KR20220002321A - 광필터 - Google Patents

광필터 Download PDF

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Publication number
KR20220002321A
KR20220002321A KR1020217034652A KR20217034652A KR20220002321A KR 20220002321 A KR20220002321 A KR 20220002321A KR 1020217034652 A KR1020217034652 A KR 1020217034652A KR 20217034652 A KR20217034652 A KR 20217034652A KR 20220002321 A KR20220002321 A KR 20220002321A
Authority
KR
South Korea
Prior art keywords
film layer
film system
film
refractive index
optical filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
KR1020217034652A
Other languages
English (en)
Korean (ko)
Inventor
체 첸
웨이홍 딩
예킹 팡
웨이 양
니안공 시아오
Original Assignee
신양 써니 옵틱스 컴퍼니., 리미티드.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 신양 써니 옵틱스 컴퍼니., 리미티드. filed Critical 신양 써니 옵틱스 컴퍼니., 리미티드.
Publication of KR20220002321A publication Critical patent/KR20220002321A/ko
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G02B5/281—Interference filters designed for the infrared light
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/10—Glass or silica
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/02—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of crystals, e.g. rock-salt, semi-conductors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G02B5/285—Interference filters comprising deposited thin solid films
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G02B5/285—Interference filters comprising deposited thin solid films
    • G02B5/288—Interference filters comprising deposited thin solid films comprising at least one thin film resonant cavity, e.g. in bandpass filters

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optical Filters (AREA)
  • Laminated Bodies (AREA)
KR1020217034652A 2019-06-05 2019-12-31 광필터 Ceased KR20220002321A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CN201910487270.2 2019-06-05
CN201910487270.2A CN110109210B (zh) 2019-06-05 2019-06-05 滤光片
PCT/CN2019/130577 WO2020244223A1 (zh) 2019-06-05 2019-12-31 滤光片

Publications (1)

Publication Number Publication Date
KR20220002321A true KR20220002321A (ko) 2022-01-06

Family

ID=67494063

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020217034652A Ceased KR20220002321A (ko) 2019-06-05 2019-12-31 광필터

Country Status (7)

Country Link
US (1) US12181698B2 (https=)
EP (1) EP3982171A4 (https=)
JP (1) JP7436508B2 (https=)
KR (1) KR20220002321A (https=)
CN (1) CN110109210B (https=)
SG (1) SG11202111677YA (https=)
WO (1) WO2020244223A1 (https=)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110109210B (zh) 2019-06-05 2024-06-18 信阳舜宇光学有限公司 滤光片
CN112444898B (zh) * 2019-08-30 2023-06-16 福州高意光学有限公司 一种宽角度应用的滤光片
CN110879435B (zh) * 2019-11-18 2021-08-06 中国科学院上海技术物理研究所 一种以硒化锌晶体为基底的中长波红外宽光谱分色片
CN115993183A (zh) * 2021-10-18 2023-04-21 天津津航技术物理研究所 宽自由光谱范围的组合式芯片结构
CN114355496B (zh) * 2021-12-30 2024-02-02 苏州厚朴传感科技有限公司 一种工作波段为11500-12500nm的远红外带滤光片
CN114706153B (zh) * 2022-02-18 2024-04-16 湖南麓星光电科技有限公司 一种10600nm波长超窄带滤光片及其制备方法
CN115166886B (zh) * 2022-06-14 2024-02-09 浙江晶驰光电科技有限公司 一种超低角度偏移效应的红外截止滤光器
CN115808733B (zh) * 2023-02-08 2023-05-23 南京英田光学工程股份有限公司 一种基于卫星激光通信的滤波片

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103018812B (zh) * 2012-12-17 2015-05-13 晋谱（福建）光电科技有限公司 用于体感识别系统的近红外窄带滤光片
DE102014216109A1 (de) * 2014-08-13 2014-11-20 Carl Zeiss Smt Gmbh Kombinierter reflektor und filter für licht unterschiedlicher wellenlängen
JP6432270B2 (ja) * 2014-10-14 2018-12-05 岩崎電気株式会社 波長選択フィルター及び光照射装置
EP3828604A1 (en) * 2015-01-23 2021-06-02 Materion Corporation Near infrared optical interference filters with improved transmission
US20160238759A1 (en) * 2015-02-18 2016-08-18 Materion Corporation Near infrared optical interference filters with improved transmission
CN105137518B (zh) * 2015-08-25 2017-09-12 浙江大学 一种入射角度不敏感的颜色滤光片及其制备方法
JP6892743B2 (ja) * 2016-06-17 2021-06-23 株式会社トプコン 製膜装置
US10168459B2 (en) * 2016-11-30 2019-01-01 Viavi Solutions Inc. Silicon-germanium based optical filter
DE202017100512U1 (de) * 2017-01-31 2017-02-09 Optics Balzers Ag Optische Filter und/oder Spiegel
JP6836428B2 (ja) * 2017-03-17 2021-03-03 倉敷紡績株式会社 分光フィルタおよび分光測光装置
DE102017004828B4 (de) 2017-05-20 2019-03-14 Optics Balzers Ag Optischer Filter und Verfahren zur Herstellung eines optischen Filters
CN108897085B (zh) 2018-08-06 2024-07-16 信阳舜宇光学有限公司 滤光片及包含该滤光片的红外图像传感系统
CN110109210B (zh) * 2019-06-05 2024-06-18 信阳舜宇光学有限公司 滤光片
CN210015252U (zh) * 2019-06-05 2020-02-04 信阳舜宇光学有限公司 滤光片

Also Published As

Publication number Publication date
JP7436508B2 (ja) 2024-02-21
US12181698B2 (en) 2024-12-31
US20220120951A1 (en) 2022-04-21
EP3982171A4 (en) 2022-12-28
CN110109210B (zh) 2024-06-18
EP3982171A1 (en) 2022-04-13
WO2020244223A1 (zh) 2020-12-10
JP2022531155A (ja) 2022-07-06
SG11202111677YA (en) 2021-11-29
CN110109210A (zh) 2019-08-09

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