KR20080079115A - Noncontact scanner using a magnetic actuator - Google Patents

Noncontact scanner using a magnetic actuator Download PDF

Info

Publication number
KR20080079115A
KR20080079115A KR1020070019204A KR20070019204A KR20080079115A KR 20080079115 A KR20080079115 A KR 20080079115A KR 1020070019204 A KR1020070019204 A KR 1020070019204A KR 20070019204 A KR20070019204 A KR 20070019204A KR 20080079115 A KR20080079115 A KR 20080079115A
Authority
KR
South Korea
Prior art keywords
magnetic
platform
scanner
hinge
driver
Prior art date
Application number
KR1020070019204A
Other languages
Korean (ko)
Other versions
KR100872031B1 (en
Inventor
박영우
설동희
정정용
Original Assignee
(주) 포코
충남대학교산학협력단
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by (주) 포코, 충남대학교산학협력단 filed Critical (주) 포코
Priority to KR1020070019204A priority Critical patent/KR100872031B1/en
Publication of KR20080079115A publication Critical patent/KR20080079115A/en
Application granted granted Critical
Publication of KR100872031B1 publication Critical patent/KR100872031B1/en

Links

Images

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B26/00Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating
    • G02B26/08Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light
    • G02B26/0816Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B26/00Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating
    • G02B26/08Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light
    • G02B26/10Scanning systems
    • G02B26/105Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1822Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors comprising means for aligning the optical axis
    • G02B7/1827Motorised alignment
    • G02B7/1828Motorised alignment using magnetic means
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N1/00Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
    • H04N1/04Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa
    • H04N1/113Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa using oscillating or rotating mirrors
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N3/00Scanning details of television systems; Combination thereof with generation of supply voltages
    • H04N3/02Scanning details of television systems; Combination thereof with generation of supply voltages by optical-mechanical means only
    • H04N3/08Scanning details of television systems; Combination thereof with generation of supply voltages by optical-mechanical means only having a moving reflector

Abstract

A noncontact scanner is provided to prevent mechanical erosion inside the scanner by adjusting an angle of a platform using a magnetic force instead of a steel wire rod. A mirror(1) is attached to one surface of a planar platform(10), while a bump is formed on the other side thereof. A hinge is formed in the center of the other side of the platform, such that the platform is supported. A magnetic actuator(30) is con-centrically arranged around the hinge and contactlessly coupled with the bump. The magnetic actuator generates the magnetic force for driving the platform according to a control voltage. A frame(40) supports the hinge. The actuator is installed on the frame. A housing(50) protects the magnetic actuator. A controller provides the control voltage to the magnetic actuator and controls the platform during a scanning process.

Description

Non-contact scanner using magnetic driver {NONCONTACT SCANNER USING A MAGNETIC ACTUATOR}

1 is a perspective view showing a non-contact scanner using a magnetic drive according to the present invention,

2 is a view for explaining a driving mechanism of the scanner according to the present invention;

3 is a view for explaining the structure of a magnetic driver according to the present invention;

4 is a view for explaining the operation of the magnetic driver according to the present invention;

5 is a schematic view showing a plunger type magnetic driver according to the present invention;

6 is a view showing a spherical elastic hinge used in the present invention,

7 is a view showing a platform having a flexural elasticity used in the present invention,

8 shows a driver and a platform according to the invention,

9 shows an example of a conventional scanner used in a laser processing machine.

* Explanation of symbols for main parts of the drawings

1: mirror 10: platform

12: disc 14-1-14-3: protrusion

20: elastic hinge 30: magnetic drive

31: magnetostrictive material 32-1, 32-2: piezo

33-1,33-2: electrode 34-1,34-2: yoke

35: permanent magnet 40: frame

50: housing P1, P2: magnetic path

The present invention relates to a scanner that scans the focal position of the laser in the x, y plane by changing the angle of the mirror in a laser processing machine, and more particularly, using a magnetic driver that can be driven in a non-contact manner using magnetic drive It relates to a contactless scanner.

In general, a system for scanning the focal position of the laser on the x, y plane by changing the angle of the mirror has been studied in various ways, and actually commercialized in various products and applied to the laser processing machine. In general, a moving coil type galvano mirror is most widely used, and a lot of researches on a scanner using a piezo driver for ultra-precision control have been made.

9 is a schematic diagram showing a laser processing apparatus employing a conventional galvano scanner, the laser processing apparatus comprising a control device 110, a laser generator 120, an optical transmission system 130, a galvano scanner 140, It consists of a work bench 150.

The controller 110 may be implemented as a PC with a built-in NC board to control the entire machining process, the laser generator 120 is, for example, CO 2 It can be implemented with a laser generator. The optical transmission system 130 is formed of an optical instrument such as a collimator 132 to form a laser generated by the laser generator 120 as a laser beam 102 for processing.

The galvano scanner 140 consists of an X-axis galvano motor 142-1 and a galvano mirror 144-1, a Y-axis galvano motor 142-2 and a galvano mirror 144-2 for optical transmission. The laser beam 102 transmitted through the system 130 is irradiated to a desired position of the work piece 160 under the control of the control device 110 so that rapid processing is performed. That is, when the galvano scanner 140 used for the laser scanner deflecting the laser beam 102 causes current to flow through the movable coil disposed in the magnetic field, an electromagnetic force is generated in relation to the current and the magnetic flux, and a rotational force proportional to the current. (Torque) is generated and the laser beam is irradiated by moving the reflector through the movable coil. As the conventional galvano scanner 140, for example, a moving iron is used in place of a moving coil arranged in a magnetic field, and a magnetic path is formed of a magnetic body provided with two permanent magnets and four magnetic poles around it. By varying the magnetic flux between magnetic poles according to the magnitude and direction of the current flowing in the drive coil wound around the coil, the reflector is moved through the movable iron to polarize the laser beam.

The work table 150 includes a work table 152 for transporting the workpiece 160 in the X-axis direction and the Y-axis direction, a scan lens 154 for focusing the laser beam, and a camera for monitoring the actual machining situation. 156) and the like to process the workpiece by the laser beam irradiated through the galvano scanner 140.

However, since the conventional scanner uses an electromagnet, the current continues to flow in the coil even if the object does not perform any operation, and energy loss due to heat is generated. This heat generation limits the use range of the electromagnet. In addition, there is a difficulty in overcoming the winding problem of the three-dimensional coil for precise magnetic force control.

That is, in the case of the conventional electromagnet made of coils, it is necessary to continuously generate energy by generating a magnetic field by controlling current and to control the final magnetic force, and there is a problem of energy loss and limitations due to heat generated in the coil. Occurs in addition. In addition, as a complicated coil structure is required for precise control, there is a problem in that it is very difficult to manufacture and very difficult to miniaturize.

The present invention has been proposed to solve the above problems, and an object of the present invention is to use a coil-less magnetic force control device to eliminate the energy loss and heat generated by the coil and to enable a simple and precise control of the structure It is to provide a non-contact scanner using a drive.

In order to achieve the above object, the present invention is a plate-shaped platform is attached to the mirror and the projection formed on the other surface; A hinge formed at the center of the other surface of the platform to support the platform; A magnetic driver disposed evenly on the concentric circle about the hinge and coupled to the protrusion in a non-contact manner and generating a magnetic force for driving the platform according to a control voltage; A frame for supporting the hinge and for installing the magnetic driver; A housing for protecting a magnetic driver attached to the frame; And a controller configured to provide a control voltage to the magnetic driver to control the platform to perform a scan operation.

The magnetic driver has a pair of yokes coupled to both sides of the permanent magnet to allow the magnetic to flow, and a pair of piezos are positioned at one end of the pair of yokes with a magnetostrictive material therebetween. It is configured to apply a control voltage between the pair of piezo and the magnetostrictive material, the gap (G) is formed at the other end of the pair of yoke to be inserted into the projection of the platform.

In addition, the magnetic driver is of a plunger type, the pair of piezos are deformed according to the control voltage to apply stress to the magnetostrictive material, the magnetic strain material is a magnetic force is variable according to the stress of the piezo It is to change the strength of the magnetic force flowing through the gap.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a perspective view showing a non-contact scanner using a magnetic drive according to the present invention.

The non-contact scanner using the magnetic drive according to the present invention has a disk-like platform 10 having a mirror 1 attached thereto for reflecting a laser beam as shown in FIG. 1, and an elastic hinge for supporting the platform (FIG. 7 of 20) and the magnetic driver 30 is arranged evenly on the concentric circle around the elastic hinge 20 to generate a magnetic force for driving the platform 10 in accordance with a control voltage, and the magnetic driver Frame 40 and a housing 50 for protecting the magnetic driver attached to the frame. Although not shown in the drawing, the scanner of the present invention is provided with a control unit to control the platform to perform a scan operation by providing a control voltage V to the magnetic driver 30.

2 is a view for explaining a driving operation mechanism of the scanner according to the present invention, where (a) is a schematic cross-sectional view and (b) is a layout view of a magnetic driver.

As shown in FIG. 2, three magnetic actuators 30 are arranged at the bottom of the platform 10 equally at 120 ° intervals on the concentric circles for angle control with respect to two axes of the scanner mirror 1. In addition, the elastic hinge 20 existing at the center of the bottom surface of the platform 10 converts the magnetic force pulled by the three magnetic actuators 30 into the angular movement of the mirror 1 and actually acts as a spring to change the magnetic force into a linear displacement. Do it. The angular direction and the angular size of the mirror 1 are determined according to the combination of the magnetic forces generated by the three magnetic drivers 30. The magnetic driver 30 using the inverse magnetostrictive effect is conventionally made using a coil. Unlike electromagnets, there is no coil, which eliminates energy loss and heat generation by the coil, enabling precise control in a structurally simple device.

Figure 3 is a view for explaining the structure of the magnetic drive according to the present invention, (a) is a structure showing a piezo on both sides of the magnetostrictive material, (b) is a yoke on both sides in (a) The figure which shows the structure which added and added the permanent magnet in parallel.

As shown in FIG. 3, the magnetic driver 30 of the present invention has piezoelectrics 32-1 and 32-2 attached to the upper and lower portions of the magnetostrictive material 31, respectively. The electrodes 33-1 and 33-2 are located outside the 32-2. In addition, the magnetostriction direction of the magnetostrictive material 31 is configured in the x direction, the permanent magnet 35 is located in parallel with the magnetostrictive material 31, iron yokes (34-1) through which magnetic flux can flow 34-2) are combined to form a magnetic circuit.

The magnetostrictive material 31 has a large magnetization property due to the stress applied from the outside due to an inverse magnetostrictive effect, thereby acting as a variable magnetoresistance in the magnetic circuit.

Piezos 32-1 and 32-2 play a role of applying stress to the magnetostrictive material 31. Electrodes (outside of each piezo 32-1 and 32-2) Applying a control voltage (V) between 33-1 and 33-2 and the magnetostrictive material 31 acting as a ground, the piezos 32-1 and 32-2 are polarized in the z direction and stretched. It is reduced in the x direction to stress the magnetostrictive material (31).

4 is a view for explaining the operation of the magnetic driver according to the present invention, (a) is a magnetic flux of the magnetic path p1 and the magnetic path p2 before the voltage is applied to the piezoelectric both ends of the electrode according to the magnetoresistance ratio, respectively In the case of flowing, (b) is a case where the magnetic flux of the p2 path increases as the magnetoresistance of the p2 path increases by applying the control voltage (V) to both ends of the piezo.

As shown in FIG. 4, the magnetic circuit is configured as a parallel magnetic circuit and includes a path 1 (P1) flowing from a permanent magnet 35 to a gap and a magnetostrictive material 31 at the permanent magnet 35. It is divided into path 2 (P2) flowing in the), and the magnetic force on the movable yoke (movable yoke) changes according to the magnetization degree of the magnetostrictive material (31). As such, the shrinkage of the piezos 32-1 and 32-2 due to the control voltage V causes pressure in the x direction of the magnetostrictive material 31, and the magnetostrictive material 31 is inverse magnetostrictive. According to the effect), the degree of magnetization decreases and the magnetoresistance increases.

However, since the sum of the magnetic flux Flux is preserved, as the magnetic resistance of the magnetostrictive material 31 increases, the amount of magnetic flux Flux flowing in the gap increases, thereby increasing the magnetic force.

In particular, the magnetic driver 30 according to the present invention is designed in a plunger type structure, as shown in Figure 5 to enable a stable displacement control. Referring to FIG. 5, there are yokes 34-1 and 34-2 for allowing magnets to flow on both sides of the permanent magnet 35, and at one end of the yokes 34-1 and 34-2, the magnetostrictive material. A pair of piezos 32-1 and 32-2 are positioned with the 31 sandwiched therebetween, and both piezos 32-1 and 32-2 apply a + control voltage (V) through the electrode and are subjected to magnetostriction. Ground 31 is connected to the material 31. And the other end of the yoke (34-1, 34-2) has a gap (gap) is formed, the platform projections (14-1, 14-2, 14-3) between the gap is located platform 10 The pulling force F is generated.

6 is a view showing a spherical elastic hinge used in the present invention.

Referring to Figure 6, the elastic hinge (Flexure) 20 is to enable the platform 10 to rotate in the two-axis 360 ° direction to implement the inclination angle, by interacting with the magnetic force of the three magnetic drivers 30 It serves as a spring constant for the displacement and the guide to change the linear movement of the magnetic drive 30 to the angular displacement in the two axis direction.

Therefore, in the present invention, the elastic hinge 20 uses a spherical flexure hinge because the platform 10 including the scanner mirror 1 must have an inclination in two directions of 360 °.

7 is a view showing a platform having a bending elasticity used in the present invention, Figure 8 is a view showing a magnetic driver and platform according to the present invention. The platform 10 according to the present invention has three projections 14-1-1 to be inserted into a gap of the magnetic driver on the opposite side of the disc 12 to which the mirror 1 is attached as shown in FIG. 7. 14-3) is formed, and the elastic hinge 20 is formed in the center.

As shown in FIG. 8, the coupling structure of the platform 10 and the magnetic driver 30 includes a magnetic driver in which the protrusions 14-1 to 14-3 of the platform 10 are disposed at 120 ° intervals. And to be positioned in the gap G between the yokes of 30). At this time, the projections 14-1 to 14-3 of the platform and the yokes 34-1 and 34-2 of the magnetic driver are coupled in a state where they do not come into contact with each other.

The operation of the non-contact scanner using the magnetic drive according to the present invention configured as described above is as follows.

First, a control voltage of a controller (eg, a controller of a laser processing machine) not shown is applied to each of the three magnetic drivers 30. Each magnetic driver 30 causes the pair of piezos 32-1 and 32-2 to deform in accordance with the control voltage applied thereto, thereby applying stress to the magnetostrictive material 31. The magnetostrictive material 31 is changed in magnetization by an inverse magnetostrictive effect depending on the degree of stress. However, since the sum of the fluxes by the permanent magnets 35 must be preserved, the amount of the magnetic flux flowing in the gap is changed according to the change of the magnetoresistance of the magnetostrictive material 31, and thus, the platform 10. The magnetic force that pulls is changed and tilts the platform 10 in the desired direction and angle according to the magnetic force combination of each magnetic driver. If the platform 10 is inclined, the mirror 1 attached to the platform is inclined, whereby the laser beam is reflected from the mirror 1 so as to scan in a desired manner.

Although the present invention has been described in detail through specific embodiments, the present invention is not limited to the above-described embodiments, and various changes may be made by those skilled in the art to which the present invention pertains without departing from the spirit and scope of the present invention. It may be changed and implemented.

As described above, the non-contact scanner of the present invention is a non-contact type in which the magnetic driver and the platform do not contact by controlling the angle of the mirror with magnetic force. Therefore, in the case of the conventional scanner using the linear movement of the piezo or electromagnet as in the prior art, a structure such as a ball bearing or steel wire rods is required to convert the linear movement into an angular movement. The non-contact scanner uses magnetic force to adjust the angle of the platform, eliminating the need for inclined driving, no mechanical problems such as friction, abrasion, and fatigue due to contact, and no errors in assembly of the structure. Precise drive is possible.

The scanner of the present invention is also a coilless magnetic driver. That is, in the case of a conventional scanner made of coils, a magnetic field must be generated by flowing a current through the coil, and energy must be continuously consumed by controlling the final magnetic force. Occurs. In addition, the conventional scanner requires a complicated coil structure for precise control, making it difficult to manufacture and very difficult to miniaturize.

However, since the present invention uses a magnetic driver using the inverse magnetostrictive effect of the magnetostrictive material, only a voltage is applied according to the characteristics of the capacitor of the piezo, and since the current hardly flows, there is no energy consumption for the current and the coil There is no heat generation and energy consumption. In addition, by using a laminated structure of piezo and magnetostrictive materials instead of a complicated coil structure, the structure of the driver is very simple and can be miniaturized.

Claims (6)

  1. A plate-shaped platform having a mirror attached to one side and a protrusion formed on the other side thereof;
    A hinge formed at the center of the other surface of the platform to support the platform;
    A magnetic driver disposed evenly on the concentric circle about the hinge and coupled to the protrusion in a non-contact manner and generating a magnetic force for driving the platform according to a control voltage;
    A frame for supporting the hinge and for installing the magnetic driver;
    A housing for protecting a magnetic driver attached to the frame; And
    And a control unit for controlling the platform to perform a scan operation by providing a control voltage to the magnetic driver.
  2. The magnetic drive device of claim 1, wherein the magnetic driver
    A pair of yokes are coupled to both sides of the permanent magnet to allow magnetic flow. A pair of piezos are disposed at one end of the pair of yokes with a magnetostrictive material interposed therebetween. The magnetic contact material is configured to apply a control voltage, and a gap is formed at the other end of the pair of yoke, the contactless scanner using a magnetic drive, characterized in that the projection of the platform can be inserted.
  3. The magnetic drive device of claim 2, wherein the magnetic driver
    It is of a plunger type, the pair of piezos are deformed according to the control voltage to apply stress to the magnetostrictive material, and the magnetic force of the magnetostrictive material is variable according to the stress of the piezoelectric force flowing through the gap Non-contact scanner using a magnetic drive, characterized in that the intensity of the variable.
  4. The non-contact scanner according to claim 1, wherein three magnetic actuators are equally arranged at a concentric circle at 120 ° intervals.
  5. 5. The non-contact scanner according to claim 4, wherein the platform has three projections on the opposite side to which the mirror is attached, the three projections being disposed equally at intervals of 120 ° on the concentric circle.
  6. The method of claim 1, wherein the hinge
    Non-contact scanner using a magnetic drive, characterized in that the spherical flexure hinge to tilt the platform including the mirror in a two-axis 360 ° direction.
KR1020070019204A 2007-02-26 2007-02-26 Noncontact scanner using a magnetic actuator KR100872031B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020070019204A KR100872031B1 (en) 2007-02-26 2007-02-26 Noncontact scanner using a magnetic actuator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020070019204A KR100872031B1 (en) 2007-02-26 2007-02-26 Noncontact scanner using a magnetic actuator

Publications (2)

Publication Number Publication Date
KR20080079115A true KR20080079115A (en) 2008-08-29
KR100872031B1 KR100872031B1 (en) 2008-12-05

Family

ID=39880904

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020070019204A KR100872031B1 (en) 2007-02-26 2007-02-26 Noncontact scanner using a magnetic actuator

Country Status (1)

Country Link
KR (1) KR100872031B1 (en)

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012067853A1 (en) * 2010-11-15 2012-05-24 DigitalOptics Corporation MEMS Motion controlled actuator
WO2012067855A1 (en) * 2010-11-15 2012-05-24 DigitalOptics Corporation MEMS Rotational comb drive z-stage
US8337103B2 (en) 2010-11-15 2012-12-25 DigitalOptics Corporation MEMS Long hinge actuator snubbing
US8358925B2 (en) 2010-11-15 2013-01-22 DigitalOptics Corporation MEMS Lens barrel with MEMS actuators
US8855476B2 (en) 2011-09-28 2014-10-07 DigitalOptics Corporation MEMS MEMS-based optical image stabilization
US8873174B2 (en) 2010-11-15 2014-10-28 DigitalOptics Corporation MEMS Mounting flexure contacts
US8884381B2 (en) 2010-11-15 2014-11-11 DigitalOptics Corporation MEMS Guard trench
US8922870B2 (en) 2010-11-15 2014-12-30 DigitalOptics Corporation MEMS Electrical routing
US8941192B2 (en) 2010-11-15 2015-01-27 DigitalOptics Corporation MEMS MEMS actuator device deployment
US8953934B2 (en) 2010-11-15 2015-02-10 DigitalOptics Corporation MEMS MEMS actuator alignment
US8998514B2 (en) 2010-11-15 2015-04-07 DigitalOptics Corporation MEMS Capillary actuator deployment
US9019390B2 (en) 2011-09-28 2015-04-28 DigitalOptics Corporation MEMS Optical image stabilization using tangentially actuated MEMS devices
US9052567B2 (en) 2010-11-15 2015-06-09 DigitalOptics Corporation MEMS Actuator inside of motion control
US9061883B2 (en) 2010-11-15 2015-06-23 DigitalOptics Corporation MEMS Actuator motion control features
US9063278B2 (en) 2010-11-15 2015-06-23 DigitalOptics Corporation MEMS Miniature MEMS actuator assemblies
US9166463B2 (en) 2010-11-15 2015-10-20 DigitalOptics Corporation MEMS Linearly deployed actuators
US9352962B2 (en) 2010-11-15 2016-05-31 DigitalOptics Corporation MEMS MEMS isolation structures
US9515579B2 (en) 2010-11-15 2016-12-06 Digitaloptics Corporation MEMS electrical contact systems and methods

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0574686A3 (en) * 1992-05-13 1994-03-23 Spectranetics Corp
JP2000200437A (en) 1999-01-06 2000-07-18 Asahi Optical Co Ltd Rotational position detector for deflection mirror and optical information recording and reproducing head
KR100613616B1 (en) * 2003-11-28 2006-08-18 김연수 High speed, great space laser finishing machine that control position by nano-meter scale

Cited By (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10003282B2 (en) 2010-11-15 2018-06-19 DigitalOptics Corporation MEMS Linearly deployed actuators
WO2012067855A1 (en) * 2010-11-15 2012-05-24 DigitalOptics Corporation MEMS Rotational comb drive z-stage
US8337103B2 (en) 2010-11-15 2012-12-25 DigitalOptics Corporation MEMS Long hinge actuator snubbing
US8358925B2 (en) 2010-11-15 2013-01-22 DigitalOptics Corporation MEMS Lens barrel with MEMS actuators
US9899938B2 (en) 2010-11-15 2018-02-20 DigitalOptics Corporation MEMS Miniature MEMS actuator assemblies
US8873174B2 (en) 2010-11-15 2014-10-28 DigitalOptics Corporation MEMS Mounting flexure contacts
US8884381B2 (en) 2010-11-15 2014-11-11 DigitalOptics Corporation MEMS Guard trench
US8922870B2 (en) 2010-11-15 2014-12-30 DigitalOptics Corporation MEMS Electrical routing
US8941192B2 (en) 2010-11-15 2015-01-27 DigitalOptics Corporation MEMS MEMS actuator device deployment
US8953934B2 (en) 2010-11-15 2015-02-10 DigitalOptics Corporation MEMS MEMS actuator alignment
US8998514B2 (en) 2010-11-15 2015-04-07 DigitalOptics Corporation MEMS Capillary actuator deployment
WO2012067853A1 (en) * 2010-11-15 2012-05-24 DigitalOptics Corporation MEMS Motion controlled actuator
US9052567B2 (en) 2010-11-15 2015-06-09 DigitalOptics Corporation MEMS Actuator inside of motion control
US9061883B2 (en) 2010-11-15 2015-06-23 DigitalOptics Corporation MEMS Actuator motion control features
US9063278B2 (en) 2010-11-15 2015-06-23 DigitalOptics Corporation MEMS Miniature MEMS actuator assemblies
US9166463B2 (en) 2010-11-15 2015-10-20 DigitalOptics Corporation MEMS Linearly deployed actuators
US9352962B2 (en) 2010-11-15 2016-05-31 DigitalOptics Corporation MEMS MEMS isolation structures
US9515579B2 (en) 2010-11-15 2016-12-06 Digitaloptics Corporation MEMS electrical contact systems and methods
US9541815B2 (en) 2010-11-15 2017-01-10 DigitalOptics Corporation MEMS Actuator for motion control in miniature cameras
US9611926B2 (en) 2010-11-15 2017-04-04 DigitalOptics Corporation MEMS Motion controlled actuator
US9664922B2 (en) 2011-09-28 2017-05-30 DigitalOptics Corporation MEMS MEMS-based optical image stabilization
US8855476B2 (en) 2011-09-28 2014-10-07 DigitalOptics Corporation MEMS MEMS-based optical image stabilization
US9019390B2 (en) 2011-09-28 2015-04-28 DigitalOptics Corporation MEMS Optical image stabilization using tangentially actuated MEMS devices

Also Published As

Publication number Publication date
KR100872031B1 (en) 2008-12-05

Similar Documents

Publication Publication Date Title
US5289318A (en) Optical apparatus provided with a driving unit for moving a lens
KR101129119B1 (en) Apparatus for manipulation of an optical element
EP1665336B1 (en) Ultrasonic lead screw motor
US7187104B2 (en) Vibration-type driving device, control apparatus for controlling the driving of the vibration-type driving device, and electronic equipment having the vibration-type driving device and the control apparatus
Breguet et al. Stick and slip actuators: design, control, performances and applications
US5089740A (en) Displacement generating apparatus
EP1897156B1 (en) Mechanism comprised of ultrasonic lead screw motor
US7271943B2 (en) Micro-oscillating member, light-deflector, and image-forming apparatus
US6198565B1 (en) Light deflection element and display apparatus using same
JP2528552B2 (en) Plane precision positioning device
US6803843B2 (en) Movable-body apparatus, optical deflector, and method of fabricating the same
US6445481B2 (en) On-fulcrum movement drive apparatus
JP2005173411A (en) Light deflector
US4475033A (en) Positioning device for optical system element
KR20110098734A (en) Gravitation compensation for optical elements in projection lighting systems
ES2263431T3 (en) Device for the transmission of a movement.
US8279541B2 (en) Lens actuator module
US5076026A (en) Microscopic grinding method and microscopic grinding device
WO1996014959A1 (en) Electromechanical positioning unit
US20110122495A1 (en) Imaging lens unit and imaging apparatus
US20030026547A1 (en) Actuator mechanism for precision alignment of optical components
US7054048B2 (en) Shape variable mirror
US8922069B2 (en) Linear motor actuator
JP6309765B2 (en) Arrangement for mounting optical elements
WO2003025657A1 (en) Actuator-controlled mirror with z-stop mechanism

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20121102

Year of fee payment: 5

FPAY Annual fee payment

Payment date: 20131031

Year of fee payment: 6

FPAY Annual fee payment

Payment date: 20151125

Year of fee payment: 8

FPAY Annual fee payment

Payment date: 20161025

Year of fee payment: 9

FPAY Annual fee payment

Payment date: 20171025

Year of fee payment: 10

FPAY Annual fee payment

Payment date: 20181030

Year of fee payment: 11

FPAY Annual fee payment

Payment date: 20191031

Year of fee payment: 12