KR20160013558A - Piezo electric pump - Google Patents

Abstract

The present invention relates to a pump transferring a fluid. More specifically, the present invention relates to a piezoelectric pump pumping by using a multi-layer piezoelectric electrode to minimize the size in comparison with an existing pump and improve output and precisely control a flow rate. According to the present invention, the piezoelectric pump comprises: a plurality of panels (110); and a plurality of piezoelectric electrodes (E). The piezoelectric electrodes (E) comprises: pumping electrodes (PE); and a plurality of valve electrodes (VE). The panels (110) comprise: an upper fixing panel (111); a lower fixing panel (112); and a plurality of deformation panels (113). The deformation panel (113) is deformed by deformation of the pumping electrodes (PE) and the valve electrodes (VE).

Description

PIEZO ELECTRIC PUMP

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pump for transferring a fluid, and more particularly, to a piezoelectric pump capable of miniaturizing a size, increasing an output, and more precisely controlling a flow rate by pumping using a multi-layer piezoelectric element.

In general, industrial robots operate according to human needs and are used in factories to improve productivity and reduce labor.

The industrial robot includes a power source for generating power and an actuator for operating the robot by receiving power from the power source.

As the power source, a hydraulic pump that pressurizes and feeds fluid by using an electric motor or the like is generally used.

On the other hand, recent development trend of robots is moving toward the development of robots or home robots in the professional service fields such as the industrial robots, the surgical robots, and the like.

However, in the case of the robot of the professional service field or the robot of the home, the conventional hydraulic pump has the following problems.

First, when using a conventional hydraulic pump, it is difficult to downsize it. That is, as described above, in the case of robots or home robots in the professional service field, which have recently been developed, it is necessary to downsize the power source itself because of the tendency to be developed in miniaturization for convenience of use. However, in the case of the conventional hydraulic pump, it is difficult to miniaturize to obtain a required output, and thus it is difficult to be applied to a robot that is being developed recently.

Second, when using a conventional hydraulic pump, it is difficult to control ultra-precision flow rate. In other words, as described above, recently developed robots require ultra-precise control. In the case of using a conventional hydraulic pump as a power source for this purpose, super precision control is difficult.

Thirdly, when the conventional hydraulic pump is used, there is a problem that the power consumption is large, and thus a lot of cost is consumed in using the robot.

Fourth, there is a problem in that a check valve or the like must be installed in both directions in order to perform pumping in both directions, resulting in a complicated structure and difficulty in miniaturization.

On the other hand, recently, a pump using a piezoelectric element has been proposed for miniaturization and lowering the power of the pump. However, the above-described problems with the pump using the piezoelectric element are still difficult to solve.

On the other hand, the pump itself using the piezoelectric element is a well-known technique and is described in detail in the following prior art documents, and a description thereof will be omitted.

U.S. Patent No. 7,104,768 Japanese Laid-Open Patent No. 1986-027688 Japanese Laid-Open Patent Publication No. 1990-149778 Japanese Patent Laid-Open No. 1993-164052 Japanese Laid-Open Patent No. 1984-203889 Japanese Laid-Open Patent Application No. 1995-274287 Japanese Laid-Open Patent Application No. 1994-147104 Korea Patent No. 1142430 Korean Patent No. 1033077 Korean Patent No. 0868898

Accordingly, an object of the present invention is to solve the above-mentioned problems, and it is an object of the present invention to provide a piezoelectric pump capable of miniaturization and low power consumption while being capable of ultra- .

According to an aspect of the present invention, there is provided a plasma display panel comprising a plurality of panels spaced apart from each other in a vertical direction, and a plurality of piezoelectric elements positioned between the panels; The plurality of piezoelectric elements are disposed between the panels and deform the panel, and a plurality of valves located between the upper and lower adjacent panels on the panel on which the pumping elements are arranged, Element; Wherein the plurality of panels comprise an upper fixed panel and a lower fixed panel spaced apart from each other in a vertical direction and a plurality of deformation panels positioned between the upper fixed panel and the lower fixed panel and spaced apart from each other in the vertical direction; Wherein the deformable panel is deformed by deformation of the pumping element and the valve element.

The valve elements are spaced apart from each other on both sides of the flow direction between the panels and are deformed in the vertical direction to intercept the fluid flowing between the panels.

A first sealing bar which is installed between the panels on which the pumping elements are arranged and is spaced apart from both sides in the flow direction and is an elastic body having a bar shape extending in the longitudinal direction of the panel; And a second sealing bar between the first sealing bars and between the valve elements, the second sealing bars being spaced apart from each other in the front-rear direction of the panel, the first sealing bar being an elastic body having a bar shape extending in the flow direction; And the first sealing bar is also deformed when the panel is deformed.

The venting hole may be formed on the second sealing bar side of the second sealing bar disposed between the panels on which the pumping device is disposed, so that the space between the panels on which the pumping device is disposed is communicated with the outside .

Wherein the elastic modulus of the first sealing bar is smaller than the elastic modulus of the second sealing bar.

In the above, a supply tank is disposed at one side of the valve element to supply fluid, and a storage tank disposed at the other side of the valve element and temporarily storing the discharged fluid.

According to the present invention, it is possible to miniaturize and consume low power, enable ultra-precision flow rate control, and pivot in both directions, which can be used as a power source of a robot which has been developed recently.

1 is an exploded perspective view of a piezoelectric pump according to an embodiment of the present invention, which is cut along the front-rear direction (direction II)
2 is an exploded perspective view illustrating that a piezoelectric pump according to an embodiment of the present invention is cut with respect to a center point in the front-back direction (direction II)
3 is a schematic view illustrating a piezoelectric pump according to another embodiment of the present invention,
4 is an exploded perspective view of a piezoelectric pump according to an embodiment of the present invention, in which each panel is separated after cutting along the front-rear direction (direction II)
5 is an exploded perspective view showing that external electrodes are installed in the front-rear direction, according to an embodiment of the present invention,
FIG. 6 is a perspective view showing that a supply tank and a reservoir are arranged in the front-rear direction as a piezoelectric pump according to an embodiment of the present invention,
FIGS. 7 and 8 are cross-sectional perspective views illustrating a process of introducing a fluid and a process of discharging the fluid after cutting the piezoelectric pump according to an embodiment of the present invention,
FIG. 9 is a schematic view for explaining a process of introducing and discharging a fluid as a piezoelectric pump according to another embodiment of the present invention,
10 and 11 are schematic views for explaining pulsation reduction by injecting a pumping point of a pumping element as a piezoelectric pump according to an embodiment of the present invention.

Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings. In this process, the thicknesses of the lines and the sizes of the components shown in the drawings may be exaggerated for clarity and convenience of explanation.

In addition, the terms described below are defined in consideration of the functions of the present invention, which may vary depending on the intention or custom of the user, the operator. Therefore, definitions of these terms should be made based on the contents throughout this specification.

In addition, the following embodiments are not intended to limit the scope of the present invention, but merely as exemplifications of the constituent elements set forth in the claims of the present invention, and are included in technical ideas throughout the specification of the present invention, Embodiments that include components replaceable as equivalents in the elements may be included within the scope of the present invention.

FIG. 1 is a perspective view of a piezoelectric pump according to an embodiment of the present invention, which is cut along the longitudinal direction (direction II) as a center, FIG. 2 is a perspective view of a piezoelectric pump according to an embodiment of the present invention, 3 is a schematic view for explaining a piezoelectric pump according to another embodiment of the present invention; Fig. 4 is an exploded perspective view of an embodiment of the present invention; Fig. FIG. 5 is a perspective view of a piezoelectric pump according to an embodiment of the present invention, in which the piezoelectric device is cut along the front-rear direction (direction II) Fig. 6 is a perspective view showing that a supply tank and a reservoir are disposed in the front-rear direction as a piezoelectric pump according to an embodiment of the present invention. Figs. 7 and 8 are perspective views showing an embodiment FIG. 9 is a cross-sectional perspective view illustrating a process of introducing and discharging a fluid after cutting along a longitudinal direction (direction II) as a piezoelectric pump according to another embodiment of the present invention. FIG. FIGS. 10 and 11 are schematic views for explaining pulsation reduction by injecting a pumping point of a pumping device as a piezoelectric pump according to an embodiment of the present invention. FIG.

First, the directions used in this specification will be described. As shown in FIG. 1, the direction of flow (direction I) is the direction in which the fluid is conveyed by the pump 100 of the present invention. As shown in the case of the present embodiment, the direction of the straight line connecting the left upper and lower right .

The forward and backward directions (direction II) are the front and rear directions of the pump 100 of the present invention, and the direction of the straight line connecting the left and right sides in the drawing in the present embodiment.

Further, the vertical direction (direction III) is the vertical direction of the pump 100 of the present invention, which is the vertical direction in the drawing of the present embodiment.

Therefore, in the case of the present embodiment, the three directions may be orthogonal to each other, but this is merely an example for illustrating the present invention, and the present invention is not limited thereto.

1 to 3, the piezoelectric pump 100 according to an embodiment of the present invention includes a plurality of panels 110 spaced apart from each other in a vertical direction (direction III) And a plurality of piezoelectric elements (E) positioned thereon.

The plurality of piezoelectric elements E may include a pumping element PE positioned between the panels 110 and a panel 110 in which the pumping element PE is disposed, (Direction III) and a further panel 110 adjacent thereto.

That is, the pumping element PE and the valve element VE are arranged alternately in the vertical direction between the panel 110, the fluid is pressurized and conveyed by the pumping element PE, Fluid flow is allowed or blocked.

Here, the term " piezoelectric element E " means that the shape is changed by power supply as is well known, and may be, for example, a piezoelectric element such as a piezoelectric element.

Of course, the piezoelectric element E is deformed in shape by power supply as described above, so that the piezoelectric element E is intended to push the fluid or to intermit the flow of the fluid. As long as the piezoelectric element E achieves this object, For example, a piezoelectric ceramic, a conductive polymer, lead zirconate titanate (pzt), or the like, are all within the scope of the present invention.

The plurality of panels 110 includes an upper fixing panel 111 and a lower fixing panel 112 disposed at the uppermost layer and the lowermost layer respectively and a plurality of the upper and lower fixing panels 111 and 112 are disposed between the upper fixing panel 111 and the lower fixing panel 112 And a deformation panel 113 interlocked with the pumping element (PE) and deforming in the vertical direction.

That is, as shown in FIG. 1A, for example, when the upper fixing panel 111 and the lower fixing panel 112 are disposed on the uppermost layer and the lowermost layer, respectively, and four pieces of the deformation panel 113 are disposed between the upper fixing panel 111 and the lower fixing panel 112 The first pumping element PE1 is disposed between the upper fixing panel 111 and the first deforming panel 113-1 disposed on the lower side.

A first valve element VE1 is disposed between the first deformable panel 113-1 and the second deformable panel 113-2 disposed below the first deformable panel 113-1.

Similarly, a second pumping element PE2 is disposed between the second deforming panel 113-2 and the third deforming panel 113-3 disposed below the second deforming panel 113-2, And the fourth deformable panel 113-4 disposed on the lower side thereof, the second valve element VE2 is disposed.

Finally, a third pumping element PE3 is disposed between the fourth modified panel 113-4 and the lower fixed panel 112 disposed on the lowermost layer.

That is, as described above, the pumping element PE and the valve element VE are arranged alternately in the vertical direction (direction III).

In addition, the deformable panel 113 is deformed in the vertical direction (direction III) in conjunction with the deformation of the pumping element (PE), whereby the fluid is transported in the flow direction (direction I). This will be described later.

The valve elements VE are disposed between the panels 110 at both ends of the flow direction (direction I), and have a bar shape to be deformed in the up-and-down direction (direction III) This is also described separately below.

In addition, the pump 100 of the present invention includes a plurality of panels 110 arranged in a vertical direction as shown in the figure, and is transported in a flow direction (direction I) while passing a fluid between the panels 110. As shown in FIG. 1, in order to maintain the laminated structure of the panel 110 in the vertical direction and to prevent the fluid from leaking, the flow direction of the fluid between the panels 110 in which the pumping element (PE) A first sealing bar 130 disposed at both ends of the panel 110 and having a bar shape and disposed between the first sealing bar 130 and the valve element VE, II) and a second sealing bar (140), each of which is disposed on both sides of the bar.

That is, the first sealing bar 130 is disposed between the panels 110 in which the pumping element (PE) is disposed. In FIG. 1A, the first sealing bar 130 is disposed between the upper fixing panel 111 and the first deforming panel 113-1 Between the second deformable panel 113-2 and the third fixed panel 113-3 and finally between the fourth fixed panel 113-4 and the lower fixed panel 112. [

In this case, the first sealing bars 130 are bar-shaped and are disposed at both ends of the flow direction (direction I), respectively, and are long in the front-rear direction (direction II) of the panel 110 .

Meanwhile, the second sealing bar 140 is installed between all the panels 110. That is, it is installed in both the part where the pumping element PE is disposed and the part where the valve element VE is disposed.

That is, in the portion where the pumping element PE is disposed, the second sealing bar 140 is disposed between the first sealing bars 130. In a portion where the valve element VE is disposed, the valve element VE The second sealing bar 140 is disposed between the first sealing bar 140 and the second sealing bar 140.

At this time, the second sealing bars 140 have bar shapes, and are installed at both ends of the panel 110 in the forward and backward directions, respectively, and may be disposed long in the flow direction.

That is, the fluid is conveyed along the flow direction (direction I) between the panels 110, and the second sealing bar 140 serves as a seal so as not to leak in the forward and backward directions of the panel 110, The first sealing bar 130 is installed to maintain and seal the structure of the sealing member 110.

The fluid is transferred by the deformation of the deformation panel 113 so that the deformation panel 113 can be more easily deformed by the deformation of the pumping element 140 of the second sealing bar 140 It is also possible to form a vent hole H formed at one side of the second sealing bar 140 disposed between the panels 110 where the PEs are disposed.

That is, the space between the panels 110 in which the pumping element PE is disposed communicates with the outside by the vent hole H, so that the deforming element 113 can be easily deformed by the pumping element PE Which will be described later.

Meanwhile, the first sealing bar 130 and the second sealing bar 140 are made of an elastic material to prevent leakage of the fluid and to support the structure of the panel 110, It is also possible.

As described above, since the first sealing bar 130 and the second sealing bar 140 are in contact with the deformation panel 113, it is preferable that the first sealing bar 130 and the second sealing bar 140 are deformed to some extent to absorb the deformation of the deformation panel 113 .

That is, since the deformable panel 113 of the present invention is deformed in its entirety, when the deformable panel 113 is deformed upward in the drawing as shown in FIG. 1B in the case of the first sealing bar 130, When the deforming panel 113 is deformed downward in the drawing, the first sealing bar 130 is deformed downward as well.

Since the second sealing bar 140 is also the same as the second sealing bar 140, a duplicate description will be omitted.

The material of the first sealing bar 130 may be selected so that the deformation rate of the first sealing bar 130 is higher than that of the second sealing bar 140. That is, the first sealing bar 130 needs to absorb the deformation of the deformation panel 113 as well as the deformation of the valve element VE. In contrast, the second sealing bar 140 functions as a sealing member, The first sealing bar 130 is higher than the second sealing bar 140 as described above.

On the other hand, the strain rate refers to a ratio of deformation amount to an original length of an object, and this is a widely known concept, and thus a detailed description thereof will be omitted.

As shown in FIG. 1, the pumping element (PE) of the present invention may be disposed at a central point between the panels 110 in a cylindrical shape. Of course, the pumping element (PE) is intended to transfer the fluid by deforming the panel 110. As long as the pumping element (PE) has a different shape or a plurality of pumping elements All fall within the scope of the present invention.

1, a plurality of deformation panels 113 may be disposed between an upper fixed panel 111 and a lower fixed panel 112, and a plurality of deformation panels 113 may be disposed between the upper fixed panel 111 and the lower fixed panel 112, It is also possible to arrange a plurality of modules in the vertical direction to increase the output as shown in FIG.

At this time, the lower fixing panel 112 of the module disposed on the upper side in the drawing and the upper fixing panel 111 of the module disposed on the lower side in the drawing may be disposed so as to be in mutual contact with each other, It is also possible to use the lower fixed panel 112 and the upper fixed panel 111 together.

1 and 2, when the pumping element PE is in direct contact with the panel 110 disposed on the upper and lower sides and the panel 110 is deformed in the vertical direction (direction III) 3, a supporting portion 150 of an elastic material is disposed between the panels 110 on which the piezoelectric element PE is disposed, and the piezoelectric element PE is supported by the supporting portions 150 And the upper surface of the panel 110 and the lower surface of the panel 110. At this time, the piezoelectric element PE may be deformed to have a specific curvature to deform the panel 110, Will be described later.

Meanwhile, as described above, since deformation occurs when power is applied to the pumping element PE and the valve element VE, it is also possible to form the electrode EL on the panel 110 for applying the power.

4, the electrode EL may be formed on the panel 110 in which the pumping element PE is disposed on the upper surface and the valve element VE is disposed on the bottom surface. In this case, The electrode EL includes a pumping electrode EL1 formed on an upper surface of the panel 110 and communicating with the pumping element PE and a pumping electrode EL1 formed on the bottom surface of the panel 110 and communicating with the valve element VE And a valve electrode EL2.

In the embodiment shown in FIG. 4, the electrode EL may be formed on the upper surface and the lower surface of the first deformable panel 113-1 and the third deformable panel 113-3 of the panel 110. FIG.

That is, in the case of the first deformable panel 113-1, a pumping electrode EL1 communicating with the first pumping element PE1 is formed on the upper surface, and a pumping electrode EL1 communicating with the second deforming panel 113-2 A valve electrode EL2 communicating with one valve element VE1 may be formed.

The valve electrode EL2 is separately formed to communicate with the first valve element VE1 disposed at both ends of the second deforming panel 113-2 in the flow direction (direction I) This is because each of the first valve elements VE1 must be independently controlled as will be described later.

In addition, the first valve element VE1 may include a conductive part CN1 formed on the upper surface of the first valve element VE1 and communicating with the valve electrode EL2, so that more stable power supply can be achieved.

The first deformable panel 113-1 has been described with respect to the electrode EL and the conductive portion CN1 of the present invention. However, since the same is applied to the third deformable panel 113-3, Is omitted.

Meanwhile, the electrode EL may be any conductive material, but it is also possible to use graphene.

As is well known, the graphene is a thin film-like nano material in which carbon atoms are entangled in a honeycomb shape. Its strength is 200 times that of steel, similar to diamond, its thermal conductivity is 13 times that of copper, Which is 100 times larger than that of other materials. Particularly, the graphene is suitable for use in the panel 110 which is deformed to transport the fluid as in the present invention because it does not break even when bent or twisted.

4, only the pump electrode EL1 is shown on the upper surface of the lower support panel 112, but a valve electrode may be formed in the same manner as described above when a valve element of another module is disposed on the lower side.

As described above, power is supplied to the pumping element PE or the valve element VE through the electrode EL, and the external electrode 160 for supplying power to the electrode EL is connected to the p- As shown in FIG.

That is, it is installed outside the plurality of panels 110 and communicates with the pumping element PE or the valve element VE to supply power.

At this time, the external electrode 160 may include a control unit (not shown) to supply power to the external electrode 160 through the control unit, or may connect the control unit directly to the electrode EL to supply power .

In order to communicate the external electrode 160 with the valve element VE, a conduction part CN2 may be formed on the front surface or the rear surface of the valve element VE to achieve stable power supply.

As described above, according to the present invention, the pump element (PE) is arranged in a plurality of layers in the up and down direction (direction III) to transport the fluid. In order to supply and discharge the fluid, And a reservoir 180 disposed at the other side of the valve element VE and temporarily storing the discharged fluid.

That is, fluid is supplied to one side of the valve element VE from the supply tank 170 and the valve element VE is pressurized and discharged through the pumping element PE through the other side. Thereafter, the pressurized and discharged fluid is supplied to the actuator side that drives the robot via the reservoir 180.

Hereinafter, a method of pumping using the piezoelectric pump 100 of the present invention will be described with reference to FIGS. 7 and 8. FIG.

First, in the step of introducing the fluid, power is applied to the pumping element (PE) to reduce the length of the piezoelectric element (PE) in the vertical direction (direction III), as shown in FIG. Further, power is applied to the valve element VE on one side of the valve element VE to deform a space between the valve element VE and the panel 110, while the valve element VE on the other side is deformed A power source is not supplied to prevent a space from being formed between the panel 110 and the panel 110.

7, when the length of the first pumping element PE1 in the up and down direction (direction III) is reduced, the first deforming panel 133-1 disposed on the bottom surface of the first pumping element PE1 It is deformed upward in the drawing. When the length of the second pumping element PE2 in the up-and-down direction (direction III) decreases, the second modification panel 133-2 is deformed downward in the drawing, and at the same time, And is deformed in an upward direction. Further, the fourth modified panel 133-4 is deformed downward in the drawing by the reduction of the length of the third pumping element PE3 in the vertical direction (direction III).

The internal space between the first deformable element 133-1 and the second deformable element 133-2 and the internal space between the third deformable element 133-4 and the fourth deformable panel 133-4 are enlarged And the internal pressure is lowered.

At this time, the input valve element VE_in disposed on one side of the valve element VE, that is, on the left side in the drawing, is deformed to form the second deformable panel 133-2 And the third deformable panel 133-3.

Accordingly, the fluid flows through the space between the input valve element VE_in and the deformable panels 133-2 and 133-3 to the inner space between the first deformable element 133-1 and the second deformable element 133-2, The fluid flows in the flow direction (direction I) into the internal space between the third deformable element 133-4 and the fourth deformable panel 133-4.

At this time, the other side of the valve element VE, that is, the discharge valve element VE_out disposed on the right side of the drawing, is not supplied with power, so that no space is formed between the valve element VE and the panel 110.

Then, the discharging step of discharging the introduced fluid increases the length of the piezoelectric element (PE) in the vertical direction (direction III) by applying a power of the opposite polarity to the pumping element (PE) Thereby reducing the space between the panels 110. That is, the first deformation panel 113-1 is deformed in the downward direction in the drawing by the increase of the length of the first pumping element PE1 in the up-and-down direction (direction III). Further, the length of the second pumping element PE2 in the up-and-down direction (direction III) is increased so that the second deforming panel 113-2 is deformed in the upper direction and the third deforming panel 113-3 is deformed in the lower direction in the drawing . In addition, with the increase of the length of the third pumping element PE3 in the up and down direction (direction III), the fourth deformed panel 113-4 is deformed upward in the figure.

Therefore, the space between the first deformable panel 113-1 and the second deformable panel 113-2 and between the third deformable panel 113-3 and the fourth deformable panel 113-4 is reduced.

At this time, power is cut off to the valve element VE of one side of the valve element VE, that is, the input valve element VE_in so that no space is formed between the input valve element VE_in and the panel 110, Do not enter. In addition, power is supplied to the valve element VE on the other side, that is, the discharge valve element VE_out, so that a space is formed between the valve element VE and the panel 110 to discharge the fluid.

Therefore, as shown in Fig. 8, the fluid is discharged in the right direction in the drawing.

In other words, as shown in Fig. 7, when the deformation panel 113 spreads due to the reduction of the pumping element (PE) and the internal space expands, fluid flows in through the inlet valve element VE_in, The fluid is discharged through the discharge valve element VE_out when the deformed panel 113 is brought close to each other due to the expansion of the pumping element PE and the internal space is reduced.

On the other hand, the valve elements VE are arranged at both ends of the flow direction (direction I), respectively, but have a bar shape and are deformed in the vertical direction (direction III). In other words, as shown in FIG. 7, in the case of the inlet valve element VE_in, a part of the center side of the inlet valve element VE_in is deformed in the upward direction in the figure by the supply of power, The fluid is returned to the original shape by the inflow of the fluid or by the cutoff of the power supply, so that no space is formed between the deformable element 113 and the inflow of the fluid.

Also, in the case of the discharge valve element VE_out, a space is formed between the deforming element 113 and the deformable element 113 by the power supply, so that the fluid is discharged or returned to the original shape by interruption of the power supply, So that the flow of the fluid is interrupted by interrupting the discharge of the fluid.

Meanwhile, as shown in FIGS. 7 and 8, the valve element VE may have a bar shape, and a part of the center thereof may be deformed upward to have an arc shape as a whole.

However, this is merely one example for explaining the present invention, and it can be understood that deformation of the valve element VE may be performed in a different shape (for example, A shape in which the height of the light guide plate is constantly reduced), and the like are all within the scope of the present invention.

As described above, the fluid is introduced and discharged by the deformation of the deformation panel 113. At this time, as shown in FIG. 1, the pumping element (PE) of the second sealing bar 140 It is also possible to form a vent hole H formed at one side of the second sealing bar 140 disposed between the panels 110. [

This deforms the first deforming panel 113-1 while deforming the first pumping element PE1 in a space between the upper support panel 111 and the first deforming panel 113-1, When the inner space between the support panel 111 and the first deformable panel 113-1 communicates with the outside to allow air to flow in and out, the first deformable panel 113-1 is deformed in the upward or downward direction It is easy to become.

3, it is also possible to dispose the pumping element PE on the upper and lower sides of the supporting part 150 after the supporting part 150 is disposed in the middle of the piezoelectric element PE, The element PE can also be deformed to a specific curvature as shown in Fig.

That is, as the piezoelectric element PE is deformed to a specific curvature, the deformation panel 113 of the panel 110 is also interlocked and deformed, so that the fluid flows in and out as described with reference to FIGS.

On the other hand, as shown in FIGS. 7 and 8, a space is formed between the inlet valve element VE_in and the deformation panel 113 when the fluid flows, and no space is formed in the discharge valve element VE_out.

On the contrary, when the fluid is discharged, no space is formed between the inlet valve element VE_in and the deformation panel 113, and a space is created in the discharge valve element VE_out.

Therefore, as shown in FIG. 4, the valve electrode EL2 is connected to both side valve elements VE, that is, the inlet valve element VE2, (VE_in) and the discharge valve element (VE_out) separately from each other

In the case of the piezoelectric pump 100 according to the present invention as described above, since the piezoelectric pump 100 can be arranged in multiple layers, the size of the pump for obtaining the required output can be made smaller than that of the conventional pump, .

However, it is necessary to precisely control the flow rate discharged from the piezoelectric pump 100 of the present invention in order to more precisely control the robots or the domestic robots in the professional service field.

To this end, the frequency of the power supplied to the pumping element (PE) can be controlled to control the flow rate more precisely than in the prior art.

That is, as described above, the deformation of the deformation panel 113 causes the fluid to flow in and out, and deformation of the deformation panel 113 is interlocked with the pumping element (PE).

Therefore, by controlling the deformation period of the pumping element (PE), the deformation period of the deformation panel 113 can be controlled, thereby controlling the frequency of the power supplied to the pumping element (PE) will be.

That is, as described above, since the frequency of the power source can be controlled very precisely, the deformation of the deformable panel 113 can be precisely controlled, so that the flow rate can be controlled more precisely than in the prior art.

On the other hand, when controlling the frequency of the power supplied to the pumping element (PE), the frequency of the power supplied to the valve element VE can be controlled in the same manner to enable smooth inflow and discharge.

In order to control the flow rate, it is also possible to control the frequency of the power source as described above, and to control the flow rate by driving only a specific pumping element PE among the pumping elements PE.

That is, as shown in FIG. 1, the piezoelectric pump 100 of the present invention has a plurality of pumping elements PE stacked in a vertical direction (direction III). At this time, among the plurality of pumping elements PE, Only the element PE is driven.

For example, in the case of FIG. 1, only the second pumping element PE2 is selectively driven, or the flow rate is controlled by selectively driving the first pumping element PE1 and the second pumping element PE2.

To this end, a controller (not shown) connected to each pumping element (PE) may selectively drive each pumping element (PE).

As described above, according to the pumping method of the present invention, the flow rate can be controlled more precisely than in the prior art.

As described above, since the piezoelectric pump 100 of the present invention has a plurality of pumping elements PE stacked in the vertical direction, if the pumping element PE is driven at the same time, pulsation may occur in the pump itself .

In order to prevent this, it is also possible to control the pulsation by dispersing the application time points of the power supplied to the pumping elements (PE).

That is, when pumping occurs at time T1 and T2 by one pumping element PE as shown in FIG. 10, if the magnitude of the pulsation by the pumping is M1, the magnitude of pulsation by the entire pumping element is Amplified.

At this time, as shown in FIG. 11, when the pumping timing of each pumping element is given a phase difference? T, pulsation suppression becomes possible.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the same is by way of illustration and example only and is not to be construed as limiting the present invention. It is obvious that the modification or improvement is possible.

110: Panel 111: Upper Fixed Panel
112: lower fixing panel 113:
130: first sealing bar 140: second sealing bar
150: Support part 160: External electrode
170: Supply tank 180: Storage tank
E: Piezoelectric element PE: Pumping element
VE: Valve element EL: Electrode
EL1: pumping electrode EL2: valve electrode

Claims (6)

A plurality of panels 110 spaced apart in the vertical direction, and a plurality of piezoelectric elements E positioned between the panels 110; The plurality of piezoelectric elements E include a pumping element PE positioned between the panels 110 to deform the panel 110 and a plurality of piezoelectric elements E which are arranged on the panel 110 on which the pumping elements PE are arranged, And a plurality of valve elements (VE), which are located between adjacent adjacent panels (110) and serve as valves; The plurality of panels 110 are disposed between the upper fixing panel 111 and the lower fixing panel 112. The upper and lower fixing panels 111 and 112 are spaced apart from each other in the vertical direction, And a plurality of deformation panels (113) spaced apart from each other in the direction of the arrows; Wherein the deformable panel (113) is deformed by deformation of the pumping element (PE) and the valve element (VE). The apparatus according to claim 1, wherein the valve elements (VE) are spaced apart from each other on both sides in the flow direction between the panels (110) and are deformed in the vertical direction to control the fluid flowing between the panels (110) Piezoelectric Pump. The panel (110) according to claim 1, characterized by further comprising a plurality of panels (110) arranged on both sides of the flow direction between the panels (110) 1 sealing bar 130; A second sealing bar 140 disposed between the first sealing bars 130 and the valve element VE and spaced apart from the front and rear sides of the panel 110 in a forward and backward direction and extending in the flow direction, ; Wherein the first sealing bar (130) is also deformed when the panel (110) is deformed. The ventilation apparatus according to claim 3, further comprising a vent hole (H) formed at one side of the second sealing bar (140) disposed between the panels (110) in which the pumping element (PE) Further comprising a space between the panel (110) where the pumping element (PE) is disposed and the outside. 4. The piezoelectric pump of claim 3, wherein the elastic modulus of the first sealing bar (130) is less than the elastic modulus of the second sealing bar (140). The apparatus according to claim 1, further comprising: a supply tank (170) disposed at one side of the valve element (VE) for supplying fluid; a reservoir (210) disposed at the other side of the valve element 180). ≪ / RTI >

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