시마
칼 프레드릭 리저
Original Assignee
램 리써치 코포레이션
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 램 리써치 코포레이션 filed Critical 램 리써치 코포레이션
Publication of KR20250057125A publication Critical patent/KR20250057125A/ko
Pending legal-status Critical Current

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Classifications

    • H01L21/67017—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • H01L21/67253—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0604—Process monitoring, e.g. flow or thickness monitoring

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Valve Housings (AREA)
  • Chemical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
  • Pipeline Systems (AREA)
  • Compressor (AREA)
KR1020257012589A 2019-04-15 2020-04-14 가스 전달을 위한 모듈형 컴포넌트 시스템 Pending KR20250057125A (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US201962834241P 2019-04-15 2019-04-15
US62/834,241 2019-04-15
PCT/US2020/028158 WO2020214616A1 (en) 2019-04-15 2020-04-14 Modular-component system for gas delivery
KR1020217037133A KR102798978B1 (ko) 2019-04-15 2020-04-14 가스 전달을 위한 모듈형 컴포넌트 시스템

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
KR1020217037133A Division KR102798978B1 (ko) 2019-04-15 2020-04-14 가스 전달을 위한 모듈형 컴포넌트 시스템

Publications (1)

Publication Number Publication Date
KR20250057125A true KR20250057125A (ko) 2025-04-28

Family

ID=72837613

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020257012589A Pending KR20250057125A (ko) 2019-04-15 2020-04-14 가스 전달을 위한 모듈형 컴포넌트 시스템
KR1020217037133A Active KR102798978B1 (ko) 2019-04-15 2020-04-14 가스 전달을 위한 모듈형 컴포넌트 시스템

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020217037133A Active KR102798978B1 (ko) 2019-04-15 2020-04-14 가스 전달을 위한 모듈형 컴포넌트 시스템

Country Status (6)

Country Link
US (2) US11996301B2 (https=)
JP (2) JP7553468B2 (https=)
KR (2) KR20250057125A (https=)
CN (2) CN113994460B (https=)
TW (1) TWI860346B (https=)
WO (1) WO2020214616A1 (https=)

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CN113994460B (zh) 2019-04-15 2025-05-20 朗姆研究公司 用于气体输送的模块部件系统
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Also Published As

Publication number Publication date
TWI860346B (zh) 2024-11-01
US11996301B2 (en) 2024-05-28
CN113994460B (zh) 2025-05-20
KR20210140779A (ko) 2021-11-23
JP7553468B2 (ja) 2024-09-18
WO2020214616A1 (en) 2020-10-22
JP2024174940A (ja) 2024-12-17
JP2022529263A (ja) 2022-06-20
TW202120861A (zh) 2021-06-01
TW202516126A (zh) 2025-04-16
US20220199431A1 (en) 2022-06-23
US20240347349A1 (en) 2024-10-17
CN113994460A (zh) 2022-01-28
KR102798978B1 (ko) 2025-04-21
CN120473408A (zh) 2025-08-12

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