KR20060086511A - Vapor deposition source for organic material and evaporating apparatus for organic material - Google Patents

Abstract

The present invention relates to an organic material evaporation source and an organic material deposition apparatus, and includes a housing having one side opened, an organic material storage part disposed in the housing and having an opening in the same direction as the housing, and part of which is coupled to an opening of the organic material storage part. And a part having an exposed surface, the nozzle part comprising an injection nozzle for injecting an organic substance into the opening of the housing, and a heating part interposed between the housing and the nozzle part, wherein the heating part is the nozzle part and a predetermined region. It is provided over the organic storage of the, it is a technique that can prevent the clogging phenomenon of the nozzle by maintaining a higher temperature of the nozzle than the organic storage by wider the heating area of the nozzle than the organic storage.

Organic matter, evaporation source, heating wire

Description

Vapor deposition source for organic material and evaporating apparatus for organic material}

1 is a schematic view showing an organic material deposition apparatus having an organic material evaporation source of the present invention.

2 is a perspective view showing an organic material evaporation source according to the present invention;

3 is a cross-sectional view taken along the line AA of FIG.

4 is an enlarged cross-sectional view of a portion B of FIG. 3.

5A and 5B are plan views showing the heat ray arrangement of the organic material evaporation source according to the present invention.

<Description of the code for the main part of the drawing>

100: organic material deposition apparatus 200: vacuum chamber

300: organic material evaporation source 310: heat insulating member

320 housing 330 heat reflector

340: heat shield plate 350: nozzle unit

351: injection nozzle 352: shock prevention jaw

353: nozzle body 355: exposed surface

360: organic matter storage unit 370: heating unit

372: heating wire 400: evaporation source transfer device

401 ball screw 402 guide

403: motor

The present invention relates to an organic material evaporation source and an evaporation apparatus, and more particularly, to an organic evaporation source and an organic material evaporation apparatus for preventing the condensation of organic matter in the nozzle by maintaining the temperature of the nozzle unit for injecting the organic material higher than the organic storage unit. .

In general, an organic film of an organic light emitting device (OLED) is largely a method of forming an organic film by evaporating a low molecular organic material in a vacuum, and dissolving a high molecular organic material in a solvent, followed by spin coating, There is a method of forming an organic thin film using dip coating, doctor blading, inkjet printing, or the like.

In particular, low molecular weight organic materials are sublimable and are capable of evaporating at relatively low temperatures of 200-400 ° C. Therefore, when forming a thin film made of such a low molecular weight organic material, a shadow mask pattern having a thin film-shaped opening is aligned in front of the substrate, and then a thin film is formed by spraying the evaporated organic molecules toward the substrate. Thus, the predetermined pattern thin film by the shadow mask pattern is formed on the substrate.

On the other hand, the evaporation and spraying of the low molecular weight organic material is performed by an organic material evaporation source capable of heating the organic material to a predetermined temperature. At this time, the organic material evaporation source is provided with a heating unit for heating the organic material, and one side is provided with a nozzle for injecting the organic molecules evaporated by the heating unit or the like to the substrate side. Therefore, organic molecules evaporated by the heating unit or the like are sprayed to the substrate side through this nozzle to form a predetermined thin film.

However, in the conventional organic material evaporation source, a large temperature deviation occurs in the organic material storage part in which the organic material is accommodated and the nozzle part injecting the organic material evaporated from the organic material storage part. As a result, organic molecules evaporated from the organic matter storage unit are condensed inside the nozzles before being sprayed to the outside through the nozzles, thereby clogging the nozzles.

Accordingly, the present invention has been made in view of the above problems, and an object of the present invention is to provide an organic material evaporation source and an organic material deposition apparatus which prevents clogging of the nozzle part by maintaining the temperature of the nozzle part higher than the organic material storage part.

Organic matter evaporation source according to the present invention for achieving the above object,

A housing having one surface open;

An organic material storage unit located in the housing and having an organic material stored therein and having an opening in the same direction as the opening of the housing;

Located in the housing, one side is fastened to the opening of the organic material storage portion, the other side has a body exposed, the nozzle portion having an injection nozzle penetrating the organic material storage portion and the outside;

A heating part provided between the housing and the partial region of the organic material storage part and the body of the nozzle part, the heating part having a heating wire provided in a horizontal direction from a spraying direction of the nozzle part,

When the width of the exposed body of the nozzle portion in which the heating unit is located is 'a', the width of the organic storage portion 'b' is characterized in that the heating unit is interposed so that a> b.

In addition, the organic material deposition apparatus according to the present invention for achieving the above object,

With vacuum chamber,

A substrate provided on one side of the vacuum chamber,

A housing provided at the other side of the vacuum chamber and having an opening on one side thereof, an organic material storage unit having an opening in the same direction as the opening of the housing, having an organic material stored therein, and having an organic material stored therein; It is located, one side is fastened to the opening of the organic material storage portion, the other side has a body exposed, the nozzle portion having a spray nozzle passing through the organic material storage portion and the outside, and a portion of the housing and the organic material storage portion And it is provided between the body of the nozzle portion, characterized in that it comprises an organic evaporation source consisting of a heating unit having a heating wire provided in a horizontal direction from the spraying direction of the nozzle portion.

Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

Referring to FIG. 1, the organic material deposition apparatus 100 includes a vacuum chamber 200 and at least one organic material evaporation source 300 for injecting organic material particles onto the substrate S. Referring to FIG.

The vacuum chamber 200 is configured to maintain a vacuum inside the vacuum pump (not shown). In the vacuum chamber 200, an evaporation source transfer device 400 capable of moving the organic material evaporation source 300 in the vertical direction is provided to move the organic material evaporation source 300 in the deposition direction.

The evaporation source transfer device 400 is a vertical transfer device suitable for use in the vacuum chamber 200, and is configured to adjust the moving speed of the organic material evaporation source 300 according to process conditions.

The evaporation source transfer device 400 includes a ball screw 401 and a motor 403 for rotating the ball screw 401, and a guide 402 for guiding the organic material evaporation source 300. The evaporation source transfer device 400 may be implemented to drive at a constant speed using a linear motor in another embodiment.

On the other hand, the substrate (S) located in the vacuum chamber 200 is located in a substantially vertical direction for the deposition of the organic material. Preferably at an angle of approximately 70 ° to 110 ° relative to the ground.

In addition, a mask pattern M that determines a shape of the organic material to be deposited is disposed between the entire surface of the substrate S, that is, between the organic material evaporation source 300 and the substrate S. Therefore, the organic material evaporated from the organic material evaporation source 300 is deposited on the substrate S while passing through the mask pattern M so that an organic film having a predetermined shape is formed on the substrate S.

2 is a perspective view of an organic material evaporation source according to the present invention. 3 is a cross-sectional view taken along line A-A of the organic material evaporation source according to FIG. 2, and FIG. 4 is an enlarged cross-sectional view of part B of FIG. 3.

The organic material evaporation source 300 includes a rectangular housing 320 having an opening having one surface open. In this case, a heat insulating member 310 may be further provided outside the housing 320. The inside of the housing 320 is provided with an organic material storage unit 360 (or referred to as "crucible").

Here, the housing 320 is formed to surround the organic storage unit 360, and serves to isolate the organic storage unit 360 from the external environment.

In addition, the organic storage unit 360 is smaller than the housing 320 and is provided in the housing 320, and has an opening in the same direction as the housing 320.

In addition, the organic storage unit 360 stores an organic material which is a deposition material of an organic thin film to be deposited on the substrate S. In addition, the organic storage unit 360 is formed of graphite having excellent thermal conductivity. The graphite is a hexagonal porous material and has excellent thermal insulation efficiency. Therefore, the heating temperature inside the organic storage unit 360 can be stably maintained. However, in such graphite, leakage of organic matter may occur. Therefore, the organic material storage unit 360 may be coated with an organic material leakage preventing member (not shown) made of nickel or a high melting point metal.

On the other hand, the nozzle unit 350 for injecting the organic material that is evaporated and discharged inside the organic storage unit 360 is fastened inside the opened surface of the organic storage unit 360. The nozzle unit 350 sprays the organic particles evaporated from the organic storage unit 360 onto the substrate S, which is substantially vertical, and determines the form in which the organic particles are deposited and distributed on the substrate S. Play a role. In this case, the nozzle unit 350 may be made of graphite having excellent thermal conductivity, and an organic material leakage preventing member (not shown) may be coated on a surface thereof to prevent leakage of the organic material.

Specifically, the nozzle unit 350 is formed through the nozzle body 353 to seal the opened portion of the organic material storage unit 360 and the nozzle body 353 and the organic material inside the organic material storage unit 360. It consists of an injection nozzle 351 for injecting molecules to the substrate (S), and the anti-jaw 352 formed integrally with the nozzle body 353 to prevent the organic material from splashing, splashing, the organic material storage unit It is connected to the opening of 360. Therefore, the organic material that is evaporated inside the organic matter storage unit 360 and discharged to the substrate S side through the spray nozzle 351 is not sprayed in the form of a cluster due to the splash barrier 352, and is sprayed in the form of particles. Lose.

At this time, a portion of the nozzle body 353 may be fitted into the organic material storage unit 360 to be fastened. Accordingly, one side of the nozzle body 353 is fitted inside the organic matter storage unit 360, and the other side of the nozzle body 353 extends a predetermined length to the outside of the organic matter storage unit 360.

In addition, the injection nozzle 351 is formed through the nozzle body 353 to spray such organic molecules, it is formed in the form of a plurality of holes extending in the side of the injection direction. Here, the injection nozzle 351 may be provided in a form in which the number is more densely formed toward both sides from the central portion of the nozzle unit 350. Therefore, the organic material spray nozzle 351 is sprayed and deposited on the substrate S with a uniform density.

The nozzle unit 350 may have an exposed surface 355 exposed to the heating unit 370 to be directly heated by the heating unit 370. At this time, the exposed surface 355 is preferably provided on the outer circumferential surface of the nozzle body 353, that is, on the outer circumferential surface of the nozzle body 353 formed to extend a predetermined length to the outside of the organic matter storage unit 360.

On the other hand, the heating unit 370 is interposed between a predetermined region of the nozzle unit 350 and the organic material storage unit 360 and the housing 320 to heat the organic material contained in the organic material storage unit 360 to enable evaporation. It plays a role. At this time, the heating unit 370 is composed of a hot wire that is a heat source to enable the evaporation of organic matter, and a hot wire support that is formed in the form of a kind of ribs (not shown in the figure) to prevent the deflection of the hot wire and accommodate it. .

That is, the heating unit 370 has a kind of heater tunnel structure consisting of a hot wire and a hot wire supporter, and a heater tunnel is formed in a predetermined region of the organic material storage unit 360 and the nozzle unit 350. It is made in the form of heating one side, or heating the slope. Therefore, the heating unit 370 is not formed in the form of being integrated with other components or attached to the other components in the organic material evaporation source 300, it can be separated and replaced independently.

5A and 5B are plan views of the organic material evaporation source according to the present invention, and show that the heating wire 372 constituting the heating unit 372 is provided in a horizontal direction with respect to the organic material injection direction of the organic material evaporation source.

5A illustrates that the heating wires 372 are provided at equal intervals, and FIG. 5B illustrates that the heating wires 372 are provided at narrow intervals in the nozzle unit 350, and in the organic material storage unit 360, the nozzle unit 350 is provided. It is shown that the provided at a wide interval as compared to. In the case of FIG. 5B, the temperature of the nozzle unit 350 may be maintained higher than the temperature of the organic storage unit 360 than in the case of FIG. 5A. When the width of the exposed surface 355 of the nozzle unit 350 where the hot wire 372 is disposed is 'a' and the width of the organic storage unit 360 is 'b', a relationship of a> b is achieved. Lay the heating wire to

5A and 5B, the heating wire 372 constituting the heating unit 370 is illustrated to be provided only on one surface of the nozzle unit 350 and the organic material storage unit 360, but the nozzle unit 350 and the organic material storage unit 370 may be provided. All of the four sides of the 360 may be provided.

Meanwhile, the organic material evaporation source 300 may further include an internal heat reflection plate 330 attached to the inner wall of the housing 320. The internal heat reflection plate 330 reflects the heat generated by the heating unit 370 to increase the thermal efficiency of the heating unit 370.

In addition, the organic material evaporation source 300 may further include a heat shield plate 340 attached to the outer surface in the direction of the substrate (S) of the nozzle unit 350. The heat shield plate 340 prevents heat from being emitted through the nozzle unit 350 and affecting the substrate S.

In addition, the organic material evaporation source 300 may further include a heat insulating member 310 installed on the outer wall of the housing 320. The heat insulating member 310 prevents heat generated from the heating unit 370 from being discharged to the outside through the housing 320.

The heat reflection plate 330, the heat shield plate 340 and the heat insulating member 310 as described above performs a function to further improve the thermal efficiency of the organic material evaporation source (300).

Meanwhile, although not shown in the drawing, the organic material evaporation source 300 may further include a measuring device that serves to measure the deposition rate of the organic material deposited on the substrate S and the deposition thickness of the organic material.

As described above, the organic material deposition apparatus 100 includes an organic material storage part 360, a heating part 370 having a heater tunnel structure, and a nozzle part fastened to an opening of the organic material storage part 360. 350 and the housing 320, the organic material storage unit 360, the nozzle unit 350, and the heating unit 370 are easily assembled and disassembled.

A method of forming an organic film using the organic material deposition apparatus 100 as described above will be described below.

First, the substrate S is mounted in the chamber 200 of the organic vapor deposition apparatus 100 so as to be approximately perpendicular to the ground, preferably 70 ° to 110 ° with the ground.

Then, the organic material in the organic material storage unit 360 is heated through the heating unit 370. At this time, the nozzle unit 350 is heated through the heating unit 370, heat is transferred from the heated nozzle unit 350 to the organic material storage unit 360, and the organic water in the organic material storage unit 360 is heated. Evaporate to organic matter.

Therefore, the evaporated organic particles flow into the nozzle unit 350, are sprayed through the nozzle unit 350, and are deposited on the substrate S. At this time, the organic particles deposited on the substrate S is determined by the mask pattern (M).

In addition, the organic material may be deposited on the substrate S while the organic material evaporation source 300 is transferred through the transfer device 400, so that more uniform organic material may be deposited.

On the other hand, the nozzle unit 350 is because the organic injection nozzle 351 and the shock prevention jaw 352 is integrated, it is possible to prevent the organic material in the form of a cluster splashing in the organic storage unit 360. In addition, the organic material evaporated by the shock barrier 352 may be accelerated.

In addition, since the nozzle unit 350 is made of a material having excellent thermal conductivity such as graphite, it is possible to prevent condensation of organic particles sprayed through the nozzle unit 350 even without a separate heating device.

In addition, since the organic material leakage preventing member is coated on both the organic material storage unit 360 and the nozzle unit 350 during the organic material deposition in the organic material evaporation source 300, leakage of the organic material is effectively prevented.

Meanwhile, the organic material evaporation source may further include a measuring device (not shown), so that the deposition rate of the organic material deposited on the substrate S and the deposition thickness of the organic material may be measured while the organic material is deposited on the substrate S. FIG. . The measuring device may employ a laser sensor or the like, and other various sensors, a data processing unit for processing measured data values of these sensors, and a display device for displaying a measurement state may be used.

Therefore, by using the measuring device, by controlling the deposition rate of the organic particles and the organic deposition thickness during the formation of the organic thin film, it is possible to realize the reproducibility of the uniform thickness of the organic thin film.

As described above, the heating part of the organic material evaporation source according to the present invention is placed in a portion of the organic material storage part and the nozzle part to maintain the temperature of the nozzle part higher than the temperature of the organic material storage part to condense the organic matter in the nozzle part. There is an advantage that can be prevented.

Claims (11)

A housing having one surface open; An organic material storage unit located in the housing and having an organic material stored therein and having an opening in the same direction as the opening of the housing; Located in the housing, one side is fastened to the opening of the organic material storage portion, the other side has a body exposed, the nozzle portion having an injection nozzle penetrating the organic material storage portion and the outside; And a heating unit provided between the housing and a portion of the organic material storage unit and the body of the nozzle unit, the heating unit including a heating wire provided in a horizontal direction from the spraying direction of the nozzle unit. The method of claim 1, The organic material evaporation source further comprises a heat insulating member on the outside of the housing. The method of claim 1, The organic material evaporation source further comprises a heat reflection plate between the housing and the heating portion. The method of claim 1, The nozzle unit further comprises an organic material splash barrier on the side coupled with the organic material storage unit. The method of claim 4, wherein The splash barrier is an organic material evaporation source, characterized in that formed integrally with the nozzle. The method of claim 1, The heating unit is an organic material evaporation source, characterized in that consisting of a hot wire and a support for supporting the hot wire. The method according to claim 1 or 6, The hot wire is provided at a narrow interval in the nozzle unit, the organic material evaporation source, characterized in that provided at a wide interval in the organic storage. The method according to claim 1 or 6, The hot wire is an organic material evaporation source, characterized in that provided at equal intervals in the nozzle unit and the organic storage. The method of claim 1, The organic material evaporation source, characterized in that the heating unit is interposed so that the width of the exposed body of the nozzle is located 'a', the width of the organic storage portion 'b' is a> b. The method of claim 1, The heating unit is an organic material evaporation source, characterized in that provided on one side or four sides of the nozzle unit and the organic material storage. With vacuum chamber, A substrate provided on one side of the vacuum chamber, A housing provided at the other side of the vacuum chamber and having an opening on one side thereof, an organic material storage unit having an opening in the same direction as the opening of the housing, having an organic material stored therein, and having an organic material stored therein; It is located, one side is fastened to the opening of the organic material storage portion, the other side has a body exposed, the nozzle portion having a spray nozzle passing through the organic material storage portion and the outside, and a portion of the housing and the organic material storage portion And an organic material evaporation source provided between the body of the nozzle unit and a heating unit including a heating wire provided in a horizontal direction from an injection direction of the nozzle unit.

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