KR20050024385A - 마이크로 전자 소자 제조용 현상액-가용성 금속알콕사이드 코팅 조성물 - Google Patents
마이크로 전자 소자 제조용 현상액-가용성 금속알콕사이드 코팅 조성물 Download PDFInfo
- Publication number
- KR20050024385A KR20050024385A KR10-2004-7021093A KR20047021093A KR20050024385A KR 20050024385 A KR20050024385 A KR 20050024385A KR 20047021093 A KR20047021093 A KR 20047021093A KR 20050024385 A KR20050024385 A KR 20050024385A
- Authority
- KR
- South Korea
- Prior art keywords
- composition
- group
- solvent system
- layer
- metal
- Prior art date
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- 229910052751 metal Inorganic materials 0.000 title claims abstract description 49
- 239000002184 metal Substances 0.000 title claims abstract description 49
- 150000004703 alkoxides Chemical class 0.000 title claims description 32
- 238000004377 microelectronic Methods 0.000 title description 3
- 239000000203 mixture Substances 0.000 claims abstract description 100
- 229920000642 polymer Polymers 0.000 claims abstract description 39
- 239000002904 solvent Substances 0.000 claims abstract description 31
- 238000000034 method Methods 0.000 claims abstract description 13
- 125000003545 alkoxy group Chemical group 0.000 claims abstract description 11
- 125000000217 alkyl group Chemical group 0.000 claims abstract description 11
- 125000003118 aryl group Chemical group 0.000 claims abstract description 11
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 11
- 239000001257 hydrogen Substances 0.000 claims abstract description 11
- 125000004435 hydrogen atoms Chemical group data:image/svg+xml;base64,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 data:image/svg+xml;base64,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 [H]* 0.000 claims abstract description 11
- 125000000951 phenoxy group Chemical group 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[H]C1=C([H])C([H])=C(O*)C([H])=C1[H] 0.000 claims abstract description 11
- 230000003667 anti-reflective Effects 0.000 claims abstract description 9
- 239000010410 layer Substances 0.000 claims description 39
- 229920002120 photoresistant polymer Polymers 0.000 claims description 29
- 239000000758 substrate Substances 0.000 claims description 29
- 229910052710 silicon Inorganic materials 0.000 claims description 15
- 150000002894 organic compounds Chemical class 0.000 claims description 14
- 125000000524 functional group Chemical group 0.000 claims description 12
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N silicon Chemical compound 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[Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 11
- 239000010703 silicon Substances 0.000 claims description 11
- 239000011247 coating layer Substances 0.000 claims description 9
- RGHHSNMVTDWUBI-UHFFFAOYSA-N 4-Hydroxybenzaldehyde Chemical compound 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OC1=CC=C(C=O)C=C1 RGHHSNMVTDWUBI-UHFFFAOYSA-N 0.000 claims description 8
- WGTYBPLFGIVFAS-UHFFFAOYSA-M Tetramethylammonium hydroxide Chemical compound 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[OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 claims description 8
- 230000027455 binding Effects 0.000 claims description 8
- 239000003446 ligand Substances 0.000 claims description 8
- XYIBRDXRRQCHLP-UHFFFAOYSA-N Ethyl acetoacetate Chemical compound 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CCOC(=O)CC(C)=O XYIBRDXRRQCHLP-UHFFFAOYSA-N 0.000 claims description 6
- LLHKCFNBLRBOGN-UHFFFAOYSA-N Propylene glycol methyl ether acetate Chemical compound 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- 125000002915 carbonyl group Chemical group 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[*:2]C([*:1])=O 0.000 claims description 4
- 238000005468 ion implantation Methods 0.000 claims description 4
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol Chemical compound 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N#CC(C)(C)N=NC(C)(C)C#N OZAIFHULBGXAKX-UHFFFAOYSA-N 0.000 claims description 3
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- FENFUOGYJVOCRY-UHFFFAOYSA-N 1-propoxypropan-2-ol Chemical compound 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CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 description 2
- MWOOGOJBHIARFG-UHFFFAOYSA-N Vanillin Chemical compound 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- 239000011347 resin Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
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Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G79/00—Macromolecular compounds obtained by reactions forming a linkage containing atoms other than silicon, sulfur, nitrogen, oxygen, and carbon with or without the latter elements in the main chain of the macromolecule
- C08G79/10—Macromolecular compounds obtained by reactions forming a linkage containing atoms other than silicon, sulfur, nitrogen, oxygen, and carbon with or without the latter elements in the main chain of the macromolecule a linkage containing aluminium
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G79/00—Macromolecular compounds obtained by reactions forming a linkage containing atoms other than silicon, sulfur, nitrogen, oxygen, and carbon with or without the latter elements in the main chain of the macromolecule
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L85/00—Compositions of macromolecular compounds obtained by reactions forming a linkage in the main chain of the macromolecule containing atoms other than silicon, sulfur, nitrogen, oxygen and carbon; Compositions of derivatives of such polymers
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/091—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers characterised by antireflection means or light filtering or absorbing means, e.g. anti-halation, contrast enhancement
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
- Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
- Y10S430/1055—Radiation sensitive composition or product or process of making
- Y10S430/106—Binder containing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
- Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
- Y10S430/1055—Radiation sensitive composition or product or process of making
- Y10S430/106—Binder containing
- Y10S430/11—Vinyl alcohol polymer or derivative
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
- Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
- Y10S430/1055—Radiation sensitive composition or product or process of making
- Y10S430/106—Binder containing
- Y10S430/111—Polymer of unsaturated acid or ester
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
- Y10S430/151—Matting or other surface reflectivity altering material
Abstract
Description
실시예 번호 | 굴절율 |
2 | 1.99 |
3 | 1.68 |
4 | 1.75 |
실시예 번호 | 용매 | 스트리핑 전의 두께 (Å) | 스트리핑 후의 두께 (Å) | 용해도% | 스핀 보울 상용성 |
2 | PGMEAa | 1273 | 31 | 97.56 | 있음 |
2 | 에틸 락테이트 | 1277 | 21 | 98.35 | 있음 |
2 | 헵타논 | 1276 | 48 | 96.24 | 있음 |
Claims (56)
- 포토리소그래피 공정에서 사용하기 위한 조성물로서, 상기 조성물은 용매계와, 상기 용매계에 분산 또는 용해된 중합체를 포함하고, 상기 중합체는 하기 화학식을 갖는 반복 단위체들을 포함하는 것을 특징으로 하는 조성물:상기 식에서,X는 광감쇠 부분이고, M은 금속이고, 각각의 R은 수소, 알킬, 아릴, 알콕시 및 페녹시로 구성되는 군에서 선택된다.
- 제 1 항에 있어서, 상기 중합체는 하기 화학식을 갖는 반복 단위체들을 추가로 포함하는 것을 특징으로 하는 조성물:상기 식에서,각각의 R1은 수소, 알킬, 아릴, 알콕시 및 페녹시로 구성되는 군에서 선택되고, M1은 금속이다.
- 제 1 항에 있어서, 각각의 반복 단위체에서의 M은 Ti, Zr, Si, 및 Al로 구성되는 군에서 선택되는 금속인 것을 특징으로 하는 조성물.
- 제 1 항에 있어서, 중합체 바인더를 추가로 포함하는 것을 특징으로 하는 조성물.
- 제 4 항에 있어서, 상기 중합체 바인더는 에폭시 노볼락 수지, 아크릴레이트, 중합된 아미노플라스트, 글리코우랄, 비닐 에테르, 및 이들의 혼합물로 구성되는 군에서 선택되는 것을 특징으로 하는 조성물.
- 제 4 항에 있어서, 상기 중합체 바인더는 분자량이 약 1,000 내지 약 50,000 인 것을 특징으로 하는 조성물.
- 제 1 항에 있어서, X는 M과의 배위를 위한 작용기를 포함하는 것을 특징으로 하는 조성물.
- 제 7 항에 있어서, 상기 작용기는 카르보닐, 알콜 및 페놀로 구성되는 군에서 선택되는 것을 특징으로 하는 조성물.
- 제 1 항에 있어서, 상기 X가 트리메틸올 에톡시레이트, 4-히드록시벤즈알데히드, 및 2-시아노-3-(4-히드록시페닐)-아크릴산 에틸 에스테르의 작용성 부분으로 구성되는 군에서 선택되는 것을 특징으로 하는 조성물.
- 제 1 항에 있어서, X 및 R은 각각 어떠한 에틸렌계 불포화기를 포함하지 않는 것을 특징으로 하는 조성물.
- 제 1 항에 있어서, 하나의 R이 -CH3이고, 다른 하나의 R이 -OC2H5인 것을 특징으로 하는 조성물.
- 포토리소그래피 공정에서 사용하기 위한 조성물로서, 상기 조성물은 용매계와, 상기 용매계에 분산 또는 용해된 중합체를 포함하고, 상기 중합체는 중합체성 금속 알콕사이드를 유기 화합물과 반응시킴으로써 형성되고, 상기 중합체성 금속 알콕사이드는 하기 화학식을 갖는 반복 단위체들을 포함하고, 상기 유기 화합물은 상기 중합체성 금속 알콕사이드의 M과의 배위를 위한 작용기를 포함하는 것을 특징으로 하는 조성물:상기 식에서,M은 금속이고, 각각의 L은 디케토 및 알콕사이드 리간드로 구성되는 군에서 선택된다.
- 제 12 항에 있어서, 각각의 반복 단위체에서의 M은 Ti, Zr, Si, 및 Al로 구성되는 군에서 선택되는 금속인 것을 특징으로 하는 조성물.
- 제 12 항에 있어서, 중합체 바인더를 추가로 포함하는 것을 특징으로 하는 조성물.
- 제 14 항에 있어서, 상기 중합체 바인더는 에폭시 노볼락 수지, 아크릴레이트, 중합된 아미노플라스트, 글리코우랄, 비닐 에테르, 및 이들의 혼합물로 구성되는 군에서 선택되는 것을 특징으로 하는 조성물.
- 제 14 항에 있어서, 상기 중합체 바인더는 분자량이 약 1,000 내지 약 50,000 인 것을 특징으로 하는 조성물.
- 제 12 항에 있어서, 각각의 L이 하기 화학식을 갖는 것을 특징으로 하는 조성물:상기 식에서,각각의 R은 수소, 알킬, 아릴, 알콕시 및 페녹시로 구성되는 군에서 선택된다.
- 제 1 항에 있어서, 하나 이상의 L이 에틸 아세토아세테이트의 부분인 것을 특징으로 하는 조성물.
- 제 17 항에 있어서, 하나의 R이 -CH3이고, 다른 하나의 R이 -OC2H5인 것을 특징으로 하는 조성물.
- 제 12 항에 있어서, 상기 작용기는 알콜, 페놀 및 카르보닐기로 구성되는 군에서 선택되는 것을 특징으로 하는 조성물.
- 제 12 항에 있어서, 상기 유기 화합물이 트리메틸올 에톡시레이트, 4-히드록시벤즈알데히드, 및 2-시아노-3-(4-히드록시페닐)-아크릴산 에틸 에스테르로 구성되는 군에서 선택되는 것을 특징으로 하는 조성물.
- 표면을 갖는 기판과, 포토리소그래피 공정에서 장벽 또는 반사방지층으로 사용하기 위한 경화된 층의 결합체(combination)로서, 상기 경화된 층은 상기 표면에 이웃하여 위치하고, 금속 원자와 수소 원자 결합이 번갈아 있고, 약 1.4 이상의 굴절율을 가지며, 습식 현상가능한 것을 특징으로 하는 결합체.
- 제 22 항에 있어서, 상기 경화된 층은 프로필렌 글리콜 메틸 에테르 아세테이트가 용매인 경우 약 75% 이상의 용해도%를 갖는 것을 특징으로 하는 결합체.
- 제 22 항에 있어서, 상기 기판은 실리콘 웨이퍼 및 이온 주입층으로 구성되는 군에서 선택되는 것을 특징으로 하는 결합체.
- 제 22 항에 있어서, 상기 경화된 층에 이웃한 포토레지스트 층을 추가로 포함하는 것을 특징으로 하는 결합체.
- 제 22 항에 있어서, 각각의 금속 원자는 Ti, Zr, Si, 및 Al로 구성되는 군에서 선택되는 금속인 것을 특징으로 하는 조성물.
- 제 22 항에 있어서, 상기 경화된 층은 용매계와, 상기 용매계에 분산 또는 용해된 중합체를 포함하는 조성물로 형성되고, 상기 중합체는 하기 화학식을 갖는 반복 단위체들을 포함하는 것을 특징으로 하는 조성물:상기 식에서,X는 광감쇠 부분이고, M은 금속이고, 각각의 R은 수소, 알킬, 아릴, 알콕시 및 페녹시로 구성되는 군에서 선택된다.
- 제 22 항에 있어서, 상기 경화된 층은 용매계와, 상기 용매계에 분산 또는 용해된 중합체를 포함하는 조성물로 형성되고, 상기 중합체는 중합체성 금속 알콕사이드를 유기 화합물과 반응시킴으로써 형성되고, 상기 중합체성 금속 알콕사이드는 하기 화학식을 갖는 반복 단위체들을 포함하고, 상기 유기 화합물은 상기 중합체성 금속 알콕사이드의 M과의 배위를 위한 작용기를 포함하는 것을 특징으로 하는 결합체:상기 식에서,M은 금속이고, 각각의 L은 디케토 및 알콕사이드 리간드로 구성되는 군에서 선택된다.
- 제 22 항에 있어서, 상기 경화된 층은 베이스 현상액에서 약 95% 이상 가용성인 것을 특징으로 하는 결합체.
- 집적 회로 선구 구조체를 형성하는 방법으로서,기판상에 조성물의 코팅층을 형성하는 단계와;상기 코팅층에 포토레지스트를 도포하여 상기 코팅층상에 포토레지스트 층을 형성하는 단계와;상기 포토레지스트 층 및 코팅층의 일부분을 선택적으로 제거하여 상기 기판상에 라인 피쳐를 형성하는 단계를 포함하며, 상기 라인 피쳐는 약 83-90°의 각도 "a"를 갖는 것을 특징으로 하는 방법.
- 제 30 항에 있어서, 상기 기판은 실리콘 웨이퍼 및 이온 주입층으로 구성되는 군에서 선택되는 것을 특징으로 하는 방법.
- 제 30 항에 있어서, 상기 제거 단계는 상기 부분을 수성 현상액으로 제거하는 것을 포함하는 것을 특징으로 하는 방법.
- 제 32 항에 있어서, 상기 수성 현탁액은 테트라메틸 암모늄 히드록사이드 및 KOH 현상액으로 구성되는 군에서 선택되는 것을 특징으로 하는 방법.
- 제 30 항에 있어서, 상기 조성물은 용매계와, 상기 용매계에 분산 또는 용해된 중합체를 포함하고, 상기 중합체는 중합체성 금속 알콕사이드를 유기 화합물과 반응시킴으로써 형성되고, 상기 중합체성 금속 알콕사이드는 하기 화학식을 갖는 반복 단위체들을 포함하고, 상기 유기 화합물은 상기 중합체성 금속 알콕사이드의 M과의 배위를 위한 작용기를 포함하는 것을 특징으로 하는 방법:상기 식에서,M은 금속이고, 각각의 L은 디케토 및 알콕사이드 리간드로 구성되는 군에서 선택된다.
- 제 30 항에 있어서, 상기 조성물은 용매계와, 상기 용매계에 분산 또는 용해된 중합체를 포함하고, 상기 중합체는 하기 화학식을 갖는 반복 단위체들을 포함하는 것을 특징으로 하는 방법:상기 식에서,X는 광감쇠 부분이고, M은 금속이고, 각각의 R은 수소, 알킬, 아릴, 알콕시 및 페녹시로 구성되는 군에서 선택된다.
- 집적 회로 선구 구조체를 형성하는 방법으로서,기판상에 조성물의 코팅층을 형성하는 단계와;상기 코팅층에 포토레지스트를 도포하여 상기 코팅층상에 포토레지스트 층을 형성하는 단계와;상기 포토레지스트 층 및 코팅층의 일부분을 선택적으로 제거하여 상기 기판상에 라인 피쳐를 형성하는 단계를 포함하며, 상기 라인 피쳐는 약 15% 이하의 부식율을 갖는 것을 특징으로 하는 방법.
- 제 36 항에 있어서, 상기 기판은 실리콘 웨이퍼 및 이온 주입층으로 구성되는 군에서 선택되는 것을 특징으로 하는 방법.
- 제 36 항에 있어서, 상기 제거 단계는 상기 부분을 수성 현상액으로 제거하는 것을 포함하는 것을 특징으로 하는 방법.
- 제 38 항에 있어서, 상기 수성 현탁액은 테트라메틸 암모늄 히드록사이드 및 KOH 현상액으로 구성되는 군에서 선택되는 것을 특징으로 하는 방법.
- 제 36 항에 있어서, 상기 조성물은 용매계와, 상기 용매계에 분산 또는 용해된 중합체를 포함하고, 상기 중합체는 중합체성 금속 알콕사이드를 유기 화합물과 반응시킴으로써 형성되고, 상기 중합체성 금속 알콕사이드는 하기 화학식을 갖는 반복 단위체들을 포함하고, 상기 유기 화합물은 상기 중합체성 금속 알콕사이드의 M과의 배위를 위한 작용기를 포함하는 것을 특징으로 하는 방법:상기 식에서,M은 금속이고, 각각의 L은 디케토 및 알콕사이드 리간드로 구성되는 군에서 선택된다.
- 제 36 항에 있어서, 상기 조성물은 용매계와, 상기 용매계에 분산 또는 용해된 중합체를 포함하고, 상기 중합체는 하기 화학식을 갖는 반복 단위체들을 포함하는 것을 특징으로 하는 방법:상기 식에서,X는 광감쇠 부분이고, M은 금속이고, 각각의 R은 수소, 알킬, 아릴, 알콕시 및 페녹시로 구성되는 군에서 선택된다.
- 제 36 항에 있어서, 상기 라인 피쳐는 약 83-90°의 각도 "a"를 갖는 것을 특징으로 하는 방법.
- 포토리소그래피 공정에서 조성물을 사용하는 방법으로서, 상기 방법은 기판에 다량의 조성물을 도포하여 층을 형성하는 단계를 포함하고, 상기 조성물은 용매계와, 상기 용매계에 분산 또는 용해된 중합체를 포함하고, 상기 중합체는 하기 화학식을 갖는 반복 단위체들을 포함하는 것을 특징으로 하는 방법:상기 식에서,X는 광감쇠 부분이고, M은 금속이고, 각각의 R은 수소, 알킬, 아릴, 알콕시 및 페녹시로 구성되는 군에서 선택된다.
- 제 43 항에 있어서, 상기 도포 단계는 상기 기판 표면상에 상기 조성물을 스핀 코팅하는 것을 포함하는 것을 특징으로 하는 방법.
- 제 43 항에 있어서, 상기 기판은 홀이 형성되어 있으며, 상기 홀은 바닥벽과 측벽에 의해 한정되고, 상기 도포 단계는 상기 바닥벽 및 측벽의 최소한 일부분에 상기 조성물을 도포하는 것을 포함하는 것을 특징으로 하는 방법.
- 제 43 항에 있어서, 상기 도포 단계 후, 상기 층을 약 100-250 ℃의 온도로 베이킹하여 경화된 층을 얻는 단계를 추가로 포함하는 것을 특징으로 하는 방법.
- 제 46 항에 있어서, 상기 베이킹된 층에 포토레지스트를 도포하는 단계를 추가로 포함하는 것을 특징으로 하는 방법.
- 제 47 항에 있어서, 상기 포토레지스트의 최소한 일부분을 활성화 방사선에 노광하는 단계와; 상기 노광된 포토레지스트를 현상하는 단계를 추가로 포함하는 것을 특징으로 하는 방법.
- 제 48 항에 있어서, 상기 현상 단계에 의하여, 상기 노광된 포토레지스트에 이웃한 영역으로부터 상기 조성물이 제거되는 것을 특징으로 하는 방법.
- 포토리소그래피 공정에서 조성물을 사용하는 방법으로서, 상기 방법은 기판에 다량의 조성물을 도포하여 층을 형성하는 단계를 포함하고, 상기 조성물은 용매계와, 상기 용매계에 분산 또는 용해된 중합체를 포함하고, 상기 중합체는 중합체성 금속 알콕사이드를 유기 화합물과 반응시킴으로써 형성되고, 상기 중합체성 금속 알콕사이드는 하기 화학식을 갖는 반복 단위체들을 포함하고, 상기 유기 화합물은 상기 중합체성 금속 알콕사이드의 M과의 배위를 위한 작용기를 포함하는 것을 특징으로 하는 방법:상기 식에서,M은 금속이고, 각각의 L은 디케토 및 알콕사이드 리간드로 구성되는 군에서 선택된다.
- 제 50 항에 있어서, 상기 도포 단계는 상기 기판 표면상에 상기 조성물을 스핀 코팅하는 것을 포함하는 것을 특징으로 하는 방법.
- 제 50 항에 있어서, 상기 기판은 홀이 형성되어 있으며, 상기 홀은 바닥벽과 측벽에 의해 한정되고, 상기 도포 단계는 상기 바닥벽 및 측벽의 최소한 일부분에 상기 조성물을 도포하는 것을 포함하는 것을 특징으로 하는 방법.
- 제 50 항에 있어서, 상기 도포 단계 후, 상기 층을 약 100-250 ℃의 온도로 베이킹하여 경화된 층을 얻는 단계를 추가로 포함하는 것을 특징으로 하는 방법.
- 제 53 항에 있어서, 상기 베이킹된 층에 포토레지스트를 도포하는 단계를 추가로 포함하는 것을 특징으로 하는 방법.
- 제 54 항에 있어서, 상기 포토레지스트의 최소한 일부분을 활성화 방사선에 노광하는 단계와; 상기 노광된 포토레지스트를 현상하는 단계를 추가로 포함하는 것을 특징으로 하는 방법.
- 제 55 항에 있어서, 상기 현상 단계에 의하여, 상기 노광된 포토레지스트에 이웃한 영역으로부터 상기 조성물이 제거되는 것을 특징으로 하는 방법.
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PCT/US2003/019457 WO2004001502A1 (en) | 2002-06-25 | 2003-06-18 | Developer-soluble metal alkoxide coatings for microelectronic applications |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20140061381A (ko) * | 2011-07-07 | 2014-05-21 | 브레우어 사이언스 인코포레이션 | 리소그래피 도포를 위한 소형 분자로부터의 금속-산화물 필름 |
KR20190101296A (ko) * | 2018-02-22 | 2019-08-30 | 신에쓰 가가꾸 고교 가부시끼가이샤 | 레지스트 재료 및 패턴 형성 방법 |
Families Citing this family (47)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6872506B2 (en) * | 2002-06-25 | 2005-03-29 | Brewer Science Inc. | Wet-developable anti-reflective compositions |
US7108958B2 (en) * | 2002-07-31 | 2006-09-19 | Brewer Science Inc. | Photosensitive bottom anti-reflective coatings |
US20040171743A1 (en) * | 2003-01-21 | 2004-09-02 | Terry Brewer, Ph.D. | Hybrid organic-inorganic polymer coatings with high refractive indices |
US7364832B2 (en) * | 2003-06-11 | 2008-04-29 | Brewer Science Inc. | Wet developable hard mask in conjunction with thin photoresist for micro photolithography |
US7364835B2 (en) * | 2003-10-15 | 2008-04-29 | Brewer Science Inc. | Developer-soluble materials and methods of using the same in via-first dual damascene applications |
US20050255410A1 (en) * | 2004-04-29 | 2005-11-17 | Guerrero Douglas J | Anti-reflective coatings using vinyl ether crosslinkers |
US20070207406A1 (en) * | 2004-04-29 | 2007-09-06 | Guerrero Douglas J | Anti-reflective coatings using vinyl ether crosslinkers |
JP4793583B2 (ja) * | 2004-10-14 | 2011-10-12 | 日産化学工業株式会社 | 金属酸化物を含むリソグラフィー用下層膜形成組成物 |
US7914974B2 (en) | 2006-08-18 | 2011-03-29 | Brewer Science Inc. | Anti-reflective imaging layer for multiple patterning process |
US8168372B2 (en) * | 2006-09-25 | 2012-05-01 | Brewer Science Inc. | Method of creating photolithographic structures with developer-trimmed hard mask |
WO2009097436A2 (en) | 2008-01-29 | 2009-08-06 | Brewer Science Inc. | On-track process for patterning hardmask by multiple dark field exposures |
US20090325106A1 (en) * | 2008-06-27 | 2009-12-31 | Conley Willard E | Method for Implant Imaging with Spin-on Hard Masks |
US9640396B2 (en) | 2009-01-07 | 2017-05-02 | Brewer Science Inc. | Spin-on spacer materials for double- and triple-patterning lithography |
JP5400134B2 (ja) * | 2009-03-19 | 2014-01-29 | 昭和電工株式会社 | 放電ギャップ充填用組成物および静電放電保護体 |
CN102473772A (zh) * | 2009-07-15 | 2012-05-23 | 日本发条株式会社 | 太阳能电池用背面保护片及其制造方法 |
WO2012133597A1 (ja) * | 2011-03-30 | 2012-10-04 | Jsr株式会社 | 多層レジストプロセスパターン形成方法及び多層レジストプロセス用無機膜形成組成物 |
JP5825177B2 (ja) * | 2011-03-30 | 2015-12-02 | Jsr株式会社 | 多層レジストプロセス用無機膜形成組成物及びパターン形成方法 |
US8568958B2 (en) * | 2011-06-21 | 2013-10-29 | Az Electronic Materials Usa Corp. | Underlayer composition and process thereof |
JP5650086B2 (ja) | 2011-06-28 | 2015-01-07 | 信越化学工業株式会社 | レジスト下層膜形成用組成物、及びパターン形成方法 |
JP5889568B2 (ja) | 2011-08-11 | 2016-03-22 | メルク、パテント、ゲゼルシャフト、ミット、ベシュレンクテル、ハフツングMerck Patent GmbH | 酸化タングステン膜形成用組成物およびそれを用いた酸化タングステン膜の製造法 |
KR102061919B1 (ko) | 2011-11-21 | 2020-01-02 | 브레우어 사이언스 인코포레이션 | Euv 리소그래피용 보조층 |
JP5882776B2 (ja) | 2012-02-14 | 2016-03-09 | 信越化学工業株式会社 | レジスト下層膜形成用組成物、及びパターン形成方法 |
JP5739360B2 (ja) | 2012-02-14 | 2015-06-24 | 信越化学工業株式会社 | ケイ素含有レジスト下層膜形成用組成物、及びパターン形成方法 |
US9070548B2 (en) | 2012-03-06 | 2015-06-30 | Rohm And Haas Electronic Materials Llc | Metal hardmask compositions |
US8795774B2 (en) | 2012-09-23 | 2014-08-05 | Rohm And Haas Electronic Materials Llc | Hardmask |
US9315636B2 (en) | 2012-12-07 | 2016-04-19 | Az Electronic Materials (Luxembourg) S.A.R.L. | Stable metal compounds, their compositions and methods |
JP5756134B2 (ja) | 2013-01-08 | 2015-07-29 | 信越化学工業株式会社 | 金属酸化物含有膜形成用組成物及びパターン形成方法 |
US9171720B2 (en) * | 2013-01-19 | 2015-10-27 | Rohm And Haas Electronic Materials Llc | Hardmask surface treatment |
US9136123B2 (en) | 2013-01-19 | 2015-09-15 | Rohm And Haas Electronic Materials Llc | Hardmask surface treatment |
JP5830044B2 (ja) | 2013-02-15 | 2015-12-09 | 信越化学工業株式会社 | レジスト下層膜形成用組成物及びパターン形成方法 |
US8759220B1 (en) | 2013-02-28 | 2014-06-24 | Shin-Etsu Chemical Co., Ltd. | Patterning process |
JP6189758B2 (ja) | 2013-03-15 | 2017-08-30 | 信越化学工業株式会社 | チタン含有レジスト下層膜形成用組成物及びパターン形成方法 |
JP5830048B2 (ja) * | 2013-03-15 | 2015-12-09 | 信越化学工業株式会社 | チタン含有レジスト下層膜形成用組成物及びパターン形成方法 |
WO2014156374A1 (ja) * | 2013-03-25 | 2014-10-02 | Jsr株式会社 | 多層レジストプロセス用無機膜形成組成物及びパターン形成方法 |
US9201305B2 (en) | 2013-06-28 | 2015-12-01 | Az Electronic Materials (Luxembourg) S.A.R.L. | Spin-on compositions of soluble metal oxide carboxylates and methods of their use |
US9296922B2 (en) | 2013-08-30 | 2016-03-29 | Az Electronic Materials (Luxembourg) S.A.R.L. | Stable metal compounds as hardmasks and filling materials, their compositions and methods of use |
US9296879B2 (en) | 2013-09-03 | 2016-03-29 | Rohm And Haas Electronic Materials Llc | Hardmask |
WO2015037398A1 (ja) * | 2013-09-11 | 2015-03-19 | Jsr株式会社 | 多層レジストプロセス用無機膜形成組成物及びパターン形成方法 |
US9409793B2 (en) | 2014-01-14 | 2016-08-09 | Az Electronic Materials (Luxembourg) S.A.R.L. | Spin coatable metallic hard mask compositions and processes thereof |
JP6399083B2 (ja) | 2014-03-12 | 2018-10-03 | Jsr株式会社 | 多層レジストプロセス用組成物および該多層レジストプロセス用組成物を用いたパターン形成方法 |
JP6165805B2 (ja) * | 2014-07-04 | 2017-07-19 | 富士フイルム株式会社 | 硬化性組成物、硬化膜の製造方法、硬化膜、並びに、タッチパネル及び表示装置 |
JP6141902B2 (ja) * | 2014-07-04 | 2017-06-07 | 富士フイルム株式会社 | 硬化性組成物、硬化膜の製造方法、硬化膜、タッチパネル及び表示装置 |
US9515272B2 (en) | 2014-11-12 | 2016-12-06 | Rohm And Haas Electronic Materials Llc | Display device manufacture using a sacrificial layer interposed between a carrier and a display device substrate |
US9499698B2 (en) | 2015-02-11 | 2016-11-22 | Az Electronic Materials (Luxembourg)S.A.R.L. | Metal hardmask composition and processes for forming fine patterns on semiconductor substrates |
JP6439520B2 (ja) * | 2015-03-16 | 2018-12-19 | Jsr株式会社 | 半導体デバイス製造用組成物及び加工基板の製造方法 |
US9442377B1 (en) | 2015-06-15 | 2016-09-13 | Rohm And Haas Electronic Materials Llc | Wet-strippable silicon-containing antireflectant |
TWI755564B (zh) | 2017-09-06 | 2022-02-21 | 德商馬克專利公司 | 含有旋轉塗佈無機氧化物的組合物、製造電子裝置之方法以及在矽基板上塗佈硬遮罩組合物之方法 |
Family Cites Families (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3949463A (en) * | 1973-02-13 | 1976-04-13 | Communications Satellite Corporation (Comsat) | Method of applying an anti-reflective coating to a solar cell |
JPS5936955B2 (ko) * | 1977-09-12 | 1984-09-06 | Sumitomo Chemical Co | |
US4244799A (en) | 1978-09-11 | 1981-01-13 | Bell Telephone Laboratories, Incorporated | Fabrication of integrated circuits utilizing thick high-resolution patterns |
US4369090A (en) * | 1980-11-06 | 1983-01-18 | Texas Instruments Incorporated | Process for etching sloped vias in polyimide insulators |
US4910122A (en) * | 1982-09-30 | 1990-03-20 | Brewer Science, Inc. | Anti-reflective coating |
JPH0612452B2 (ja) * | 1982-09-30 | 1994-02-16 | ブリュ−ワ−・サイエンス・インコ−ポレイテッド | 集積回路素子の製造方法 |
JPH0443264B2 (ko) | 1984-06-11 | 1992-07-16 | Nippon Telegraph & Telephone | |
US4683024A (en) | 1985-02-04 | 1987-07-28 | American Telephone And Telegraph Company, At&T Bell Laboratories | Device fabrication method using spin-on glass resins |
US4732841A (en) | 1986-03-24 | 1988-03-22 | Fairchild Semiconductor Corporation | Tri-level resist process for fine resolution photolithography |
JPS63165435A (en) * | 1986-12-27 | 1988-07-08 | Nippon Steel Corp | Production of organometallic polymer composition |
US4891303A (en) | 1988-05-26 | 1990-01-02 | Texas Instruments Incorporated | Trilayer microlithographic process using a silicon-based resist as the middle layer |
US5126231A (en) | 1990-02-26 | 1992-06-30 | Applied Materials, Inc. | Process for multi-layer photoresist etching with minimal feature undercut and unchanging photoresist load during etch |
JP3041972B2 (ja) | 1991-01-10 | 2000-05-15 | 富士通株式会社 | 半導体装置の製造方法 |
US5370969A (en) | 1992-07-28 | 1994-12-06 | Sharp Kabushiki Kaisha | Trilayer lithographic process |
JPH07183194A (ja) | 1993-12-24 | 1995-07-21 | Sony Corp | 多層レジストパターン形成方法 |
KR100206597B1 (ko) | 1995-12-29 | 1999-07-01 | 김영환 | 반도체 장치의 미세패턴 제조방법 |
KR100223329B1 (ko) | 1995-12-29 | 1999-10-15 | 김영환 | 반도체 소자의 미세 패턴 제조방법 |
US5652317A (en) * | 1996-08-16 | 1997-07-29 | Hoechst Celanese Corporation | Antireflective coatings for photoresist compositions |
JPH10149531A (ja) * | 1996-11-15 | 1998-06-02 | Sony Corp | 磁気記録媒体及びその製造方法 |
JP3680469B2 (ja) * | 1997-01-24 | 2005-08-10 | Jsr株式会社 | 硬化性組成物 |
JPH11258813A (ja) * | 1998-03-13 | 1999-09-24 | Jsr Corp | 反射防止膜形成用組成物および反射防止膜 |
US6156665A (en) | 1998-04-13 | 2000-12-05 | Lucent Technologies Inc. | Trilayer lift-off process for semiconductor device metallization |
JP3673399B2 (ja) * | 1998-06-03 | 2005-07-20 | クラリアント インターナショナル リミテッド | 反射防止コーティング用組成物 |
JP2000010293A (ja) | 1998-06-17 | 2000-01-14 | Jsr Corp | 反射防止膜形成用組成物および反射防止膜 |
US6380611B1 (en) * | 1998-09-03 | 2002-04-30 | Micron Technology, Inc. | Treatment for film surface to reduce photo footing |
US6136511A (en) | 1999-01-20 | 2000-10-24 | Micron Technology, Inc. | Method of patterning substrates using multilayer resist processing |
US6303270B1 (en) * | 1999-03-01 | 2001-10-16 | The Curators Of The University Of Missouri | Highly plasma etch-resistant photoresist composition containing a photosensitive polymeric titania precursor |
JP2003502449A (ja) * | 1999-06-10 | 2003-01-21 | ハネウエル・インターナシヨナル・インコーポレーテツド | フォトリソグラフィ用スピンオンガラス反射防止コーティング |
US6632535B1 (en) * | 2000-06-08 | 2003-10-14 | Q2100, Inc. | Method of forming antireflective coatings |
JP4868639B2 (ja) * | 2000-06-12 | 2012-02-01 | 株式会社Adeka | 化学気相成長用原料及びこれを用いた薄膜の製造方法 |
JP2003238573A (ja) * | 2002-02-18 | 2003-08-27 | Toray Ind Inc | 有機金属化合物を含む組成物ならびにディスプレイ部材およびディスプレイ |
-
2002
- 2002-06-25 US US10/180,625 patent/US6740469B2/en active Active
-
2003
- 2003-06-06 TW TW092115340A patent/TWI303014B/zh active
- 2003-06-18 KR KR1020047021093A patent/KR101051617B1/ko active IP Right Grant
- 2003-06-18 CN CNB038151987A patent/CN100435026C/zh active Active
- 2003-06-18 EP EP03739224.8A patent/EP1516226B1/en not_active Not-in-force
- 2003-06-18 JP JP2004516000A patent/JP4550573B2/ja active Active
- 2003-06-18 WO PCT/US2003/019457 patent/WO2004001502A1/en active Application Filing
- 2003-06-18 AU AU2003245596A patent/AU2003245596A1/en not_active Abandoned
- 2003-06-18 EP EP11004386.6A patent/EP2375288B1/en not_active Not-in-force
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2010
- 2010-05-06 JP JP2010106668A patent/JP5023183B2/ja active Active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20140061381A (ko) * | 2011-07-07 | 2014-05-21 | 브레우어 사이언스 인코포레이션 | 리소그래피 도포를 위한 소형 분자로부터의 금속-산화물 필름 |
KR20190101296A (ko) * | 2018-02-22 | 2019-08-30 | 신에쓰 가가꾸 고교 가부시끼가이샤 | 레지스트 재료 및 패턴 형성 방법 |
Also Published As
Publication number | Publication date |
---|---|
EP1516226B1 (en) | 2016-03-16 |
EP1516226A1 (en) | 2005-03-23 |
EP1516226A4 (en) | 2010-02-17 |
JP2005537502A (ja) | 2005-12-08 |
US6740469B2 (en) | 2004-05-25 |
EP2375288A2 (en) | 2011-10-12 |
TWI303014B (en) | 2008-11-11 |
JP2010224554A (ja) | 2010-10-07 |
AU2003245596A1 (en) | 2004-01-06 |
CN1666146A (zh) | 2005-09-07 |
CN100435026C (zh) | 2008-11-19 |
JP5023183B2 (ja) | 2012-09-12 |
JP4550573B2 (ja) | 2010-09-22 |
WO2004001502A1 (en) | 2003-12-31 |
TW200401166A (en) | 2004-01-16 |
EP2375288B1 (en) | 2014-10-22 |
KR101051617B1 (ko) | 2011-07-26 |
EP2375288A3 (en) | 2012-09-05 |
US20030235786A1 (en) | 2003-12-25 |
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