KR20060080482A - Effusion cell for depositing material and deposition system having it - Google Patents

Effusion cell for depositing material and deposition system having it Download PDF

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KR20060080482A
KR20060080482A KR1020050000964A KR20050000964A KR20060080482A KR 20060080482 A KR20060080482 A KR 20060080482A KR 1020050000964 A KR1020050000964 A KR 1020050000964A KR 20050000964 A KR20050000964 A KR 20050000964A KR 20060080482 A KR20060080482 A KR 20060080482A
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heating
organic material
crucible
vapor
organic
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KR100645719B1 (en
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김도근
안재홍
황민정
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삼성에스디아이 주식회사
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    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
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    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
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    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
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    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54Controlling or regulating the coating process
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    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
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    • H01L51/00Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof
    • H01L51/0001Processes specially adapted for the manufacture or treatment of devices or of parts thereof
    • H01L51/0002Deposition of organic semiconductor materials on a substrate
    • H01L51/0008Deposition of organic semiconductor materials on a substrate using physical deposition, e.g. sublimation, sputtering
    • H01L51/001Vacuum deposition
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L51/00Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof
    • H01L51/0001Processes specially adapted for the manufacture or treatment of devices or of parts thereof
    • H01L51/0002Deposition of organic semiconductor materials on a substrate
    • H01L51/0008Deposition of organic semiconductor materials on a substrate using physical deposition, e.g. sublimation, sputtering
    • H01L51/0011Deposition of organic semiconductor materials on a substrate using physical deposition, e.g. sublimation, sputtering selective deposition, e.g. using a mask
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L51/00Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof
    • H01L51/50Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof specially adapted for light emission, e.g. organic light emitting diodes [OLED] or polymer light emitting devices [PLED];
    • H01L51/56Processes or apparatus specially adapted for the manufacture or treatment of such devices or of parts thereof

Abstract

본 발명은 물질증착용 증착원 및 이를 구비한 증착시스템에 관한 것으로서, 진공챔버; The present invention relates to a vapor deposition material evaporation source and a vapor deposition system including the same, a vacuum chamber; 상기 진공챔버의 일측에 설치되는 기판과 마스크를 정렬된 상태로 지지하는 척을 갖는 스테이지; Stage having a chuck for supporting a substrate in an ordered and mask, which is installed at one side of the vacuum chamber state; 상기 진공챔버의 타측에 설치되는 구동축; A drive shaft installed in the other side of the vacuum chamber; 및 상기 구동축을 따라서 이동가능하도록 설치되는 증착원으로 구성되고, 상기 증착원은 복수개로 구분된 분할구역을 갖고, 상기 분할구역 각각에는 유기물질을 저장하는 도가니와; And a crucible that is composed of a vapor source, which is installed to be movable along the drive shaft, the evaporation source having a segmented areas separated by a plurality of stores a, the organic material of the divided areas, respectively; 상기 도가니를 가열하는 가열체와; And a heating member for heating the crucible; 상기 가열체의 가열작용에 의해 상기 유기물질이 증발함으로써 형성되는 유기기상물질이 분사되는 분사노즐부로 이루어진 것을 특징으로 하므로 분사노즐부를 통해서 분사되는 유기기상물질의 증착율을 전체적으로 균일화시켜 기판에 균일한 유기물층을 형성할 수 있다. Heated by the action, so it characterized that the composed parts spray nozzle that organic vapor phase material which is formed by the evaporation of the organic material injected to equalize the deposition rate of the organic vapor phase material is injected through parts of the injection nozzle as a whole a uniform organic layer on the substrate of the heaters a it can be formed.
가열체, 증착율 감지센서, 유기기상물질 Heating target, the deposition rate sensor, an organic material vapor

Description

물질증착용 증착원 및 이를 구비한 증착시스템{EFFUSION CELL FOR DEPOSITING MATERIAL AND DEPOSITION SYSTEM HAVING IT} Material deposition evaporation source and a vapor deposition system including the same {EFFUSION CELL FOR DEPOSITING MATERIAL AND DEPOSITION SYSTEM HAVING IT}

도 1은 본 발명에 따른 진공증착 시스템의 버퍼영역에 증착원이 위치하고 있는 상태를 나타내는 개략도; Figure 1 is a schematic view showing a state in which the evaporation source located in the buffer area of ​​the vacuum deposition system according to the present invention;

도 2는 본 발명에 따른 진공증착 시스템의 성막영역에 증착원이 위치하고 있는 상태를 나타내는 개략도; Figure 2 is a schematic view showing a state in which the evaporation source is located in the deposition zone of the vacuum deposition system according to the present invention;

도 3은 본 발명에 따른 도가니가 내장된 증착원을 도시한 측단면도; A side sectional view of Figure 3 illustrates a vapor source crucible is built in accordance with the present invention;

도 4는 본 발명에 따른 다수의 분할구역을 갖는 도가니를 도시한 사시도; Figure 4 is a perspective view of a crucible having a plurality of divided areas in accordance with the present invention;

도 5는 도가니의 분할구역에 대응하여 분사노즐부로부터 분사되는 유기기상물질의 증착율을 측정하는 센서의 설치상태를 도시한 도면. 5 is a view illustrating the mounting of the sensor to measure the deposition rate of the organic vapor phase material in correspondence with the divided areas of the crucible injected from the injection nozzle portion.

< 도면의 주요부분에 대한 부호의 설명 > <Description of the Related Art>

10 : 진공챔버 10: vacuum chamber

20 : 증착원 20: deposition source

22 : 도가니 22: crucible

24 : 분사노즐부 24: injection nozzle unit

26a, 26b, 28 : 센서 26a, 26b, 28: sensor

30 : 기판 30: substrate

40 : 마스크 40: Mask

50 : 척 50: Chuck

100 : 진공증착 시스템 100: vacuum deposition system

본 발명은 유기물질을 저장하는 도가니를 갖는 증착원 및 이를 구비한 증착시스템에 관한 것이고, 더 상세하게는 복수개로 나누어져 있는 분할구역 각각에 유기물질이 저장되어 있는 도가니를 갖는 증착원 및 이를 구비한 증착시스템에 관한 것이다. The present invention is an evaporation source, and relates to a vapor deposition system including the same, and more specifically to the evaporation source and having the same having a crucible which is an organic material stored in each divided area, which is divided into a plurality of having a crucible for storing the organic material It relates to the deposition system.

일반적으로, 평판 디스플레이 중의 하나인 전계발광 디스플레이 장치는 발광층으로 사용하는 물질에 따라서 무기전계발광 디스플레이 장치와, 유기전계발광 디스플레이 장치로 구분되고, 유기전계발광 디스플레이 장치는 저전압으로 구동이 가능하고, 경량의 박형이면서 시야각이 넓을 뿐만 아니라 응답속도 또한 빠르다는 장점을 구비하고 있기 때문에 각광을 받고 있다. In general, one of the EL display device of the flat panel display is separated by the inorganic electroluminescent display device, an organic electroluminescent display device according to materials used for the light emitting layer, the organic light emitting display device can be driven at a low voltage, and light-weight yet thin as wide a viewing angle as a response speed also is under the spotlight because it offers the advantages is fast.

이러한 유기전계발광 디스플레이 장치의 유기전계 발광소자는 기판 상에 적층식으로 형성되는 양극, 유기물층 및 음극으로 구성된다. The organic electroluminescence device of the organic EL display apparatus is of a positive electrode, an organic material layer and a negative electrode formed of the laminated on a substrate. 상기 유기물층은 정공과 전자가 재결합하여 여기자를 형성하고 빛을 방출하는 유기 발광층의 유기물층을 포함하고, 또한 정공과 전자를 유기 발광층으로 원활하게 수송하여 발광효율을 향상시키기 위하여 상기 음극과 유기 발광층 사이에 전자 주입층과 전자 수송층의 유기물층을 개재시키면서 양극과 유기 발광층 사이에 정공 주입층과 전자 수송층의 유기물층을 개재시킨다. Between the organic compound layer and holes and electrons recombine and includes an organic material layer of the organic light emitting layer to form an exciton and emit light, and holes and electrons to order to smoothly transported to the organic light emitting layer to improve luminous efficiency the negative electrode, an organic emission layer while sandwiching the organic compound layer of an electron injecting layer and the electron transport layer thereby sandwiching the organic layer of the hole injection layer and the electron transport layer between the anode and the organic emission layer.

상술된 구조로 이루어진 유기전계 발광소자는 일반적으로, 진공증착법, 이온 플레이팅법 및 스퍼터링법 등과 같은 물리기상 증착법 또는 가스 반응에 의한 화학기상 증착법으로 제작된다. The organic electroluminescent device comprising the structure described above is commonly manufactured by vacuum deposition method, an ion plating method and physical vapor deposition or chemical vapor deposition method by a gas reaction, such as a sputtering method. 특히, 유기전계 발광소자의 유기물층을 형성하기 위해서는 진공중에서 증발시킨 유기물질을 기판에 증착시키는 진공증착법이 널리 사용되고 있으며, 이러한 진공증착법에는 진공챔버 내에서 증발되는 유기물질을 기판에 분사시키는 증착원(effusion cell)이 사용된다. In particular, in order to form an organic layer of an organic EL device, and a vacuum deposition method is widely used to deposit the organic material is evaporated in a vacuum to the substrate, the vacuum deposition method, the deposition source to spray an organic material to be evaporated in the vacuum chamber on the substrate ( this effusion cell) is used.

상기 증착원은 유기물질이 수용되어 있는 도가니와, 상기 도가니를 가열시키는 가열수단과, 상기 가열수단에 의해서 증발되는 유기기상물질을 분사하는 분사노즐부를 포함한다. The evaporation source further includes an injection nozzle for injecting the organic material vapor that is evaporated by the heating means and the heating means for heating the crucible which is accommodated the organic material, the crucible.

따라서, 기판이 진공챔버 내에 장착된 상태에서, 도가니에 수용된 유기물질이 가열수단에 의해서 가열됨으로써 형성되는 유기기상물질은 분사노즐을 통해서 기판으로 분사되어 증착된다. Thus, the organic vapor phase material in which the substrate is formed by heating in the mounted state, by the heating means, the organic material contained in a crucible in a vacuum chamber is deposited is injected into the substrate through a spray nozzle. 이때, 진공증착법의 취급자는 기판에 형성되는 유기물층의 스텝 커버리지 및 균일도를 향상시키기 위한 노력을 경주하고 있다. At this time, the person handling the vacuum deposition racing efforts to improve the step coverage and uniformity of the organic compound layer formed on the substrate.

특히, 기판이 대형화되는 추세하에서, 양호한 스텝 커버리지와 균일도를 갖는 유기물층을 기판에 형성하기 위하여 증착원이 진공챔버 내에서 수직 상하방향으로 이동하면서 정지되어 있는 기판에 유기물질을 증발시킴으로써 형성되는 유기기 상물질을 분사하는 수직 이동형 유기물 증착장치가 개발되었다. In particular, under the tendency that the substrate is large-sized, oil that is formed by evaporating the organic material in the substrate, to which the evaporation source is stopped while moving in the vertical up-and-down direction in the vacuum chamber to form an organic layer having a good step coverage and uniformity on a substrate unit the vertically movable organic material deposition apparatus for spraying a material have been developed.

그러나, 이러한 수직 이동형 유기물 증착장치에 있어서, 도가니와 가열수단의 크기도 상대적으로 증가한다. However, in such a vertical mobile organic material deposition apparatus, the size of the crucible and the heating means increases relatively. 그리고, 가열수단에 의한 가열작용이 도가니 전체에 걸쳐서 균일해지면 유기물질의 가열상태가 균일해져서 분사노즐을 통해서 분사되는 유기기상물질의 증착율도 균일해진다. And, it haejimyeon the heating action by the heating means uniformly over the entire crucible becomes also uniform deposition rate of the organic material vapor is heated state of the organic material to be uniformly haejyeoseo injected through an injection nozzle.

그러나, 도가니에 대한 가열수단의 가열작용이 불균일해지면 분사노즐을 통해서 분사되는 유기기상물질의 증착율도 불균일해지며, 결과적으로 유기물층의 균일도를 저하시킨다. However, the deposition rate of the organic material vapor haejimyeon the heating action of the heating means for the crucible non-uniform spray through the spray nozzle also becomes to non-uniform, resulting in lowering the uniformity of the organic compound layer.

따라서, 대면적 증착에 사용되는 수직 이동형 유기물 증착장치에 있어서, 도가니의 크기가 증가하여도 도가니에 수용되어 있는 유기물질을 균일하게 가열하여 기판에 형성되는 유기물층의 균일도를 향상시킬 수 있는 방안이 요구되었다. Therefore, in the vertically movable organic material deposition apparatus to be used in large-area deposition, the ways to uniformly heat the organic material which is accommodated in FIG crucible to the size of the crucible increases to improve the uniformity of the organic compound layer formed on the substrate requires It was.

본 발명은 상기된 바와 같은 종래의 문제점을 해결하기 위하여 제안된 것으로, 기판의 대형화에 대응하기 위한 수직 이동형 유기물 증착장치에 있어서 복수개로 나누어져 있고 유기물질이 각각 저장되어 있는 분할구역을 갖는 도가니를 가짐으로써 도가니의 크기가 증가하여도 도가니에 수용되어 있는 유기물질을 균일하게 가열할 수 있는 증착원 및 이를 구비한 증착시스템을 제공하는 데 그 목적이 있다. The present invention is a crucible having a by dividing section that is stored is divided into a plurality, and each of the organic material in the vertical removable organic material deposition apparatus to respond to upsizing of the substrate proposed in order to solve the conventional problems as described above by having the size of the crucible increases also to provide an evaporation source and a vapor deposition system including the same that can uniformly heat the organic material, which is accommodated in the crucible it is an object.

상기 목적을 달성하기 위하여, 본 발명의 실시예에 따르면, 물질증착용 증착원은 복수개로 구분된 분할구역을 갖고, 상기 분할구역 각각에는 유기물질을 저장하는 도가니와; In order to achieve the above object, according to an embodiment of the present invention, the material evaporation source for deposition having the divided areas divided into a plurality, and a crucible for storing the divided areas, respectively, the organic material; 상기 도가니를 가열하는 가열체와; And a heating member for heating the crucible; 상기 가열체의 가열작용에 의해 상기 유기물질이 증발함으로써 형성되는 유기기상물질이 분사되는 분사노즐부로 이루어진 것을 특징으로 한다. Characterized in that by the heating action of the heating body consisting of the injection nozzle portion is the organic material vapor is formed by evaporating the organic material injected.

본 발명의 일실시예에 따르면, 증착시스템은 진공챔버; According to one embodiment of the invention, the vapor deposition system has a vacuum chamber; 상기 진공챔버의 일측에 설치되는 기판과 마스크를 정렬된 상태로 지지하는 척을 갖는 스테이지; Stage having a chuck for supporting a substrate in an ordered and mask, which is installed at one side of the vacuum chamber state; 상기 진공챔버의 타측에 설치되는 구동축; A drive shaft installed in the other side of the vacuum chamber; 및 상기 구동축을 따라서 이동가능하도록 설치되는 증착원으로 구성되고, 상기 증착원은 복수개로 구분된 분할구역을 갖고, 상기 분할구역 각각에는 유기물질을 저장하는 도가니와; And a crucible that is composed of a vapor source, which is installed to be movable along the drive shaft, the evaporation source having a segmented areas separated by a plurality of stores a, the organic material of the divided areas, respectively; 상기 도가니를 가열하는 가열체와; And a heating member for heating the crucible; 상기 가열체의 가열작용에 의해 상기 유기물질이 증발함으로써 형성되는 유기기상물질이 분사되는 분사노즐부로 이루어진 것을 특징으로 한다. Characterized in that by the heating action of the heating body consisting of the injection nozzle portion is the organic material vapor is formed by evaporating the organic material injected.

바람직하게, 상기 도가니의 분할구역에 각각 대응하는 상기 분사노즐부 전방에는 상기 분사노즐부로부터 분사되는 유기기상물질의 증착율을 감지하는 복수개의 증착율 감지센서를 더 포함한다. Preferably, each corresponding to the injection nozzle unit to forward the dividing zone of the furnace is further comprising a plurality of deposition rate sensors for sensing the vapor deposition rate of the organic material injected from the injection nozzle portion.

더 바람직하게, 상기 복수개의 증착율 감지센서는 상기 증착원의 양단에 설치되는 한 쌍의 외부 감지센서와, 상기 증착시스템의 내부 바닥면에 고정설치되는 중앙 감지센서로 이루어진다. More preferably, the plurality of deposition rate sensor is composed of a central sensor is fixed to the inner bottom surface of the pair of external sensors and, the vapor deposition system is installed at both ends of the evaporation source.

이하, 첨부도면을 참조하여 본 발명의 바람직한 실시예를 설명한다. With reference to the accompanying drawings will be described a preferred embodiment of the present invention. 그리 고, 용어 '유기물질'은 기판에 유기물층을 형성하기 위하여 도가니에 액체상태 또는 고체상태로 저장되어 있는 물질을 의미하고, 용어 '유기기상물질'은 도가니를 가열할 때 유기물질이 증발함으로써 형성되는 기체상태의 물질을 의미한다. So high, and formed, by the term "organic material" means a material that is stored in a liquid state or solid state in a crucible to form an organic layer on the substrate, the organic material evaporates when heated to the term "organic vapor phase material" is a crucible It means a substance that is gaseous. 이와 같이, 본 발명을 설명함에 있어서 사용되는 특정용어는 설명의 편리성을 위하여 정의된 것이므로 당 분야에 종사하는 기술자의 의도 또는 관례 등에 따라 달라질 수 있고 또한 본 발명의 기술적 구성요소를 한정하는 의미로 이해되어서는 아니될 것이다. In this way, certain terms used in describing the present invention, because it is defined for convenience of description may vary depending on the intention or practice of a technician working in the art also as a means to limit the technical components of the present invention It will not be understood.

먼저, 유기전계 발광소자의 유기물층을 형성하기 위한 진공증착법은 진공챔버를 포함하는 진공증착 시스템에서 수행된다. First, a vacuum deposition method for forming the organic compound layer of the organic EL device is carried out in a vacuum vapor deposition system including a vacuum chamber.

도 1을 참조하면, 진공증착 시스템(100)의 진공챔버(10)에는 유기물층을 형성하고자 하는 기판(30)과, 기판(30)의 전방에 위치되는 마스크(40)와, 마스크(40)로부터 소정 간격으로 이격되어 있는 증착원(20)이 설치된다. 1, from the substrate 30 and the front mask 40 and a mask 40 is positioned on the substrate 30 for the vacuum chamber 10 of the vacuum deposition system 100 is used to form the organic layer the evaporation source (20) that are spaced apart at a predetermined interval is provided. 마스크(40)와 기판(30)은 얼라인먼트 시스템(미도시)에 의해서 정렬된 상태로 척(50)에 서로 밀착된 상태로 고정된다. Mask 40 and the substrate 30 is fixed in a state in close contact with each other in the chuck 50 to the alignment by the alignment system (not shown).

마스크(40)는 기판(30)에 형성하고자 하는 유기물층에 대응하는 패턴이 형성되어 있는 패턴형성부(가상선으로 표시됨)와, 마스크 프레임(미도시)에 용접을 통해서 고정되는 고정부로 구성된다. Mask 40 is composed of a fixed part which is fixed via welding to the substrate 30 (not shown), the organic layer pattern forming unit that the pattern is formed, and a mask frame (shown in phantom) corresponding to the to be formed in . 이때, 진공챔버(10)는 마스크(40) 및 기판(30)의 설치위치에 대응하는 성막영역(B)과 상기 성막영역(B) 이외의 위치에 대응하는 버퍼영역(A)으로 구분된다. At this time, the vacuum chamber 10 is divided into a buffer area (A) corresponding to a position other than the film formation area (B) and the film formation area (B) corresponding to the installation position of the mask 40 and the substrate 30.

증착원(20)은 이동수단(미도시)의 작동에 의해서 축회전하는 구동축에 이동 가능하게 장착되고, 상기 구동축의 회전방향에 따라서 진공챔버(10) 내에서 수직 상하방향으로 이동한다. Evaporation source 20 is movably mounted on the drive shaft for axial rotation by the operation of the moving means (not shown), and moves according to the rotational direction of the driving shaft in the vacuum chamber 10 in a vertical up-and-down direction.

도 3을 참조하면, 증착원(20)은 유기물질이 저장되어 있는 도가니(22)와, 도가니에서 형성된 유기기상물질이 분사되는 분사노즐부(24)로 구성된다. Is 3, the evaporation source 20 is composed of the crucible 22 in the organic material is stored, injection nozzle unit 24, which is the organic material vapor formed in the crucible injection. 또한, 도 4를 참조하면, 도가니(22)는 복수개의 격벽(22a, 22b)에 의해서 나누어진 복수개의 분할구역을 포함한다. In addition, 4, the crucible 22 includes a plurality of divided areas divided by a plurality of partition walls (22a, 22b). 도면에는 단지 2개의 격벽만이 도시되어 있지만 격벽의 갯수는 이에 한정되지 않는다. Drawing, only two partition walls only are shown, but the number of the barrier ribs is not limited to this.

상기 분할구역 각각에는 유기물질이 저장된다. Each of the divided areas is stored in the organic material. 그리고, 분할구역 각각의 외부에는 가열체(22-1)가 설치되고, 가열체(22-1) 각각의 가열작용은 제어수단(미도시)에 의해서 개별적으로 제어된다. And, outside each of the divided areas is provided with a heater 22-1, respectively, of heating the heating body (22-1) is controlled individually by a control means (not shown). 바람직하게 가열체(22-1)에 대한 상기 제어수단의 제어동작은 도가니(22)의 분할구역 단위로 수행된다. Preferably for the heating body (22-1) control operation of said control means is performed in units of divided areas of the crucible (22). 따라서, 상기 제어수단에 의해서 가열체(22-1)의 가열작용이 도가니(22)의 분할구역 단위로 제어됨으로써 도가니(22)의 분할구역은 개별적으로 가열될 수 있다. Accordingly, the division section of the heating body to the split area unit controlled thereby crucible 22 of the heating furnace 22 of the 22-1, by the control means can be separately heated.

이때, 가열체(22-1)는 열선과 같이 통전 등에 의해서 열을 발산시키는 부재를 의미하지만 이에 한정되지는 않는다. In this case, the heating body (22-1) means the member to dissipate heat by conduction or the like, such as hot wire, but are not limited to.

도 5를 참조하면, 분사노즐부(24)의 전방에는 분사노즐부(24)의 분사노즐(24a)로부터 분사되는 유기기상물질의 증착율을 감지하기 위한 증착율 감지센서(26a, 26b, 28)가 제공된다. 5, the injection nozzle section forward, the injection nozzle deposition rate sensors (26a, 26b, 28) for detecting the deposition rate of the organic vapor material ejected from (24a) of the ejection nozzle portion 24 of 24 is It is provided. 이때, 제1감지센서와 제2감지센서(26a, 26b)는 증착원(22)의 양단에 각각 설치되므로, 증착원(22)이 수직 상하방향으로 이동함에 따라서 같은 방향으로 이동한다. In this case, the first sensor and the second sensor (26a, 26b) moves in the same direction, therefore, so as respectively provided to both ends of the evaporation source 22, the evaporation source 22 is moved vertically up and down. 그리고, 제3감지센서(28)는 진공챔버(10)의 바닥면, 특히 진공챔버(10)의 버퍼영역(A)에서 분사노즐부(24)의 전방에 고정설치된다. And, third sensor 28 is fixed to the front of the injection nozzle unit 24 in the buffer area (A) of the vacuum chamber 10 the bottom surface, in particular a vacuum chamber (10). 이는, 하기에 설명되는 바와 같이 증착원(22)이 성막영역(B)에서 유기기상물질을 분사하여 기판(10)에 유기물층을 형성하는 것을 제3감지센서(28)가 방해하지 않도록 하기 위함이다. This is to avoid the interference of 3 detection sensor 28 to the evaporation source 22 is formed of an organic material layer on the substrate 10 by spraying the organic vapor phase material in the deposition region (B) as described below .

증착율 감지센서(26a, 26b, 28)은 이에 한정되지는 않지만 증착율에 대한 감지효율을 향상시키기 위하여 크리스탈 센서가 사용될 수 있다. Deposition rate sensors (26a, 26b, 28) include, but are not limited to, a crystal sensor can be used to improve the detection efficiency for the deposition rate.

도 1을 다시 참조하면, 상술된 구조로 이루어진 진공증착 시스템(100)에 있어서 증착원(20)은 진공챔버(10) 내에서 버퍼영역(A)에 위치한다. Referring again to Figure 1, the evaporation source 20 in the vacuum deposition system 100 is composed of the above-described structure is located in the buffer area (A) in the vacuum chamber 10. 마스크(40)와 기판은 증착원(20)으로부터 이격해서 위치하고, 이들은 서로 정렬된 상태로 얼라인먼트 시스템(미도시)의 척(50)에 밀착된다. Mask 40 and the substrate is positioned by remote from the evaporation source 20, which are aligned with each other, the close contact to the chuck 50 of the alignment system (not shown).

그리고, 기판(30) 상에 유기물층을 형성하기 위하여 가열체(22-1)에 동력이 인가되면, 가열체(22-1)의 가열작용에 의해 도가니(22)가 가열됨으로써 도가니(22)에 저장되어 있는 유기물질이 증발하여 유기기상물질을 형성한다. And, in the heating body when the 22-1 applied with power, crucible 22, thereby heating the crucible 22 by the heating action of the heating body (22-1) so as to form an organic layer on a substrate (30) to the organic material stored evaporated to form the organic material vapor. 이때, 상술된 바와 같이, 상기 제어수단에 의해서 가열체(22-1)의 가열작용은 도가니(22)의 분할구역 단위로 이루어지므로, 도가니(22)의 분할구역 각각에 저장되어 있는 유기물질은 개별적으로 가열된다. At this time, heating is done in units of divided areas of the crucible 22, and is stored in the divided areas, each of the crucible 22, the organic material in the heating body 22-1 by the control means as described above It is individually heated.

이 후에, 유기기상물질은 분사노즐부(24)의 분사노즐(24a)을 통해서 분사된다. After this, the organic material vapor is injected through the injection nozzle (24a) of the injection nozzle unit 24. The 이때, 분사되는 유기기상물질의 증착율은 분사노즐부(24)의 전방에 위치하는 증착율 감지센서(26a, 26b, 28)에 의해서 감지되어 상기 제어수단으로 전송된다. At this time, the deposition rate of the organic material vapor is injected in the deposition rate is sensed by sensors (26a, 26b, 28) which is located in front of the injection nozzle unit 24 is transmitted to the control means. 상기 감지수단은 감지센서로부터 제공되는 감지신호에 의해서 도가니(22)의 분할구 역 각각에 대한 가열체(22-1)의 가열작용을 제어하여 유기기상물질의 증착율이 전체적으로 균일해지도록 한다. The sensing means controls the heating of the heating body (22-1) for each of the divided zones of the crucible 22 by a detection signal supplied from the detection sensor so that a uniform deposition rate of the organic material vapor as a whole.

분사노즐부(24)를 통해 분사되는 유기기상물질의 증착율이 전체적으로 균일해지면, 증착원(22)은 성막영역(B)으로 이동한 후 수직 상하방향으로 이동하면서 유기기상물질을 분사하여 기판(30)에 유기물층을 형성한다. Spraying the deposition rate of the organic vapor phase material is injected through the nozzle portion 24 haejimyeon entirely uniform, evaporation source 22 is film formation area (B), to move to move vertically up and down direction jet the organic vapor phase material substrate (30 ) and to form an organic layer.

상기 내용은 본 발명의 바람직한 실시예를 단지 예시한 것으로 본 발명이 속하는 분야의 당업자는 첨부된 청구범위에 기재된 본 발명의 사상 및 요지로부터 벗어나지 않고 본 발명에 대한 수정 및 변경을 가할 수 있다는 것을 인식하여야 한다. The information is recognized that those skilled in the art to which the present invention pertains to the way of example only a preferred embodiment of the present invention can be applied to changes and modifications to the invention without departing from the spirit and substance of the invention as set forth in the appended claims shall.

본 발명에 따르면, 유기물질이 저장되어 있는 도가니를 복수개의 분할구역으로 나누고 분할구역 각각에 대한 가열체의 가열작용을 개별적으로 제어함으로써 증착원의 분사노즐부를 통해 분사되는 유기기상물질의 증착율을 전체적으로 균일화시켜 기판에 유기물층을 균일하게 증착할 수 있다. According to the invention, the deposition rate of the organic vapor material ejected by controlling the heating of the heating body for a Partition, respectively dividing the crucible in the organic material is stored in a plurality of divided areas separately through the evaporation source injection nozzle as a whole It can be made uniform to uniformly deposit the organic material on the substrate.

Claims (10)

  1. 복수개로 구분된 분할구역을 갖고, 상기 분할구역 각각에는 유기물질을 저장하는 도가니와; It has a segmented areas separated by a plurality of each of the divided areas has a crucible for storing the organic material;
    상기 도가니를 가열하는 가열체와; And a heating member for heating the crucible;
    상기 가열체의 가열작용에 의해 상기 유기물질이 증발함으로써 형성되는 유기기상물질이 분사되는 분사노즐부로 이루어진 것을 특징으로 하는 물질증착용 증착원. Increased material evaporation source to wear, characterized in that by the heating action of the heating body consisting of the injection nozzle portion is the organic material vapor is formed by evaporating the organic material injected.
  2. 제1항에 있어서, According to claim 1,
    상기 가열체는 상기 분할구역 각각에 대응하는 복수개의 분할 가열수단으로 이루어져 있는 것을 특징으로 하는 물질증착용 증착원. The heating body is a material evaporation source for deposition, characterized in that consists of a plurality of divided heating means corresponding to each of the divided areas.
  3. 제1항에 있어서, According to claim 1,
    상기 가열체는 열선으로 이루어져 있는 것을 특징으로 하는 물질증착용 증착원. The heating body is a material evaporation source for deposition, characterized in that consists of a heating wire.
  4. 진공챔버; A vacuum chamber;
    상기 진공챔버의 일측에 설치되는 기판과 마스크를 정렬된 상태로 지지하는 척을 갖는 스테이지; Stage having a chuck for supporting a substrate in an ordered and mask, which is installed at one side of the vacuum chamber state;
    상기 진공챔버의 타측에 설치되는 구동축; A drive shaft installed in the other side of the vacuum chamber; And
    상기 구동축을 따라서 이동가능하도록 설치되는 증착원으로 구성되고, Therefore, the drive shaft is composed of an evaporation source, which is installed to be movable,
    상기 증착원은 복수개로 구분된 분할구역을 갖고, 상기 분할구역 각각에는 유기물질을 저장하는 도가니와; The evaporation source has a divided area divided into a plurality, and a crucible for storing the divided areas, respectively, the organic material; 상기 도가니를 가열하는 가열체와; And a heating member for heating the crucible; 상기 가열체의 가열작용에 의해 상기 유기물질이 증발함으로써 형성되는 유기기상물질이 분사되는 분사노즐부로 이루어진 것을 특징으로 하는 증착시스템. A vapor deposition system, characterized in that by the heating action of the heating body consisting of the injection nozzle portion is the organic material vapor is formed by evaporating the organic material injected.
  5. 제4항에 있어서, 5. The method of claim 4,
    상기 가열체는 상기 분할구역 각각에 대응하는 복수개의 분할 가열수단으로 이루어져 있는 것을 특징으로 하는 증착시스템. The heating body is a vapor deposition system, characterized in that consists of a plurality of divided heating means corresponding to each of the divided areas.
  6. 제5항에 있어서, 6. The method of claim 5,
    상기 분할 가열수단에 대한 가열제어를 개별적으로 수행할 수 있는 제어부를 더 포함하는 것을 특징으로 하는 증착시스템. Deposition system according to claim 1, further comprising a controller capable of performing the heating control separately for the divided heating means.
  7. 제4항에 있어서, 5. The method of claim 4,
    상기 도가니의 분할구역에 각각 대응하는 상기 분사노즐부 전방에는 상기 분사노즐부로부터 분사되는 유기기상물질의 증착율을 감지하는 복수개의 증착율 감지센서를 더 포함하는 것을 특징으로 하는 증착시스템. The spray nozzle has a front portion deposition system according to claim 1, further comprising a plurality of deposition rate sensors for sensing the vapor deposition rate of the organic material injected from the injection nozzle portion corresponding to the divided areas of the furnace.
  8. 제7항에 있어서, The method of claim 7,
    상기 복수개의 증착율 감지센서는 상기 증착원의 양단에 설치되는 한 쌍의 외부 감지센서와, 상기 진공챔버의 내부 바닥면에 고정설치되는 중앙 감지센서로 이루어진 것을 특징으로 하는 증착시스템. The plurality of deposition rate sensors are vapor deposition system according to claim consisting of the center sensor is a pair of external sensors that are installed at both ends of the evaporation source, securely fixed to the inner bottom surface of the vacuum chamber.
  9. 제8항에 있어서, The method of claim 8,
    상기 중앙 감지센서는 상기 진공챔버의 버퍼영역에 설치되는 것을 특징으로 하는 증착시스템. The center sensor system is deposited, characterized in that provided in the buffer area of ​​the vacuum chamber.
  10. 제8항에 있어서, The method of claim 8,
    상기 증착율 감지센서는 크리스탈 센서인 것을 특징으로 하는 증착시스템. The deposition rate sensor is a vapor deposition system which is characterized in that the crystal sensor.
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US8993360B2 (en) 2013-03-29 2015-03-31 Samsung Display Co., Ltd. Deposition apparatus, method of manufacturing organic light emitting display apparatus, and organic light emitting display apparatus
US9040330B2 (en) 2013-04-18 2015-05-26 Samsung Display Co., Ltd. Method of manufacturing organic light-emitting display apparatus
US9534288B2 (en) 2013-04-18 2017-01-03 Samsung Display Co., Ltd. Deposition apparatus, method of manufacturing organic light-emitting display apparatus by using same, and organic light-emitting display apparatus manufactured by using deposition apparatus
US8962360B2 (en) 2013-06-17 2015-02-24 Samsung Display Co., Ltd. Organic layer deposition apparatus and method of manufacturing organic light-emitting display device by using the organic layer deposition apparatus
US9347886B2 (en) 2013-06-24 2016-05-24 Samsung Display Co., Ltd. Apparatus for monitoring deposition rate, apparatus provided with the same for depositing organic layer, method of monitoring deposition rate, and method of manufacturing organic light emitting display apparatus using the same
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