KR20230046351A - optical inspection device and inspecting method using the same - Google Patents

Abstract

According to one embodiment, an optical inspection device comprises: a first light source radiating light to an object to be inspected; a transparent film positioned between the object to be inspected and the first light source; a first beam splitter splitting the incident light into first light and second light; a first camera positioned in an end where the first light is oriented; and a second camera positioned in an end where the second light is oriented. The first camera and the second camera have different focal surfaces.

Description

Optical inspection device and inspection method using the same {optical inspection device and inspecting method using the same}

The present disclosure relates to an optical inspection device and an inspection method using the same.

An inkjet device includes an inkjet head having nozzles for ejecting ink. In order to precisely control ink drops ejected on a substrate, management of an inkjet device is required. In order to manage the inkjet device, information on the nozzle state of the inkjet head and the impact state of the ink drop ejected from each inkjet head is required, and based on this information, the inkjet device of the inkjet device can be calibrated.

Embodiments are intended to simultaneously and easily inspect the nozzle state and the ink drop state of an inkjet head.

An optical inspection apparatus according to an embodiment includes a first light source for radiating light to an inspection object, a transparent film positioned between the inspection object and the first light source, and a first light source for splitting incident light into first and second lights. 1 includes a beam splitter, a first camera positioned at an end toward which the first light is directed, and a second camera positioned at an end toward which the second light is directed, wherein the first camera and the second camera have different focal planes. .

The first light source may include a ring light source.

A telecentric lens disposed between the first light source and the first beam splitter may be further included.

The apparatus may further include a second light source radiating light to the object, and the second light source may include a coaxial light source.

It may further include a second beam splitter positioned between the first light source and the first beam splitter, wherein the second beam splitter is configured to direct light from the second light source toward the telecentric lens.

A depth of focus of at least one of the first camera and the second camera may be 1/4 or less of a distance between the inspection target and the transparent film.

A distance between the inspection target and the transparent film may be greater than 0 and may range from 100 micrometers to 1000 micrometers.

The object to be inspected includes an inkjet head including a nozzle surface on which a plurality of nozzles are located, and an image captured by the first camera includes an image of the nozzle surface that is clearer than an image of an ink drop dropped on the transparent film. , The image captured by the second camera may include an image of the ink drop falling on the transparent film that is clearer than the image of the nozzle surface.

The first camera may set a focal plane to the nozzle plane, and the second camera may set a focal plane to the transparent film or the ink drop on the transparent film.

The nozzle face may be reflective.

At least one of the first camera and the second camera may include an area scan camera or a line scan camera.

The transparent film includes a PET film, and the thickness of the transparent film may be 30 micrometers to 300 micrometers.

An optical inspection device according to an embodiment includes a transparent film spaced apart from the inspection object, a ring light source positioned under the transparent film, and a first light source positioned under the ring light source and splitting incident light into first light and second light. 1 includes a beam splitter, a first camera positioned at an end toward which the first light is directed, and a second camera positioned at an end toward which the second light is directed, wherein the first camera has a focal plane positioned on the object to be examined; The second camera has a focal plane positioned on the transparent film.

A telecentric lens positioned between the ring light source and the first beam splitter may be further included.

It may further include a coaxial light source for radiating light to the inspection target, and a second beam splitter configured to send light from the coaxial light source toward the telecentric lens.

A depth of focus of at least one of the first camera and the second camera may be 1/4 or less of a distance between the inspection target and the transparent film.

The object to be inspected includes an inkjet head including a nozzle surface on which a plurality of nozzles are positioned, and the nozzle surface may be reflective.

An inspection method according to an embodiment includes radiating light from a first light source to an inspection target and a transparent film spaced below the inspection object, and capturing a portion of light reflected from the inspection object through a first camera. and capturing a part of the light reflected from the transparent film through a second camera, wherein the first camera and the second camera have different focal planes.

The object to be inspected includes an inkjet head including a nozzle surface on which a plurality of nozzles are located, and an image captured by the first camera includes an image of the nozzle surface that is clearer than an image of an ink drop dropped on the transparent film. , The image captured by the second camera may include an image of the ink drop falling on the transparent film that is clearer than the image of the nozzle surface.

Analyzing the image captured by the first camera and the image captured by the second camera to generate information about the location of the nozzle, the state of the nozzle, the location of the ink drop, and the state of the ink drop can include

According to embodiments, the nozzle state and the ink drop state of the inkjet head can be simultaneously and easily inspected.

1 shows an optical inspection device and an inkjet head according to an embodiment;
2 shows a state in which ink is dropped from an inkjet head according to an embodiment;
3 shows an optical inspection device and an inkjet head according to an embodiment;
4 shows an inkjet head of an inkjet device and a transparent film on which ink does not drop, according to an embodiment;
FIG. 5 shows an image obtained by capturing a nozzle surface of the inkjet head and a transparent film shown in FIG. 4 by an optical inspection device according to an exemplary embodiment;
6 shows an inkjet head of an inkjet device and a transparent film on which ink is dropped, according to an embodiment;
FIG. 7 shows an image obtained by capturing a nozzle surface of the inkjet head and a transparent film shown in FIG. 6 by an optical inspection device according to an exemplary embodiment;
FIG. 8 overlaps an image of a nozzle surface of the inkjet head shown in FIG. 7 with an image of an ink drop on a transparent film.

Hereinafter, various embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art can easily carry out the present invention. This invention may be embodied in many different forms and is not limited to the embodiments set forth herein.

In order to clearly describe the present invention, parts irrelevant to the description are omitted, and the same reference numerals are assigned to the same or similar components throughout the specification.

In addition, since the size and thickness of each component shown in the drawings are arbitrarily shown for convenience of explanation, the present invention is not necessarily limited to the shown bar. In the drawings, the thickness is shown enlarged to clearly express the various layers and regions. And in the drawings, for convenience of explanation, the thicknesses of some layers and regions are exaggerated.

In addition, when a part such as a layer, film, region, plate, etc. is said to be "on" or "on" another part, this includes not only the case where it is "directly on" the other part, but also the case where another part is in the middle. . Conversely, when a part is said to be "directly on" another part, it means that there is no other part in between. In addition, being "above" or "on" a reference part means being located above or below the reference part, and does not necessarily mean being located "above" or "on" in the opposite direction of gravity. .

In addition, throughout the specification, when a certain component is said to "include", it means that it may further include other components without excluding other components unless otherwise stated.

In addition, throughout the specification, when it is referred to as "planar image", it means when the target part is viewed from above, and when it is referred to as "cross-sectional image", it means when a cross section of the target part cut vertically is viewed from the side.

An optical inspection device according to an exemplary embodiment will be described with reference to FIGS. 1 and 2 .

1 illustrates an optical inspection device and an inkjet head according to an exemplary embodiment, and FIG. 2 illustrates a state in which ink is dropped from an inkjet head according to an exemplary embodiment.

An optical inspection device 1000 according to an embodiment is a transmission optical system inspection device, and includes a light source 500 for irradiating light to an inspection object, a transparent film 200 positioned under the inspection object, and a first device for acquiring an image by performing imaging. It includes a first camera 410, a second camera 420, and a beam splitter 430.

An object to be inspected using the optical inspection apparatus 1000 is, for example, a transparent object ejected from a nozzle surface 120 in which a plurality of nozzles 110 are disposed below the inkjet head 100 of an inkjet device and the nozzle 110. It may be the ink drop 300 dropped on the film 200 .

The nozzle surface 120 on which the plurality of nozzles 110 are disposed may have a surface extending on the xy plane and is disposed toward the optical inspection apparatus 1000 . Referring to FIG. 2 , the ink 300d to be ejected may be suspended in the hole of each nozzle 110 by surface tension and then ejected downward by vibration or the like.

An inkjet device may drop ink onto a substrate or film that is being transported by air flotation. Even in this embodiment, the transparent film 200 may be transported by air floatation.

The light source 500 may be positioned between the beam splitter 430 and the transparent film 200 . The light source 500 is a ring light source and may be condensed while forming an inclination toward the ink drop 300 on the transparent film 200 and the nozzle surface 120 .

The nozzle surface 120 may include a material such as silicon or polyimide. Nozzle face 120 may be reflective. Accordingly, light from the light source 500 passes through the transparent film 200, is reflected from the nozzle surface 120, and passes through the transparent film 200 again to be directed to the beam splitter 430.

The transparent film 200 is an optically transparent film and may be, for example, a PET film, but is not limited thereto. The thickness of the transparent film 200 in the z direction may be about 30 micrometers to about 300 micrometers, but is not limited thereto. The transparent film 200 may be positioned between the inkjet head 100 and the light source 500 .

A beam splitter 430 is positioned below the light source 500 . The beam splitter 430 splits the incident light into a first light directed in a first direction and a second light directed in a second direction different from the first direction. For example, the first light may be a horizontal light directed in the x direction in FIG. 1 , and the second light may be a vertical light directed in the z direction. Instead of the beam splitter 430, a half mirror may be used that partially reflects and partially transmits incident light.

A first camera 410 is positioned at an end toward which the first light reflected from the beam splitter 430 is directed, and a second camera 420 is positioned at an end toward which the second light passing through the beam splitter 430 is directed.

The first camera 410 has a focal plane on the nozzle surface 120 of the inkjet head 100, so that a clear image of the nozzle surface 120 can be captured, and the second camera 420 can By placing the focal plane on the transparent film 200 or the ink drop 300 on the transparent film 200, a clear image of the ink drop 300 on the transparent film 200 can be captured. To this end, the first camera 410 ) and the second camera 420 have different focal planes.

Based on the distance G1 between the nozzle surface 120 of the inkjet head 100 and the transparent film 200, the depth of focus DOF1 of the first camera 410 is approximately the distance G1 It may be 1/4 or less of , and the depth of focus DOF2 of the second camera 420 may also be approximately 1/4 of the interval G1 or less.

By setting the depth of focus of the first camera 410 and the second camera 420 in this way, the image of the nozzle surface 120 of the inkjet head 100 is clear in the image captured by the first camera 410 while The transparent film 200 or the image of the ink drop 300 on the transparent film 200 may obtain a blurring effect, and in the image captured by the second camera 420, the transparent film 200 or the image of the ink drop 300 on the transparent film 200 may be obtained. The image of the ink drop 300 is clear, but the image of the nozzle surface 120 of the inkjet head 100 is blurred.

The distance G1 in the z direction between the nozzle surface 120 of the inkjet head 100 and the transparent film 200 is greater than 0, and is, for example, approximately 100 micrometers to 1000 micrometers considering general characteristics of inkjet devices. It may be, but is not limited thereto.

Each of the first camera 410 and the second camera 420 may be an area scan camera or a line scan camera.

The optical inspection apparatus 1000 may further include a telecentric lens 700 and a coaxial light source. The telecentric lens 700 is positioned between the light source 500 and the beam splitter 430 so that light passing between the transparent film 200 and the beam splitter 430 can pass through the telecentric lens 700. .

An optical inspection apparatus according to an embodiment will be described with reference to FIG. 3 along with FIGS. 1 and 2.

3 shows an optical inspection device and an inkjet head according to one embodiment.

Referring to FIG. 3 , an optical inspection device 1000a according to an exemplary embodiment is a transmission optical system inspection device, and includes a light source 500 for radiating light to an object to be inspected, and a transparent film 200 positioned between the object and the light source 500. ), a first camera 410 and a second camera 420 for acquiring images by imaging, a first beam splitter 430a, a second beam splitter 430b, and a light source 600.

An object to be inspected using the optical inspection device 1000a is ejected from a nozzle surface 120 in which a plurality of nozzles are disposed under the inkjet head 100 of an inkjet device and a nozzle, as shown in FIG. 1, for example. It may be an ink drop dropped on the transparent film 200 .

The nozzle surface 120 may have a surface extending on the xy plane and is disposed facing the optical inspection device 1000a.

An inkjet device may drop ink onto a substrate or film that is being transported by air floatation. Even in this embodiment, the transparent film 200 may be transported by air floatation.

The light source 500 may be positioned between the first beam splitter 430a and the transparent film 200 . The light source 500 is a ring light source, and may be focused toward the ink drop 300 on the transparent film 200 and the nozzle surface 120 .

The nozzle surface 120 and the transparent film 200 of the inkjet head 100 are the nozzle surface 120 and the transparent film 200 of the optical inspection apparatus 1000 according to the embodiment shown in FIGS. 1 and 2 described above. may have the same characteristics as

The first beam splitter 430a is positioned below the light source 500, and the second beam splitter 430b is positioned below the first beam splitter 430a.

The first beam splitter 430a changes an optical path so that light incident from the light source 600 is directed in a direction opposite to the z direction, and passes light incident from the top toward the z direction, which is a downward direction.

The light source 600 may be a coaxial light source or a dot light source. Light from the light source 600 may be reflected by the first beam splitter 430a and illuminate ink drops on the nozzle surface 120 of the inkjet head 100 and the transparent film 200 upward.

The second beam splitter 430b may be disposed under the first beam splitter 430a. The second beam splitter 430b splits the light passing through the first beam splitter 430a into a first light directed in a first direction and a second light directed in a second direction different from the first direction. For example, the first light may be a horizontal light directed in the x direction in FIG. 3 and the second light may be a vertical light directed in the z direction.

Instead of the first beam splitter 430a and the second beam splitter 430b, a half mirror may be used to partially reflect and partially transmit incident light.

The first camera 410 is located at the end toward which the first light reflected from the second beam splitter 430b is directed, and the second camera 420 is positioned at the end toward which the second light passing through the second beam splitter 430b is directed. .

The first camera 410 can capture a clear image of the nozzle surface 120 by focusing on the nozzle surface 120 of the inkjet head 100, and the second camera 420 can capture the transparent film 200 or A clear image of the ink drop on the transparent film 200 can be captured by focusing on the ink drop on the transparent film 200. To this end, the first camera 410 and the second camera 420 use different focal planes. have

In addition, the characteristics of the first camera 410 and the second camera 420 of the optical inspection apparatus 1000 according to the embodiment shown in FIGS. 1 and 2 described above are the first camera 410 and the The same can be applied to the 2 cameras 420 .

A distance between the nozzle surface 120 of the inkjet head 100 and the transparent film 200 may be the same as in the optical inspection apparatus 1000 according to the exemplary embodiment illustrated in FIGS. 1 and 2 described above.

The optical inspection apparatus 1000a may further include a telecentric lens 700 . The telecentric lens 700 is positioned between the light source 500 and the first beam splitter 430a so that light passing between the transparent film 200 and the first beam splitter 430a passes through the telecentric lens 700. can pass

Next, an inspection method using the optical inspection devices 1000 and 1000a according to the embodiment shown in FIGS. 1 and 2 and FIG. 3 described above will be described with reference to FIGS. 4 to 8 .

FIG. 4 shows an inkjet head of an inkjet device and a transparent film on which ink does not drop, and FIG. 5 shows an optical inspection device according to an embodiment of an inkjet head nozzle surface and a transparent film shown in FIG. 4 . 6 shows an inkjet head of an inkjet device according to an embodiment and a transparent film on which ink is dropped, and FIG. 7 shows an optical inspection device according to an embodiment of an inkjet head shown in FIG. 8 shows an image of the nozzle surface of the inkjet head shown in FIG. 7 and an image of an ink drop on the transparent film superposed.

An object to be inspected using the optical inspection apparatuses 1000 and 1000a according to the present embodiment may be the nozzle surface 120 including the plurality of nozzles 110 of the inkjet head 100 .

First, ink is ejected onto the transparent film 200 from the nozzle 110 disposed on the nozzle surface 120 of the inkjet device, and then the optical inspection device 1000 or 1000a scans the lower part of the transparent film 200 to obtain an image. to photograph

Some of the light from the light sources 500 and 600 condensed toward the nozzle surface 120 and the transparent film 200 is transmitted through the transparent film 200 and reflected from the nozzle surface 120 of the inkjet head 100, and is reflected. Light passes through the transparent film 200 again. Light from the light source 500 , which is a ring light source, is incident on the transparent film 200 at an oblique angle and can pass through the transparent film 200 at an oblique angle even after being reflected from the nozzle surface 120 .

In this way, the light reflected from the nozzle surface 120 and transmitted through the transparent film 200 in the z direction is captured by the first camera 410 having a focal plane on the nozzle surface 120 of the inkjet head 100. It can be. The image captured by the first camera 410 may include an image of the nozzle surface 120 and an image of the ink drop 300 on the transparent film 200 . However, the sharpness of the edge of the image of the ink drop 300 is relatively low and may be removed through image processing.

At the same time, another part of the light from the light sources 500 and 600 condensed toward the nozzle surface 120 and the transparent film 200 is the lower surface of the ink drop 300 on the transparent film 200, that is, the transparent film 200 and It may be reflected at the boundary of the ink drop 300 . The reflected light is captured by the second camera 420 having a focal plane on the transparent film 200 to obtain an image of the ink drop 300 .

At this time, when the nozzle surface 120 of the inkjet head 100 is reflective, light transmitted through the transparent film 200 and reflected from the nozzle surface 120 can be incident to the second camera 420 together, resulting in bright ink drops. An image of (300) can be obtained. Therefore, a bright image of the ink drop 300 can be obtained without the need for a separate backlight source that illuminates downward from the side of the inkjet head 100 for the image of the bright ink drop.

The image captured by the second camera 420 may include an image of the nozzle surface 120 as well as an image of the ink drop 300 . However, the sharpness of the edge of the image of the nozzle surface 120 is relatively low and can be removed through image processing.

Specifically, as shown in FIG. 4 , the first camera 410 and the second camera 420 of the optical inspection devices 1000 and 1000a according to the present embodiment are located in an area where ink is not dropped on the transparent film 200 . ) exemplarily shows an image captured by FIG. 5 .

The focal plane of the first camera 410 is aligned with the nozzle surface 120 of the inkjet head 100 and has a predetermined depth of focus DOF1 around the nozzle surface 120 . The focal plane of the second camera 420 is aligned with the transparent film 200 and has a predetermined depth of focus (DOF2) centered on the transparent film 200 .

Accordingly, as shown on the left side of FIG. 5, the image captured by the first camera 410 includes the positions of the plurality of nozzles 110 on the nozzle surface 120, the state of the nozzle 110 and the nozzle surface 120, An image of the nozzle surface 120 including information such as a state in which an ink drop is suspended in a hole of the nozzle 110 is included. Since ink is not dropped on the transparent film 200 , the image of the ink drop is not included in the image captured by the first camera 410 .

Meanwhile, the image captured by the second camera 420 may include a blurry image of the nozzle surface 120 as shown on the right side of FIG. 5 . The image of the nozzle surface 120 may be removed through image processing, and it may be detected that no ink is dropped.

Next, as shown in FIG. 6, the first camera 410 and the second camera of the optical inspection apparatus 1000, 1000a according to the present embodiment are located in the area where the ink drop 300 is located on the transparent film 200. 7 exemplarily shows an image captured by 420 .

As shown on the left side of FIG. 7, the image captured by the first camera 410 includes the positions of the plurality of nozzles 110 on the nozzle surface 120, the state of the nozzle 110 and the nozzle surface 120, and the nozzle ( 110) includes a clear image of the nozzle surface 120 in which information such as a state in which an ink drop is suspended in a hole can be known. A blurry image of the ink drop 300 on the transparent film 200 may also be included but may be removed.

As shown in the right side of FIG. 7 , the image captured by the second camera 420 is the location and state of the plurality of ink drops 300 on the transparent film 200 and the ink drop through the lower area of the ink drop 300 It includes a clear image of the ink drop 300 in which information such as the volume or mass of the ink drop 300 can be known. In addition, the image captured by the second camera 420 may include a blurry image of the nozzle surface 120, but this may be removed through image processing.

By analyzing the image captured by the first camera 410 and the image captured by the second camera 420, the position of the nozzle 110, the state of the nozzle 110, the position of the ink drop 300, and the ink drop 300 ) can generate information about the state and volume.

As shown in FIG. 8, the nozzle ( 110) It is possible to calibrate the inkjet device, such as position correction, and to calibrate the location and quantity of ink drops.

As described above, in the inkjet device inspection method using the optical inspection device according to the present embodiment, all nozzles 110 and the ink drop 300 are inspected through one-time scanning and image capturing of the optical inspection devices 1000 and 1000a after ink drops. An image can be obtained, and the nozzle surface 120 including the nozzle 110 and the ink drop 300 can be simultaneously inspected. When an abnormal area is found through the inspection algorithm, it moves to the corresponding nozzle 110, and the nozzle 110 and the ink drop 300 are compared in real time to easily inspect.

Accordingly, the inspection time of the inkjet device can be shortened, and the nozzle surface 120 and the ink drop 300 can be compared and inspected in real time. In addition, it is possible to reduce the time required for calibrating and managing the inkjet device, increase the reliability of the correction, and make it easy to check and manage the state of the inkjet device.

Although the embodiments of the present invention have been described in detail above, the scope of the present invention is not limited thereto, and various modifications and improvements made by those skilled in the art using the basic concept of the present invention defined in the following claims are also included in the scope of the present invention. that fall within the scope of the right.

100: inkjet head
110: nozzle
120: nozzle surface
200: transparent film
300: ink drop
300d: ink
410, 420: camera
430, 430a, 430b: beam splitter
500, 600: light source
700: telecentric lens
1000, 1000a: optical inspection device

Claims (20)

A first light source for radiating light to an object to be inspected;
A transparent film positioned between the inspection target and the first light source;
A first beam splitter splitting incident light into first and second light;
A first camera positioned at an end toward which the first light is directed; and
A second camera positioned at an end toward which the second light is directed;
The first camera and the second camera have different focal planes
optical inspection device. In paragraph 1,
The first light source includes a ring light source. In paragraph 2,
The optical inspection apparatus further comprises a telecentric lens positioned between the first light source and the first beam splitter. In paragraph 3,
Further comprising a second light source for irradiating light to the test object,
The second light source includes a coaxial light source
optical inspection device. In paragraph 4,
Further comprising a second beam splitter located between the first light source and the first beam splitter,
The second beam splitter is configured to direct light from the second light source toward the telecentric lens.
optical inspection device. In paragraph 2,
The depth of focus of at least one of the first camera and the second camera is 1/4 or less of a distance between the inspection target and the transparent film. In paragraph 6,
The distance between the inspection object and the transparent film is greater than 0 and has a range between 100 micrometers and 1000 micrometers. In paragraph 7,
The test object includes an inkjet head including a nozzle surface on which a plurality of nozzles are located,
The image captured by the first camera includes an image of the nozzle surface that is clearer than an image of an ink drop dropped on the transparent film;
The image captured by the second camera includes an image of the ink drop falling on the transparent film that is clearer than the image of the nozzle surface.
optical inspection device. In paragraph 8,
The first camera has a focal plane on the nozzle surface,
The second camera puts a focal plane on the transparent film or the ink drop on the transparent film.
optical inspection device. In paragraph 8,
The nozzle surface is reflective optical inspection device. In paragraph 2,
At least one of the first camera and the second camera includes an area scan camera or a line scan camera. In paragraph 2,
The transparent film includes a PET film,
The thickness of the transparent film is 30 micrometers to 300 micrometers
optical inspection device.
A transparent film spaced apart from the test object;
A ring light source positioned under the transparent film,
A first beam splitter located below the ring light source and splitting the incident light into first light and second light;
A first camera positioned at an end toward which the first light is directed; and
A second camera positioned at an end toward which the second light is directed;
The first camera has a focal plane located on the test object,
The second camera has a focal plane located on the transparent film
optical inspection device. In paragraph 13,
The optical inspection apparatus further comprises a telecentric lens positioned between the ring light source and the first beam splitter. In paragraph 14,
A coaxial light source for irradiating light to the test object, and
Further comprising a second beam splitter configured to direct light from the coaxial light source toward the telecentric lens.
optical inspection device. In paragraph 13,
The depth of focus of at least one of the first camera and the second camera is 1/4 or less of a distance between the inspection target and the transparent film. In paragraph 13,
The test object includes an inkjet head including a nozzle surface on which a plurality of nozzles are located,
The nozzle surface is reflective
optical inspection device.
Irradiating light from a first light source to an object to be inspected and a transparent film spaced apart from the object to be inspected;
Capturing a part of the light reflected from the test object through a first camera, and
Including the step of imaging a part of the light reflected from the transparent film through a second camera,
The first camera and the second camera have different focal planes
method of inspection. In clause 18,
The test object includes an inkjet head including a nozzle surface on which a plurality of nozzles are located,
The image captured by the first camera includes an image of the nozzle surface that is clearer than an image of an ink drop dropped on the transparent film;
The image captured by the second camera includes an image of the ink drop falling on the transparent film that is clearer than the image of the nozzle surface.
method of inspection. In paragraph 19,
Analyzing the image captured by the first camera and the image captured by the second camera to generate information about the location of the nozzle, the state of the nozzle, the location of the ink drop, and the state of the ink drop Including inspection methods.

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