KR20110003453A - Structure of circuit board and method for fabricating the same - Google Patents

Structure of circuit board and method for fabricating the same Download PDF

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Publication number
KR20110003453A
KR20110003453A KR1020100132506A KR20100132506A KR20110003453A KR 20110003453 A KR20110003453 A KR 20110003453A KR 1020100132506 A KR1020100132506 A KR 1020100132506A KR 20100132506 A KR20100132506 A KR 20100132506A KR 20110003453 A KR20110003453 A KR 20110003453A
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KR
South Korea
Prior art keywords
layer
forming
conductive
insulating protective
protective layer
Prior art date
Application number
KR1020100132506A
Other languages
Korean (ko)
Inventor
시엔 쇼우 왕
싱-루 왕
시-핑 츄
Original Assignee
피닉스 프리시젼 테크날로지 코포레이션
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Priority to TW094145205A priority Critical patent/TWI295550B/en
Priority to TW094145205 priority
Application filed by 피닉스 프리시젼 테크날로지 코포레이션 filed Critical 피닉스 프리시젼 테크날로지 코포레이션
Publication of KR20110003453A publication Critical patent/KR20110003453A/en

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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/40Forming printed elements for providing electric connections to or between printed circuits
    • H05K3/42Plated through-holes or plated via connections
    • H05K3/429Plated through-holes specially for multilayer circuits, e.g. having connections to inner circuit layers
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits
    • H05K3/4644Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
    • H05K3/4682Manufacture of core-less build-up multilayer circuits on a temporary carrier or on a metal foil
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/11Printed elements for providing electric connections to or between printed circuits
    • H05K1/111Pads for surface mounting, e.g. lay-out
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/11Printed elements for providing electric connections to or between printed circuits
    • H05K1/115Via connections; Lands around holes or via connections
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/18Printed circuits structurally associated with non-printed electric components
    • H05K1/182Printed circuits structurally associated with non-printed electric components associated with components mounted in the printed circuit board, e.g. IMC (insert mounted components)
    • H05K1/185Components encapsulated in the insulating substrate of the printed circuit or incorporated in internal layers of a multilayer circuit
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/02Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/06Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
    • H05K3/061Etching masks
    • H05K3/064Photoresists
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/40Forming printed elements for providing electric connections to or between printed circuits
    • H05K3/4038Through-connections; Vertical interconnect access [VIA] connections
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/40Forming printed elements for providing electric connections to or between printed circuits
    • H05K3/42Plated through-holes or plated via connections
    • H05K3/422Plated through-holes or plated via connections characterised by electroless plating method; pretreatment therefor

Abstract

PURPOSE: A circuit board and a manufacturing method thereof are provided to increase an electrical function by reducing the thickness of a circuit board and a package size. CONSTITUTION: An insulating protective layer(31) is formed in one side of a support substrate. A plurality of openings are formed on the insulating protective layer in order to expose a part of the support substrate. A circuit structure is formed on the surface of the insulating protective layer and inside the opening. A first dielectric layer is formed in the insulating protective layer and the circuit structure. The opening is formed in the first dielectric layer in order to expose a pattern circuit layer(33). A build-up structure, which includes a plurality of second conductive penetration holes, is formed in the first dielectric layer. The connection pad of the build-up structure is electrically connected to a semiconductor device. The support substrate is removed in order to expose the lower side of the first conductive penetration hole.

Description

Circuit board and its manufacturing method {STRUCTURE OF CIRCUIT BOARD AND METHOD FOR FABRICATING THE SAME}

The present invention relates to a circuit board and a method for manufacturing the same, and more particularly, to a circuit board without a core layer and a method for manufacturing the same.

With the development of semiconductor package technology, many different types of packages have been developed for semiconductor devices. In a typical semiconductor device, a semiconductor device, such as an integrated circuit, is first mounted on a package substrate or lead frame and then electrically connected to the package substrate or lead frame and then sealed. Ball grid arrays (BGAs) such as PBGA, EBGA and FCBGA are among the most advanced semiconductor package technologies. This is characterized by mounting a semiconductor device on a package substrate, and at the back of the package substrate is implanted with many solder balls arranged in a grid by a self-alignment method, thus semiconductor devices of the same cross-sectional area. The support substrate allows for more I / C connections to meet the high integration requirements of the semiconductor chip, and the solder balls allow the entire package to be soldered together to make electrical contact with external devices.

In addition, the ability of circuit boards with wiring such as signal transmission, bandwidth enhancement, and resistance control to improve the demand for computing high-efficiency chips such as microprocessors, chipsets, and graphics chips has been improved, resulting in more efficient I / O connections. Develop a package with However, circuit boards that package semiconductor chips are now equipped with openings such as thin wirings to meet the development trend of miniaturization, multifunction, high speed, and high solidification. In current circuit board production, critical dimensions such as line width, line space and aspect ratio have been reduced from the typical size of 100 μm to 30 μm. Today, efforts are being made to refine thinner circuit wiring.

In order to increase the wiring accuracy required for the circuit board of the semiconductor chip package, the semiconductor industry has developed a build-up technique, which stacks the surface of the core circuit board into a plurality of dielectric layers and circuit boards, and the conductive bi By forming an ass to electrically connect the upper and lower circuit layers, the build-up process is critically important for the circuit density of the circuit board.

1A-1H show a conventional method of manufacturing a build-up circuit board. First, as shown in FIG. 1A, a core board 1 including an insulating layer 100 and a thin film metal layer 101 such as resin coated copper (RCC) is provided, and then the core board. In (1), a through hole 102 is formed. As shown in FIG. 1B, another metal layer 103 is formed on the surface of the core board 1 and the inner wall of the through hole 102 by a copper electroplating process. As shown in FIG. 1C, an insulating layer is formed by filling a space left in the through hole 102 by a conductive or non-conductive hole-plugging material (such as an insulating ink or a conductive paste containing copper). Plating through-holes (PTH) 102a for electrically connecting the metal layer 103 are formed on upper and lower surfaces of the 100. As shown in FIG. 1D, the marginal portion of the hole-filling material 11 is removed by a polishing process to make the circuit surface in the core board 1 uniform and flat. As shown in FIG. 1E, a copper foil on both sides of the insulating layer 100 and the metal layer 103 is patterned to produce a finished core circuit board 10 having internal circuit layers 104 on both sides. .

Subsequently, as shown in FIG. 1F, a dielectric layer 12 is formed on the upper and lower surfaces of the core circuit board 10 on the inner circuit layer 104, and a plurality of openings 120 are formed in the dielectric layer 12 by laser ablation. Is formed. Thereafter, as shown in FIG. 1G, after the conductive layer 13 is formed on the surface of the dielectric layer 12 and the opening 120 by electroless plating, the conductive layer 13 has a pattern resist layer 14. ) Is formed to form the circuit layer 15. As shown in FIG. 1H, the pattern resist layer 14 is removed and etching is performed, thereby removing the conductive layer 13 under the pattern resist layer 14. The process is repeated to form a dielectric layer and a build-up circuit layer in the manufacture of a circuit board having a multilayer circuit layer.

In this process, however, an insulating layer covered with a thin metal layer is used as the core, and a core circuit board is formed by forming a circuit on the core and then performing a build-up process on the core circuit board, thereby meeting the electrical demands required. The multilayer circuit board is manufactured. As a result, the thickness of the finished multilayer circuit board cannot be reduced, which is inconsistent with the trend of recent miniaturized semiconductor package structures. If the core thickness is reduced below 60 mu m, multilayer circuit board fabrication will be greatly compromised and the yield will be greatly reduced.

In addition, the manufacture of core circuit boards requires additional steps, such as hole-plugging and scrubbing, to encourage cost increases. More importantly, it is necessary to form a plurality of PTH in the core circuit board, and the diameter of the typical through hole formed by the perforation is about 100 μm or more, while the diameter of the conductive via (laser blind hole) is about 50 μm. . In comparison, the PTH process makes the structure having a finer circuit more difficult.

Furthermore, in the multilayer circuit board process described above, it is necessary to make the core circuit board before making the dielectric layer and the circuit layer, which results in complicated manufacturing steps, lengthy process, and consequently an increase in manufacturing cost.

As a result, there is an urgent need in the art for circuit boards that solve the problems of the prior art, such as increased circuit board thickness, low wiring density, low yield, complex manufacturing steps, long process time, and high cost.

In view of the above problems of the prior art, a first object of the present invention is to provide a circuit board and a method of manufacturing the same, which can reduce the thickness of the circuit board and accordingly meet the miniaturization trend.

Another method of the present invention is to provide a circuit board capable of increasing the wiring density of the circuit board and a manufacturing method thereof.

It is still another object of the present invention to provide a circuit board and a method of manufacturing the same, which can simplify the manufacturing step, increase the yield, reduce the manufacturing time and lower the unit cost.

The circuit board manufacturing method of the present invention for achieving the above and other objects, providing a carrier board made of metal; Forming an insulating protective layer on one surface of the supporting substrate, and forming a plurality of openings on the insulating protective layer to expose a portion of the supporting substrate; Forming a circuit structure on the surface of the insulating protective layer and in the opening; Forming a dielectric layer on the insulating protective layer and the circuit structure, and forming openings in the dielectric layer to expose the circuit structure; And forming a build-up structure and removing the support substrate to manufacture the circuit board.

The present invention also provides an insulating protective layer having a plurality of openings having conductive through holes therein; A pattern circuit layer formed on one surface of the insulating protective layer and electrically connected to the conductive through hole in the opening of the insulating protective layer; And a dielectric layer formed in the pattern circuit layer and the insulating protective layer and having a plurality of openings formed to expose a portion of the pattern circuit layer.

Compared with the prior art, the circuit board and its manufacturing method according to the present invention effectively reduce the thickness of the circuit board, reduce the package size, and enhance the electrical function. Accordingly, the present invention meets the trend of miniaturization of electronic products, and can eliminate the problems of conventional thick packages and large volume products.

1A-1H are cross-sectional views illustrating a conventional circuit board manufacturing method having a build-up layer according to the prior art.
2a to 2ff are cross-sectional views showing a method according to a first embodiment of the present invention.
Figure 2aa is another cross-sectional view showing a supporting substrate which is a metal layer with an insulating plate attached on one surface thereof in the method according to the first embodiment of the present invention.
3a to 3ff are cross-sectional views showing a method according to a second embodiment of the present invention.
3A is another cross-sectional view showing a supporting substrate which is a metal layer having an insulating plate attached on one surface thereof in the method according to the second embodiment of the present invention;

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to FIGS. 1A to 2FF and FIGS. 3A to 3FF.

Example  One

2A to 2FF are cross-sectional views showing a method according to a first embodiment of the present invention.

As shown in FIG. 2A, a support substrate 20 is provided first, which is made of metal, but not limited to, preferably copper. Thereafter, an insulating protective layer 21 made of a photosensitive dielectric material or a solder mask layer is formed in the supporting substrate 20, and a plurality of openings 210 are formed in the insulating protective layer 21 to support the supporting substrate 20. Expose part of.

As shown in FIG. 2B, the supporting substrate 20 serves as a conductive path for forming the circuit structure 22 by electroplating. First, a seed layer (not shown) is formed on the surface of the insulating protective layer 21 and the opening 210 by electroless plating. Thereafter, the metal layer (not shown) and the conductive through hole 221 are formed by electroplating, and finally, the pattern circuit layer 222 is formed by photolithography and etching.

Another method of manufacturing the circuit structure 22 is disclosed. First, an unshown seed layer is formed on the surfaces of the insulating protective layer 21 and the opening 210 by electroless plating. Thereafter, a pattern resist layer (not shown) is formed on the seed layer. Finally, the pattern circuit layer 222 and the conductive through hole 221 is formed by electroplating, and details thereof will not be described any more.

As shown in FIG. 2C, the method further includes forming a dielectric layer 23 on the insulating protective layer 21 and the circuit structure 22 and the plurality of openings 230 in the dielectric layer 23. Forming a portion thereof, thereby exposing a portion of the pattern circuit layer 222. The dielectric layer 23 may be a combination of an organic film made of a dielectric material or a liquid organic resin material, which may be a photosensitive or non-photosensitive organic resin, for example, an Ajinomoto build-up film (ABF), a benzocyclo-buthene (BCB), or an LCP (LCP). Liquid crystal polymer), PI (poly-imide), PPE (poly (phenylene ether)), PTFE (poly (tetra-fluoroethylene)), FR4, FR5, BT (bismaleimide triazine) or aramid, etc. It may also be made of a material mixed with other epoxy resins and glass fibers. As such, a basic circuit board is manufactured to meet the requirements of many different types of assemblies.

As shown in FIG. 2D, a build-up structure 24 is formed in the dielectric layer 23. The build-up structure 24 includes at least one dielectric layer 241, at least one circuit layer stacked on the dielectric layer 241, a plurality of connection pads 244 and a plurality of conductive through holes formed in the dielectric layer 241. (243). The through hole 243 is electrically connected to the pattern circuit layer 222. In addition, another insulating protective layer 25 is formed on the surface of the build-up structure 24, and a plurality of openings 250 are formed in the insulating protective layer 25, so that the connection pads of the build-up structure 24 ( 244). The connection pad 244 may be mounted together with a conductive element (not shown), such as a conductive bump or a metal wire, and thus electrically connected to a semiconductor device (not shown).

As shown in FIG. 2E, the support substrate 20 is then removed by chemical etching to expose the bottom surface of the conductive through hole 221, and likewise etched slightly recessed as shown in FIG. 2F 221. ') Is formed. Optionally, the support substrate 20 may be subjected to a patterning process such as photolithography and etching, or SAP electroplating may be performed after the support substrate 20 is removed so that each of the conductive through holes 221 may be formed. A bump 20 'is formed on the bottom surface, and the bump 20' protrudes outward from the surface of the insulating protective layer 21 as shown in Fig. 2ff.

Furthermore, an adhesion layer is formed on the surface of the bump 20 '(not shown), which is tin, lead, nickel, palladium, silver, gold, a metal alloy thereof, or tin / lead, nickel / gold, nickel / palladium It may be a gold, multi-layered metal or organic solderability preservatives (OSP), and other suitable materials may be used.

As shown in FIG. 2A, the support substrate 20 made of metal further includes an insulating substrate 201 attached to the other surface of the support substrate 20, which is a surface on which an insulating protective layer 21 is formed. The other side. Thereafter, the steps as shown in the following Figures 2A to 2FF proceed. The difference is that the insulating substrate 201 attached to the supporting substrate 20 is removed in a chemical or physical manner prior to the removal of the supporting substrate 20.

Example  2

3A to 3FF are cross-sectional views showing the method according to the second embodiment of the present invention. Unlike the first embodiment, the second embodiment discloses the step of forming the conductive through holes 32 and the pattern circuit layer alternately instead of simultaneously.

As shown in FIG. 3A, the method further includes providing a support substrate 30 made of metal, forming an insulating protective layer 31 on the supporting substrate 30, and the insulating protective layer 31 thereof. Forming a plurality of openings 310) to expose the support substrate 30, and forming conductive through holes 32 in the openings 310 of the insulating protection layer 31.

As shown in FIG. 3B, the method includes forming a pattern circuit layer 33 on the top surface of the conductive through hole 32 and the insulating protective layer 31 and the pattern in the conductive through hole 32. And electrically connecting portions of the circuit layer 33. Before the pattern circuit layer 33 is formed, a seed layer (not shown) is formed on the surface of the insulating protective layer 31 and the upper surface of the conductive through hole 32. The seed layer is a conductive passage for electricity. A pattern resist layer (not shown) is formed on the seed layer to form the pattern circuit layer 33 by electroplating. Alternatively, the pattern circuit layer 33 may electroplat the seed layer to first form a metal layer and then perform patterning processes such as photolithography and etching.

As shown in Figs. 3c to 3ff, the following steps are the same as those of Figs. 2c to 2ff described above, and further description thereof will be omitted. 3aa is understood with reference to FIG. 2aa.

In addition, the present invention discloses a circuit board, which includes an insulating protective layer 21 having a plurality of openings 210, conductive through holes 221 formed in each opening 210, and an insulating protective layer 21. A pattern circuit layer 222 formed on the surface of the substrate) and electrically connected to the conductive through hole 221, and an insulating layer 23 formed on the surface of the insulating protective layer 21 and the pattern circuit layer 222. A plurality of openings 230 are formed in the dielectric layer 23 to expose portions of the pattern circuit layer 222 as shown in FIG. 2E. The bottom of each of the conductive through holes 221 may be further etched to form a slightly recessed structure 221 ′ (FIG. 2F), or a patterning process may be performed to bump 20 ′ on the bottom of each of the conductive through holes 221. ), And the bumps 20 'protrude outward from the surface of the insulating protective layer 21, as shown in Fig. 2ff.

Therefore, according to the circuit board of the present invention and a method of manufacturing the same, it is possible to manufacture a circuit board without a core, thereby minimizing electronic products by effectively reducing the circuit board thickness and facilitating the size reduction for packaged products to promote electrical functions. Can respond to the trend.

Further, the circuit board of the present invention does not require PTH for electrical connection between circuits of each layer, which is made through conductive through holes formed in the dielectric layer, so that the wiring density of the circuit board surface can be improved.

The preferred embodiments of the present invention have been described above, but those skilled in the art to which the present invention pertains may be modified within the scope of the present invention.

Claims (17)

  1. Providing a carrier board made of metal;
    Forming an insulating protective layer on one surface of the supporting substrate, and forming a plurality of openings on the insulating protective layer to expose a portion of the supporting substrate;
    Forming a circuit structure on the surface of the insulating protective layer and in the opening, wherein the circuit structure comprises a patterned circuit layer formed on the surface of the insulating protective layer and an opening of the insulating protective layer. First conductive vias formed in the substrate;
    Forming a first dielectric layer on the insulating protection layer and the circuit structure, and forming openings in the first dielectric layer to expose the pattern circuit layer;
    Build-up struture comprising at least one second dielectric layer, at least one build-up circuit layer, a plurality of connection pads and a plurality of second conductive through holes electrically connected to the pattern circuit layer ) In the first dielectric layer, wherein the plurality of connection pads of the build-up structure are used to electrically connect to a semiconductor device; And
    Removing the support substrate to expose each bottom surface of the first conductive through hole as another connection pad, the exposed bottom surface of each of the first conductive through holes being coplanar with the insulating protective layer; Used to electrically connect to a circuit board;
    Circuit board manufacturing method comprising a.
  2. The method of claim 1,
    Before forming the insulating protective layer on one surface of the supporting substrate, further comprising attaching the insulating substrate to the other surface of the supporting substrate.
  3. The method of claim 1, wherein the circuit structure,
    Forming a seed layer by electroless plating, electroplating the insulating protective layer to form a metal layer and the conductive through hole, and forming the pattern circuit by photolithography and etching. A circuit board manufacturing method, characterized in that the step of forming a layer.
  4. The method of claim 1, wherein the circuit structure,
    Forming a seed layer by electroless plating, and forming the patterned circuit layer and the conductive through hole by electroplating.
  5. The method of claim 1,
    The lower surface of each of the first conductive through holes is etched after the support substrate is removed, thereby forming a recessed structure.
  6. The method of claim 1,
    And forming a bump on a lower surface of each of the first conductive through holes by a patterning process.
  7. The method of claim 1,
    Forming another insulating protective layer on one surface of the build-up structure; And
    Forming a plurality of openings in the insulating protective layer to expose the connection pads of the build-up structure;
    Circuit board manufacturing method characterized in that it further comprises.
  8. Providing a support substrate made of a metal;
    Forming an insulating protective layer on one surface of the supporting substrate, and forming a plurality of openings on the insulating protective layer to expose a portion of the supporting substrate;
    Forming first conductive through holes in each of the openings of the insulating protective layer;
    Forming a pattern circuit layer on a surface of an insulating protective layer and an upper surface of the first conductive through hole so as to be electrically connected to the first conductive through hole;
    Forming a first dielectric layer in which the opening is formed to expose a portion of the pattern circuit layer, in the insulation protection layer and the pattern circuit layer;
    The build-up structure includes at least one second dielectric layer, at least one build-up circuit layer, and a plurality of connection pads and a plurality of second conductive through holes electrically connected to the pattern circuit layer. Forming in the plurality of connection pads of the build-up structure is used to electrically connect to a semiconductor device; And
    Removing the support substrate to expose the bottom surface of the first conductive through hole as another connection pad, wherein the exposed bottom surface of each of the first conductive through holes is coplanar with the insulating protective layer and on another circuit board. Used to be electrically connected;
    Circuit board manufacturing method comprising a.
  9. The method of claim 8,
    Before forming the insulating protective layer on one surface of the supporting substrate, further comprising attaching the insulating substrate to the other surface of the supporting substrate.
  10. The method of claim 8, wherein the pattern circuit layer,
    Forming a seed layer by electroless plating; forming a metal layer by electroplating; and forming the pattern circuit layer by photolithography and etching.
  11. The method of claim 8, wherein the pattern circuit layer,
    Forming a seed layer by electroless plating, forming a pattern resist layer on the seed layer, and forming a pattern circuit layer by electroplating.
  12. The method of claim 8,
    Forming another insulating protective layer on one surface of the build-up structure; And
    Forming a plurality of openings in the insulating protective layer to expose the connection pads of the build-up structure;
    Circuit board manufacturing method characterized in that it further comprises.
  13. The method of claim 8,
    The lower surface of the first conductive through hole is etched after the support substrate is removed, thereby forming a recessed structure.
  14. The method of claim 8,
    And forming a bump on a lower surface of the first conductive through hole by a patterning process.
  15. An insulating protective layer having a plurality of openings having a first conductive through hole therein, wherein an exposed surface of each of the first conductive through holes is coplanar with the insulating protective layer and used to electrically connect to another circuit board;
    A pattern circuit layer formed on one surface of the insulating protective layer and electrically connected to the first conductive through hole;
    A first dielectric layer formed in the pattern circuit layer and the insulating protective layer and having a plurality of openings formed to expose a portion of the pattern circuit layer; And
    A build formed in the first dielectric layer and including at least one second dielectric layer, at least one build-up circuit layer, a plurality of connection pads and a plurality of second conductive through holes electrically connected to the pattern circuit layer An up structure, wherein the plurality of connection pads of the build-up structure are used to electrically connect to a semiconductor device;
    Circuit board comprising a.
  16. 16. The method of claim 15,
    And another insulating protection layer formed on one surface of the build-up structure and having a plurality of openings exposing the connection pads of the build-up structure.
  17. 16. The method of claim 15,
    And a bump formed on an exposed surface of the first conductive through hole.
KR1020100132506A 2005-12-20 2010-12-22 Structure of circuit board and method for fabricating the same KR20110003453A (en)

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