KR20130095941A - Apparatus for large area deposition using surface acoustic wave and method for making large scale electrode using the same - Google Patents

Abstract

PURPOSE: A manufacturing method of a large area electrode by using a large area deposition device which uses a surface acoustic wave is provided to prevent quality degradation in total from a denaturalization of conductive ink which is supplied during the deposition process. CONSTITUTION: A large area deposition device which uses a surface acoustic wave comprises: a substrate; a piezoelectricity base which is arranged to be separated to the substrate; and a vibrating electrode part which is patterned on the piezoelectricity base; a vibration generator which is permitted to have a power source and generates the surface acoustic wave (110); a nozzle unit (120) which consecutively supplies the conductive ink to the vibration generator; an ink supply portion (130) which provides the conductive ink to the nozzle unit; an electrostatic force permitting portion (140) which permits the electrostatic force to induce the flow of the atomized conductive ink to the substrate side so that the atomized conductive ink is deposited in the substrate with the surface acoustic wave in the vibration generator; and a cooling means (160) which is for cooling the piezoelectricity base in order to prevent a denaturalization of the conductive ink which is supplied on the spray area. [Reference numerals] (116) Power supply part; (133) Voltage authorization part; (143) Supply control part

Description

Large area deposition apparatus using surface acoustic wave and manufacturing method of large area electrode using same {APPARATUS FOR LARGE AREA DEPOSITION USING SURFACE ACOUSTIC WAVE AND METHOD FOR MAKING LARGE SCALE ELECTRODE USING THE SAME}

The present invention relates to a large area deposition apparatus using surface acoustic waves, and more particularly, to a large area deposition apparatus using surface acoustic waves capable of depositing conductive ink on the surface of a large area substrate using surface acoustic waves and electrostatic forces. will be.

When an earthquake occurs, the P waves and the S waves are followed by the waves of vibration along the surface. In this way, the surface of the elastic body of the free surface is a surface acoustic wave (surface acoustic wave) that is present in the wave localized on the surface.

The piezoelectric material is distorted when a signal is applied from the outside. If a comb-shaped electrode is formed on the base of the piezoelectric material and a signal is applied, surface acoustic waves can be generated.

On the other hand, a technique for atomizing and transporting liquid using such surface acoustic waves has been developed. However, according to the related art, the liquid is atomized in such a manner that the process of atomizing the discharged droplets again after atomizing the discharged droplets is repeated.

That is, there is a problem that it takes a long time to atomize a large amount of liquid by atomizing the liquid depending on the intermittent droplet discharge. At the same time, there has been a problem that the atomization process by discontinuous ejection is not suitable for the purpose of reaching a large area substrate with liquid.

Accordingly, an object of the present invention is to provide a large area deposition apparatus using surface acoustic waves capable of continuously depositing conductive ink on a large area substrate using surface acoustic waves.

The above object, according to the present invention; A vibration generating part including a piezoelectric base spaced apart from the substrate and a vibrating electrode part patterned on the piezoelectric base, and generating surface acoustic waves by receiving power; A nozzle unit continuously supplying conductive ink to the vibration generating unit; An ink supply unit providing the conductive ink to the nozzle unit; An electrostatic force applying unit for applying an electrostatic force for guiding the flow of the atomized conductive ink toward the substrate so that conductive ink atomized by the surface acoustic wave is deposited on the substrate in the vibration generating unit; And a cooling means for cooling the piezoelectric base so that the conductive ink supplied on the injection region is prevented from being denatured.

In addition, the cooling means may be a Peltier device mounted on the lower surface of the piezoelectric base.

The vibrating electrode unit may include a first vibrating electrode and a second vibrating electrode spaced apart from each other, and a virtual spraying region is formed on the piezoelectric base between the first vibrating electrode and the second vibrating electrode. The nozzle unit may be disposed to supply conductive ink onto the injection area.

The ink supply unit may further include a storage unit in which conductive ink is stored; A monitor unit for monitoring conductive ink sprayed from the vibration generating unit and conductive ink supplied from the nozzle unit; Controlling the flow rate of the conductive ink supplied from the storage unit to the nozzle unit so that the flow rate of the conductive ink atomized from the vibration generating unit and sprayed upward is the same as the flow rate of the conductive ink supplied to the vibration generating unit It may include a supply control unit.

The electrostatic force applying unit may further include: a first electrode disposed above the substrate; A second electrode penetrating a region in contact with the movement path of the conductive ink to be injected, and disposed between the first electrode and the vibration generator; And a voltage applying unit configured to apply a voltage to the first electrode or the second electrode.

The apparatus may further include a stage unit for moving the piezoelectric base.

In addition, a plurality of the vibrating electrode parts are arranged in a line on the piezoelectric base, a plurality of the nozzle parts are provided one by one on the spraying region of each of the vibrating electrode parts, one end of the ink supply part is connected to the storage part, The other end portion is divided into a plurality of paths, the surface area acoustic wave deposition apparatus using a surface acoustic wave further comprises a connection portion connected to each of the plurality of nozzles.

In addition, the above object, according to the present invention, a substrate preparation step of preparing a flexible (flexible) substrate; A deposition step of depositing a thin film portion of a conductive ink material on the substrate using a large area deposition apparatus using the surface acoustic wave of any one of claims 1 to 7; It is achieved by a large-area electrode manufacturing method comprising a; thin film portion drying step of drying the thin film portion.

According to the present invention, a large-area vapor deposition apparatus using surface acoustic waves capable of depositing ink on a substrate using surface acoustic waves is provided.

In addition, according to the present invention, by cooling the vibration generating unit using the cooling unit, it is possible to prevent the conductive ink supplied during the deposition process from being denatured and deteriorating the overall quality.

In addition, by configuring the flow rate of the conductive ink to be injected and the flow rate of the conductive ink supplied from the nozzle unit, the continuity of conductive ink jetting can be achieved.

In addition, the conductive ink can be deposited on a large-area substrate by multiplexing the nozzle portion.

Further, according to the present invention, there is provided a large area electrode manufacturing method that can easily produce a large area of the electrode by depositing a conductive ink of a thin film on a large area substrate using surface acoustic waves.

1 is a perspective view of a large-area deposition apparatus using surface acoustic waves according to a first embodiment of the present invention,
FIG. 2 illustrates a vibration generating unit of the large area deposition apparatus using the surface acoustic wave of FIG. 1,
3 is an operation cross-sectional view of the large-area deposition apparatus using the surface acoustic wave of FIG.
FIG. 4 is for explaining the principle of continuous ink jetting during the operation of the large-area deposition apparatus using the surface acoustic wave of FIG.
5 is a perspective view of a large-area deposition apparatus using a surface acoustic wave according to a second embodiment of the present invention,
Figure 6 schematically shows the procedure of a large area electrode manufacturing method using a surface acoustic wave according to the present invention.

Prior to the description, components having the same configuration are denoted by the same reference numerals as those in the first embodiment. In other embodiments, configurations different from those of the first embodiment will be described do.

Hereinafter, a large area deposition apparatus 100 using surface acoustic waves according to a first embodiment of the present invention will be described in detail with reference to the accompanying drawings.

1 is a perspective view of a large-area deposition apparatus using surface acoustic waves according to a first embodiment of the present invention.

Referring to FIG. 1, the large-area deposition apparatus 100 using the surface acoustic wave according to the first embodiment of the present invention includes a vibration generating unit 110, a nozzle unit 120, an ink supply unit 130, and an electrostatic force applying unit ( 140, the stage unit 150 and the cooling means 160.

FIG. 2 illustrates a vibration generator of the large-area deposition apparatus using the surface acoustic wave of FIG. 1.

Referring to FIG. 2, the vibration generating unit 110 is a member that generates a surface acoustic wave to atomize the conductive ink supplied from the nozzle unit 120, which will be described later, and the piezoelectric base 111. And a vibrating electrode part 112, a cover part 115, and a power supply part 116.

The piezoelectric base 111 is a member on which the vibrating electrode part 112 described later is formed, and is a member generating surface acoustic waves by the vibrating electrode part 112 to which power is applied. As the piezoelectric base 111 in the present embodiment, 128 ° YX lithium niobate (LiNbO ₃ ) is used, but is not limited thereto.

The vibrating electrode part 112 is a member for receiving a predetermined power and transmitting the same to the piezoelectric base 111. The vibration electrode part 112 is patterned on the piezoelectric base 111, and a virtual region on the piezoelectric base 111 to amplify a wavelength. The first vibration electrode 113 and the second vibration electrode 114 are symmetrically provided at both sides with respect to the phosphorus injection region 20.

The cover part 115 is a non-conductive material and prevents an electrical reaction between the conductive ink and the vibrating electrode part 112 supplied by the vibrating electrode part 112 being deposited on the patterned piezoelectric base 111. In the present embodiment, the cover portion 115 is a transparent and non-conductive polydimethylsiloxane (polydimethylsiloxane) is used, but if the transparent and non-conductive material is not limited thereto.

The power supply unit 116 is for applying a predetermined power to the vibration electrode 112, and includes an RF source unit (not shown) and an RF amplifier (not shown). The RF amplifier is connected to the RF source unit and applies an amplified RF power to the vibrating electrode unit 112.

The nozzle unit 120 is disposed on the injection region 20, which is an area between the first vibration electrode 113 and the second vibration electrode 114 of the vibration generating unit 110, so that conductive ink is formed in the injection region 20. It is a member for providing continuously.

The ink supply unit 130 is connected to the nozzle unit 120 to supply conductive ink to the nozzle unit 120, and includes a storage unit 131, a monitor unit 132, and a supply control unit 133.

The storage unit 131 is a member in which conductive ink before being supplied to the nozzle unit 120 is temporarily stored by being connected to the nozzle unit 120.

The monitor unit 132 is for monitoring the flow rate of the conductive ink, and more specifically, the vibration generating unit 110 from the conductive ink and the nozzle unit 120 atomized upward from the vibration generating unit 110 Means for monitoring the ink provided on the ejection area 20 of the apparatus.

The supply control unit 133 supplies conductive ink from the storage unit 131 toward the nozzle unit 120, and is supplied to the nozzle unit 120 using flow rate information of the conductive ink obtained through the monitor unit 132. It is a member for controlling the flow rate of the conductive ink.

The supply control unit 133 is composed of a predetermined pump (not shown) to control the flow rate of the conductive ink by using a pressure difference, but is not limited thereto.

The electrostatic force applying unit 140 applies electrostatic force so that the conductive ink atomized by the vibration generating unit 110 can be sprayed upward, and the first electrode 141, the second electrode 142, and the voltage applying unit are applied. 143.

The first electrode 141 is disposed above the vibration generating unit 110 and is provided on an upper side of the substrate 10 to be coated by conductive ink.

The second electrode 142 is disposed between the substrate 10 and the vibration generating unit 110 to generate an electrostatic force. On the other hand, the second electrode 142 is formed through the central portion to allow the particles of the atomized conductive ink to pass through.

That is, when the second electrode 142 is disposed between the substrate 10 and the vibration generating unit 110, the conductive ink that is sprayed is not deposited on the substrate 10, but part of the second electrode 142 is deposited on the second electrode 142. In order to prevent a phenomenon from occurring, the center of the second electrode 142 disposed in the movement path of the conductive ink penetrates.

The voltage applying unit 143 is a member that induces the generation of an electrostatic force between the first electrode 141 and the second electrode 142 by applying a voltage to the first electrode 141 or the second electrode 142.

The stage unit 150 is a member for transferring the piezoelectric base 111. The stage unit 150 transfers the piezoelectric base 150 on the same plane by using the stage unit 150 to be sprayed and deposited from the spraying area 20. The area of the substrate 10 can be enlarged.

The cooling means 160 is a means for cooling the piezoelectric base 111. In this embodiment, the cooling means 160 is formed of a Peltier element in contact with the lower surface of the piezoelectric base 111, but the piezoelectric base 111 is cooled. If possible, the cooling means 1350 is not limited to the Peltier element.

The operation of the first embodiment of the large-area vapor deposition apparatus 100 using the surface acoustic wave described above will now be described.

3 is a cross-sectional view illustrating an operation of the large area deposition apparatus using the surface acoustic wave of FIG. 1.

Referring to FIG. 3, when an RF power source having a frequency band corresponding to a resonance frequency of the piezoelectric base 111 is applied to the vibrating electrode unit 112 through the power supply unit 116, the piezoelectric base 111 may vibrate. At this time, the surface acoustic wave is generated in the injection region 20 between the first vibration electrode 113 and the second vibration electrode 114 by the vibration. This surface acoustic wave is operated as a driving force for atomizing the conductive ink supplied from the row portion 120.

In this case, the conductive ink supplied from the storage unit 131 is provided on the injection area 20 through the nozzle unit 120. The discharged conductive ink is atomized by surface acoustic waves generated from the piezoelectric base 111.

The voltage applying unit 143 of the electrostatic force applying unit 140 applies a high voltage to the first electrode 141, and an electrostatic force is generated between the first electrode 141 and the second electrode 142. The atomized conductive ink particles are sprayed toward the upper substrate 10 by the electrostatic force, and are deposited on the substrate 10 through the second electrode 142 formed to penetrate the central portion thereof.

Simultaneously with the deposition process described above, the cooling means 160 cools the piezoelectric base 111 in real time in order to prevent the piezoelectric base 111 from being excessively heated to denature the conductive ink supplied thereto.

In this embodiment, since the cooling surface of the Peltier element, which is the cooling means 160, is in contact with the lower surface of the piezoelectric base 111, the temperature of the piezoelectric base 111 is prevented from rising by 40 ° C. or more by driving it.

On the other hand, the conductive ink is continuously provided continuously on the jetting region 20 of the vibration generating unit 110 as described above, thereby depositing the conductive ink on a large-area substrate. The continuity of the conductive ink supply is implemented by controlling the flow rate of the conductive ink provided from the nozzle unit 120 by the supply control unit 133, the continuity of the conductive ink supply can be controlled in the following manner.

FIG. 4 illustrates the principle of continuous ink jetting during the operation of the large-area deposition apparatus using the surface acoustic wave of FIG. 1.

First, referring to FIG. 4, the control volume of the end of the nozzle unit 120 for supplying conductive ink to the first vibration electrode 113, the second vibration electrode 114, and the injection region 20 is measured. Set to (30). In order to realize the continuity of the above-mentioned conductive ink injection, the set inspection volume 30 should maintain a steady state.

In other words, the flow rate of the conductive ink discharged to the outside from the inspection volume 30, that is, the flow rate Qout of the conductive ink atomized and sprayed upward by the electrostatic force is determined by the flow rate of the conductive ink supplied from the nozzle unit 120. Qin) should be controlled in the same way.

At the same time, the monitor unit 132 monitors the injected conductive ink and the supplied conductive ink and provides the supply control unit 133 with information obtained through the monitor. The supply control unit 133 determines the flow rate of the conductive ink to be supplied to the nozzle unit 120 using the transmitted information. Therefore, through such a process, the conductive ink supply is continuously provided on the injection region 20 without interruption, and at the same time, the continuous deposition process may be performed.

Next, a large area deposition apparatus 200 using surface acoustic waves according to a second embodiment of the present invention will be described.

The large-area deposition apparatus 200 using the surface acoustic wave according to the second embodiment of the present invention includes the vibration generating unit 210, the nozzle unit 220, the ink supply unit 230, the electrostatic force applying unit 240, and the stage unit ( 150 and cooling means 160.

The vibration generator 210 includes a piezoelectric base 111, a vibration electrode 212, a cover 115, and a power supply 116.

The vibrating electrode unit 212 is formed such that a plurality of patterns including the first vibrating electrode 213 and the second vibrating electrode 214 are spaced apart at predetermined intervals in a row on the piezoelectric base 111. That is, when the area between the first vibration electrode 213 and the second vibration electrode 214 is defined as the injection area 20, a plurality of injection areas 20 to which conductive ink is injected are provided.

Since the cover section 115 and the power supply section 116 are the same as those in the first embodiment, redundant description is omitted.

The nozzle unit 220 has the same shape as the nozzle unit 120 of the first embodiment, but is provided in each of the plurality of injection regions 20 provided by the plurality of vibration electrode units 212, thereby providing a multi-nozzle unit ( 220).

The ink supply unit 230 includes a storage unit 231, a connection unit 232, a monitor unit 233, and a supply control unit 234.

The storage unit 231 stores conductive ink and is configured in the same manner as in the first embodiment.

The connection part 232 is a path through which conductive ink can flow, and is a member connecting the ends of the plurality of nozzle parts 220 and the storage part 231 to each other. The connection part 232 extends with a single path from the storage part 231, and is connected to the plurality of nozzle parts 220 by being divided into a plurality of paths.

The monitor unit 233 is provided in a plurality so as to monitor the conductive ink atomized in each of the spraying areas 20 and sprayed upward, and the ink provided from the nozzle unit.

The supply control unit 234 controls the flow rate of the conductive ink supplied to each nozzle unit 220 from the storage unit 231 through the connection unit 232 through the information provided from the monitor unit 233.

Meanwhile, in the present exemplary embodiment, a plurality of monitor units 233 may be provided to monitor each of the plurality of nozzle units 220. However, in the modification, a single monitor unit is provided so that the situation of the non-monitored injection zone 20 It is also possible to reduce the production cost by controlling the supply of the conductive ink on the assumption that the monitor is the same as the situation of the injection zone 20.

The electrostatic force applying unit 240 includes a first electrode 241, a second electrode 242, and a voltage applying unit 243, and the first electrode 241 and the voltage applying unit 243 are formed in a first manner. Since it is the same as the configuration of the embodiment, duplicate description is omitted.

The second electrode 242 is disposed between the substrate 10 and the piezoelectric base 111, and penetrates through the conductive ink sprayed upward from the plurality of injection regions 20. At this time, the space between the moving paths of the conductive ink sprayed from the adjacent spraying regions 20 is also completely penetrated, thereby preventing a problem of unintentionally depositing some conductive ink on the second electrode 242.

That is, the second electrode 242 of the present embodiment is similar to the configuration of the first embodiment, and is formed so that the inside is completely penetrated, thereby preventing the second electrode 242 from becoming a resistor or an obstacle of the conductive ink to be sprayed.

The voltage applying unit 243 and the stage unit 150 are the same as those of the first embodiment, and redundant description thereof will be omitted.

On the other hand, the operation of the second embodiment of the large-area deposition apparatus 200 using the surface acoustic wave described above will be described later.

5 is a perspective view of a large area deposition apparatus using surface acoustic waves according to a second embodiment of the present invention.

Referring to FIG. 5, when an RF power source having a frequency band corresponding to the resonance frequency of the piezoelectric base 111 is applied to the vibration electrode unit 212 through the power supply unit 116, the piezoelectric base corresponding to each injection area 20 is applied. When the 111 is vibrated, surface acoustic waves are generated.

At this time, the conductive ink supplied from the nozzle unit 220 to the spraying region 20 is atomized by the surface acoustic wave, and is sprayed upward through the electrostatic force formed by the electrostatic force applying unit 240 to the substrate 10. Is deposited.

Meanwhile, since the conductive ink is injected through the second electrode 242 through which the center part is completely penetrated, the conductive ink may be deposited on the substrate without interrupting the second electrode 242.

On the other hand, as in the first embodiment, the monitor unit 233 monitors the conductive ink sprayed on the respective injection regions 20 and the conductive ink supplied from the nozzle unit 220, and supplies the obtained flow rate information to the supply control unit 234. To provide.

The supply control unit 234 controls only the flow rate of the conductive ink discharged from the storage unit 231 toward the connection unit 232, thereby simultaneously controlling the flow rate of the conductive ink supplied from the plurality of nozzle units 220 to the respective injection regions 20. can do.

Therefore, the continuity of the injection of the conductive ink can be realized by controlling the flow rate of the conductive ink atomized on the plurality of injection regions 20 to be sprayed upward and the flow rate of the conductive ink supplied from each nozzle unit 220 to be equal. Can be.

Next, an embodiment of the large-area electrode manufacturing method S100 using the large-area deposition apparatus using the surface acoustic wave described above will be described.

Figure 6 schematically shows the procedure of a large area electrode manufacturing method using a surface acoustic wave according to the present invention.

Referring to FIG. 6, a large area electrode manufacturing method according to an embodiment of the present invention (S100) includes a substrate preparation step (S110), a thin film portion deposition step (S120), and a thin film portion drying step (S130).

In the substrate preparation step (S110), as a step of preparing the substrate 10 on which the thin film is to be deposited, the substrate 10 is preferably made of a flexible and elastic material. The substrate 10 is moved in each step on the roll-to-roll apparatus 300.

In the thin film deposition step (S120), a thin film portion 40 having a uniform thickness is deposited on a substrate by using a large area deposition apparatus 100 using surface acoustic waves according to the first embodiment of the present invention.

The thin film part drying step (S130) is a step of drying the deposited thin film part 40.

Therefore, according to the large-area electrode manufacturing method S100 of the present embodiment, a large-area electrode can be easily manufactured by depositing conductive ink on a large-area substrate.

On the other hand, although not shown, in the thin film deposition step (S120) may be used a large-area deposition apparatus 200 using the surface acoustic wave according to the second embodiment of the present invention.

The scope of the present invention is not limited to the above-described embodiments, but may be embodied in various forms of embodiments within the scope of the appended claims. Without departing from the gist of the invention claimed in the claims, it is intended that any person skilled in the art to which the present invention pertains falls within the scope of the claims described in the present invention to various extents which can be modified.

100: large area deposition apparatus using surface acoustic waves according to the first embodiment of the present invention
110: vibration generating unit 140: electrostatic force applying unit
120: nozzle portion 150: stage portion
130: ink supply unit 160: cooling means

Claims (8)

Board;
A vibration generating part including a piezoelectric base spaced apart from the substrate and a vibrating electrode part patterned on the piezoelectric base, and generating surface acoustic waves by receiving power;
A nozzle unit continuously supplying conductive ink to the vibration generating unit;
An ink supply unit providing the conductive ink to the nozzle unit;
An electrostatic force applying unit for applying an electrostatic force for guiding the flow of the atomized conductive ink toward the substrate so that conductive ink atomized by the surface acoustic wave is deposited on the substrate in the vibration generating unit;
And a cooling means for cooling the piezoelectric base so that the conductive ink supplied on the injection region is prevented from being denatured. The method of claim 1,
The cooling means is a transparent electrode manufacturing system, characterized in that the Peltier (Peltier) element mounted on the lower surface of the piezoelectric base. The method of claim 2,
The vibrating electrode part includes a first vibration electrode and a second vibration electrode spaced apart from each other, and a virtual injection region formed on the piezoelectric base is formed between the first vibration electrode and the second vibration electrode,
The nozzle unit is a large-area deposition apparatus using a surface acoustic wave, characterized in that arranged to supply conductive ink on the injection area. The method of claim 3,
The ink supply unit stores a conductive ink is stored; A monitor unit for monitoring conductive ink sprayed from the vibration generating unit and conductive ink supplied from the nozzle unit; Controlling the flow rate of the conductive ink supplied from the storage unit to the nozzle unit so that the flow rate of the conductive ink atomized from the vibration generating unit and sprayed upward is the same as the flow rate of the conductive ink supplied to the vibration generating unit Large area deposition apparatus using a surface acoustic wave comprising a; supply control unit. 5. The method of claim 4,
The electrostatic force applying unit is a first electrode disposed on the upper side of the substrate; A second electrode penetrating a region in contact with the movement path of the conductive ink to be injected, and disposed between the first electrode and the vibration generator; And a voltage applying unit for applying a voltage to the first electrode or the second electrode. 5. The method of claim 4,
And a stage unit for moving the piezoelectric base. 5. The method of claim 4,
A plurality of vibration electrode parts are arranged in a line on the piezoelectric base,
A plurality of nozzles are provided one on the spraying region of each of the vibration electrode,
The ink supply unit is a large-area deposition apparatus using a surface acoustic wave characterized in that the one end is further connected to the storage portion, the other end is divided into several paths connected to each of the plurality of nozzles. A substrate preparation step of preparing a flexible substrate;
A deposition step of depositing a thin film portion of a conductive ink material on the substrate using a large area deposition apparatus using the surface acoustic wave of any one of claims 1 to 7;
Large-area electrode manufacturing method comprising; drying the thin film portion.

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