KR20140081140A - Light emitting device and lighting system having the same - Google Patents
Light emitting device and lighting system having the same Download PDFInfo
- Publication number
- KR20140081140A KR20140081140A KR1020120150547A KR20120150547A KR20140081140A KR 20140081140 A KR20140081140 A KR 20140081140A KR 1020120150547 A KR1020120150547 A KR 1020120150547A KR 20120150547 A KR20120150547 A KR 20120150547A KR 20140081140 A KR20140081140 A KR 20140081140A
- Authority
- KR
- South Korea
- Prior art keywords
- layer
- light emitting
- emitting device
- barrier layer
- substrate
- Prior art date
Links
- 230000004888 barrier function Effects 0.000 claims abstract description 73
- 239000004065 semiconductor Substances 0.000 claims abstract description 63
- 239000011777 magnesium Substances 0.000 claims abstract description 53
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims abstract description 49
- 229910052749 magnesium Inorganic materials 0.000 claims abstract description 49
- 238000009792 diffusion process Methods 0.000 claims abstract description 46
- 239000000758 substrate Substances 0.000 claims abstract description 45
- 238000002347 injection Methods 0.000 claims abstract description 31
- 239000007924 injection Substances 0.000 claims abstract description 31
- 238000000034 method Methods 0.000 claims description 17
- 230000002265 prevention Effects 0.000 claims description 14
- 230000002708 enhancing effect Effects 0.000 claims description 10
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 7
- 238000005286 illumination Methods 0.000 claims description 7
- 229910052698 phosphorus Inorganic materials 0.000 claims description 3
- 239000011574 phosphorus Substances 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 261
- 238000007599 discharging Methods 0.000 description 30
- 229910002601 GaN Inorganic materials 0.000 description 22
- 239000000463 material Substances 0.000 description 20
- -1 InN Inorganic materials 0.000 description 10
- 230000000903 blocking effect Effects 0.000 description 8
- 238000000465 moulding Methods 0.000 description 7
- 150000001875 compounds Chemical class 0.000 description 6
- 238000000151 deposition Methods 0.000 description 6
- 150000004767 nitrides Chemical class 0.000 description 6
- 239000004417 polycarbonate Substances 0.000 description 6
- 229920000515 polycarbonate Polymers 0.000 description 6
- 238000010168 coupling process Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000003973 paint Substances 0.000 description 5
- 239000004033 plastic Substances 0.000 description 5
- 229920003023 plastic Polymers 0.000 description 5
- 229910002704 AlGaN Inorganic materials 0.000 description 4
- 239000004698 Polyethylene Substances 0.000 description 4
- 239000004743 Polypropylene Substances 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 229920000573 polyethylene Polymers 0.000 description 4
- 229920001155 polypropylene Polymers 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 230000003746 surface roughness Effects 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 239000002019 doping agent Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000017525 heat dissipation Effects 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 229920000139 polyethylene terephthalate Polymers 0.000 description 3
- 239000005020 polyethylene terephthalate Substances 0.000 description 3
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 238000000071 blow moulding Methods 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 2
- 239000004926 polymethyl methacrylate Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 229910052718 tin Inorganic materials 0.000 description 2
- 239000012780 transparent material Substances 0.000 description 2
- XCZXGTMEAKBVPV-UHFFFAOYSA-N trimethylgallium Chemical compound C[Ga](C)C XCZXGTMEAKBVPV-UHFFFAOYSA-N 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910005540 GaP Inorganic materials 0.000 description 1
- 108010043121 Green Fluorescent Proteins Proteins 0.000 description 1
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 239000002223 garnet Substances 0.000 description 1
- 238000002248 hydride vapour-phase epitaxy Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- QBJCZLXULXFYCK-UHFFFAOYSA-N magnesium;cyclopenta-1,3-diene Chemical compound [Mg+2].C1C=CC=[C-]1.C1C=CC=[C-]1 QBJCZLXULXFYCK-UHFFFAOYSA-N 0.000 description 1
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000001451 molecular beam epitaxy Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 description 1
- 239000011112 polyethylene naphthalate Substances 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000002096 quantum dot Substances 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 229910052714 tellurium Inorganic materials 0.000 description 1
- RXMRGBVLCSYIBO-UHFFFAOYSA-M tetramethylazanium;iodide Chemical compound [I-].C[N+](C)(C)C RXMRGBVLCSYIBO-UHFFFAOYSA-M 0.000 description 1
- IBEFSUTVZWZJEL-UHFFFAOYSA-N trimethylindium Chemical compound C[In](C)C IBEFSUTVZWZJEL-UHFFFAOYSA-N 0.000 description 1
- 238000000927 vapour-phase epitaxy Methods 0.000 description 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N zinc oxide Inorganic materials [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/14—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a carrier transport control structure, e.g. highly-doped semiconductor layer or current-blocking structure
- H01L33/145—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a carrier transport control structure, e.g. highly-doped semiconductor layer or current-blocking structure with a current-blocking structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/20—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Non-Portable Lighting Devices Or Systems Thereof (AREA)
Abstract
Description
The present invention relates to a light emitting device, and more particularly, to a light emitting device, a method of manufacturing a light emitting device, a light emitting device package, and an illumination system for improving light emitting characteristics.
Light Emitting Device is a compound semiconductor whose electrical energy is converted into light energy. It can be produced from compound semiconductors such as Group III and Group V on the periodic table and can be implemented in various colors by controlling the composition ratio of compound semiconductors. Do.
When a forward voltage is applied to the light emitting device, electrons in the n-layer and holes in the p-layer are coupled to emit energy corresponding to the band gap energy of the conduction band and the valance band. For example, nitride semiconductors are widely used in the development of optical devices and high-power electronic devices due to their high thermal stability and wide band gap energy. I am receiving great attention. Particularly, blue light emitting devices, green light emitting devices, ultraviolet (UV) light emitting devices, and the like using nitride semiconductors have been commercialized and widely used.
Conventional nitride semiconductors are formed of an n-type first conductivity type semiconductor layer, an active layer, and a p-type second conductivity type semiconductor layer, and enhance the radiative recombination of electrons and holes in the active layer Much research is under way.
However, in the conventional nitride semiconductor, it is difficult to inject a large amount of holes into the active layer due to the low carrier concentration and mobility of the p-type second conductivity type semiconductor layer, resulting in a problem of lowering the light intensity.
In addition, in the conventional nitride semiconductor, a certain amount of magnesium (Mg) diffuses into the active layer, and the brightness of the light emitting device is lowered due to magnesium diffused into the active layer.
In order to solve the above-mentioned problems, it is an object of the present invention to provide a light emitting device and an illumination system including the light emitting device for improving the luminous intensity of the light emitting device.
According to an aspect of the present invention, there is provided a light emitting device comprising: a substrate; a first conductive semiconductor layer formed on the substrate; an active layer formed on the first conductive semiconductor layer; A barrier layer including an injection enhancement layer, a magnesium diffusion prevention layer formed on the hole injection enhancement layer, and a second conductivity type semiconductor layer formed on the barrier layer.
The present invention has an effect of preventing a decrease in luminous intensity by magnesium by forming a magnesium diffusion preventing layer between the p-type second conductivity type semiconductor layer and the active layer.
Further, according to the present invention, the hole injection improving layer is formed between the second conductivity type semiconductor layer and the active layer, so that the amount of hole injected into the active layer is increased to improve the luminous intensity.
Further, the present invention has the effect of preventing the diffusion of magnesium more effectively by forming the magnesium diffusion preventing layer and the hole injection improving layer in multiple layers.
1 is a cross-sectional view of a light emitting device according to the present invention,
2 is a cross-sectional view showing a barrier layer of a light emitting device according to the present invention,
FIG. 3 is a cross-sectional view showing a state where holes and magnesium of the light emitting device according to the present invention pass through the barrier layer,
4 to 9 are sectional views showing a method of manufacturing a light emitting device according to the present invention,
10 is a cross-sectional view of a light emitting device package according to the present invention, and Fig.
11 to 13 are exploded perspective views illustrating embodiments of an illumination system having a light emitting device according to the present invention.
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1 is a cross-sectional view illustrating a light emitting device according to the present invention, FIG. 2 is a cross-sectional view illustrating a barrier layer of a light emitting device according to the present invention, and FIG. And FIGS. 4 to 9 are cross-sectional views illustrating a method of manufacturing the light emitting device according to the present invention.
1 to 3, a
The
A
The
The
The second buffer layer Al x Ga (1-x) N (0 ? X? 1) / GaN superlattice layer effectively blocks dislocations due to lattice mismatch between the material of the light emitting structure and the
The first
The first
Alternatively, the first
A
The
Further, a
The
The lattice constant of the
The
Electrons injected through the first conductive
The
The well layer / barrier layer of the
A
The
When the thickness t1 of the
The
The
The hole
The hole
The magnesium
The thickness t4 of the magnesium
The magnesium blocking of the magnesium
Although the magnesium
Although the
3, when the holes and magnesium reach the top of the
Holes passing through the
On the other hand, a part of magnesium not blocked by the
As described above, since the magnesium diffusion preventing layer can not be formed over a certain thickness, if the hole injection improving layer is formed between the magnesium diffusion preventing layers, the hole injection can be smoothly performed and the magnesium diffusion can be prevented more effectively.
Although the
Hereinafter, a manufacturing process of the light emitting device according to the present invention will be described with reference to FIGS. 4 to 9. FIG.
4, the
The
The first
The first conductivity
5, when the
The
The
6, a
First, the hole
When the hole
7, when the
The
8, when a
The
The second conductivity
9, when the
A mesa etching process may be performed to expose a portion of the first conductivity
The
10 is a cross-sectional view of a light emitting device package according to the present invention. The light emitting device package according to the present invention may be mounted with the light emitting device having the structure as described above.
The light emitting
The
The
The
The
The
11 to 13 are exploded perspective views illustrating embodiments of an illumination system having a light emitting device according to the present invention.
11, the lighting apparatus according to the present invention includes a
For example, the
The inner surface of the
The
The
The
The surface of the
The
The
The
The
The
The
The
12, the lighting apparatus according to the present invention includes a
The
The
The
The inner surface of the
The
The
The
The
The light emitting device 3230 may be a light emitting diode chip that emits red, green, or blue light, or a light emitting diode chip that emits UV light. Here, the light emitting diode chip may be a lateral type or a vertical type, and the light emitting diode chip may emit blue, red, yellow, or green light. .
The light emitting device 3230 may have a phosphor. The phosphor may be at least one of a garnet system (YAG, TAG), a silicate system, a nitride system, and an oxynitride system. Alternatively, the fluorescent material may be at least one of a yellow fluorescent material, a green fluorescent material, and a red fluorescent material.
The
A plurality of radiating
The
The
The
The material of the
The
The
The
The plurality of
The
The receiving
The
The
13, a backlight unit according to the present invention includes a
The
The
The
The
The plurality of light emitting device packages 200 may be mounted on the
The
The
The
It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit and scope of the invention as defined by the appended claims. You will understand.
100: light emitting device 110: substrate
120: first conductivity type semiconductor layer 130: active layer
140: barrier layer 142: hole injection enhancement layer
144: Magnesium diffusion preventing layer 150: Second conductive type semiconductor layer
Claims (13)
A first conductive semiconductor layer formed on the substrate;
An active layer formed on the first conductive semiconductor layer;
A barrier layer including a hole injection enhancement layer formed on the active layer and a magnesium diffusion prevention layer formed on the hole injection enhancement layer; And
And a second conductivity type semiconductor layer formed on the barrier layer.
Wherein the barrier layer has a thickness of 5 nm to 20 nm.
Wherein the barrier layer comprises a first barrier layer to a fifth barrier layer.
Wherein the thickness of the hole injection enhancing layer is 1/3 of the thickness of the magnesium diffusion preventing layer.
Wherein the magnesium diffusion prevention layer comprises an InGaN series.
And the phosphorus (In) content of the magnesium diffusion prevention layer is 1% to 15%.
Wherein the magnesium diffusion preventing layer has a thickness of 0.5 nm to 15 nm.
Wherein the hole injection enhancing layer comprises a GaN series.
Wherein the hole injection enhancing layer has a thickness of 0.5 nm to 5 nm.
A first conductive semiconductor layer formed on the substrate;
An active layer formed on the first conductive semiconductor layer;
A magnesium diffusion prevention layer formed on the active layer; And
And a second conductivity type semiconductor layer formed on the magnesium diffusion prevention layer.
Wherein the magnesium diffusion prevention layer includes an InGaN series and the phosphorus content of the magnesium diffusion prevention layer is 1% to 15%.
Wherein the magnesium diffusion preventing layer has a thickness of 0.5 nm to 15 nm.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020120150547A KR20140081140A (en) | 2012-12-21 | 2012-12-21 | Light emitting device and lighting system having the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020120150547A KR20140081140A (en) | 2012-12-21 | 2012-12-21 | Light emitting device and lighting system having the same |
Publications (1)
Publication Number | Publication Date |
---|---|
KR20140081140A true KR20140081140A (en) | 2014-07-01 |
Family
ID=51732519
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020120150547A KR20140081140A (en) | 2012-12-21 | 2012-12-21 | Light emitting device and lighting system having the same |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR20140081140A (en) |
-
2012
- 2012-12-21 KR KR1020120150547A patent/KR20140081140A/en not_active Application Discontinuation
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