KR20250048175A - 드라이 필름 레지스트 지지체용 이축 배향 폴리에스테르 필름 - Google Patents

드라이 필름 레지스트 지지체용 이축 배향 폴리에스테르 필름 Download PDF

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Publication number
KR20250048175A
KR20250048175A KR1020247035520A KR20247035520A KR20250048175A KR 20250048175 A KR20250048175 A KR 20250048175A KR 1020247035520 A KR1020247035520 A KR 1020247035520A KR 20247035520 A KR20247035520 A KR 20247035520A KR 20250048175 A KR20250048175 A KR 20250048175A
Authority
KR
South Korea
Prior art keywords
film
layer
biaxially oriented
less
oriented polyester
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020247035520A
Other languages
English (en)
Korean (ko)
Inventor
토시히로 센다이
타쿠지 히가시오지
Original Assignee
도레이 카부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 도레이 카부시키가이샤 filed Critical 도레이 카부시키가이샤
Publication of KR20250048175A publication Critical patent/KR20250048175A/ko
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C55/00Shaping by stretching, e.g. drawing through a die; Apparatus therefor
    • B29C55/02Shaping by stretching, e.g. drawing through a die; Apparatus therefor of plates or sheets
    • B29C55/10Shaping by stretching, e.g. drawing through a die; Apparatus therefor of plates or sheets multiaxial
    • B29C55/12Shaping by stretching, e.g. drawing through a die; Apparatus therefor of plates or sheets multiaxial biaxial
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29DPRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D7/00Producing flat articles, e.g. films or sheets
    • B29D7/01Films or sheets
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/18Layered products comprising a layer of synthetic resin characterised by the use of special additives
    • B32B27/20Layered products comprising a layer of synthetic resin characterised by the use of special additives using fillers, pigments, thixotroping agents
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/36Layered products comprising a layer of synthetic resin comprising polyesters
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J5/00Manufacture of articles or shaped materials containing macromolecular substances
    • C08J5/18Manufacture of films or sheets
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J7/00Chemical treatment or coating of shaped articles made of macromolecular substances
    • C08J7/04Coating
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/09Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29KINDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2067/00Use of polyesters or derivatives thereof, as moulding material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Medicinal Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Laminated Bodies (AREA)
  • Materials For Photolithography (AREA)
KR1020247035520A 2022-08-05 2023-07-24 드라이 필름 레지스트 지지체용 이축 배향 폴리에스테르 필름 Pending KR20250048175A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2022-125263 2022-08-05
JP2022125263 2022-08-05
PCT/JP2023/026984 WO2024029384A1 (ja) 2022-08-05 2023-07-24 ドライフィルムレジスト支持体用二軸配向ポリエステルフィルム

Publications (1)

Publication Number Publication Date
KR20250048175A true KR20250048175A (ko) 2025-04-08

Family

ID=89848942

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020247035520A Pending KR20250048175A (ko) 2022-08-05 2023-07-24 드라이 필름 레지스트 지지체용 이축 배향 폴리에스테르 필름

Country Status (5)

Country Link
JP (1) JPWO2024029384A1 (https=)
KR (1) KR20250048175A (https=)
CN (1) CN119604400A (https=)
TW (1) TW202415535A (https=)
WO (1) WO2024029384A1 (https=)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1024665A (ja) 1996-07-10 1998-01-27 Toray Ind Inc 熱転写用リボン
JP2015178623A (ja) 2002-06-26 2015-10-08 イーストマン ケミカル カンパニー 二軸配向ポリエステルフィルム及びそれらの銅との積層板
JP2021054069A (ja) 2019-09-24 2021-04-08 東レ株式会社 熱転写インクリボン用ポリエステルフィルム
JP2021160240A (ja) 2020-03-31 2021-10-11 三菱ケミカル株式会社 セラミックグリーンシートの支持体用ポリエステルフィルムロール

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7172045B2 (ja) * 2017-01-31 2022-11-16 東レ株式会社 転写材用二軸配向ポリエステルフィルムロール
JP7463905B2 (ja) * 2019-09-27 2024-04-09 東レ株式会社 ドライフィルムレジスト用二軸配向ポリエステルフィルム

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1024665A (ja) 1996-07-10 1998-01-27 Toray Ind Inc 熱転写用リボン
JP2015178623A (ja) 2002-06-26 2015-10-08 イーストマン ケミカル カンパニー 二軸配向ポリエステルフィルム及びそれらの銅との積層板
JP2021054069A (ja) 2019-09-24 2021-04-08 東レ株式会社 熱転写インクリボン用ポリエステルフィルム
JP2021160240A (ja) 2020-03-31 2021-10-11 三菱ケミカル株式会社 セラミックグリーンシートの支持体用ポリエステルフィルムロール

Also Published As

Publication number Publication date
WO2024029384A1 (ja) 2024-02-08
JPWO2024029384A1 (https=) 2024-02-08
CN119604400A (zh) 2025-03-11
TW202415535A (zh) 2024-04-16

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St.27 status event code: A-0-1-A10-A15-nap-PA0105

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