KR20170107621A - Substrate inspection apparatus - Google Patents

Substrate inspection apparatus Download PDF

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Publication number
KR20170107621A
KR20170107621A KR1020160030948A KR20160030948A KR20170107621A KR 20170107621 A KR20170107621 A KR 20170107621A KR 1020160030948 A KR1020160030948 A KR 1020160030948A KR 20160030948 A KR20160030948 A KR 20160030948A KR 20170107621 A KR20170107621 A KR 20170107621A
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KR
South Korea
Prior art keywords
screw
inclined portion
axis direction
coupled
move
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KR1020160030948A
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Korean (ko)
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KR101792543B1 (en
Inventor
박희재
김영대
Original Assignee
에스엔유 프리시젼 주식회사
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Priority to KR1020160030948A priority Critical patent/KR101792543B1/en
Publication of KR20170107621A publication Critical patent/KR20170107621A/en
Application granted granted Critical
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2855Environmental, reliability or burn-in testing
    • G01R31/286External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2865Holding devices, e.g. chucks; Handlers or transport devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/282Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2832Specific tests of electronic circuits not provided for elsewhere
    • G01R31/2834Automated test systems [ATE]; using microprocessors or computers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2832Specific tests of electronic circuits not provided for elsewhere
    • G01R31/2836Fault-finding or characterising
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10Measuring as part of the manufacturing process
    • H01L22/12Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/30Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements

Abstract

The present invention relates to a substrate inspection apparatus, and a substrate inspection apparatus according to the present invention is a substrate inspection apparatus including an inspection module, comprising: a plate; A first moving module coupled to the plate and installed to move the inspection module in the Y axis direction; And a second moving module coupled to the plate and installed to move the inspection module in the Z axis direction and installed to move in the same direction when moving in the Y axis direction of the inspection module, Y axis and Z axis directions can be moved by driving a single driving unit to perform precise movement control and each driving unit in the X axis, Y axis and Z axis directions can be individually or simultaneously controlled, The substrate can be quickly moved to the position.

Description

SUBSTRATE INSPECTION APPARATUS

The present invention relates to a substrate inspection apparatus, and more particularly, to a substrate inspection apparatus, and more particularly, to an inspection apparatus for optically inspecting various structures, particularly spacers, formed on a substrate, To a substrate inspection apparatus capable of minimizing the size of the substrate.

In general, small-sized electronic or mechanical parts must be subjected to high-precision measurement and anomaly detection to determine whether the processing is defective or not.

Especially. LCDs, OLEDs, and circuit boards used in semiconductor devices used in computers, home appliances, etc., TVs and mobile phones, etc., must be thoroughly inspected before production or after shipment.

The most widely used method of this close inspection is the optical method. In this optical inspection method, images such as scattering of light and reflection of light are processed using a computer to determine whether or not the product is abnormal .

As shown in FIG. 1, an inspection apparatus and an inspection method using such an optical apparatus are widely used. An inspection apparatus 120 is installed on the stage 100 in accordance with the inspection purpose of the measurement object 110 on the stage 100 In addition to 2D and 3D measurement tests, the accuracy and speed of measurement tests are being increased by varying the number and type of lights used and the number and type of cameras used.

FIG. 2 is a perspective view of a conventional substrate inspection apparatus, and FIG. 3 is an exploded perspective view of FIG.

2 and 3, a conventional substrate inspection apparatus is configured to move inspection devices such as a camera module by X-axis, Y-axis, and Z-axis moving units.

The X-axis moving unit 200 includes an X-axis guide 210, an X-axis driving motor (not shown) and a base block 220. The base block 220 moves along X- And is provided so as to be movable by the shaft driving motor.

The Y-axis moving unit 300 includes a Y-axis driving unit 310, a tilting block 320, and a tilt guide 330. The Y-axis driving unit 310 is installed at a central portion of the base block 220 including a motor and a ball screw. The axial direction of the Y-axis driving unit 310 is inclined with respect to the outer surface of the base block 220, 320 are coupled to move along the screw axis of the Y-axis driving part 310. The second inclined part 322 of the Y-

The inclined block 320 is divided into a first inclined portion 321 and a second inclined portion 322. The inclined surface is inclined at a predetermined angle, As shown in FIG.

A pair of inclined guides 330 are interposed between the first inclined portion 321 and the second inclined portion 322 and the second inclined portion 322 is driven by the Y- And moves along the screw axis of the Y-axis driving unit 310. FIG.

The first inclined portion 321 is coupled to move along the vertical guide of the Z-axis moving portion 400 coupled to the base block 220, and an inspection device such as a camera module is coupled to the outside of the second guide.

The Z-axis moving unit 400 includes a Z-axis driving unit 410 and a vertical guide 420. The Z-axis driving unit 410 includes a motor and a ball screw, and is fixedly coupled to the base block 220. The Z-axis driving unit 410 is installed such that the screw axis thereof is aligned with the side of the inclined block 320, And the portion 322 is coupled to move in accordance with the rotation of the screw shaft.

The vertical guides 420 are provided on both sides of the Y-axis driving unit 310 and are interposed between the second slanting unit 322 and the base block 220.

The second inclined portion 322 is coupled to the base block 220 with the vertical guide 420 interposed therebetween. In addition, the inspection module for inspecting the substrate is coupled to the outside of the second inclined portion 322.

In order to move the inspection module 500 on the Y axis by using the conventional substrate inspection apparatus as described above, the second inclined portion 322 is driven by the Y-axis driving portion 310 as shown in FIG. 4, 321, the inspection module moves in the left-down diagonal direction. That is, the movement in the Y-axis direction as well as the Z-axis direction is performed in parallel. Accordingly, when the Y-axis driving unit 310 is driven to move in the Y-axis direction in a state very close to the substrate, there arises a problem that the substrate and the inspection module collide with each other.

Therefore, as shown in FIG. 5, by moving the first inclined portion 321 upward in the Z-axis direction by driving the Z-axis driving portion 410, collision with the substrate can be avoided.

As a result, when the conventional substrate inspection apparatus as described above is used, it is difficult to precisely control the movement of the inspection module by driving two driving units simultaneously for movement in the single direction of the Y axis.

Open utility model 2008-0006520 Wafer 3-axis precision transfer stage

SUMMARY OF THE INVENTION The present invention has been made in an effort to solve the above problems, and it is an object of the present invention to provide a substrate inspection apparatus capable of precisely controlling movement of a substrate by driving a single driving unit in X-, Y- and Z- .

Another object of the present invention is to provide a substrate inspection apparatus capable of individually or simultaneously controlling each of the X, Y, and Z-axis driving units, thereby quickly moving the inspection module to the inspection position.

The above object is achieved by a substrate inspection apparatus comprising an inspection module according to the present invention, comprising: a plate; A first moving module coupled to the plate and installed to move the inspection module in the Y axis direction; And a second moving module coupled to the plate and installed to move the inspection module in the Z axis direction and to move in the same direction when moving in the Y axis direction of the inspection module ≪ / RTI >

The base module further includes a base block coupled to the plate and including a base block having a first sloped surface and a second sloped surface inclined downwardly in the direction of both sides of the center portion of the base block, A screw disposed in a central portion of the base block so that the axial direction thereof is positioned in the Z axis direction, and a first moving member and a second moving member moving along the rotation of the screw to move toward each other or to move away from each other A second driving unit for driving the first driving unit; A first inclined portion coupled to the first moving member on one side and a second inclined portion coupled on the other side to move along a first inclined surface of the base block; And a second inclined portion, one side of which is engaged with the second moving member and the other side of which is coupled to move along the second inclined surface of the base block.

The screw of the first driving unit may include: a first screw installed to rotate by the motor; A second screw connected to the first screw so as to have the same axial direction as the first screw; And a rotation converting member interposed between the first screw and the second screw to convert the rotational direction of the first screw and the second screw such that the rotational directions of the first screw and the second screw are opposite to each other.

The first moving module may include a first inclined guide interposed between the first inclined portion and the first inclined surface of the base block; And a second inclined guide interposed between the second inclined portion and the second inclined surface of the base block.

The first inclined portion and the second inclined portion may be inclined with respect to the inclined surface of the base block facing the respective inclined surfaces of the base block and the first inclined surface and the second inclined surface of the base block, And may be formed to have a corresponding inclination angle.

The second moving module may include a vertical moving block coupled to an outer surface of the first inclined portion and the second inclined portion and moving in the Y-axis direction according to the driving of the first driving portion; A second driving unit installed on the plate and coupled to one side of the vertical moving block to move the vertical moving block in the Z axis direction; And a y guide interposed between the second driving unit and the vertical moving block to move in the Y axis direction while sliding the second driving unit rotor when the vertical moving block moves in the Y axis direction.

The second moving module may include: a first vertical guide interposed between an outer surface of the first inclined portion and the vertical moving block; And a second vertical guide interposed between the outer surface of the second inclined portion and the vertical moving block.

The plate may be movable in the X-axis direction.

In addition, the inspection unit may be a camera for acquiring an image for measuring a spacer height of the substrate.

According to the present invention, there is provided a substrate inspection apparatus capable of moving in X-axis, Y-axis, and Z-axis directions by driving a single drive unit and performing precise movement control.

In addition, a substrate inspection apparatus is provided which is capable of individually or simultaneously controlling each of the driving sections in the X-axis, Y-axis, and Z-axis directions so that the inspection module can quickly move to the inspection position.

1 is a schematic view of a conventional substrate inspection apparatus,
2 is a perspective view of a conventional substrate inspection apparatus,
Fig. 3 is an exploded perspective view of Fig. 1,
Figures 4 and 5 are operational states of Figure 1,
6 is a perspective view of a substrate inspection apparatus according to the first embodiment of the present invention,
FIG. 7 is an exploded perspective view of FIG. 6,
Figure 8 is an exploded perspective view of the first transfer module of Figure 7,
Figure 9 is a partial cross-sectional view of the combined state of Figure 8,
Fig. 10 is a partial exploded perspective view of Fig. 8
11 is an exploded perspective view of the y guide of Fig. 10,
12 is an operational state through the y guide,
13 to 16 are operational states of a substrate inspection apparatus according to the first embodiment of the present invention.

Prior to the description, components having the same configuration are denoted by the same reference numerals as those in the first embodiment. In other embodiments, configurations different from those of the first embodiment will be described do.

Hereinafter, a substrate inspection apparatus according to a first embodiment of the present invention will be described in detail with reference to the accompanying drawings.

FIG. 6 is a perspective view of a substrate inspection apparatus according to a first embodiment of the present invention, and FIG. 7 is an exploded perspective view of FIG.

6 and 7, a substrate inspection apparatus according to a first embodiment of the present invention includes a base module 1, a first movement module 2, a second movement module 3, and a check module 4 .

The base module 1 comprises a plate 10 and a base block 11. The plate 10 is movably coupled along the X-axis guide a.

The base block 11 is formed with a first inclined surface 111 and a second inclined surface 112 inclined downward in the direction of both side edges around the center portion and is coupled to the plate 10.

The inclination angle of the first inclined surface 111 and the inclined surface 112 is the same. The first guide rail 111a and the second guide rail 112a are spaced apart from each other at both side edges of the first inclined surface 111 and the second inclined surface 112, respectively.

A groove 11a in which a screw 201 of the first driving part 20 of the first moving module 2 to be described later is located is formed at the center of the base block 11. [

FIG. 8 is an exploded perspective view of the first transfer module of FIG. 7, and FIG. 9 is a partial cross-sectional view of the combined state of FIG. Referring to FIGS. 8 and 9, the first moving module 2 includes a first driving part 20, a first inclined part 21, and a second inclined part 22.

The first driving unit 20 includes a motor 200 and a first moving member 202 and a second moving member 203 that move along the axial direction of the screw 201 and the screw 201 .

The screw 201 includes an upper screw 201a as a first screw, a lower screw 201b as a second screw connected to the upper screw 201a, and a direction changing member 201c.

The direction changing member 201c is interposed between the upper screw 201a and the lower screw 201b to change the direction of rotation so that the lower screw 201b rotates in a direction opposite to the rotating direction of the upper screw 201a .

The first moving member 202 is a nut-like structure that moves along the axial direction of the screw in the ball-screw device. The first moving member 202 is coupled to the upper screw 201a and moves along the axial direction. The second moving member 203 also has the same structure as the first moving member and is coupled to the lower screw 201b and moves along the axial direction.

The first inclined portion 21 and the second inclined portion 22 are provided in the same configuration so that the first inclined portion 21 is coupled to the first inclined surface 111 of the base block 11, 112 are coupled to the second inclined portion 22.

Since the configurations of the first inclined portion 21 and the second inclined portion 22 are the same, only the first inclined portion 21 will be described in detail and the description of the second inclined portion 22 will be omitted.

The first inclined portion 21 includes a main body 211, a left side 212, a post 213, and a coupling piece 214. The main body 211 is provided in a plate shape, and the left and right halves 212 and 213 are coupled to the left and right sides, respectively.

The lower surface of the coupling piece 214 is coupled to the upper side of the main body 211 and the upper surface of the coupling piece 214 is coupled to the first moving member 202 of the first driving portion 20.

The coupling piece 214 is formed with a guide groove 214a into which a screw shaft is inserted. Here, the guide groove 214a is a portion where the screw shaft 201 is located. When the main shaft 211 is moved in the Y axis direction, the screw shaft 201 is positioned inside the guide groove 214a, And is formed so as to have a length that can not come into contact with each other.

In this embodiment, the main body 211, the left side 212, the post 213, and the coupling piece 214 are separately formed, but they are integrally formed and the size of the guide groove 214a is set to the first inclined portion 21, It may be formed so as not to come in contact with the screw shaft 201 when it is moved to the lowest position along the first inclined surface 111.

The portions of the left and right sides 212 and 213 which contact the first inclined surface 111 are formed to have inclination angles that are offset from the inclination angle of the first inclined surface 111, The outer surface, which is the opposite surface, is formed so as to have a plane parallel to the Z-axis direction.

A pair of first guide rails 111a spaced apart from the first inclined surface 111 and a pair of guide members 23 engaged with the first inclined surface 111 are provided at a portion contacting the first inclined surface 111.

At this time, a pair of guide rails 24 to be coupled with the first vertical guide member 32 of the second moving module 3, which will be described later, are spaced apart from the outer surface of the first inclined surface 111 (see FIG. 10) .

At this time, the pair of guide rails 24 provided on the first inclined portion 21 and the second inclined portion 22 are installed so as to be parallel to each other in the Z-axis direction, and the pair of guide rails 24 And guides the movement of the second moving module 3 in the Z-axis direction to move along the Z-axis.

As described above, the first inclined portion 21 is coupled to the first movable member 202, the second inclined portion 22 is coupled to the second movable member 203, and the motor (not shown) of the first driving portion 20 The first inclined portion 21 is moved in conjunction with the rotation of the upper shaft 201a while the second inclined portion 23 is moved in conjunction with the rotation of the lower shaft 201b.

At this time, the moving directions of the first inclined portion 21 and the second inclined portion 23 are close to each other by the upper shaft 201a and the lower shaft 201b, which are rotated in opposite directions by the direction changing member 201c They can move at the same time in the losing direction or in the direction away from each other.

10 is a partially exploded perspective view of FIG. Referring to FIG. 10, the second moving module 3 is coupled to the base block 10 including the second driving portion 30 and the vertical moving block 31.

The second driving unit 30 includes a motor 300 such as the first driving unit 20 and an interlocking member 302 moving along the screw shaft 301 and the screw shaft 301.

The second driving unit 30 is installed on the plate 10 so that the screw shaft 301 is positioned in the Z axis direction on the side of the first moving module 2. [

The vertical moving block 31 is disposed such that its flat surface faces the first inclined portion 21 and the second inclined portion 22.

 An inspection module 4 such as a camera for acquiring an image to inspect the substrate is coupled to the outer side surface of the vertical movement block 31 in the Y-axis direction.

The inspection module 4 may be a camera or the like for acquiring an image for measuring the height of the spacer of the substrate.

The first vertical guide member 32 and the second vertical guide member 33 are spaced apart from each other on the surface of the vertical movement block 31 facing the first inclined portion 21, And the guide rail 24 provided on the outer surface of the second inclined portion 23, respectively.

The vertical moving block 31 is moved along the outer sides of the first inclined portion 21 and the second inclined portion 23 through the coupling of the guide rails 24 and the vertical guide members.

Meanwhile, the interlocking member 302 and the vertical moving block 31 are coupled to each other under the interposition of the y-guide 35. 11 is an exploded perspective view of the y guide of Fig. Referring to FIG. 11, a first block 351, a second block 352, and a pair of sliding guides 353 are included.

The first block 351 is coupled to the interlocking member 302, and a protruding end 351a is formed at an end thereof. The second block 352 is coupled to the vertical movement block 31 and has an accommodating groove 352a formed therein for accommodating a protruding end 351a and a pair of sliding guides 353 therein.

The pair of sliding guides 353 are located on both sides of the protruding end 351a. Each of the sliding guides 353 includes a first guide 353a having a slot 353a 'formed along the length thereof and a second guide 353b having a rib 353b' inserted into the slot 353a ' And a guide 353b.

The first guide 353a is coupled to both sides of the protruding end 351a of the first block 351 and the second guide 353b is coupled to the inner wall of the receiving groove 352a of the second block 352 .

12, even if the first inclined portion 21 and the second inclined portion 22 are moved in the Y-axis direction by the driving of the first driving portion 20, Axis direction along the Y-axis direction.

As a result, the vertical movement block 31 can be moved only in the Y-axis direction by the driving of the first driving unit 20, and only in the Z-axis direction by the second driving unit 30. [

Next, an operation state of the substrate inspection apparatus according to the first embodiment of the present invention will be described. 13 and 16 are operational states of a substrate inspection apparatus according to the first embodiment of the present invention.

Movement of Inspection Module in the Y-axis direction

13, when the motor 200 of the first driving unit 20 is driven, the upper shaft 201a and the lower shaft 201b of the screw shaft 201 rotate in opposite directions to each other, and the first moving member 202 And the second moving member 203 move toward each other.

14, the first inclined portion 21 coupled to the first movable member 202 and the second inclined portion 22 coupled to the second movable member are coupled to the first inclined surface 111 and the second inclined portion 22, Two inclined surfaces 112 are moved along the slant surfaces 112, respectively.

That is, the inspection module 4 is moved in the Y-axis direction by the inclined portions which are moved so as to approach each other along the first inclined surface 111 and the second inclined surface 112.

At this time, although not shown, the vertical moving block 31 is moved in the Y-axis direction in accordance with the sliding movement of the y-guide 35.

The inspection module 4 is moved in the direction opposite to the Y-axis direction by the inclined portions which are moved so as to move away from each other along the first inclined surface 111 and the second inclined surface 112, .

Movement of inspection module in Z-axis direction

When the motor 300 of the second driving unit 30 is driven in the state of FIG. 11, the vertical moving block 31 moves in the Z-axis direction as shown in FIG. 13 as the screw shaft 301 rotates.

The explanation is directed to the case where the vertical movement block 31 moves upward in the Z axis direction. When the rotation of the screw shaft 301 is in the opposite direction, the vertical movement block 31 moves downward .

As described above, it is possible to move in the Y-axis direction and the Z-axis direction by the single drive unit, and precise position control can be performed.

Also, when the inspection module 4 is very close to the substrate, only the first driving part 20 which moves in the Y-axis direction can be moved and moved even in the Y-axis direction, have.

Simultaneous movement of inspection module in Y and Z directions

The inspection module may be moved in the Y-axis direction as shown in FIG. 12 and simultaneously moved in the Z-axis direction as shown in FIG. 13 to move the inspection module in the diagonal direction. In Fig. 14, movement in the left upward diagonal direction is shown.

That is, as shown in FIG. 14, the driving in the Y-axis direction and the driving in the Z-axis direction can be performed at the same time to substantially move the inspection module 4 in the diagonal direction, .

In addition, the Y-axis direction driving and the Z-axis direction driving can be individually or simultaneously driven so that the inspection module 4 can be quickly moved to the inspection position.

The scope of the present invention is not limited to the above-described embodiments, but may be embodied in various forms of embodiments within the scope of the appended claims. It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the present invention as defined by the appended claims.

[Description of Reference Numerals]
1: Base module 10: Plate
11: base block 111: first inclined surface
112: second inclined surface 113: groove
2: first moving module 20: first driving section
200: motor 201: screw shaft
201a: Upper shaft 201b: Lower shaft
201c: direction changing member 202: first moving member
203: second moving member 21: first inclined portion
211: main body 212: left side
213: Post 214: Coupling
214a: guide groove 22: second inclined portion
23: guide member 24: guide rail
3: second moving module 30: second driving section
300: motor 301: screw shaft
302: interlocking member 31: vertical movement block
32: first vertical guide member 33: second vertical guide member
35: y guide 351: first block
351a: protruding end 352: second block
352a: receiving groove 353: sliding guide
353a: first guide 353a ': slot
353b: second guide 353b ': rib
4: Inspection module

Claims (9)

A substrate inspection apparatus comprising an inspection module,
plate;
A first moving module coupled to the plate and installed to move the inspection module in the Y axis direction;
And a second moving module coupled to the plate and installed to move the inspection module in the Z axis direction and installed to move in the same direction when moving in the Y axis direction of the inspection module.
The method according to claim 1,
And a base block coupled to the plate and including a base block having a first sloped surface and a second sloped surface inclined downwardly in opposite side edge directions about a central portion,
Wherein the first movement module comprises:
A first movable member and a second movable member that move along the rotation of the screw and move to approach each other or move away from each other, A first driving unit including a first driving unit;
A first inclined portion coupled to the first moving member on one side and a second inclined portion coupled on the other side to move along a first inclined surface of the base block; And
And a second inclined portion coupled to one side of the second movable member and the other side of the second movable member to move along a second inclined surface of the base block.
3. The method of claim 2,
The screw of the first driving unit
A first screw installed to rotate by the motor;
A second screw connected to the first screw so as to have the same axial direction as the first screw; And
And a rotation converting member interposed between the first screw and the second screw to convert the rotational direction so that the rotational directions of the first screw and the second screw are opposite to each other.
3. The method of claim 2,
Wherein the first movement module comprises:
A first inclined guide interposed between the first inclined portion and the first inclined surface of the base block; And
And a second inclined guide interposed between the second inclined portion and the second inclined surface of the base block.
3. The method of claim 2,
Wherein the first inclined surface and the second inclined surface of the base block are formed to have the same inclination angle and the first inclined portion and the second inclined portion correspond to the inclined surfaces of the base block facing the respective inclined surfaces of the base block Wherein the substrate inspection apparatus is formed to have an inclination angle.
3. The method of claim 2,
Wherein the second movement module comprises:
A vertical moving block coupled to an outer surface of the first inclined portion and the second inclined portion and moving in the Y axis direction according to the driving of the first driving portion;
A second driving unit installed on the plate and coupled to one side of the vertical moving block to move the vertical moving block in the Z axis direction; And
And a y guide interposed between the second driving part and the vertical moving block to move in the Y axis direction while sliding the second driving part rotor when the vertical moving block moves in the Y axis direction.
The method according to claim 6,
Wherein the second movement module comprises:
A first vertical guide interposed between an outer surface of the first inclined portion and the vertical moving block; And
And a second vertical guide interposed between an outer surface of the second inclined portion and the vertical moving block.
The method according to claim 1,
Wherein the plate is movable in the X-axis direction.
The method according to claim 1,
Wherein the inspection unit is a camera for acquiring an image for measuring a spacer height of the substrate.
KR1020160030948A 2016-03-15 2016-03-15 Substrate inspection apparatus KR101792543B1 (en)

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CN110132141A (en) * 2019-06-13 2019-08-16 上海电气集团股份有限公司 A kind of locating platform and method of silicon steel sheet measurement
KR20200052695A (en) * 2018-11-07 2020-05-15 김기태 Parts manufacturing apparatus and parts manufacturing system including the same
KR20210097274A (en) * 2020-01-29 2021-08-09 주식회사 탑 엔지니어링 Substrate cutting apparatus

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JP2000205840A (en) 1999-01-07 2000-07-28 Sony Corp Inspection device for shape

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Publication number Priority date Publication date Assignee Title
KR20200052695A (en) * 2018-11-07 2020-05-15 김기태 Parts manufacturing apparatus and parts manufacturing system including the same
CN110132141A (en) * 2019-06-13 2019-08-16 上海电气集团股份有限公司 A kind of locating platform and method of silicon steel sheet measurement
KR20210097274A (en) * 2020-01-29 2021-08-09 주식회사 탑 엔지니어링 Substrate cutting apparatus

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