KR20060080475A - Apparatus for sealing the driving shaft for the effusion cell in the deposition system and deposition system having it - Google Patents

Apparatus for sealing the driving shaft for the effusion cell in the deposition system and deposition system having it Download PDF

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KR20060080475A
KR20060080475A KR1020050000957A KR20050000957A KR20060080475A KR 20060080475 A KR20060080475 A KR 20060080475A KR 1020050000957 A KR1020050000957 A KR 1020050000957A KR 20050000957 A KR20050000957 A KR 20050000957A KR 20060080475 A KR20060080475 A KR 20060080475A
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drive shaft
deposition system
support
portion
tubular body
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KR1020050000957A
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Korean (ko)
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KR100600357B1 (en
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강유진
정성화
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삼성에스디아이 주식회사
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Priority claimed from JP2005347029A external-priority patent/JP4384109B2/en
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04Coating on selected surface areas, e.g. using masks
    • C23C14/042Coating on selected surface areas, e.g. using masks using masks
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/12Organic material
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/243Crucibles for source material
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L51/00Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof
    • H01L51/0001Processes specially adapted for the manufacture or treatment of devices or of parts thereof
    • H01L51/0002Deposition of organic semiconductor materials on a substrate
    • H01L51/0008Deposition of organic semiconductor materials on a substrate using physical deposition, e.g. sublimation, sputtering
    • H01L51/001Vacuum deposition
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L51/00Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof
    • H01L51/50Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof specially adapted for light emission, e.g. organic light emitting diodes [OLED] or polymer light emitting devices [PLED];
    • H01L51/56Processes or apparatus specially adapted for the manufacture or treatment of such devices or of parts thereof

Abstract

본 발명은 증착시스템용 증착원의 구동축 밀폐장치 및 이를 구비한 증착시스템에 관한 것으로서, 증착시스템의 진공챔버에 설치된 구동축에 결합하는 결합부와, 연결부를 통해서 상기 결합부에 연결되고 상기 진공챔버에서 유기기상물질을 분사하는 증착원을 지지하는 지지판을 갖고, 상기 연결부에는 관통창이 형성되어 있는 지지체; The present invention relates to a vapor deposition system having a drive shaft sealing device and this, in the evaporation source for deposition system, and the binding unit for binding to a drive shaft installed in the vacuum chamber of a vapor deposition system, coupled to the engagement portion via the connecting portion in the vacuum chamber, having a support plate for supporting the evaporation source for injecting a gaseous organic substance, the support in the through-window is formed in the connecting portion; 상기 구동축을 둘러싸고 상기 지지체가 상기 구동축을 따라서 상하방향으로 이동가능하도록 일측면이 개방되어 있는 빔; Surrounding the drive shaft with the support beam is therefore the days open side so as to be movable in the vertical direction to the drive shaft; 및 상기 관통창을 관통하는 차단판으로 이루어진 것을 특징으로 하므로, 유기기상물질이 진공챔버 내에서 비산하여 구동체에 부착되는 것을 방지하여 증착원이 원활하게 상하방향으로 이동하도록 한다. And it is characterized by being a blocking plate extending through the through-window, it is possible to prevent the organic material vapor is attached to the drive body by scattering in the vacuum chamber to the evaporation source so as to move smoothly in the vertical direction.
빔, 차단판, 지지체, 관형체, 결합부 Beam-shielding plate, the support, the tubular body, engaging portions

Description

증착시스템용 증착원의 구동축 밀폐장치 및 이를 구비한 증착시스템{APPARATUS FOR SEALING THE DRIVING SHAFT FOR THE EFFUSION CELL IN THE DEPOSITION SYSTEM AND DEPOSITION SYSTEM HAVING IT} Depositing a deposition source including deposition shaft sealing device and this for the system, the system {APPARATUS FOR SEALING THE DRIVING SHAFT FOR THE EFFUSION CELL IN THE DEPOSITION SYSTEM AND DEPOSITION SYSTEM HAVING IT}

도 1은 본 발명에 따른 밀폐장치가 구동축 주위에 설치된 상태를 도시한 분해 사시도; 1 is an exploded perspective view showing a state in which a sealing device according to the invention installed around the drive shaft;

도 2는 본 발명에 따른 밀폐장치의 결합 사시도; Figure 2 is a perspective view of the closure coupling device according to the present invention;

도 3은 본 발명에 따른 밀폐장치가 진공챔버에 설치되어 있는 증착시스템의 도면; 3 is a view of a deposition system with a sealing device according to the invention is installed in the vacuum chamber;

도 4는 본 발명의 다른 실시예에 따른 밀폐장치가 구동축 주위에 설치된 상태를 도시한 분해 사시도; Figure 4 is an exploded perspective view showing a state that the device is sealed around the drive shaft according to another embodiment of the present invention;

도 5a는 증착원이 버퍼영역에 위치한 상태에서 도 4에 도시한 밀폐장치의 작동상태를 나타낸 사시도; Figure 5a is a perspective view showing an operating state of the sealing device shown in Figure 4 in a state where the evaporation source is located in the buffer area;

도 5b는 증착원이 성막영역에 위치한 상태에서 도 4에 도시한 밀폐장치의 작동상태를 나타낸 사시도. Figure 5b is a perspective view showing an operating state of the sealing device shown in Figure 4 in a state where the evaporation source in the film forming region.

< 도면의 주요부분에 대한 부호의 설명 > <Description of the Related Art>

10 : 진공챔버 10: vacuum chamber

20 : 증착원 20: deposition source

30 : 기판 30: substrate

40 : 마스크 40: Mask

50 : 척 50: Chuck

110 : 빔 110: beam

120, 220 : 지지판 120, 220: support plate

130 : 차단판 130: blocking plate

230a, 230b : 관형체 230a, 230b: the tubular body

본 발명은 증착시스템에서 유기기상물질을 분사하는 증착원을 지지하는 지지판을 상하방향으로 이동시키는 구동축을 밀폐시키는 장치 및 이를 구비한 증착시스템에 관한 것이고, 더 상세하게 증착원으로부터 분사되면서 진공챔버 내에서 비산하는 유기기상물질이 구동축에 부착됨으로써 증착원의 이동성능이 저하하는 것을 방지할 수 있는 증착시스템용 증착원의 구동축 밀폐장치 및 이를 구비한 증착시스템에 관한 것이다. The present invention relates to an apparatus and a vapor deposition system including the same to seal the drive shaft for moving the support plate to support the evaporation source for injecting the organic vapor phase material in the vapor deposition system in the vertical direction, as more particularly sprayed from the evaporation source in a vacuum chamber the organic material is vapor relates to a vapor deposition system can be equipped with a drive shaft of sealing device for the evaporation source and a vapor deposition system that it be prevented from being attached to the drive shaft of which the evaporation source moves to a non-degraded in.

일반적으로, 평판 디스플레이 중의 하나인 전계발광 디스플레이 장치는 발광층으로 사용하는 물질에 따라서 무기전계발광 디스플레이 장치와, 유기전계발광 디 스플레이 장치로 구분되고, 유기전계발광 디스플레이 장치는 저전압으로 구동이 가능하고, 경량의 박형이면서 시야각이 넓을 뿐만 아니라 응답속도 또한 빠르다는 장점을 구비하고 있기 때문에 각광을 받고 있다. In general, one of the EL display device of the flat panel displays are classified into inorganic electroluminescent display devices and organic light emitting display device according to materials used for the light emitting layer, the organic light emitting display device is driven at a low voltage and can be, yet lightweight thin as wide a viewing angle as it receives a response speed also popular because it offers the advantages is fast.

이러한 유기전계발광 디스플레이 장치의 유기전계 발광소자는 기판 상에 적층식으로 형성되는 양극, 유기물층 및 음극으로 구성된다. The organic electroluminescence device of the organic EL display apparatus is of a positive electrode, an organic material layer and a negative electrode formed of the laminated on a substrate. 상기 유기물층은 정공과 전자가 재결합하여 여기자를 형성하고 빛을 방출하는 유기 발광층의 유기물층을 포함하고, 또한 정공과 전자를 유기 발광층으로 원활하게 수송하여 발광효율을 향상시키기 위하여 상기 음극과 유기 발광층 사이에 전자 주입층과 전자 수송층의 유기물층을 개재시키면서 양극과 유기 발광층 사이에 정공 주입층과 전자 수송층의 유기물층을 개재시킨다. Between the organic compound layer and holes and electrons recombine and includes an organic material layer of the organic light emitting layer to form an exciton and emit light, and holes and electrons to order to smoothly transported to the organic light emitting layer to improve luminous efficiency the negative electrode, an organic emission layer while sandwiching the organic compound layer of an electron injecting layer and the electron transport layer thereby sandwiching the organic layer of the hole injection layer and the electron transport layer between the anode and the organic emission layer.

상술된 구조로 이루어진 유기전계 발광소자는 일반적으로, 진공증착법, 이온 플레이팅법 및 스퍼터링법 등과 같은 물리기상 증착법 또는 가스 반응에 의한 화학기상 증착법으로 제작된다. The organic electroluminescent device comprising the structure described above is commonly manufactured by vacuum deposition method, an ion plating method and physical vapor deposition or chemical vapor deposition method by a gas reaction, such as a sputtering method. 특히, 유기전계 발광소자의 유기물층을 형성하기 위해서는 진공챔버 내에서 유기물질을 증발시켜 형성된 유기기상물질을 증착원에서 분사하여 기판에 증착시키는 진공증착법이 널리 사용된다. In particular, in order to form an organic layer of an organic EL device is a vacuum vapor deposition method that injects an organic material vapor is formed by evaporating the organic substance in the vacuum chamber from the evaporation source to the deposition substrate is widely used.

최근에 디스플레이의 대형화에 부응하여 기판의 크기가 대형화되고 있으며, 이러한 대형 기판에 유기물층을 증착하기 위하여 증착원이 진공챔버 내에서 수직 상하방향으로 이동하면서 유기기상물질을 분사하는 증착시스템이 개발되었다. And recently, the size of the substrate to be enlarged in response to the increase in size of the display on, the deposition system, while the evaporation source is moved in a vertical up-and-down direction in the vacuum chamber spraying the organic vapor phase material has been developed to deposit the organic material in such a large-sized substrate.

이러한 증착시스템에는 증착원을 상하방향으로 이동시키는 구동축이 제공되어 있고, 상기 구동축은 구동수단에 의해서 축회전하게 된다. This deposition system, and is provided with a drive shaft for moving the evaporation source in the vertical direction, the driving shaft is the shaft rotated by the drive means. 구동축의 축회전에 의해서 증착원은 수직 상하방향으로 이동하는 동안 유기물질을 증발시킴으로써 형성되는 유기기상물질을 분사하게 된다. Evaporation source by an axial rotation of the drive shaft is for moving vertically up and down direction jet the organic material vapor is formed by evaporating the organic material.

상기 구동축은 진공챔버 내에서 노출된 상태로 유지된다. The drive shaft is held in the exposed state in the vacuum chamber. 그리고, 증착원으로부터 분사되는 유기기상물질은 진공챔버 내에서 비산하게 된다. Then, the organic material vapor sprayed from the evaporation source is scattered within the vacuum chamber. 이때, 비산하는 유기기상물질 중 일부가 구동축에 부착되어 이물질로 작용함으로써 증착원의 상하방향 이동이 원활하게 수행되지 못하는 문제점이 발생되었다. At this time, not a part of the gaseous organic substances are not attached to the non-driving axle carried out by acting as a foreign matter is smoothly moved up and down direction of the evaporation source problem has occurred.

따라서, 진공챔버 내에 존재하는 유기기상물질의 비산물이 구동축에 부착되는 것을 방지하기 위한 방안이 요구되었다. Thus, the measures to prevent the non-product of the organic material vapor present in the vacuum chamber which is attached to the drive shaft was required.

본 발명은 상기된 바와 같은 종래의 문제점을 해결하기 위하여 제안된 것으로, 기판의 대형화에 대응하기 위한 수직 이동형 유기물 증착장치에 있어서 증착원으로부터 분사되는 유기기상물질이 진공챔버 내에서 비산하여 증착원을 상하방향으로 이동시키는 구동축에 부착되는 것을 방지할 수 있는 증착시스템용 증착원의 구동축 밀폐장치 및 이를 구비한 증착시스템을 제공하는 데 그 목적이 있다. The present invention is a conventional evaporation source to the organic vapor phase material scattered in the vacuum chamber is sprayed from the evaporation source in the vertical removable organic material deposition apparatus to correspond to the that, increase in size of the substrate proposed in order to solve the problems as described above drive shaft sealing apparatus of the evaporation source for deposition systems which can be prevented from being attached to the drive shaft to move in the vertical direction and to provide a vapor deposition system having the same has the purpose.

상기 목적을 달성하기 위하여, 본 발명의 실시예에 따르면, 증착시스템용 증착원의 구동축 밀폐장치는 증착시스템의 진공챔버에 설치된 구동축에 결합하는 결합부와, 연결부를 통해서 상기 결합부에 연결되고 상기 진공챔버에서 유기기상물질 을 분사하는 증착원을 지지하는 지지판을 갖고, 상기 연결부에는 관통창이 형성되어 있는 지지체; In order to achieve the above object, according to an embodiment of the invention, the drive shaft seal device of an evaporation source for the vapor deposition system is connected to the engaging part coupling part and, through a connecting portion coupled to a drive shaft installed in the vacuum chamber of a vapor deposition system wherein having a support plate for supporting the evaporation source for injecting a gaseous organic substance into a vacuum chamber, in the support in the through-window is formed in the connecting portion; 상기 구동축을 둘러싸고 상기 지지체가 상기 구동축을 따라서 상하방향으로 이동가능하도록 일측면이 개방되어 있는 빔; Surrounding the drive shaft with the support beam is therefore the days open side so as to be movable in the vertical direction to the drive shaft; 및 상기 관통창을 관통하는 차단판으로 이루어진 것을 특징으로 한다. And it is characterized by being a blocking plate extending through the through-window.

본 발명의 일실시예에 따르면, 증착시스템용 증착원의 구동축 밀폐장치는 증착시스템의 진공챔버에 설치된 구동축에 결합하는 결합부와, 상기 결합부에 연결되고 상기 진공챔버에서 유기기상물질을 분사하는 증착원을 지지하는 지지판을 갖는 지지체; According to one embodiment of the invention, the drive shaft seal device of an evaporation source for the vapor deposition system is connected to the coupling part and the coupling part for coupling to a drive shaft installed in the vacuum chamber of a deposition system for injecting an organic vapor phase material in the vacuum chamber, a support having a support plate for supporting the evaporation source; 상기 결합부의 상부에 위치하는 구동축을 둘러싸는 제1관형체; A first tubular body surrounding the drive shaft which is located above the engaging portion; 및 상기 결합부의 하부에 위치하는 구동축을 둘러싸는 제2관형체로 이루어진 것을 특징으로 한다. And it characterized by consisting of a second tube surrounding the drive shaft shape which is located in the lower coupling portion.

본 발명의 다른 실시예에 따르면, 증착시스템은 진공챔버; In accordance with another embodiment of the invention, the vapor deposition system has a vacuum chamber; 상기 진공챔버의 일측에 설치되는 기판과 마스크를 정렬된 상태로 지지하는 척을 갖는 스테이지; Stage having a chuck for supporting a substrate in an ordered and mask, which is installed at one side of the vacuum chamber state; 상기 진공챔버의 타측에 설치되는 구동축; A drive shaft installed in the other side of the vacuum chamber; 상기 구동축에 결합하는 결합부 및 연결부를 통해서 상기 결합부에 연결된 지지판을 갖고, 상기 연결부에는 관통창이 형성되어 있는 지지체; Through the coupler and the connecting portion coupled to the drive shaft has a supporting plate coupled to the coupling portion, the support in the through-window is formed in the connecting portion; 상기 지지체의 지지판 상에 안착되어 상기 기판을 향해서 유기기상물질을 분사하는 증착원; It is seated on the support plate of the support evaporation source for injecting a gaseous organic material toward the substrate; 상기 구동축을 둘러싸고 상기 지지체가 상기 구동축을 따라서 상하방향으로 이동가능하도록 일측면이 개방되어 있는 빔; Surrounding the drive shaft with the support beam is therefore the days open side so as to be movable in the vertical direction to the drive shaft; 및 상기 지지체의 관통창을 관통하는 차단판으로 이루어진 것을 특징으로 한다. And it is characterized by being a blocking plate extending through a through-window in the support.

본 발명의 또 다른 실시예에 따르면, 증착시스템은 진공챔버; According to a further embodiment of the present invention, the vapor deposition system has a vacuum chamber; 상기 진공챔버의 일측에 설치되는 기판과 마스크를 정렬된 상태로 지지하는 척을 갖는 스테이지; Stage having a chuck for supporting a substrate in an ordered and mask, which is installed at one side of the vacuum chamber state; 상기 진공챔버의 타측에 설치되는 구동축; A drive shaft installed in the other side of the vacuum chamber; 상기 구동축에 결합하는 결합부 및 상기 결합부에 연결된 지지판을 갖는 지지체; A support having a support plate connected to the coupling part and the coupling part coupled to the drive shaft; 상기 지지체의 지지판 상에 안착되어 상기 기판을 향해서 유기기상물질을 분사하는 증착원; It is seated on the support plate of the support evaporation source for injecting a gaseous organic material toward the substrate; 상기 결합부의 상부에 위치하는 구동축을 둘러싸는 제1관형체; A first tubular body surrounding the drive shaft which is located above the engaging portion; 및 상기 결합부의 하부에 위치하는 구동축을 둘러싸는 제2관형체로 이루어진 것을 특징으로 한다. And it characterized by consisting of a second tube surrounding the drive shaft shape which is located in the lower coupling portion.

이하, 첨부도면을 참조하여 본 발명에 따른 증착시스템 및 증착시스템용 증착원의 구동축 밀폐장치를 설명한다. Describes a shaft sealing device of an evaporation source for the vapor deposition system and a deposition system in accordance with the following, the present invention will be described with reference to the accompanying drawings. 그리고, 용어 '유기물질'은 기판에 유기물층을 형성하기 위하여 도가니에 액체상태 또는 고체상태로 저장되어 있는 물질을 의미하고, 용어 '유기기상물질'은 도가니를 가열할 때 유기물질이 증발함으로써 형성되는 기체상태의 물질을 의미한다. And, in which the term "organic material" means a material that is stored in a liquid state or solid state in a crucible to form an organic layer on the substrate, the term "organic vapor phase material, is formed by the organic material evaporates when heated crucible It means a substance in a gaseous state. 이와 같이, 본 발명을 설명함에 있어서 사용되는 특정용어는 설명의 편리성을 위하여 정의된 것이므로 당 분야에 종사하는 기술자의 의도 또는 관례 등에 따라 달라질 수 있고 또한 본 발명의 기술적 구성요소를 한정하는 의미로 이해되어서는 아니될 것이다. In this way, certain terms used in describing the present invention, because it is defined for convenience of description may vary depending on the intention or practice of a technician working in the art also as a means to limit the technical components of the present invention It will not be understood.

먼저, 유기전계 발광소자의 유기물층을 형성하기 위한 진공증착법은 진공챔버를 포함하는 진공증착 시스템에서 수행된다. First, a vacuum deposition method for forming the organic compound layer of the organic EL device is carried out in a vacuum vapor deposition system including a vacuum chamber. 상기 진공챔버의 일측에는 유기물층을 형성하고자 하는 기판과 마스크를 정렬상태로 지지하는 척을 갖는 스테이지가 제공된다. One side of the vacuum chamber, the stage having a chuck for supporting a substrate and a mask to form the organic material layer is provided in alignment. 또한, 상기 진공챔버의 타측에는 상기 기판을 향해서 유기기상물질을 분사하는 증착원이 제공된다. Further, the evaporation source is provided to the other side of the vacuum chamber towards the substrate jet the organic material vapor. 상기 증착원은 진공챔버에서 거의 직립상태로 설치된 구동축을 따라서 수직 상하방향으로 이동가능하다. Wherein the evaporation source is provided along the drive shaft in substantially upright position in a vacuum chamber and is movable vertically up and down.

도 1과 도 2를 참조하면, 본 발명에 따른 증착시스템용 증착원의 구동축 밀폐장치는 구동축(12)을 둘러싸는 빔(110)을 갖는다. Even if 1 and 2, drive shaft sealing apparatus of the evaporation source for deposition system according to the present invention has a beam 110 that surrounds the drive shaft 12. 빔(110)에는 하기에 설명하는 지지체의 결합부와 연결부가 수용될 수 있는 내부공간이 형성된다. Beam 110 to the inner space is formed with a coupling part and the coupling part of the support can be accommodated to be described. 빔(110)의 일측면에는 하기에 설명하는 지지체(120)가 상하방향으로 이동할 수 있도록 개방되어 있고, 이에 의해서 개방단부가 형성된다. And a support 120 that is described below, the one side of the beam 110 is opened so as to be movable in the vertical direction, whereby the open end is formed by.

지지체(120)는 구동축(12)에 결합하는 결합부(126)와, 증착원(20)이 장착되는 지지판(122)과, 결합부(126)와 지지판(122)을 연결하고 소정 크기의 관통창(124a)이 형성되어 있는 연결부(124)를 갖는다. The support 120 is connected to and through a predetermined size the coupling portion 126 and the evaporation source 20, the support plate 122 and the engaging portions 126 and the support plate 122 which is mounted for coupling to the drive shaft 12, window (124a) has a connecting portion 124 which is formed. 연결부(124)의 관통창(124a)에는 판상 구조의 차단판(130; 도면의 간략화를 위해서 점선으로 표시됨)이 관통되어 제공된다. Through-window in the connecting portion (124), (124a), the planar structure of the shield plate; is provided in (130 indicated by a broken line in order to simplify the illustration) with a through. 결합부(126)에는 구동축(12)이 관통하는 구멍(126a)이 형성되고, 바람직하게 구멍(126a)은 구동축(12)에 기어결합방식으로 체결되어 구동축(12)이 구동수단(미도시)에 의해서 회전하면, 결합부(126)는 구동축(12)을 따라서 상하방향으로 이동하게 된다. The engaging portion 126 has a drive shaft 12, the holes penetrating (126a) is formed, preferably in a hole (126a) is fastened to the gear-coupled to the drive shaft 12 drive shaft 12 drive means (not shown) When the rotation by, the engaging section 126 is moved in the vertical direction along the drive shaft 12.

구동축(12)이 위치하는 빔(110)의 내부공간에는 지지체(120)의 결합부(126)와 연결부(124)가 이동가능하게 수용된다. The internal space of the beam 110 to the drive shaft 12. This location is received to enable the coupling part 126 and the connection portion 124 of the support 120 move. 빔(110)의 내부공간을 한정하는 내측면에는 외측으로 연장하는 홈이 상기 개방단부에 인접하여 상하방향으로 형성된다. In the inner surface defining an interior space of the beam 110, the home extending outwardly adjacent the open end is formed in the vertical direction. 지지체(120)의 연결부(124)에는 상기 홈에 대응하는 외향돌기가 제공된다. The outward projection corresponding to the groove is provided, the connecting portion 124 of the support 120. 이때, 관통창(124a)은 상기 외향돌기가 형성된 부위에 제공된다. At this time, the through-window (124a) it is provided at the portion where the outward projection formed. 그리고, 지지체(120)에 있어서, 외향돌기와 지지판(122) 사이에는 요홈이 형성되고, 빔(110)의 개방단부는 상기 요홈에 삽입되는 날개부로서 작용한다. Then, in the support 120, the open end of the outward protrusion has a groove in between the support plate (122) is formed, beam 110 acts as a blade portion that is inserted into the groove.

따라서, 구동축(12)이 결합부(126)의 구멍(126a)에 삽입되고, 빔(110)의 날개부가 지지체(120)의 요홈에 삽입되고, 연결부(124)의 외향돌기는 빔(110)의 홈에 삽입됨으로써 지지체(120)의 결합부(126)와 연결부(124)는 빔(110)의 내부공간에 위치하게 된다. Thus, drive shaft 12 is inserted into the hole (126a) of the coupling portion 126, is inserted into the groove of the blade portion support 120 of the beam 110, the outward protrusion of the connecting portion 124 are beams 110 by being inserted in a groove engaging portion 126 and the connection portion 124 of the support 120 is positioned in the interior space of the beam 110. 이때, 차단판(130)이 연결부(124)의 관통창(124a)에 삽입됨으로써 구동축(12)은 외부로부터 밀폐된다. At this time, the blocking plate 130 is inserted into the through-window (124a) whereby the drive shaft 12 of the connecting portion 124 is sealed from the outside. 그리고, 지지체(120)의 지지판(122)은 빔(110)의 외부에 노출된다. Then, the support plate 122 of the support 120 is exposed to the outside of the beam 110.

도 3에 도시한 바와 같이, 본 발명의 실시예에 따른 구동축 밀폐장치가 설치되어 있는 증착시스템에 있어서, 진공챔버(10)의 일측에는 기판(30)과 마스크(40)를 정렬된 상태로 지지하는 척(50)이 제공된다. 3, according to a deposition system with a drive shaft seal relating to the present embodiment is provided, one side of the vacuum chamber 10 is supported by the alignment of the substrate 30 and the mask 40, the state the chuck 50 is provided. 진공챔버(10)의 타측에는 구동축(12)이 빔(110)의 내부공간에 제공되고, 이러한 상태에서 차단판(130)에 의하여 밀폐된 상태로 유지된다. The other side of the drive shaft 12 of the vacuum chamber 10 is provided in the interior space of the beam 110, by the blocking plate 130 in such a state is maintained in a closed state. 빔(110)의 개방단부를 통해서 노출되어 있는 지지체(120)의 지지판(122) 상에는 증착원(20)이 안착된다. The evaporation source 20 is formed on the support plate 122 of the support 120 which is exposed through the open end of the beam 110 is seated.

구동수단(미도시)의 작동에 의해서 구동축(12)이 축회전하게 되며, 이와 연동하여 지지체(120)의 지지판(122)은 빔(110)의 개방단부를 따라서 수직 상하방향으로 이동한다. By operation of the drive means (not shown) driving shaft 12 and the rotation axis, this linkage to a support plate 122 of the support 120 is moved vertically up and down direction along the open end of the beam 110. 그리고, 진공챔버(10)에서 증착원으로부터 기판(30)을 향해서 분사되는 유기기상물질이 비산되어도, 차단판(130)과 빔(110)에 의해서 비산되는 유기기상물질이 구동축(12)에 부착하는 것을 효과적으로 방지하게 된다. And, attached to even the organic gaseous substance is injected toward the substrate 30 from the evaporation source in a vacuum chamber 10, non-blocking plate 130 and beam 110. The drive shaft 12, an organic vapor phase material is scattered by the it is effectively prevented.

한편, 도 4를 참조하면, 본 발명의 다른 실시예에 따른 증착시스템용 증착원의 구동축 밀폐장치는 구동축(12)에 결합하는 결합부(226)와, 결합부(226)에 연결되고 증착원이 안착되는 지지판(222)을 갖는 지지체(220)를 포함한다. On the other hand, referring to Figure 4, the shaft sealing device of an evaporation source for deposition system according to another embodiment of the present invention is coupled to the coupling portion 226 and a coupling section 226 which coupled to the drive shaft 12, the evaporation source and a support body 220 having a supporting plate 222 which is seated. 결합부 (226)를 중심으로 하여 그의 상부에 위치하는 구동축(12)은 제1관형체(230a)에 의해서 둘러싸이고, 그의 하부에 위치하는 구동축(12)은 제2관형체(230a)에 의해서 둘러싸인다. Around the coupling unit 226 by a drive shaft 12 which is located in its upper portion is surrounded by the first tubular body (230a), a drive shaft 12 which is located in its lower part is by a second tubular body (230a) enclosed.

바람직하게, 제1관형체(230a)의 하부는 결합부(226)의 상부면에 고정되고, 제2관형체(230b)의 상부는 결합부(226)의 하부면에 고정된다. Preferably, the first lower portion of the pipe shape (230a) is fixed to the upper surface of the coupling portion 226, a second upper portion of the tube shape (230b) is fixed to the lower surface of the engaging portion 226. The 또한, 제1관형체(230a)의 상부는 진공챔버(10)의 상부면에 고정되고 제2관형체(230b)의 하부는 진공챔버(10)의 하부면에 고정된다. Further, the first upper portion of the pipe shape (230a) is fixed to the upper surface of the vacuum chamber 10, the lower portion of the second tubular body (230b) is fixed to the lower surface of the vacuum chamber 10. 따라서, 구동축(12)은 제1관형체 및 제2관형체(230a, 230b)와, 지지체(220)의 결합부(226)에 밀폐된 상태로 유지된다. Thus, drive shaft 12 is held at the closed state to the engagement portion 226 of the first tubular body and second tubular body (230a, 230b) and the support (220).

제1관형체와 제2관형체(230a, 230b)는 구동수단(미도시)에 의해서 구동축(12)이 회전함에 따라 결합부(226)가 상하방향으로 이동하는 동안에는 구동축(12)을 효과적으로 외부로부터 밀폐시키기 위하여 길이신축가능한 구조를 갖는 것이 바람직하다. A first tubular body and second tubular body (230a, 230b) are effectively outside the drive shaft 12 while the coupling part 226 moves in the vertical direction as the drive shaft 12 is rotated by a drive means (not shown) it has a length from the retractable structure so as to seal is preferred. 예를 들어, 제1관형체는 제2관형체(230a, 230b)는 주름관 형상의 외형을 갖는 것이 바람직하다. For example, the first tubular body preferably has a second tubular body (230a, 230b) of the outer corrugated pipe shape.

도 8a를 참조하면, 본 발명의 다른 실시예에 따른 구동축 밀폐장치가 설치되어 있는 증착시스템에 있어서, 진공챔버(10)의 일측에는 기판(30)과 마스크(40)를 정렬된 상태로 지지하는 척(50)이 제공된다. Referring to Figure 8a, in a deposition system with a shaft sealing device according to another embodiment of the present invention is provided, in one side of the vacuum chamber 10 for supporting in sorted the substrate 30 and the mask 40, the state the chuck 50 is provided. 진공챔버(10)의 타측에는 구동축(12)이 제공되고, 구동축(12)에는 결합부(226)를 통해서 수직 상하방향으로 이동가능하게 지지체(220)가 결합된다. The other side of the drive shaft 12 of the vacuum chamber 10 is provided, the drive shaft 12 is provided with a vertically movable up and down the support 220 is coupled through the coupling portion 226. 지지체(220)는 유기물질이 저장되어 있는 증착원이 안착되는 지지판(222)을 갖는다. The support 220 has a support plate 222 which is mounted in the evaporation source of the organic material is stored. 지지체(220)의 결합부(226)를 중심으로 하여 그의 상부에 위치하는 구동축(12)에는 제1관형체(230a)가 제공되는 반면에 그의 하부 에 위치하는 구동축(12)에는 제2관형체(230b)가 제공된다. A second tubular body driving shaft 12 is provided with a first tubular body drive shaft 12 which is located in its lower part whereas (230a) is provided around the engaging portion 226 of the support 220 positioned on its upper the (230b) is provided.

증착원(20)이 진공챔버(10)의 버퍼영역(A)에 위치하도록 지지체(220)가 구동축(12)의 하부에 제공된 상태에서, 제1관형체(230a)는 최대 길이로 신장되어 있는 반면에 제2관형체(230b)는 최소 길이로 축소된다. Evaporation source 20 in a state in which provided on the lower portion of the support 220, the drive shaft 12 to be located in the buffer area (A) of the vacuum chamber 10, the first tubular body (230a) is that the height to the maximum length on the other hand, a second tubular body (230b) is reduced to a minimum length. 이 위치에서 증착원(20)은 유기물질을 증발시켜 유기기상물질을 형성하도록 예열되고 또한 이러한 유기기상물질의 증착율이 목표치에 도달할 때까지 대기한다. Evaporation source 20 in this position is evaporated to an organic material is preheated so as to form the organic material vapor is also waiting until reaching the target deposition rate of the organic material vapor.

도 8b에 도시된 바와 같이, 증착원(20)으로부터 분사되는 유기기상물질의 증착율이 목표치에 도달하면, 구동수단(미도시)의 작동에 의하여 구동축(12)이 축회전하여 지지체(220)는 이동한다. The deposition reaches a deposition rate of the target value of the organic vapor phase material is injected from the source 20, the drive shaft 12 the rotating shaft by the operation of the drive means (not shown), the support 220, as shown in Figure 8b moves. 결과적으로, 지지체(220)의 지지판(222) 상에 안착되어 있는 증착원(20)은 진공챔버(10)의 성막영역(B)에 위치한다. As a result, the evaporation source 20, which is seated on the support plate 222 of the support 220 is located at the film formation area (B) of the vacuum chamber 10. 이때, 증착원(20)으로부터 유기기상물질이 분사되어 진공챔버(10) 내의 기판(30)에 유기물층을 형성한다. In this case, the vapor of the organic material sprayed from the evaporation source 20 to form an organic material layer on the substrate 30 in the vacuum chamber 10.

한편, 증착원(20)이 진공챔버(10)의 성막영역(B)에 위치하도록 지지체(220)를 이동시킨 상태에서, 제1관형체(230a)는 약간 축소되고 또한 제2관형체(230b)는 약간 신장된다. On the other hand, the evaporation source 20 is in a state to move the support 220 is positioned in the deposition region (B) of the vacuum chamber 10, the first tubular body (230a) is slightly reduced also a second tubular body (230b ) it is slightly stretched.

따라서, 관형체(230a, 230b)는 지지체(220)의 이동방향에 연동하여 길이신축하므로, 관형체(230a, 230b) 및 결합부(226)에 의해서 구동체(12)는 외부로부터 밀폐되어, 지지체(220)의 지지판(222) 상에 안착되어 있는 증착원(20)으로부터 분사되는 유기기상물질이 진공챔버(10) 내에서 비산하여도, 구동체(12)에 비산하는 유기기상물질이 접촉하는 것을 효과적으로 차단한다. Thus, the tubular body (230a, 230b) is so elastic in association with the moving direction of the support 220, the length, the tubular body drive member 12 by the (230a, 230b) and the engaging portion 226 is sealed from the outside, the organic vapor phase material in contact to the organic vapor material ejected from the evaporation source 20, which is seated on the support plate 222 of the support 220 be scattered in the vacuum chamber 10, scattered on the driving body 12, effectively blocking that.

상기 내용은 본 발명의 바람직한 실시예를 단지 예시한 것으로 본 발명이 속하는 분야의 당업자는 첨부된 청구범위에 기재된 본 발명의 사상 및 요지로부터 벗어나지 않고 본 발명에 대한 수정 및 변경을 가할 수 있다는 것을 인식하여야 한다. The information is recognized that those skilled in the art to which the present invention pertains to the way of example only a preferred embodiment of the present invention can be applied to changes and modifications to the invention without departing from the spirit and substance of the invention as set forth in the appended claims shall.

본 발명에 따르면, 유기기상물질을 분사하는 증착원을 상하방향으로 이동시키는 구동체를 진공챔버 내에 밀폐된 상태로 유지하므로, 분사되는 유기기상물질이 진공챔버 내에서 비산하여 구동체에 부착되는 것을 방지하여 증착원이 원활하게 상하방향으로 이동하도록 한다. According to the invention, that maintains the actuator for moving the evaporation source in the vertical direction for ejecting an organic vapor phase material in a closed state in a vacuum chamber, an organic gas phase material to be injected is attached to the drive body by scattering in the vacuum chamber to prevent and to facilitate the evaporation source moves in the vertical direction.

Claims (15)

  1. 증착시스템의 진공챔버에 설치된 구동축에 결합하는 결합부와, 연결부를 통해서 상기 결합부에 연결되고 상기 진공챔버에서 유기기상물질을 분사하는 증착원을 지지하는 지지판을 갖고, 상기 연결부에는 관통창이 형성되어 있는 지지체; And a coupling part for coupling to a drive shaft of the deposition system installed in a vacuum chamber, connected to the engagement portion via the connecting portion, and having a support plate for supporting the evaporation source for injecting the organic vapor phase material in the vacuum chamber, wherein the connecting portion has a through window is formed support that;
    상기 구동축을 둘러싸고 상기 지지체가 상기 구동축을 따라서 상하방향으로 이동가능하도록 일측면이 개방되어 있는 빔; Surrounding the drive shaft with the support beam is therefore the days open side so as to be movable in the vertical direction to the drive shaft; And
    상기 관통창을 관통하는 차단판으로 이루어진 것을 특징으로 하는 증착시스템용 증착원의 구동축 밀폐장치. Drive shaft sealing apparatus of the evaporation source for deposition systems which is characterized by being a blocking plate extending through the through-window.
  2. 제1항에 있어서, According to claim 1,
    상기 지지체의 연결부의 양측 에지에는 요홈이 형성되고, 상기 빔의 개방단부에는 상기 연결부의 요홈에 대응하는 날개부가 형성되어 있는 것을 특징으로 하는 증착시스템용 증착원의 구동축 밀폐장치. The open end has a drive shaft sealing apparatus of the evaporation source for deposition system, it characterized in that the wing portion is formed corresponding to the groove of the connection part of the beam and the grooves are formed in both side edges of the connection portion of the support.
  3. 제2항에 있어서, 3. The method of claim 2,
    상기 연결부의 요홈과 상기 결합부의 사이에는 외향으로 연장하는 돌기가 형성되어 있고, 상기 빔의 내측면에는 상기 돌기에 대응하는 홈이 형성되어 있는 것 을 특징으로 하는 증착시스템용 증착원의 구동축 밀폐장치. And between the grooves and the engaging portion of the connecting portion is formed with a protrusion extending outwardly, the inner surface, the vapor deposition system evaporation source driving shaft sealing devices for that feature will in groove is formed corresponding to the projection of the beam .
  4. 제3항에 있어서, 4. The method of claim 3,
    상기 관통창은 상기 돌기가 형성되어 있는 부분에 형성되어 있는 것을 특징으로 하는 증착시스템용 증착원의 구동축 밀폐장치. The through window shaft seal device of an evaporation source for deposition system, characterized in that formed on the portion is formed with the projections.
  5. 증착시스템의 진공챔버에 설치된 구동축에 결합하는 결합부와, 상기 결합부에 연결되고 상기 진공챔버에서 유기기상물질을 분사하는 증착원을 지지하는 지지판을 갖는 지지체; And a coupling part for coupling to a drive shaft of the deposition system installed in a vacuum chamber, the support having a support plate for supporting a vapor source coupled to the coupling portion and spraying the organic material vapor from the vacuum chamber;
    상기 결합부의 상부에 위치하는 구동축을 둘러싸는 제1관형체; A first tubular body surrounding the drive shaft which is located above the engaging portion; And
    상기 결합부의 하부에 위치하는 구동축을 둘러싸는 제2관형체로 이루어진 것을 특징으로 하는 증착시스템용 증착원의 구동축 밀폐장치. Drive shaft sealing apparatus of the vapor source for vapor deposition system according to claim consisting of the second tubular body which surrounds the drive shaft located below the engaging portion.
  6. 제5항에 있어서, 6. The method of claim 5,
    상기 제1관형체의 하부는 상기 결합부의 상부면에 고정되고 상기 제2관형체의 상부는 상기 결합부의 하부면에 고정되는 것을 특징으로 하는 증착시스템용 증착원의 구동축 밀폐장치. A drive shaft seal device of the first lower portion of the tube shape is fixed to the upper surface of the coupling of the second tubular body above the evaporation source for deposition system, characterized in that secured to the lower surface of the coupling portion of the.
  7. 제5항 또는 제6항에 있어서, 6. The method of claim 5 or 6,
    상기 제1관형체와 상기 제2관형체는 길이신축이 가능한 것을 특징으로 하는 증착시스템용 증착원의 구동축 밀폐장치. A drive shaft seal device of the first tubular body and the second tubular body has an evaporation source for deposition system, characterized in that the length of the extendable.
  8. 제7항에 있어서, The method of claim 7,
    상기 제1관형체와 제2관형체는 주름관의 외형을 갖는 것을 특징으로 하는 증착시스템용 증착원의 구동축 밀폐장치. A drive shaft seal device of the first tubular body and second tubular body has an evaporation source for deposition system characterized in that it has the outer shape of the corrugated pipe.
  9. 진공챔버; A vacuum chamber;
    상기 진공챔버의 일측에 설치되는 기판과 마스크를 정렬된 상태로 지지하는 척을 갖는 스테이지; Stage having a chuck for supporting a substrate in an ordered and mask, which is installed at one side of the vacuum chamber state;
    상기 진공챔버의 타측에 설치되는 구동축; A drive shaft installed in the other side of the vacuum chamber;
    상기 구동축에 결합하는 결합부 및 연결부를 통해서 상기 결합부에 연결된 지지판을 갖고, 상기 연결부에는 관통창이 형성되어 있는 지지체; Through the coupler and the connecting portion coupled to the drive shaft has a supporting plate coupled to the coupling portion, the support in the through-window is formed in the connecting portion;
    상기 지지체의 지지판 상에 안착되어 상기 기판을 향해서 유기기상물질을 분사하는 증착원; It is seated on the support plate of the support evaporation source for injecting a gaseous organic material toward the substrate;
    상기 구동축을 둘러싸고 상기 지지체가 상기 구동축을 따라서 상하방향으로 이동가능하도록 일측면이 개방되어 있는 빔; Surrounding the drive shaft with the support beam is therefore the days open side so as to be movable in the vertical direction to the drive shaft; And
    상기 지지체의 관통창을 관통하는 차단판으로 이루어진 것을 특징으로 하는 증착시스템. Deposition system is characterized by being a blocking plate extending through a through-window in the support.
  10. 제9항에 있어서, 10. The method of claim 9,
    상기 지지체의 연결부의 양측 에지에는 요홈이 형성되고, 상기 빔의 개방단부에는 상기 연결부의 요홈에 대응하는 날개부가 형성되어 있는 것을 특징으로 하는 증착시스템. And grooves are formed in both side edges of the connection portion of the support, the open end of the beam, the vapor deposition system wherein a blade portion is formed corresponding to the groove of the connecting part.
  11. 제10항에 있어서, 11. The method of claim 10,
    상기 연결부의 요홈과 상기 결합부의 사이에는 외향으로 연장하는 돌기가 형성되어 있고, 상기 빔의 내측면에는 상기 돌기에 대응하는 홈이 형성되어 있는 것을 특징으로 하는 증착시스템. A vapor deposition system, characterized in that between the recess and the engaging portion of the connecting portion is formed on a protrusion extending outwardly, in the inner surface of the beam a groove corresponding to the projection is formed.
  12. 진공챔버; A vacuum chamber;
    상기 진공챔버의 일측에 설치되는 기판과 마스크를 정렬된 상태로 지지하는 척을 갖는 스테이지; Stage having a chuck for supporting a substrate in an ordered and mask, which is installed at one side of the vacuum chamber state;
    상기 진공챔버의 타측에 설치되는 구동축; A drive shaft installed in the other side of the vacuum chamber;
    상기 구동축에 결합하는 결합부 및 상기 결합부에 연결된 지지판을 갖는 지지체; A support having a support plate connected to the coupling part and the coupling part coupled to the drive shaft;
    상기 지지체의 지지판 상에 안착되어 상기 기판을 향해서 유기기상물질을 분사하는 증착원; It is seated on the support plate of the support evaporation source for injecting a gaseous organic material toward the substrate;
    상기 결합부의 상부에 위치하는 구동축을 둘러싸는 제1관형체; A first tubular body surrounding the drive shaft which is located above the engaging portion; And
    상기 결합부의 하부에 위치하는 구동축을 둘러싸는 제2관형체로 이루어진 것을 특징으로 하는 증착시스템. Deposition system according to claim consisting of the second tubular body which surrounds the drive shaft located below the engaging portion.
  13. 제12항에 있어서, 13. The method of claim 12,
    상기 제1관형체의 하부는 상기 결합부의 상부면에 고정되고 상기 제2관형체의 상부는 상기 결합부의 하부면에 고정되는 것을 특징으로 하는 증착시스템. It said first lower portion of the tubular body is fixed to the upper surface of the upper coupling portion of the second tubular body is a vapor deposition system, characterized in that secured to the lower surface of the coupling portion.
  14. 제12항 또는 제13항에 있어서, 13. The method of claim 12 or 13,
    상기 제1관형체와 상기 제2관형체는 길이신축이 가능한 것을 특징으로 하는 증착시스템. The first tubular body and the second tubular body is a vapor deposition system, characterized in that the length of the extendable.
  15. 제14항에 있어서, 15. The method of claim 14,
    상기 제1관형체와 제2관형체는 주름관의 외형을 갖는 것을 특징으로 하는 증착시스템. The first tubular body and the second tubular body is a vapor deposition system, characterized in that it has an outer shape of a corrugated pipe.
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