KR20170107621A - Substrate inspection apparatus - Google Patents
Substrate inspection apparatus Download PDFInfo
- Publication number
- KR20170107621A KR20170107621A KR1020160030948A KR20160030948A KR20170107621A KR 20170107621 A KR20170107621 A KR 20170107621A KR 1020160030948 A KR1020160030948 A KR 1020160030948A KR 20160030948 A KR20160030948 A KR 20160030948A KR 20170107621 A KR20170107621 A KR 20170107621A
- Authority
- KR
- South Korea
- Prior art keywords
- screw
- inclined portion
- axis direction
- coupled
- move
- Prior art date
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
- G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2832—Specific tests of electronic circuits not provided for elsewhere
- G01R31/2834—Automated test systems [ATE]; using microprocessors or computers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2832—Specific tests of electronic circuits not provided for elsewhere
- G01R31/2836—Fault-finding or characterising
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
Abstract
The present invention relates to a substrate inspection apparatus, and a substrate inspection apparatus according to the present invention is a substrate inspection apparatus including an inspection module, comprising: a plate; A first moving module coupled to the plate and installed to move the inspection module in the Y axis direction; And a second moving module coupled to the plate and installed to move the inspection module in the Z axis direction and installed to move in the same direction when moving in the Y axis direction of the inspection module, Y axis and Z axis directions can be moved by driving a single driving unit to perform precise movement control and each driving unit in the X axis, Y axis and Z axis directions can be individually or simultaneously controlled, The substrate can be quickly moved to the position.
Description
The present invention relates to a substrate inspection apparatus, and more particularly, to a substrate inspection apparatus, and more particularly, to an inspection apparatus for optically inspecting various structures, particularly spacers, formed on a substrate, To a substrate inspection apparatus capable of minimizing the size of the substrate.
In general, small-sized electronic or mechanical parts must be subjected to high-precision measurement and anomaly detection to determine whether the processing is defective or not.
Especially. LCDs, OLEDs, and circuit boards used in semiconductor devices used in computers, home appliances, etc., TVs and mobile phones, etc., must be thoroughly inspected before production or after shipment.
The most widely used method of this close inspection is the optical method. In this optical inspection method, images such as scattering of light and reflection of light are processed using a computer to determine whether or not the product is abnormal .
As shown in FIG. 1, an inspection apparatus and an inspection method using such an optical apparatus are widely used. An
FIG. 2 is a perspective view of a conventional substrate inspection apparatus, and FIG. 3 is an exploded perspective view of FIG.
2 and 3, a conventional substrate inspection apparatus is configured to move inspection devices such as a camera module by X-axis, Y-axis, and Z-axis moving units.
The
The Y-
The
A pair of
The first
The Z-
The
The second
In order to move the
Therefore, as shown in FIG. 5, by moving the first
As a result, when the conventional substrate inspection apparatus as described above is used, it is difficult to precisely control the movement of the inspection module by driving two driving units simultaneously for movement in the single direction of the Y axis.
SUMMARY OF THE INVENTION The present invention has been made in an effort to solve the above problems, and it is an object of the present invention to provide a substrate inspection apparatus capable of precisely controlling movement of a substrate by driving a single driving unit in X-, Y- and Z- .
Another object of the present invention is to provide a substrate inspection apparatus capable of individually or simultaneously controlling each of the X, Y, and Z-axis driving units, thereby quickly moving the inspection module to the inspection position.
The above object is achieved by a substrate inspection apparatus comprising an inspection module according to the present invention, comprising: a plate; A first moving module coupled to the plate and installed to move the inspection module in the Y axis direction; And a second moving module coupled to the plate and installed to move the inspection module in the Z axis direction and to move in the same direction when moving in the Y axis direction of the inspection module ≪ / RTI >
The base module further includes a base block coupled to the plate and including a base block having a first sloped surface and a second sloped surface inclined downwardly in the direction of both sides of the center portion of the base block, A screw disposed in a central portion of the base block so that the axial direction thereof is positioned in the Z axis direction, and a first moving member and a second moving member moving along the rotation of the screw to move toward each other or to move away from each other A second driving unit for driving the first driving unit; A first inclined portion coupled to the first moving member on one side and a second inclined portion coupled on the other side to move along a first inclined surface of the base block; And a second inclined portion, one side of which is engaged with the second moving member and the other side of which is coupled to move along the second inclined surface of the base block.
The screw of the first driving unit may include: a first screw installed to rotate by the motor; A second screw connected to the first screw so as to have the same axial direction as the first screw; And a rotation converting member interposed between the first screw and the second screw to convert the rotational direction of the first screw and the second screw such that the rotational directions of the first screw and the second screw are opposite to each other.
The first moving module may include a first inclined guide interposed between the first inclined portion and the first inclined surface of the base block; And a second inclined guide interposed between the second inclined portion and the second inclined surface of the base block.
The first inclined portion and the second inclined portion may be inclined with respect to the inclined surface of the base block facing the respective inclined surfaces of the base block and the first inclined surface and the second inclined surface of the base block, And may be formed to have a corresponding inclination angle.
The second moving module may include a vertical moving block coupled to an outer surface of the first inclined portion and the second inclined portion and moving in the Y-axis direction according to the driving of the first driving portion; A second driving unit installed on the plate and coupled to one side of the vertical moving block to move the vertical moving block in the Z axis direction; And a y guide interposed between the second driving unit and the vertical moving block to move in the Y axis direction while sliding the second driving unit rotor when the vertical moving block moves in the Y axis direction.
The second moving module may include: a first vertical guide interposed between an outer surface of the first inclined portion and the vertical moving block; And a second vertical guide interposed between the outer surface of the second inclined portion and the vertical moving block.
The plate may be movable in the X-axis direction.
In addition, the inspection unit may be a camera for acquiring an image for measuring a spacer height of the substrate.
According to the present invention, there is provided a substrate inspection apparatus capable of moving in X-axis, Y-axis, and Z-axis directions by driving a single drive unit and performing precise movement control.
In addition, a substrate inspection apparatus is provided which is capable of individually or simultaneously controlling each of the driving sections in the X-axis, Y-axis, and Z-axis directions so that the inspection module can quickly move to the inspection position.
1 is a schematic view of a conventional substrate inspection apparatus,
2 is a perspective view of a conventional substrate inspection apparatus,
Fig. 3 is an exploded perspective view of Fig. 1,
Figures 4 and 5 are operational states of Figure 1,
6 is a perspective view of a substrate inspection apparatus according to the first embodiment of the present invention,
FIG. 7 is an exploded perspective view of FIG. 6,
Figure 8 is an exploded perspective view of the first transfer module of Figure 7,
Figure 9 is a partial cross-sectional view of the combined state of Figure 8,
Fig. 10 is a partial exploded perspective view of Fig. 8
11 is an exploded perspective view of the y guide of Fig. 10,
12 is an operational state through the y guide,
13 to 16 are operational states of a substrate inspection apparatus according to the first embodiment of the present invention.
Prior to the description, components having the same configuration are denoted by the same reference numerals as those in the first embodiment. In other embodiments, configurations different from those of the first embodiment will be described do.
Hereinafter, a substrate inspection apparatus according to a first embodiment of the present invention will be described in detail with reference to the accompanying drawings.
FIG. 6 is a perspective view of a substrate inspection apparatus according to a first embodiment of the present invention, and FIG. 7 is an exploded perspective view of FIG.
6 and 7, a substrate inspection apparatus according to a first embodiment of the present invention includes a base module 1, a
The base module 1 comprises a
The
The inclination angle of the first
A
FIG. 8 is an exploded perspective view of the first transfer module of FIG. 7, and FIG. 9 is a partial cross-sectional view of the combined state of FIG. Referring to FIGS. 8 and 9, the first moving
The
The
The
The first moving
The first
Since the configurations of the first
The first
The lower surface of the
The
In this embodiment, the
The portions of the left and
A pair of
At this time, a pair of
At this time, the pair of
As described above, the first
At this time, the moving directions of the first
10 is a partially exploded perspective view of FIG. Referring to FIG. 10, the second moving
The
The
The vertical moving
An
The
The first
The vertical moving
Meanwhile, the interlocking
The
The pair of sliding
The
12, even if the first
As a result, the
Next, an operation state of the substrate inspection apparatus according to the first embodiment of the present invention will be described. 13 and 16 are operational states of a substrate inspection apparatus according to the first embodiment of the present invention.
Movement of Inspection Module in the Y-axis direction
13, when the
14, the first
That is, the
At this time, although not shown, the vertical moving
The
Movement of inspection module in Z-axis direction
When the
The explanation is directed to the case where the
As described above, it is possible to move in the Y-axis direction and the Z-axis direction by the single drive unit, and precise position control can be performed.
Also, when the
Simultaneous movement of inspection module in Y and Z directions
The inspection module may be moved in the Y-axis direction as shown in FIG. 12 and simultaneously moved in the Z-axis direction as shown in FIG. 13 to move the inspection module in the diagonal direction. In Fig. 14, movement in the left upward diagonal direction is shown.
That is, as shown in FIG. 14, the driving in the Y-axis direction and the driving in the Z-axis direction can be performed at the same time to substantially move the
In addition, the Y-axis direction driving and the Z-axis direction driving can be individually or simultaneously driven so that the
The scope of the present invention is not limited to the above-described embodiments, but may be embodied in various forms of embodiments within the scope of the appended claims. It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the present invention as defined by the appended claims.
[Description of Reference Numerals]
1: Base module 10: Plate
11: base block 111: first inclined surface
112: second inclined surface 113: groove
2: first moving module 20: first driving section
200: motor 201: screw shaft
201a:
201c: direction changing member 202: first moving member
203: second moving member 21: first inclined portion
211: main body 212: left side
213: Post 214: Coupling
214a: guide groove 22: second inclined portion
23: guide member 24: guide rail
3: second moving module 30: second driving section
300: motor 301: screw shaft
302: interlocking member 31: vertical movement block
32: first vertical guide member 33: second vertical guide member
35: y guide 351: first block
351a: protruding end 352: second block
352a: receiving groove 353: sliding guide
353a:
353b:
4: Inspection module
Claims (9)
plate;
A first moving module coupled to the plate and installed to move the inspection module in the Y axis direction;
And a second moving module coupled to the plate and installed to move the inspection module in the Z axis direction and installed to move in the same direction when moving in the Y axis direction of the inspection module.
And a base block coupled to the plate and including a base block having a first sloped surface and a second sloped surface inclined downwardly in opposite side edge directions about a central portion,
Wherein the first movement module comprises:
A first movable member and a second movable member that move along the rotation of the screw and move to approach each other or move away from each other, A first driving unit including a first driving unit;
A first inclined portion coupled to the first moving member on one side and a second inclined portion coupled on the other side to move along a first inclined surface of the base block; And
And a second inclined portion coupled to one side of the second movable member and the other side of the second movable member to move along a second inclined surface of the base block.
The screw of the first driving unit
A first screw installed to rotate by the motor;
A second screw connected to the first screw so as to have the same axial direction as the first screw; And
And a rotation converting member interposed between the first screw and the second screw to convert the rotational direction so that the rotational directions of the first screw and the second screw are opposite to each other.
Wherein the first movement module comprises:
A first inclined guide interposed between the first inclined portion and the first inclined surface of the base block; And
And a second inclined guide interposed between the second inclined portion and the second inclined surface of the base block.
Wherein the first inclined surface and the second inclined surface of the base block are formed to have the same inclination angle and the first inclined portion and the second inclined portion correspond to the inclined surfaces of the base block facing the respective inclined surfaces of the base block Wherein the substrate inspection apparatus is formed to have an inclination angle.
Wherein the second movement module comprises:
A vertical moving block coupled to an outer surface of the first inclined portion and the second inclined portion and moving in the Y axis direction according to the driving of the first driving portion;
A second driving unit installed on the plate and coupled to one side of the vertical moving block to move the vertical moving block in the Z axis direction; And
And a y guide interposed between the second driving part and the vertical moving block to move in the Y axis direction while sliding the second driving part rotor when the vertical moving block moves in the Y axis direction.
Wherein the second movement module comprises:
A first vertical guide interposed between an outer surface of the first inclined portion and the vertical moving block; And
And a second vertical guide interposed between an outer surface of the second inclined portion and the vertical moving block.
Wherein the plate is movable in the X-axis direction.
Wherein the inspection unit is a camera for acquiring an image for measuring a spacer height of the substrate.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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KR1020160030948A KR101792543B1 (en) | 2016-03-15 | 2016-03-15 | Substrate inspection apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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KR1020160030948A KR101792543B1 (en) | 2016-03-15 | 2016-03-15 | Substrate inspection apparatus |
Publications (2)
Publication Number | Publication Date |
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KR20170107621A true KR20170107621A (en) | 2017-09-26 |
KR101792543B1 KR101792543B1 (en) | 2017-11-03 |
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KR1020160030948A KR101792543B1 (en) | 2016-03-15 | 2016-03-15 | Substrate inspection apparatus |
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KR (1) | KR101792543B1 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110132141A (en) * | 2019-06-13 | 2019-08-16 | 上海电气集团股份有限公司 | A kind of locating platform and method of silicon steel sheet measurement |
KR20200052695A (en) * | 2018-11-07 | 2020-05-15 | 김기태 | Parts manufacturing apparatus and parts manufacturing system including the same |
KR20210097274A (en) * | 2020-01-29 | 2021-08-09 | 주식회사 탑 엔지니어링 | Substrate cutting apparatus |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000205840A (en) | 1999-01-07 | 2000-07-28 | Sony Corp | Inspection device for shape |
-
2016
- 2016-03-15 KR KR1020160030948A patent/KR101792543B1/en active IP Right Grant
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20200052695A (en) * | 2018-11-07 | 2020-05-15 | 김기태 | Parts manufacturing apparatus and parts manufacturing system including the same |
CN110132141A (en) * | 2019-06-13 | 2019-08-16 | 上海电气集团股份有限公司 | A kind of locating platform and method of silicon steel sheet measurement |
KR20210097274A (en) * | 2020-01-29 | 2021-08-09 | 주식회사 탑 엔지니어링 | Substrate cutting apparatus |
Also Published As
Publication number | Publication date |
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KR101792543B1 (en) | 2017-11-03 |
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