KR20110097395A - Gate valve - Google Patents

Gate valve Download PDF

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Publication number
KR20110097395A
KR20110097395A KR1020100017218A KR20100017218A KR20110097395A KR 20110097395 A KR20110097395 A KR 20110097395A KR 1020100017218 A KR1020100017218 A KR 1020100017218A KR 20100017218 A KR20100017218 A KR 20100017218A KR 20110097395 A KR20110097395 A KR 20110097395A
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KR
South Korea
Prior art keywords
valve
exhaust line
housing
cover
blocking
Prior art date
Application number
KR1020100017218A
Other languages
Korean (ko)
Other versions
KR101229324B1 (en
Inventor
조길영
최한기
Original Assignee
주식회사 라온테크
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Application filed by 주식회사 라온테크 filed Critical 주식회사 라온테크
Priority to KR1020100017218A priority Critical patent/KR101229324B1/en
Priority to PCT/KR2011/001167 priority patent/WO2011105737A2/en
Publication of KR20110097395A publication Critical patent/KR20110097395A/en
Application granted granted Critical
Publication of KR101229324B1 publication Critical patent/KR101229324B1/en

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F16K3/182—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of toggle links
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F16K3/184—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of cams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sliding Valves (AREA)
  • Details Of Valves (AREA)

Abstract

The present invention is a gate valve (vacuum valve) installed in the exhaust line of the vacuum equipment, the valve forms a part of the exhaust line and by moving the valve horizontally can completely block the process contaminants and by-products flowing into the gate valve and exhaust The present invention relates to a gate valve having an excellent effect, the gate valve according to the present invention comprising: a valve housing inserted into and installed in a removed portion of the exhaust line in a state where a portion of the vacuum chamber exhaust line is removed; A valve installed horizontally within the valve housing and having a communication portion forming a removed portion of the exhaust line and a shutoff portion blocking the exhaust line; A valve driver connected to the valve at one side of the valve housing and moving the valve in a direction orthogonal to the exhaust line; A valve movement guide part installed inside the valve housing to guide a movement direction of the valve; And a valve heating unit installed inside the valve to heat the valve.

Description

Gate valve {GATE VALVE}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gate valve, and more particularly, to a gate valve installed in an exhaust line of a vacuum equipment, wherein the valve forms a part of the exhaust line and moves into the gate valve by horizontally moving the valve. The invention relates to a gate valve capable of completely blocking contaminants and by-products and having an excellent exhaust effect.

In the precision manufacturing fields such as semiconductors, LCDs, LEDs, solar cells, and the like, vacuum equipments are frequently used in the manufacturing process while keeping the pressure inside the equipment lower than atmospheric pressure. The vacuum equipment is provided with a vacuum pump for suctioning and discharging gas inside the vacuum equipment to keep the pressure inside the vacuum equipment low and an exhaust line connecting the vacuum pump and the vacuum equipment.

And this exhaust line is provided with a gate valve for opening and closing of the exhaust line itself. The conventional gate valve is installed in the middle of the exhaust line 1, as shown in FIG. 1, and includes a valve housing 10, a valve 20, and a valve drive unit (not shown).

First, the valve 20 is a component that blocks and blocks the exhaust line 1, and moves in a direction orthogonal to the exhaust line 1. In addition, the valve housing 10 provides a path through which the valve 20 moves, and serves to prevent an external outflow of the exhaust gas that is installed in the exhaust line 1 and discharged through the exhaust line. Finally, the valve driver is coupled to the rear end of the valve 20 to drive the valve 20.

However, as shown in FIG. 1, the gate valve having such a structure does not block the space between the valve 20 and the valve housing 10 in the gate valve, and thus, a process by-product discharged through the exhaust line 1 or There is a problem that contaminants 30 accumulate on the inside of the valve housing 10 and the surface of the valve 20.

When the process by-products or contaminants 30 accumulate in the valve housing 10 or in the valve 20, the bar housing 10 or the valve 20 may be corroded, resulting in a fatal problem in which driving failure occurs and frequent repairs are required. In addition, there is a problem that the exhaust capacity is reduced due to unnecessary friction.

The technical problem to be solved by the present invention is to keep the valve in close contact with the valve housing in the valve housing so that the valve housing inside and the surface of the valve is not contaminated by process by-products and contaminants, by installing a heating unit in the valve itself Maintaining the temperature at a high temperature provides a gate valve that does not accumulate contaminants in contact with the valve surface.

According to an aspect of the present invention, there is provided a gate valve including: a valve housing inserted and installed in a removed portion of the exhaust line in a state in which a part of a vacuum chamber exhaust line is removed; A valve installed horizontally within the valve housing and having a communication portion forming a removed portion of the exhaust line and a shutoff portion blocking the exhaust line; A valve driver connected to the valve at one side of the valve housing and moving the valve in a direction orthogonal to the exhaust line; A valve movement guide part installed inside the valve housing to guide a movement direction of the valve; And a valve heating unit installed inside the valve to heat the valve.

In the present invention, the valve housing, the housing body having a predetermined space therein the upper or lower surface is opened; A cover coupled to the housing body to form an upper or lower surface of the valve housing; A first communication hole formed through the horizontal plane of the housing main body in a thickness direction and connected to one side of the exhaust line; A second communication hole formed through the horizontal plane of the cover in a thickness direction and connected to the other side of the exhaust line; A first blocking portion contact surface formed by inserting a first o-ring adjacent to the first communicating hole and contacting one surface of the blocking portion in a state in which the communicating portion coincides with the exhaust line; A second O-ring is formed adjacent to the second communication hole and is formed, and the second blocking part contact surface is in contact with the other surface of the blocking part in a state in which the communicating part coincides with the exhaust line.

And the valve, the main body side valve in contact with the horizontal plane of the valve housing; A cover side valve which is coupled to the main body side valve so as to be spaced apart and in contact with the cover; A first link connecting portion rotatably installed at one end of the main body side valve and connected to one end of the valve driving part; And a second link connection part rotatably installed at one end of the cover side valve and connected to one end of the valve driving part.

Further, the gate valve of the present invention is further provided with a valve blocking ring interposed between the main body side valve and the cover side valve to block a space between the main body side valve and the cover side valve. Despite the up and down movement of the valve and the cover side valve, it is preferable to prevent the process by-products and contaminants from flowing into the valve housing and the valve.

And the gate valve of the present invention is installed to be spaced apart from each other at a predetermined interval around the communication portion, the first, second contact surface protection ring to surround the communication portion double; and is installed to surround the blocking portion around the blocking portion, the blocking It is preferable that the first and second blocking ring for blocking the space between the valve housing and the valve in the state in addition to the exhaust line.

Meanwhile, in the present invention, the valve movement guide part includes a first guide part for guiding the main body side valve and a second guide part symmetrically formed with the first guide part and for guiding the cover side valve.

The main body valve and the cover valve are the valves at the position where the communication portion coincides with the first and second communication holes and the cutoff portion coincides with the first and second communication holes. It is desirable to have a tight area that guides to be in close contact with the interior of the housing.

According to the gate valve of the present invention, the valve remains completely in contact with the valve housing in the valve housing at both the open position and the shut off position of the exhaust line so that the valve housing inside and the valve surface are not contaminated by process by-products and contaminants. In addition, since the heating unit is installed on the valve itself to maintain the temperature at a high temperature, there is an excellent effect that the contaminants in contact with the valve surface do not accumulate.

1 is a cross-sectional view showing a conventional gate valve structure.
2 is a cross-sectional view showing the structure of a gate valve according to an embodiment of the present invention.
3 is a perspective view of an open state showing a structure of a gate valve according to an embodiment of the present invention.
4 is a partial cross-sectional view showing the close contact structure between the valve and the valve housing in the open state of the gate valve according to the embodiment of the present invention.
5 is a front view showing the structure of the valve movement guide according to an embodiment of the present invention.
6 is another sectional view showing the structure of the valve housing according to the embodiment of the present invention.

Hereinafter, a specific embodiment of the present invention will be described in detail with reference to the accompanying drawings.

As shown in FIG. 2, the gate valve according to the present exemplary embodiment includes a valve housing 110, a valve 120, a valve driving unit 130, a valve movement guide 140, and a valve heating unit 150. It is composed.

First, the valve housing 110 is a component that is inserted into and installed in the removed portion of the exhaust line 1 in a state where a part of the exhaust line 1 of the vacuum chamber is removed, and the overall appearance of the gate valve according to the present embodiment. To achieve this, it provides a space in which the valve 120, the valve movement guide 140 and the valve heating unit 150 is installed. In particular, the valve housing 110 is inserted into a portion removed from the exhaust line 1 to form a part of the exhaust line, and the structure is completely sealed so that gas discharged through the exhaust line 1 does not leak out. Has

To this end, the valve housing 110 according to the present embodiment has a housing main body 112, a cover 114, a first communication hole 111, a second communication hole 113, as shown in FIGS. 2 and 3. The first blocking portion contact surface and the second blocking portion contact surface 114c are configured. First, as shown in FIG. 3, the housing main body 112 has a structure having a predetermined space therein with one surface of an upper surface or a lower surface opened. An installation space and a movement space of the valve 120 are provided in the housing main body 112, and a valve movement guide 140 for moving the valve 120 is also installed. As described above, the housing body 112 preferably has a structure in which one surface of the upper or lower surface of the housing body 112 is opened for convenience of installation and manufacturing of the valve 120 and the valve movement guide 140.

Next, the cover 114 is coupled to the housing body 112 to cover an open one of the upper or lower surface of the valve housing 110. The cover 114 is made of the same material as the housing main body 112, and is coupled to the housing main body 112 in a completely intimate state using fastening means such as bolts.

In addition, in the gate valve according to the present exemplary embodiment, as shown in FIG. 4, a nitrogen gas supply port 160 may be further provided on the cover 114. The nitrogen gas supply port 160 is formed so as to supply nitrogen (N2) gas from the outside of the gate valve toward the communicating portion 127 described later. When the nitrogen gas is supplied toward the communication unit 127 through the nitrogen gas supply port 160 as described above, particles are formed on the wall surface of the communication unit 127 or the like even in an emergency situation in which the heating unit 150 described later does not operate. There is an advantage that can minimize the phenomenon of stacking.

The first communication hole 111 is a hole formed to penetrate the horizontal plane of the housing main body 112 in the thickness direction, and is formed to have the same size as the inner diameter of the exhaust line 1 so that It is connected with one side to form a continuous tube in the exhaust line (1). On the other hand, the second communication hole 113 is a part which is in contact with the exhaust line 1 opposite the first communication hole 111, is a hole formed to penetrate the horizontal plane of the cover 114 in the thickness direction.

The first blocking portion contact surface is formed by inserting a first o-ring 112a into an inner surface of the housing main body 112 adjacent to the first communication hole 111. It is a surface which contacts one surface of the said interruption | blocking part in the state coincided with the exhaust line 1. This first blocking contact surface is blocked and protected by the first o-ring 112a, as shown in FIG. The protected first blocking contact surface keeps the surface constituting the blocking portion and the o-ring clean and free of contamination.

Meanwhile, the second blocking portion contact surface 114c is formed in the opposite direction to the first blocking portion contact surface to function the same. Specifically, as shown in FIGS. 2 and 4, the second blocking contact surface 114c has a second o-ring 114a formed on the inner surface of the cover 114 adjacent to the second communication hole 113. It is inserted and formed, and the communication part is in contact with the other surface of the blocking part in a state coincided with the exhaust line (1).

Next, in the gate valve according to the present embodiment, the valve 120 is installed to be horizontally movable in the valve housing 110, and the communication unit 127 and the communication part constituting the removed part of the exhaust line 1 are formed. It is a component having a block 125 for blocking the exhaust line 1. That is, the valve 120 serves to connect the removed part of the exhaust line 1 so that the exhaust line is opened or close and block a part of the exhaust line. To this end, the valve 120 specifically includes the main body side valve 122, the cover side valve 124, the first link connection 128, and the second link connection 126 as shown in FIGS. 2 and 3. It is configured to include. In addition, the main body side valve 122 and the cover side valve 124 each have a communication part 127 consisting of a communication hole 121 and first contact surface O-rings 122a and 122b, and a blocking surface 123 and a first contact surface. A blocking unit 125 formed of a blocking ring 122c is provided.

First, the body side valve 122 is a component in contact with the horizontal surface of the housing body 112, and blocks or communicates with the first communication hole 111. In addition, the cover side valve 124 is coupled to the main body side valve 122 and the main body side valve 122 so as to be able to change the gap, and is in contact with the cover 114. That is, in the present embodiment, the valve 120 is divided into two main body side valves 122 and a cover side side valve 124, each of which is moved by the valve drive unit 130 and communicates with the first body of the housing main body 112. It connects and blocks the ball 111 or serves to connect and block the second communication hole 113 of the cover 114.

In this case, as shown in FIGS. 2 and 4, the main body side valve 122 and the cover side valve 124 are coupled to each other, it is preferable that the inter-valve blocking ring 122d is further provided. The inter-valve shutoff ring 122d is provided at the contact portion between the main body side valve 122 and the cover side valve 124 so that the main body side valve 122 and the cover side valve 124 move up and down while maintaining a contact surface therebetween. Through this process, by-products or contaminants are prevented from entering the valve housing 110.

The main valve 122 and the cover valve 124 are connected to the valve driver 130, respectively. In this case, as shown in FIG. 2, the main valve 122 is connected to the valve driving unit 130 by a first link connecting part 128, and the first link connecting part 128 is connected to the main valve 122. ) Is rotatably installed at one end and the end 132 of the valve drive unit. Therefore, even when the main valve 122 moves in the vertical direction along the valve movement guide 140, the power of the valve driver 130 may be transmitted without difficulty. Similarly, the cover side valve 124 is also rotatably connected to the valve driving unit 130 by the second link connecting portion 126.

In addition, a plurality of O-rings are installed in the main valve 122 and the cover valve 124. First, first and second contact surface protection rings 122a and 122b are installed around the communication part 127 in a double manner. The first and second contact surface protection rings 122a and 122b are provided at the main body side valve 122 and the cover side valve 124, respectively, and are spaced apart from each other by a predetermined interval. As shown in FIG. 4, a surface protected by the first and second contact surface protection rings 122a and 122b among the inner surfaces of the cover 114 may include the first and second communication holes 125. When the positions 111 and 113 block, the first blocking ring 122c is in contact with each other. In the present embodiment, the first blocking ring 122c plays an important role in preventing process byproducts and contaminants from flowing into the valve housing 110 while the exhaust line 1 is blocked. The blocking ring 122c is protected by the first o-ring 114a in the open position, and is always protected by the first and second contact surface protection rings 122a and 122b in the blocking position. . Similarly, the communicating part and the blocking part of the main body side valve 112 also have the same structure.

Meanwhile, the second contact surface protection ring 122b may not be installed on the main body side valve 122 or the cover side valve 124, but may be installed on the surface of the housing main body 112 or the surface of the cover 114. When the second contact surface protection ring 122b is installed on the surface of the housing body 112 or the cover 114 in this manner, the first blocking ring 122c may be formed inside the valve housing 110 when the valve is in the blocking position. And the second contact surface protection ring 122b has the advantage of blocking the double.

Next, in the present embodiment, the valve driving unit 130 is installed to be connected to the valve 120 at one side of the valve housing 110, and the valve 120 is perpendicular to the exhaust line 1. The component to move. The valve driving unit 130 may be composed of various power means 134 that can linearly move the valve 120, for example, may be composed of a motor or a cylinder. As described above, the distal end 132 of the valve drive unit 130 is rotatably connected to the main valve 122 and the cover valve 124 by the first and second link connecting portions 128 and 126. .

Next, the valve movement guide 140 is installed on both side walls of the valve housing 110 so as to face each other to guide the movement direction of the valve 120. In this embodiment, as shown in FIG. 5, the valve movement guide 140 includes a first guide 144 and a second to move the main valve 122 and the cover valve 124, respectively. It is configured to include a guide 142. At this time, the first guide portion 144 and the second guide portion 142 is formed symmetrically in the vertical direction, the guide portion formed on the side of the main valve 122 and the cover valve 124, respectively It is coupled with a coupler (not shown in the figure). Accordingly, the main valve 122 and the cover valve 124 may be connected to the valve driver 130 with the guide coupler coupled to the first guide 144 and the second guide 142. To move horizontally. Therefore, vertical driving is simultaneously performed according to the shapes of the first guide part 144 and the second guide part 142.

In the present exemplary embodiment, the main body side valve 122 and the cover side valve 124 are in close contact with the housing main body 112 and the cover 114 in the open position and the shut off position, and the housing main body 112 in the remaining movement section. And a close contact area between the first guide part 144 and the second guide part 142 so as to be smoothly spaced apart from the cover 114. The close contact areas 142a, 142b, 142c, 144a, 144b, and 144c are formed in three portions of the first guide part 144 and the second guide part 142, respectively, as shown in FIG. In the zones 142a, 142b, 142c, 144a, 144b, and 144c, the body side valve 122 and the cover side valve 124 are spaced apart from each other as far as possible and completely contact the housing body 112 and the cover 114. .

In addition, the heating unit 150 is a component installed inside the valve 120 to heat the valve. In general, in a vacuum equipment is heated to a temperature of 100 ℃ or more to facilitate the progress of the process. However, when the process gas used in the vacuum equipment is exhausted through the exhaust line 1 and the temperature suddenly decreases in the gate valve, process by-products and contaminants accumulate rapidly on the gate valve. Therefore, the gate valve, in particular, the valve 120 for directly blocking the exhaust line 1 is preferably maintained at the same temperature inside the vacuum equipment. To this end, in the gate valve according to the present embodiment, as shown in FIG. 2, a heating unit 150 is installed inside the valve 120 to directly heat the valve 120. Therefore, there is an advantage in that the temperature of the valve 120 can be directly and accurately adjusted to a high temperature.

In addition, as shown in FIG. 6, the gate valve according to the present embodiment may further include a soft pumping line 170. The soft pumping line 170 bypasses the valve 120 and connects the exhaust line 1. Specifically, the soft pumping line 170 penetrates the valve housing 110 to connect the upper exhaust line and the lower exhaust line. In addition, a valve port 180 is further provided at an intermediate portion of the soft pumping line 170 to open and close the soft pumping line 170. The soft pumping line 170 can reduce the burden caused by the sudden pressure change in the operation of opening and closing the exhaust line by using the gate valve, it is possible to achieve a smoother pumping operation.

1: exhaust line 110: valve housing
120: valve 130: valve driving unit
140: valve movement guide portion 150: valve heating portion
160: nitrogen gas supply port 170: soft pumping line

Claims (7)

A valve housing inserted into and installed in the removed portion of the exhaust line with a portion of the vacuum chamber exhaust line removed;
A valve installed horizontally within the valve housing and having a communication portion forming a removed portion of the exhaust line and a shutoff portion blocking the exhaust line;
A valve driver connected to the valve at one side of the valve housing and moving the valve in a direction orthogonal to the exhaust line;
A valve movement guide part installed inside the valve housing to guide a movement direction of the valve;
And a valve heating unit installed inside the valve to heat the valve. The method of claim 1, wherein the valve housing,
A housing main body having a predetermined space therein with one of the upper and lower surfaces opened;
A cover coupled to the housing body to cover an open one of an upper or lower surface of the valve housing;
A first communication hole formed through the horizontal plane of the housing main body in a thickness direction and connected to one side of the exhaust line;
A second communication hole formed through the horizontal plane of the cover in a thickness direction and connected to the other side of the exhaust line;
A first blocking portion contact surface formed by inserting a first o-ring into an inner surface of the housing main body adjacent to the first communicating hole and contacting one surface of the blocking portion in a state in which the communicating portion coincides with the exhaust line;
And a second o-ring inserted into an inner surface of the cover adjacent to the second communication hole, the second blocking part contacting surface contacting the other surface of the blocking part in a state in which the communicating part coincides with the exhaust line. Gate valve, characterized in that. The method of claim 1, wherein the valve,
A main body side valve in contact with the horizontal plane of the valve housing;
A cover side valve which is coupled to the main body side valve so as to be spaced apart and in contact with the cover;
A first link connecting portion rotatably installed at one end of the main body side valve and connected to one end of the valve driving part;
And a second link connecting part rotatably installed at one end of the cover side valve and connected to one end of the valve driving part. The method of claim 3,
A gate valve is provided between the contact surface of the main valve and the cover valve, the inter-valve blocking ring is further provided to block the space between the main valve and the cover valve. The method of claim 1,
First and second contact surface protection rings which are spaced apart from each other by a predetermined distance around the communication unit and surround the communication unit in a double;
And a first and second blocking rings disposed around the blocking part to block the space between the valve housing and the valve in a state in which the blocking part is coincided with the exhaust line. Gate valve. The method of claim 1, wherein the valve movement guide portion,
A first guide part for guiding the main body side valve;
And a second guide part symmetrically formed with the first guide part and guiding the cover side valve.
The main body valve and the cover valve are the valves at the position where the communication portion coincides with the first and second communication holes and the cutoff portion coincides with the first and second communication holes. A gate valve, characterized in that it has a close contact guides to be in close contact with the inside of the housing. The method of claim 1,
And a soft pumping line bypassing the valve and connecting the removed portion of the exhaust line, wherein a part of the exhaust gas discharged through the exhaust line is exhausted.
KR1020100017218A 2010-02-25 2010-02-25 Gate valve KR101229324B1 (en)

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KR1020100017218A KR101229324B1 (en) 2010-02-25 2010-02-25 Gate valve
PCT/KR2011/001167 WO2011105737A2 (en) 2010-02-25 2011-02-23 Gate valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020100017218A KR101229324B1 (en) 2010-02-25 2010-02-25 Gate valve

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KR20110097395A true KR20110097395A (en) 2011-08-31
KR101229324B1 KR101229324B1 (en) 2013-02-05

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KR200292558Y1 (en) * 2002-07-22 2002-10-25 정인열 Opening and closing tool having a switch plate of sliding
KR100779241B1 (en) * 2006-11-02 2007-11-23 주식회사 비츠로테크 Double sided vacuum gate valve

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WO2014119819A1 (en) * 2013-02-04 2014-08-07 주식회사 유엔아이 Compact type decompression device
WO2019074340A1 (en) * 2017-10-13 2019-04-18 주식회사 라온티엠디 Valve assembly
KR20190041649A (en) * 2017-10-13 2019-04-23 주식회사 라온티엠디 A valve complex
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TWI749266B (en) * 2017-10-13 2021-12-11 南韓商萊恩Ｔｍｄ有限公司 A valve complex
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KR102490651B1 (en) * 2022-08-18 2023-01-20 주식회사 미래보 Process stop loss reduction system through rapid replacement of apparatus for trapping of reaction by-product for semiconductor process
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WO2011105737A2 (en) 2011-09-01
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