KR20160149656A - Device cleaning wafer in transfer equipment - Google Patents

Device cleaning wafer in transfer equipment Download PDF

Info

Publication number
KR20160149656A
KR20160149656A KR1020150087093A KR20150087093A KR20160149656A KR 20160149656 A KR20160149656 A KR 20160149656A KR 1020150087093 A KR1020150087093 A KR 1020150087093A KR 20150087093 A KR20150087093 A KR 20150087093A KR 20160149656 A KR20160149656 A KR 20160149656A
Authority
KR
South Korea
Prior art keywords
fluid
suction
pipe
circulating
circulating fluid
Prior art date
Application number
KR1020150087093A
Other languages
Korean (ko)
Other versions
KR101762001B1 (en
Inventor
여영호
윤영환
Original Assignee
여영호
윤영환
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 여영호, 윤영환 filed Critical 여영호
Priority to KR1020150087093A priority Critical patent/KR101762001B1/en
Publication of KR20160149656A publication Critical patent/KR20160149656A/en
Application granted granted Critical
Publication of KR101762001B1 publication Critical patent/KR101762001B1/en

Links

Images

Classifications

    • AHUMAN NECESSITIES
    • A47FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47LDOMESTIC WASHING OR CLEANING; SUCTION CLEANERS IN GENERAL
    • A47L5/00Structural features of suction cleaners
    • A47L5/12Structural features of suction cleaners with power-driven air-pumps or air-compressors, e.g. driven by motor vehicle engine vacuum
    • A47L5/14Structural features of suction cleaners with power-driven air-pumps or air-compressors, e.g. driven by motor vehicle engine vacuum cleaning by blowing-off, also combined with suction cleaning
    • AHUMAN NECESSITIES
    • A47FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47LDOMESTIC WASHING OR CLEANING; SUCTION CLEANERS IN GENERAL
    • A47L7/00Suction cleaners adapted for additional purposes; Tables with suction openings for cleaning purposes; Containers for cleaning articles by suction; Suction cleaners adapted to cleaning of brushes; Suction cleaners adapted to taking-up liquids
    • A47L7/04Suction cleaners adapted for additional purposes; Tables with suction openings for cleaning purposes; Containers for cleaning articles by suction; Suction cleaners adapted to cleaning of brushes; Suction cleaners adapted to taking-up liquids for using the exhaust air for other purposes, e.g. for distribution of chemicals in a room, for sterilisation of the air
    • AHUMAN NECESSITIES
    • A47FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47LDOMESTIC WASHING OR CLEANING; SUCTION CLEANERS IN GENERAL
    • A47L9/00Details or accessories of suction cleaners, e.g. mechanical means for controlling the suction or for effecting pulsating action; Storing devices specially adapted to suction cleaners or parts thereof; Carrying-vehicles specially adapted for suction cleaners
    • A47L9/10Filters; Dust separators; Dust removal; Automatic exchange of filters
    • A47L9/16Arrangement or disposition of cyclones or other devices with centrifugal action

Abstract

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for transporting and cleaning various materials and water retention by injection of a circulating gas and simultaneous suction.
In order to accomplish this, the present invention relates to a method and apparatus for circulating gas to remove contaminants attached to a floor surface by using a circulating fluid injected and sucked in a fluid circulating device, and for conveying and cleaning various materials and water retention by simultaneous suction A shielding tube assembled with a diaphragm having a chamber formed therein and adhered to a bottom surface to which contaminants are adhered along a lower circumferential surface of the chamber, one end of the shielding tube being connected to the chamber of the shielding tube, A supply pipe connected to the discharge port and spraying the circulating fluid to the bottom surface to disperse the pollutant attached to the bottom surface into the chamber of the shut-off pipe, a suction pipe inserted into the outer diameter of the supply pipe with the suction passage interposed therebetween, And a circulating fluid which is connected to the tip of the tube and is dispersed by the pressure of the circulating fluid jetted from the supply tube, A first dust collecting device connected to a front end of the suction pipe to filter out contaminants contained in the fluid sucked from the suction pipe, and a second dust collecting device connected to a front end of the first dust collecting device, And a suction pipe for sucking the circulating fluid filtered by the pollutants in the first dust collector into the fluid circulating device.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a device for transferring and cleaning various substances and water by spraying a circulating gas and simultaneously suctioning the same,

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to an apparatus and method for transferring and cleaning various materials and water retention by simultaneous suction of a circulating gas and simultaneous suction, and more particularly, Versatile, multi-purpose, multi-purpose, low-cost, low-cost, multifunctional, multi-purpose, multi-purpose, multi-purpose collection of materials (sludge, sludge, mud and sediment sediment) For the second purpose, for the purpose of multifunctional cleaning, it is possible to effectively remove contaminants adhered to deep grooves or floors by injection of circulating gas and simultaneous inhalation of various substances The present invention relates to a transferring and cleaning apparatus for transferring water.

Generally, a vacuum cleaner is a device that sucks pollutants such as dust and dust by suction force using an aerator, and all of the above vacuum cleaners are a single cleaning function, but the basic principle is the same, but various types Products.

The vacuum cleaner includes a main body having a discharge port, a blower for generating a suction force by a power source built in the main body, and a dust and dust contained in the air sucked by the suction force of the blower, An air suction pipe connected to the main body and forming a flow path of air containing pollutants flowed in by the suction force of the fan, And a suction brush having a suction hole to which air containing pollutants is sucked. The suction brush is placed on a floor to be cleaned by the vacuum cleaner. When the power switch is operated, the suction force Contaminated air containing pollutants such as dust is sucked through the suction hole of the suction brush Flows within the suction pipe flows into the dust collecting filtering apparatus, the contained in the incoming air flow and dust contaminants as they are filtered in the dust collecting filtering device discharged to the exterior body portion through the outlet only clean air in the clean cleaning is achieved.

However, such a vacuum cleaner can suck and remove dust from a digging groove that can be scraped off with a flat floor or a brush, but the corner or other corner of the window frame that the suction port of the vacuum cleaner can not enter and the narrow gap carpet floor And the dust attached to the bottom of a bed mat, a sofa, a chair and the like can not be cleaned due to inability to suck into the vacuum cleaner. Thus, various cleaning techniques have been proposed to solve this problem. However, It is not resolved by structural limitations.

First, a device for attaching a horizontally rotating brush with a horizontal / vertical direction attached to a vacuum cleaner, rotating the brush to scrape off dust and foreign matter, and then sucking foreign matter.

However, this technique may cause secondary contamination due to damage or abrasion of the surface due to the contact of the cleaning part with the brush, and it may cause deeper, dense, invisible, , "Special difficult-to-get place"), there is a limitation in the suction power and the pollutants may remain in the cleaning process.

Secondly, there is disclosed a technique in which a separate spray nozzle for spraying high-pressure air to a small vacuum cleaner is provided.

As a representative prior art related to the single-function cleaner equipped with such a spray nozzle, there can be mentioned, for example, Korean Patent Laid-Open Publication No. 10-2013-0059500 (name: vacuum cleaner equipped with air injection means).

The present invention relates to an inhaler comprising a main body having a discharge port, a suction pipe communicating with the main body to form a flow path of air to be sucked in, and a suction pipe coupled to an end of the suction pipe, A dust collector, a filter unit, and a dust collecting unit. The dust collector includes a brush, a suction fan installed in the main body to generate a suction force, a dust collector installed in the main body to filter contaminants such as dust contained in the air, The vacuum cleaner is provided with a driving operation portion for operating the vacuum cleaner. The vacuum cleaner is provided with a vacuum cleaner for discharging pollutants such as dust, Wherein the air injection means is disposed in the main body part, An air discharge pipe connected to the air compressor to form a discharge passage of the compressed air, and an air discharge pipe connected to the end of the air discharge pipe to spray the compressed air separately And an injection nozzle unit for injecting the fuel.

However, such a vacuum cleaner equipped with an air jet nozzle blows pollutants such as dust and bacteria by spraying air at a narrow space between appliances, And there is a problem in that it takes more time and trouble to clean again, that is, to clean twice.

As a first technology, the existing technology principle of the number of transfer collecting times of a fluid having a predetermined size and property (physical property) and a powdered residue is a technique of conveying and collecting by pushing with a compressed air blowing force, and as a second technique, There is inhaled air transport transport transport collection and recovery technology.

Since both of the above technologies are a single-function technology that is pushed into the compressed air or sucked into the intake air, both techniques require floating energy, and are unlikely to be used in special difficult places due to the process structure.

Document 1: Korean Patent Application Publication No. 10-2013-0059500

SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to solve the above-mentioned problems, and it is an object of the present invention to provide a method and an apparatus for circulating and supplying a fluid within a double pipe structure, Air circulation through the inner pipe in the sealed atmosphere, the material to be treated and the water stagnant floating simultaneously with the injection are simultaneously introduced into the first primary dust collecting apparatus cyclone through the appearance like the circulating gas, and the circulating fluid and the treated After the material or water retention is separated, the circulating fluid is introduced into the second microfiltration device through the intake pipe and filtered to the fine particles of the dust level. Then, the circulating fluid is introduced into the inlet of the fluid circulation device as circulating fluid And the material to be treated or water retained in the first dust collector is collected and processed according to the purpose of use. The catalyst supply device is installed at a certain position of the circulating fluid inlet of the fluid circulating device, and a well-being environment such as sterilization is completed. In addition, it is possible to carry out transportation from the special difficulty place of the object to be treated floating at the same time with the spraying or the object to be treated, Conveying and cleaning device.

Another object of the present invention is to provide a method and apparatus for injecting and sucking a fluid into an outside air shut-off pipe which is in close contact with a floor to effectively remove contaminants adhering to a deep groove or floor, And a cleaning device using the same.

Another object of the present invention is to provide a cleaning device using injection and suction of fluids, which can simplify the operation by blocking the diffusion of contaminants around the outside air.

Another object of the present invention is to provide a cleaning device using a spraying and suction of a fluid, which can form an atmosphere environment such as well-being by mixing a catalyst material with a circulating fluid.

It is another object of the present invention to provide a cleaning device that uses a centrifugal force to collect and collect contaminants contained in a fluid sucked through a cyclone dust collecting device.

It is another object of the present invention to provide a cleaning device using a spraying and suction of a fluid, which is provided with a filtration device on an intake pipe so as to filter fine dusts of a level of yellow dust contained in the fluid.

In order to accomplish the above-mentioned objects, the present invention provides a method and apparatus for discharging a circulating gas to remove contaminants attached to a floor surface by using a circulating fluid injected and sucked in a fluid circulating apparatus, And a cleaning device, comprising: a shielding tube having a chamber formed therein and having a diaphragm closely attached to a bottom surface to which contaminants are adhered along a lower circumferential surface thereof, one end connected to a chamber of the shielding tube, A supply pipe connected to a discharge port of the circulating device and spraying a circulating fluid to the bottom surface to disperse the pollutant attached to the bottom surface into a chamber of the shut-off pipe, a suction pipe inserted into the outer diameter of the supply pipe, Is connected to the front end of the shut-off tube and circulates the pollutants dispersed by the pressure of the circulating fluid ejected from the supply pipe A first dust collecting device connected to a front end of the suction pipe for filtering the contaminants contained in the fluid sucked from the suction pipe, and a second dust collecting device connected to the front end of the first dust collecting device, And a suction pipe connected to the first dust collecting device and sucking the circulating fluid filtered by the first dust collecting device into the fluid circulating device.

The intake pipe is preferably provided with a catalyst supply device for supplying and mixing the catalyst to the circulating fluid sucked by the intake pipe.

It is preferable that the intake pipe is further provided with a microfiltration device.

And a free wheel for supporting the movement of the shut-off pipe is installed on the circumferential surface of the shut-off pipe.

And a catalyst flow and a fresh air supply pipe for injecting the catalyst and the fresh air from the catalyst supply device into the intake pipe are installed in the intake pipe.

Preferably, the supply pipe is provided with a pressure regulating valve for regulating the pressure and flow rate of the circulating fluid.

The apparatus for transporting and transporting various substances and water retention by spraying and simultaneous suction of a circulating gas according to the present invention is a device for discharging pollutants floated simultaneously with the spraying of a fluid into the outside cone- It is possible to effectively remove contaminants adhering to the deep grooves or the floor by the use of a cone-shaped shielding pipe and a cone-shaped diaphragm intercepting the outside air. Thus, it is possible to prevent the pollution around the periphery, It is possible to realize the simplicity of the operation.

In addition, the present invention has an effect that an atmosphere environment such as sterilization and well-being can be created by incorporating various catalyst materials in a circulating fluid circulating through an intake tract.

In addition, it is possible to collect the contaminants contained in the mixed phase circulating fluid (hereinafter referred to as the circulating fluid) in the attracting and mixing state by the centrifugal force to collect the particles, thereby simultaneously transporting the contaminants or removing the contaminants during the circulation of the fluid In particular, it is possible to further arrange the second fine filtration device (hereinafter referred to as the second filtration device) in front of the intake port or the exhaust port to filter the fine dust of the dust level contained in the circulating gas, Thereby realizing an action effect that can be eliminated.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a view showing the overall configuration of a transporting and cleaning apparatus for transporting various materials and water by simultaneous suction of a circulating gas and simultaneous suction according to a preferred embodiment of the present invention; FIG.
Figure 2 shows the plane of Figure 1;

Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. In the following detailed description, exemplary embodiments of the present invention will be described in order to accomplish the above-mentioned technical problems. And other embodiments which may be presented by the present invention are replaced by descriptions in the constitution of the present invention.

The transporting and cleaning device of various substances and water retention by the spraying and simultaneous suction of the circulating gas of the present invention can be used in the course of the circulation of the gas which suspends and cools the gas stream simultaneously with fine particles and dusts, , Various sediment deposits, various kinds of sludge, wastewater sludge, solid state logistics, precipitated solidification sludge and slurry in various oil tanks, stacked slag, various toxic gas holdings, various kinds of liquid poisonous materials, , Transport, transport, dust collection, storage, or packaging.

Particularly, the transportation and cleaning devices of the present invention are used in various fields such as civil engineering, construction, machinery, electricity, electronics, shipping, shipbuilding, shipbuilding, defense, defense industry, high-tech industry, medical, automobile, Manufacture of structural logistics such as pylons, tanks, bridges, etc., agriculture, water, livestock, dairy, food production processing, mining, aerospace industry, food industry, medical industry, optical industry, advanced robot industry, ceramics industry, refractory industry, Transportation, dust collection, collection, stacking, loading and cleaning, washing and cleaning equipment of industrial, powder industry, plating, toxic material manufacturing industry and others.

The conveying device and the cleaning device of the present invention can be used in a conveying process of a material to be treated and in an invisible place, a corner place, a deep groove, a narrow place, a dense place , Inside and outside of home appliances such as carpets and brass products, bookmarks, locks and containers of irregular bottoms, netting, filtering cloths, clothes, footwear, It can be used for sedimentation, deposition, coagulation sludge, constant density gas flow, liquid of certain standard and concentration, peeling, desorption and cleaning of a fixed size, washing, dust collection, collection and regulation treatment, airplane generator turbine etc. It is designed to remove contaminants present in the special obstacle areas.

The general principle of the conveying device and the cleaning device of the present invention is to use a fluid such as a gas or liquid to form a double tube of a certain shape (circle, ellipse, square, rectangle and the like) Pipe) through a nozzle to a target point of the object to be treated or a material flow at a constant flow rate, the injected fluid reaches and collides with the material to be treated at the target point, The suspended matter or the water residues are floated, and at the same time, the air is sucked into the dust collecting apparatus through the suction pipe at the suction port, and the separated fluid is sucked through the suction pipe or the discharge pipe (hereinafter referred to as the suction pipe) After entering the secondary circulation fluid microfiltration unit, the microfine particles having a particle size of 2.5 μm or less (dust-level fine particles) are filtered, and the clean fluid thus treated is supplied to a blower , It is circulated.

At this time, various kinds of catalyst flow supply devices are selectively provided between the dust collecting device and the secondary filtration device to supply necessary catalysts such as a bactericide, a fragrance, a diluent, a surfactant, an adsorption coagulant, a dehumidifying agent When injected and injected, the respective catalysts will form a well-being atmosphere environment, and the function is further added so that the thermal apparatus is added as a catalyst, and the thermal energy is used for drying the material to be treated and the stay of the object to be treated.

In some cases, the circulating fluid flow of the inventive device may be reversed.

Meanwhile, the transporting and cleaning device for transporting various materials and water by simultaneous suction of the circulating gas and the suction of the circulating gas of the present invention may be used as means for transporting various dusts and suspended matters to other places in addition to means for cleaning various substances and water stays And the exemplary embodiments described below are only for illustrating the technical idea of the present invention. Therefore, the technical scope of the present invention is not to be construed as being limited by the following embodiments.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

BRIEF DESCRIPTION OF THE DRAWINGS The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate embodiments of the invention and, together with the description, serve to explain the principles of the invention.

1 and 2, the cleaning apparatus 100 using the fluid injection and suction of the present invention includes a shutoff tube 10, a supply tube 20, a suction pipe 30, a primary dust collector 40 And a fluid circulation device 50. [0031]

The shut-off tube 10 has a conical shape, and the chamber 12 is formed in the state where the upper and lower ends are open.

An end of the suction pipe 30 is connected to an open upper end of the shut-off pipe 10 and an opened lower end of the suction pipe 30 is in close contact with a bottom surface 90 for cleaning. ).

A diaphragm 11 is fitted on the bottom surface of the shield tube 10 and the diaphragm 11 seals the gap between the shield tube and the bottom surface.

At this time, it is preferable that the gasket is formed on the circumferential surface of the lower end of the shut-off pipe 10 in consideration of airtightness.

The blocking pipe 10 receives the reaction force due to the reaction due to the velocity of the circulating fluid injected from the injection nozzle having a structure that can be easily exchanged through the supply pipe 20, So that the suction and the sucking operation can be continuously performed. Thus, the transfer device and the pollutants can be removed more quickly and easily.

The supply pipe 20 and the suction pipe 30 simultaneously discharge and circulate the circulating fluid to the closed bottom surface 90 through the diaphragm 11 of the shut-off pipe 10 to form a deep portion of the bottom surface 90, Transported, collecting, collecting, collecting, collecting, collecting, collecting, transporting, collecting, or collecting various transported or contaminating materials 92 that are hiding or sticking to or adhering to a special nuisance place such as a place, an invisible place, a corner place,

The supply pipe 20 is connected to a discharge port 58 (hereinafter referred to as a discharge port or a discharge port after the discharge port) of the fluid circulating device 50 and the other end is connected to the shutoff pipe 10 A circulating fluid that is located in the inner chamber 12 of the shutoff tube 10 and is injected through the discharge port 58 of the fluid circulator 50 is sealed by the shutoff tube 10 and the diaphragm 11 The circulating fluid in the chamber 12 in the shutoff tube 10 in the bottom surface 90 or in a mixed state of the contaminants 92 and the contaminants 92 at a predetermined position in a mixed state with the suspended air, (32) to the first dust collector (40).

A pressure regulating valve 24 is provided at a predetermined position of the supply pipe 20 and the pressure regulating valve 24 regulates the pressure and the flow rate and the amount of the circulating fluid passing through the supply pipe 20. A height adjusting device 22 is provided between the supply pipe 20 and the discharge pipe 58 to adjust the distance between the injection nozzle 9 and the bottom surface 90 of the supply pipe 20 .

The suction pipe 30 is a tube that is inserted into the outer diameter of the supply pipe 20 and the suction pipe 30 is formed to have a diameter larger than the diameter of the supply pipe 20 and is inserted between the supply pipe 20 and the suction pipe 30 So that the suction flow path 32 of the mixed phase circulating fluid is formed.

The end of the suction pipe 30 is connected to the first dust collector 40 and the end of the suction pipe 30 is connected to the open upper end of the shutoff pipe 10, The circulation fluid injected to the bottom surface 90 through the injection nozzle 9 of the supply pipe 20 is introduced into the first dust collector 40 through the suction passage 32. [

Contaminants present on the bottom surface 90 closed by the diaphragm 11 of the shutoff tube 10 through the supply pipe 20 and the suction pipe 30 are injected from the injection nozzle 9 through the supply pipe 20 The pollutants 92 and the circulating fluid that are suspended and dispersed around the chamber 12 of the shutoff tube 10 by the reaction force or the reaction force due to the fluid pressure are supplied to the engine 30 and the supply pipe 20, The dust is mixed with the circulating fluid through the suction passage 32 formed between the first dust collector 40 and the first dust collector 40 and then flows into the first dust collector 40. Then, The circulating fluid collected and cleaned by the trapping net 42 under the first dust collecting apparatus 40 is supplied to the fine microfiltration apparatus 40 through the intake tube 60 connected to the upper end of the first dust collecting apparatus 40 80, treated with the second pollutant, and sucked into the fluid circulating device 50.

A spacer 34 attached to the outer diameter portion of the fluid supply pipe is inserted between the suction pipe 30 and the supply pipe 20 at two or more positions separated by 120 degrees and the spacer 34 is inserted into the suction pipe 30, And the supply pipe (20) in the suction flow path (32) based on the concentric circular structure.

A wheel 14 is mounted on the bottom surface 90 of the equipment movement wheel 16 so that the wheel 14 is mounted on the wheel. The shield tube 10 can be freely moved in the forward, backward, left, and right directions while being positioned on the peripheral surface of the shield tube 10.

One side of the first primary dust collector 40 is connected to the suction pipe 30 and receives a circulating fluid containing contaminants sucked into the suction pipe 30 to exert a centrifugal force on the circulating fluid, And collects and collects contaminants contained in the fluid. At this time, the pollutants filtered by the circulating fluid are collected by the collection net 42 installed at the lower end of the first dust collector 40, and the circulating fluid filtered by the pollutants is installed at the upper end of the first dust collector 40 Is introduced into the fluid circulating device (50) through the intake tube (60).

The fluid circulating device 50 injects the circulating fluid from the injection nozzle 9 of the supply pipe 20 and also circulates the circulating fluid suspended in the state of contamination with the suction pipe 30 and the first dust collection An apparatus for sucking, discharging or blowing a clean circulating fluid filtered by a microfiltration apparatus (80) via an apparatus (40) and an intake tube (60), comprising an electric motor (52) And a duct chamber (56) surrounding the air blowing fan (54).

The duct chamber 56 is connected to a discharge port 58 and an intake pipe 60 so that the high pressure fluid is supplied to the supply pipe 20 connected to the discharge port 58 as the blowing fan 54 is driven And the fluid introduced into the first dust collector 40 through the suction pipe 30 is supplied to the suction pipe 60 through the suction nozzle 60 and the fluid circulating device 50 is driven The circulating fluid floating simultaneously with the injection from the injection nozzle 9 at the lower end of the supply pipe 20 flows into the first dust collector 40 through the suction flow path 32 of the suction pipe 30 to return pollutants The collection time or collection time is removed.

Meanwhile, a separate catalyst supply device 70 is further installed in the intake pipe 60. The catalyst supply device 70 mixes a fluid such as a sterilizing agent, a fragrance, a diluent, a surfactant, a humidifier, a dehumidifying agent, and the like (hereinafter referred to as a catalyst) We will continue to contribute.

The catalyst feeder 70 includes a reaction feeder 72 for preparing and feeding a catalyst, a heat source generator 74 installed in the reaction feeder 72 and heating the catalyst stored in the reaction feeder 70, One end of which is connected to the lower end of the reaction feeder 72 and the other end of which is installed to pass through the intake pipe 60 and the fresh air for controlling the concentration of the catalyst and the circulating fluid stored in the reaction feeder 72, The amount of catalyst passing through the catalyst flow and fresh air supply pipe 78 which is connected to the catalyst flow and fresh air supply pipe 78 injected into the intake pipe 60 and to the catalyst flow and fresh air supply pipe 78, And a regulating valve 76 for regulating fresh air supply amount for regulating the concentration of the circulating fluid.

The intake pipe (60) is further provided with a separate microfiltration unit (80) having a second dust collection function. The microfiltration device 80 filters out fine dust particles of a dust level, which is not removed by the first dust collector 40, preferably fine dust particles of 2.5 μm or less, and precisely removes contaminants contained in the circulating fluid do.

Hereinafter, the operation of the transporting and cleaning device for various materials and water retention by the injection of the circulating gas and the simultaneous suction of the circulating gas according to the present invention will be described with reference to FIGS. 1 and 2. FIG.

The use of the conveying and cleaning device according to the present invention is performed by first moving the diaphragm 11 of the shut-off pipe 10 to the electric motor 52 of the fluid circulating device 50 When the power is applied, the air blowing fan 54 rotates, and the circulating fluid is sprayed from the spray nozzle 9 through the discharge pipe 58 through the discharge pipe 58. At the same time, The circulating fluid sprayed through the spray nozzle 9 through the spray nozzle 20 is sprayed onto the bottom surface 90 sealed inside the shutoff tube 10 and is sprayed onto the bottom surface 90 to remove contaminants The contaminants 92 and the circulating fluid that are dispersed are dispersed around the chamber 12 of the shield tube 10 while being separated from the suction tube 30 and the supply tube 20, Is introduced into the first dust collector (40) through the passage (32), and the pollutants are separated from the circulating fluid After the clean circulating fluid passes through the intake pipe, the microfine dust and the like are removed again from the microfiltration device 80 and then introduced (sucked) into the fluid circulating device 50, do.

That is, when the circulating fluid is discharged and supplied to the discharge port 58 of the duct chamber 56 as the fluid circulating device 50 is driven, the circulating fluid circulating through the shut-off pipe 10 through the intake pipe 60 is circulated by the fluid circulation The circulating fluid is injected into the shutoff tube 10 through the injection nozzle 9 and simultaneously flows into the chamber 12 of the shutoff tube 10 as it has a circulation structure that flows into the duct chamber 56 of the apparatus 50 The instantaneous mixed circulating fluid continuously flows into the suction passage (32) and is circulated, thereby rapidly collecting and collecting the dust collecting or pollutants.

Meanwhile, the circulating fluid in which the pollutants are sucked into the suction passage 32 is introduced into the first dust collector 40. At this time, the circulating fluid introduced into the first dust collector 40 rotates, The pollutants 92 included in the circulating fluid drop and fall into the trapping net 42 installed at the lower end of the first dust collector 40 and the fluid from which the pollutants 92 have been removed is returned to the first And is sucked into the intake pipe 60 connected to the upper end of the dust collecting device 40.

The clean circulating fluid flowing into the intake pipe 60 is supplied to the duct chamber 56 of the fluid circulator 50 while being mixed with the catalyst of the catalyst feeder 70 and the catalyst supplied from the fresh air supply pipe 78, So that a well-being effect can be realized.

9: injection nozzle 10: shutoff tube
11: diaphragm 12: chamber
20: supply pipe 30: suction pipe
32: Suction flow path 40: First primary dust collector
42: collection net 50: fluid circulation device
56: Duct chamber 58: Outlet
60: intake tube 70: catalyst supply device
80: Microfiltration device 90: Catalyst feeder

Claims (3)

The circulation gas for removing the pollutants 92 attached to the bottom surface 90 by using the circulating fluid injected and sucked from the fluid circulating device 50 and the conveying of various substances and water retention by simultaneous suction And a cleaning device,
A shielding tube 10 in which a chamber 12 is formed and a diaphragm 11 is attached to a bottom surface 90 of which contaminants 92 are adhered along a lower circumferential surface thereof;
One end of the shutoff tube 10 is connected to the chamber 12 and the other end of the shutoff tube 10 is connected to the discharge port 58 of the fluid circulator 50 to spray the circulating fluid onto the bottom surface 90, 90) to the chamber (12) of the shut-off tube (10);
The end of the pipe is connected to the outer diameter of the supply pipe 20 with the suction passage 32 interposed therebetween. The end of the pollutant is connected to the end of the pipe 10 and dispersed in the pressure of the circulating fluid 92) into the suction passage (32) together with the circulating fluid;
A first dust collecting device 40 connected to a front end of the suction pipe 30 for filtering out contaminants contained in the fluid sucked in the suction pipe 30;
An intake pipe 60 connected to a front end of the first primary dust collector 40 and sucking the circulating fluid filtered by the pollutants 92 in the first primary dust collector 40 into the fluid circulator 50, And an apparatus for transferring and cleaning various substances and water retention by simultaneous suction of the circulating gas and simultaneous suction.
The method according to claim 1,
Wherein the intake pipe (60) is provided with a catalyst supply device (70) for supplying and mixing the catalyst to the circulating fluid drawn into the intake pipe (60). Transporting and cleaning equipment for transport of stays.
3. The method according to claim 1 or 2,
Wherein the suction pipe (60) is further provided with a microfiltration device (80). The device for transporting and cleaning various materials and water retention by simultaneous suction and simultaneous suction of the circulation gas.
KR1020150087093A 2015-06-19 2015-06-19 Device cleaning wafer in transfer equipment KR101762001B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020150087093A KR101762001B1 (en) 2015-06-19 2015-06-19 Device cleaning wafer in transfer equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020150087093A KR101762001B1 (en) 2015-06-19 2015-06-19 Device cleaning wafer in transfer equipment

Publications (2)

Publication Number Publication Date
KR20160149656A true KR20160149656A (en) 2016-12-28
KR101762001B1 KR101762001B1 (en) 2017-08-04

Family

ID=57724624

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020150087093A KR101762001B1 (en) 2015-06-19 2015-06-19 Device cleaning wafer in transfer equipment

Country Status (1)

Country Link
KR (1) KR101762001B1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180106921A (en) * 2017-03-21 2018-10-01 도쿄엘렉트론가부시키가이샤 Gas supply member and gas processing apparatus
KR102279800B1 (en) * 2020-12-21 2021-07-21 한전케이피에스 주식회사 Oil supply device for RCP TBA for emergency and installation method of it

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20130059500A (en) 2011-11-29 2013-06-07 학교법인 한국산업기술대학 Air blowing means having vacumm cleaner

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3766921B2 (en) * 1998-10-30 2006-04-19 三菱電機株式会社 Vacuum cleaner
KR100944746B1 (en) * 2004-03-11 2010-03-03 엘지전자 주식회사 A vacuum clearner
JP2006043444A (en) * 2004-07-07 2006-02-16 Kazuo Takai Exhaust circulation type vacuum cleaner and suction nozzle used for the same

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20130059500A (en) 2011-11-29 2013-06-07 학교법인 한국산업기술대학 Air blowing means having vacumm cleaner

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180106921A (en) * 2017-03-21 2018-10-01 도쿄엘렉트론가부시키가이샤 Gas supply member and gas processing apparatus
KR102279800B1 (en) * 2020-12-21 2021-07-21 한전케이피에스 주식회사 Oil supply device for RCP TBA for emergency and installation method of it

Also Published As

Publication number Publication date
KR101762001B1 (en) 2017-08-04

Similar Documents

Publication Publication Date Title
KR101601246B1 (en) A air cleaner
EP2466085A2 (en) Centrifugal, wet-type air cleaner
KR100663635B1 (en) Deodorization equipment doing self-rotation by a pressured deodorizing agent
KR101959628B1 (en) Shower filter for air cleaning
WO2012111949A2 (en) Centrifugal wet type cleaner
JP4632939B2 (en) Water purification device, water purification method, purification device for exhaust gas treatment device, and purification system for exhaust gas treatment device
KR101612519B1 (en) Dust collector
KR101609512B1 (en) Wet Scrubber
KR101762001B1 (en) Device cleaning wafer in transfer equipment
KR20210001365U (en) Decontamination system for space and surface with scrubbing device
KR20170006088A (en) Air Purifier with water
CN107806677A (en) A kind of new and effective air purifier
KR101611538B1 (en) A Scrubber for Collecting Contaminator from Gas with Swirl Generating Structure
KR20120051887A (en) Air cleaner
KR20180010826A (en) Dust collecting apparatus using multi filling ball
US9782049B2 (en) Liquid filtration vacuum
CN101816536A (en) Self-cleaning dust-free dust-collecting barrel
CN209081586U (en) A kind of environmental protective type chemical sewage disposal device
CN201186070Y (en) Circular filter element type PM10 cyclic washing-filtering device for air purification and disinfection
KR102629915B1 (en) Sterilizing device and Sterilizing system
KR200481183Y1 (en) A vacuum cleaner including water sprayer into sponge filter
KR101404201B1 (en) Apparatus for eliminating paint dust preventing paint absorption
KR20210132904A (en) Decontamination system for space and surface with scrubbing device
KR101857158B1 (en) White smoke eliminating apparatus
GB2338404A (en) A suction cleaning device having a fluid stream for dislodging material from a surface

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
GRNT Written decision to grant