KR20050024385A - 마이크로 전자 소자 제조용 현상액-가용성 금속알콕사이드 코팅 조성물 - Google Patents
마이크로 전자 소자 제조용 현상액-가용성 금속알콕사이드 코팅 조성물 Download PDFInfo
- Publication number
- KR20050024385A KR20050024385A KR10-2004-7021093A KR20047021093A KR20050024385A KR 20050024385 A KR20050024385 A KR 20050024385A KR 20047021093 A KR20047021093 A KR 20047021093A KR 20050024385 A KR20050024385 A KR 20050024385A
- Authority
- KR
- South Korea
- Prior art keywords
- composition
- solvent
- layer
- metal
- polymer
- Prior art date
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- 229910052751 metal Inorganic materials 0.000 title claims abstract description 49
- 239000002184 metal Substances 0.000 title claims abstract description 49
- 150000004703 alkoxides Chemical class 0.000 title claims description 32
- 238000004377 microelectronic Methods 0.000 title description 3
- 239000000203 mixture Substances 0.000 claims abstract description 100
- 229920000642 polymer Polymers 0.000 claims abstract description 39
- 239000002904 solvent Substances 0.000 claims abstract description 31
- 238000000034 method Methods 0.000 claims abstract description 13
- 125000003545 alkoxy group Chemical group 0.000 claims abstract description 11
- 125000000217 alkyl group Chemical group 0.000 claims abstract description 11
- 125000003118 aryl group Chemical group 0.000 claims abstract description 11
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 11
- 239000001257 hydrogen Substances 0.000 claims abstract description 11
- 125000000951 phenoxy group Chemical group 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- 239000010703 silicon Substances 0.000 claims description 11
- 239000011247 coating layer Substances 0.000 claims description 9
- RGHHSNMVTDWUBI-UHFFFAOYSA-N 4-Hydroxybenzaldehyde Chemical compound 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OC1=CC=C(C=O)C=C1 RGHHSNMVTDWUBI-UHFFFAOYSA-N 0.000 claims description 8
- WGTYBPLFGIVFAS-UHFFFAOYSA-M Tetramethylammonium hydroxide Chemical compound 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[OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 claims description 8
- 230000027455 binding Effects 0.000 claims description 8
- 239000003446 ligand Substances 0.000 claims description 8
- XYIBRDXRRQCHLP-UHFFFAOYSA-N Ethyl acetoacetate Chemical compound 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CCOC(=O)CC(C)=O XYIBRDXRRQCHLP-UHFFFAOYSA-N 0.000 claims description 6
- LLHKCFNBLRBOGN-UHFFFAOYSA-N Propylene glycol methyl ether acetate Chemical compound 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COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 claims description 6
- 238000005260 corrosion Methods 0.000 claims description 6
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 CCOC(=O)C(C#N)=CC1=CC=C(O)C=C1 HRBVVSOFSLPAOY-UHFFFAOYSA-N 0.000 claims description 5
- 125000002915 carbonyl group Chemical group 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[*:2]C([*:1])=O 0.000 claims description 4
- 238000005468 ion implantation Methods 0.000 claims description 4
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol Chemical compound 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OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 claims description 4
- KWYUFKZDYYNOTN-UHFFFAOYSA-M potassium hydroxide Inorganic materials data:image/svg+xml;base64,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 data:image/svg+xml;base64,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 [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 claims description 4
- 229910052719 titanium Inorganic materials 0.000 claims description 4
- 229910052726 zirconium Inorganic materials 0.000 claims description 4
- 239000004593 Epoxy Substances 0.000 claims description 3
- 230000003213 activating Effects 0.000 claims description 3
- 150000001875 compounds Chemical class 0.000 claims description 3
- 125000003700 epoxy group Chemical group 0.000 claims description 3
- 229920003986 novolac Polymers 0.000 claims description 3
- OZAIFHULBGXAKX-UHFFFAOYSA-N precursor Substances 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N#CC(C)(C)N=NC(C)(C)C#N OZAIFHULBGXAKX-UHFFFAOYSA-N 0.000 claims description 3
- 238000004528 spin coating Methods 0.000 claims description 3
- QYKIQEUNHZKYBP-UHFFFAOYSA-N vinyl ether Chemical class 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COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 6
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- LZCLXQDLBQLTDK-UHFFFAOYSA-N Ethyl lactate Chemical compound 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CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 description 2
- MWOOGOJBHIARFG-UHFFFAOYSA-N Vanillin Chemical compound 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Abstract
Description
실시예 번호 | 굴절율 |
2 | 1.99 |
3 | 1.68 |
4 | 1.75 |
실시예 번호 | 용매 | 스트리핑 전의 두께 (Å) | 스트리핑 후의 두께 (Å) | 용해도% | 스핀 보울 상용성 |
2 | PGMEAa | 1273 | 31 | 97.56 | 있음 |
2 | 에틸 락테이트 | 1277 | 21 | 98.35 | 있음 |
2 | 헵타논 | 1276 | 48 | 96.24 | 있음 |
Claims (56)
- 포토리소그래피 공정에서 사용하기 위한 조성물로서, 상기 조성물은 용매계와, 상기 용매계에 분산 또는 용해된 중합체를 포함하고, 상기 중합체는 하기 화학식을 갖는 반복 단위체들을 포함하는 것을 특징으로 하는 조성물:상기 식에서,X는 광감쇠 부분이고, M은 금속이고, 각각의 R은 수소, 알킬, 아릴, 알콕시 및 페녹시로 구성되는 군에서 선택된다.
- 제 1 항에 있어서, 상기 중합체는 하기 화학식을 갖는 반복 단위체들을 추가로 포함하는 것을 특징으로 하는 조성물:상기 식에서,각각의 R1은 수소, 알킬, 아릴, 알콕시 및 페녹시로 구성되는 군에서 선택되고, M1은 금속이다.
- 제 1 항에 있어서, 각각의 반복 단위체에서의 M은 Ti, Zr, Si, 및 Al로 구성되는 군에서 선택되는 금속인 것을 특징으로 하는 조성물.
- 제 1 항에 있어서, 중합체 바인더를 추가로 포함하는 것을 특징으로 하는 조성물.
- 제 4 항에 있어서, 상기 중합체 바인더는 에폭시 노볼락 수지, 아크릴레이트, 중합된 아미노플라스트, 글리코우랄, 비닐 에테르, 및 이들의 혼합물로 구성되는 군에서 선택되는 것을 특징으로 하는 조성물.
- 제 4 항에 있어서, 상기 중합체 바인더는 분자량이 약 1,000 내지 약 50,000 인 것을 특징으로 하는 조성물.
- 제 1 항에 있어서, X는 M과의 배위를 위한 작용기를 포함하는 것을 특징으로 하는 조성물.
- 제 7 항에 있어서, 상기 작용기는 카르보닐, 알콜 및 페놀로 구성되는 군에서 선택되는 것을 특징으로 하는 조성물.
- 제 1 항에 있어서, 상기 X가 트리메틸올 에톡시레이트, 4-히드록시벤즈알데히드, 및 2-시아노-3-(4-히드록시페닐)-아크릴산 에틸 에스테르의 작용성 부분으로 구성되는 군에서 선택되는 것을 특징으로 하는 조성물.
- 제 1 항에 있어서, X 및 R은 각각 어떠한 에틸렌계 불포화기를 포함하지 않는 것을 특징으로 하는 조성물.
- 제 1 항에 있어서, 하나의 R이 -CH3이고, 다른 하나의 R이 -OC2H5인 것을 특징으로 하는 조성물.
- 포토리소그래피 공정에서 사용하기 위한 조성물로서, 상기 조성물은 용매계와, 상기 용매계에 분산 또는 용해된 중합체를 포함하고, 상기 중합체는 중합체성 금속 알콕사이드를 유기 화합물과 반응시킴으로써 형성되고, 상기 중합체성 금속 알콕사이드는 하기 화학식을 갖는 반복 단위체들을 포함하고, 상기 유기 화합물은 상기 중합체성 금속 알콕사이드의 M과의 배위를 위한 작용기를 포함하는 것을 특징으로 하는 조성물:상기 식에서,M은 금속이고, 각각의 L은 디케토 및 알콕사이드 리간드로 구성되는 군에서 선택된다.
- 제 12 항에 있어서, 각각의 반복 단위체에서의 M은 Ti, Zr, Si, 및 Al로 구성되는 군에서 선택되는 금속인 것을 특징으로 하는 조성물.
- 제 12 항에 있어서, 중합체 바인더를 추가로 포함하는 것을 특징으로 하는 조성물.
- 제 14 항에 있어서, 상기 중합체 바인더는 에폭시 노볼락 수지, 아크릴레이트, 중합된 아미노플라스트, 글리코우랄, 비닐 에테르, 및 이들의 혼합물로 구성되는 군에서 선택되는 것을 특징으로 하는 조성물.
- 제 14 항에 있어서, 상기 중합체 바인더는 분자량이 약 1,000 내지 약 50,000 인 것을 특징으로 하는 조성물.
- 제 12 항에 있어서, 각각의 L이 하기 화학식을 갖는 것을 특징으로 하는 조성물:상기 식에서,각각의 R은 수소, 알킬, 아릴, 알콕시 및 페녹시로 구성되는 군에서 선택된다.
- 제 1 항에 있어서, 하나 이상의 L이 에틸 아세토아세테이트의 부분인 것을 특징으로 하는 조성물.
- 제 17 항에 있어서, 하나의 R이 -CH3이고, 다른 하나의 R이 -OC2H5인 것을 특징으로 하는 조성물.
- 제 12 항에 있어서, 상기 작용기는 알콜, 페놀 및 카르보닐기로 구성되는 군에서 선택되는 것을 특징으로 하는 조성물.
- 제 12 항에 있어서, 상기 유기 화합물이 트리메틸올 에톡시레이트, 4-히드록시벤즈알데히드, 및 2-시아노-3-(4-히드록시페닐)-아크릴산 에틸 에스테르로 구성되는 군에서 선택되는 것을 특징으로 하는 조성물.
- 표면을 갖는 기판과, 포토리소그래피 공정에서 장벽 또는 반사방지층으로 사용하기 위한 경화된 층의 결합체(combination)로서, 상기 경화된 층은 상기 표면에 이웃하여 위치하고, 금속 원자와 수소 원자 결합이 번갈아 있고, 약 1.4 이상의 굴절율을 가지며, 습식 현상가능한 것을 특징으로 하는 결합체.
- 제 22 항에 있어서, 상기 경화된 층은 프로필렌 글리콜 메틸 에테르 아세테이트가 용매인 경우 약 75% 이상의 용해도%를 갖는 것을 특징으로 하는 결합체.
- 제 22 항에 있어서, 상기 기판은 실리콘 웨이퍼 및 이온 주입층으로 구성되는 군에서 선택되는 것을 특징으로 하는 결합체.
- 제 22 항에 있어서, 상기 경화된 층에 이웃한 포토레지스트 층을 추가로 포함하는 것을 특징으로 하는 결합체.
- 제 22 항에 있어서, 각각의 금속 원자는 Ti, Zr, Si, 및 Al로 구성되는 군에서 선택되는 금속인 것을 특징으로 하는 조성물.
- 제 22 항에 있어서, 상기 경화된 층은 용매계와, 상기 용매계에 분산 또는 용해된 중합체를 포함하는 조성물로 형성되고, 상기 중합체는 하기 화학식을 갖는 반복 단위체들을 포함하는 것을 특징으로 하는 조성물:상기 식에서,X는 광감쇠 부분이고, M은 금속이고, 각각의 R은 수소, 알킬, 아릴, 알콕시 및 페녹시로 구성되는 군에서 선택된다.
- 제 22 항에 있어서, 상기 경화된 층은 용매계와, 상기 용매계에 분산 또는 용해된 중합체를 포함하는 조성물로 형성되고, 상기 중합체는 중합체성 금속 알콕사이드를 유기 화합물과 반응시킴으로써 형성되고, 상기 중합체성 금속 알콕사이드는 하기 화학식을 갖는 반복 단위체들을 포함하고, 상기 유기 화합물은 상기 중합체성 금속 알콕사이드의 M과의 배위를 위한 작용기를 포함하는 것을 특징으로 하는 결합체:상기 식에서,M은 금속이고, 각각의 L은 디케토 및 알콕사이드 리간드로 구성되는 군에서 선택된다.
- 제 22 항에 있어서, 상기 경화된 층은 베이스 현상액에서 약 95% 이상 가용성인 것을 특징으로 하는 결합체.
- 집적 회로 선구 구조체를 형성하는 방법으로서,기판상에 조성물의 코팅층을 형성하는 단계와;상기 코팅층에 포토레지스트를 도포하여 상기 코팅층상에 포토레지스트 층을 형성하는 단계와;상기 포토레지스트 층 및 코팅층의 일부분을 선택적으로 제거하여 상기 기판상에 라인 피쳐를 형성하는 단계를 포함하며, 상기 라인 피쳐는 약 83-90°의 각도 "a"를 갖는 것을 특징으로 하는 방법.
- 제 30 항에 있어서, 상기 기판은 실리콘 웨이퍼 및 이온 주입층으로 구성되는 군에서 선택되는 것을 특징으로 하는 방법.
- 제 30 항에 있어서, 상기 제거 단계는 상기 부분을 수성 현상액으로 제거하는 것을 포함하는 것을 특징으로 하는 방법.
- 제 32 항에 있어서, 상기 수성 현탁액은 테트라메틸 암모늄 히드록사이드 및 KOH 현상액으로 구성되는 군에서 선택되는 것을 특징으로 하는 방법.
- 제 30 항에 있어서, 상기 조성물은 용매계와, 상기 용매계에 분산 또는 용해된 중합체를 포함하고, 상기 중합체는 중합체성 금속 알콕사이드를 유기 화합물과 반응시킴으로써 형성되고, 상기 중합체성 금속 알콕사이드는 하기 화학식을 갖는 반복 단위체들을 포함하고, 상기 유기 화합물은 상기 중합체성 금속 알콕사이드의 M과의 배위를 위한 작용기를 포함하는 것을 특징으로 하는 방법:상기 식에서,M은 금속이고, 각각의 L은 디케토 및 알콕사이드 리간드로 구성되는 군에서 선택된다.
- 제 30 항에 있어서, 상기 조성물은 용매계와, 상기 용매계에 분산 또는 용해된 중합체를 포함하고, 상기 중합체는 하기 화학식을 갖는 반복 단위체들을 포함하는 것을 특징으로 하는 방법:상기 식에서,X는 광감쇠 부분이고, M은 금속이고, 각각의 R은 수소, 알킬, 아릴, 알콕시 및 페녹시로 구성되는 군에서 선택된다.
- 집적 회로 선구 구조체를 형성하는 방법으로서,기판상에 조성물의 코팅층을 형성하는 단계와;상기 코팅층에 포토레지스트를 도포하여 상기 코팅층상에 포토레지스트 층을 형성하는 단계와;상기 포토레지스트 층 및 코팅층의 일부분을 선택적으로 제거하여 상기 기판상에 라인 피쳐를 형성하는 단계를 포함하며, 상기 라인 피쳐는 약 15% 이하의 부식율을 갖는 것을 특징으로 하는 방법.
- 제 36 항에 있어서, 상기 기판은 실리콘 웨이퍼 및 이온 주입층으로 구성되는 군에서 선택되는 것을 특징으로 하는 방법.
- 제 36 항에 있어서, 상기 제거 단계는 상기 부분을 수성 현상액으로 제거하는 것을 포함하는 것을 특징으로 하는 방법.
- 제 38 항에 있어서, 상기 수성 현탁액은 테트라메틸 암모늄 히드록사이드 및 KOH 현상액으로 구성되는 군에서 선택되는 것을 특징으로 하는 방법.
- 제 36 항에 있어서, 상기 조성물은 용매계와, 상기 용매계에 분산 또는 용해된 중합체를 포함하고, 상기 중합체는 중합체성 금속 알콕사이드를 유기 화합물과 반응시킴으로써 형성되고, 상기 중합체성 금속 알콕사이드는 하기 화학식을 갖는 반복 단위체들을 포함하고, 상기 유기 화합물은 상기 중합체성 금속 알콕사이드의 M과의 배위를 위한 작용기를 포함하는 것을 특징으로 하는 방법:상기 식에서,M은 금속이고, 각각의 L은 디케토 및 알콕사이드 리간드로 구성되는 군에서 선택된다.
- 제 36 항에 있어서, 상기 조성물은 용매계와, 상기 용매계에 분산 또는 용해된 중합체를 포함하고, 상기 중합체는 하기 화학식을 갖는 반복 단위체들을 포함하는 것을 특징으로 하는 방법:상기 식에서,X는 광감쇠 부분이고, M은 금속이고, 각각의 R은 수소, 알킬, 아릴, 알콕시 및 페녹시로 구성되는 군에서 선택된다.
- 제 36 항에 있어서, 상기 라인 피쳐는 약 83-90°의 각도 "a"를 갖는 것을 특징으로 하는 방법.
- 포토리소그래피 공정에서 조성물을 사용하는 방법으로서, 상기 방법은 기판에 다량의 조성물을 도포하여 층을 형성하는 단계를 포함하고, 상기 조성물은 용매계와, 상기 용매계에 분산 또는 용해된 중합체를 포함하고, 상기 중합체는 하기 화학식을 갖는 반복 단위체들을 포함하는 것을 특징으로 하는 방법:상기 식에서,X는 광감쇠 부분이고, M은 금속이고, 각각의 R은 수소, 알킬, 아릴, 알콕시 및 페녹시로 구성되는 군에서 선택된다.
- 제 43 항에 있어서, 상기 도포 단계는 상기 기판 표면상에 상기 조성물을 스핀 코팅하는 것을 포함하는 것을 특징으로 하는 방법.
- 제 43 항에 있어서, 상기 기판은 홀이 형성되어 있으며, 상기 홀은 바닥벽과 측벽에 의해 한정되고, 상기 도포 단계는 상기 바닥벽 및 측벽의 최소한 일부분에 상기 조성물을 도포하는 것을 포함하는 것을 특징으로 하는 방법.
- 제 43 항에 있어서, 상기 도포 단계 후, 상기 층을 약 100-250 ℃의 온도로 베이킹하여 경화된 층을 얻는 단계를 추가로 포함하는 것을 특징으로 하는 방법.
- 제 46 항에 있어서, 상기 베이킹된 층에 포토레지스트를 도포하는 단계를 추가로 포함하는 것을 특징으로 하는 방법.
- 제 47 항에 있어서, 상기 포토레지스트의 최소한 일부분을 활성화 방사선에 노광하는 단계와; 상기 노광된 포토레지스트를 현상하는 단계를 추가로 포함하는 것을 특징으로 하는 방법.
- 제 48 항에 있어서, 상기 현상 단계에 의하여, 상기 노광된 포토레지스트에 이웃한 영역으로부터 상기 조성물이 제거되는 것을 특징으로 하는 방법.
- 포토리소그래피 공정에서 조성물을 사용하는 방법으로서, 상기 방법은 기판에 다량의 조성물을 도포하여 층을 형성하는 단계를 포함하고, 상기 조성물은 용매계와, 상기 용매계에 분산 또는 용해된 중합체를 포함하고, 상기 중합체는 중합체성 금속 알콕사이드를 유기 화합물과 반응시킴으로써 형성되고, 상기 중합체성 금속 알콕사이드는 하기 화학식을 갖는 반복 단위체들을 포함하고, 상기 유기 화합물은 상기 중합체성 금속 알콕사이드의 M과의 배위를 위한 작용기를 포함하는 것을 특징으로 하는 방법:상기 식에서,M은 금속이고, 각각의 L은 디케토 및 알콕사이드 리간드로 구성되는 군에서 선택된다.
- 제 50 항에 있어서, 상기 도포 단계는 상기 기판 표면상에 상기 조성물을 스핀 코팅하는 것을 포함하는 것을 특징으로 하는 방법.
- 제 50 항에 있어서, 상기 기판은 홀이 형성되어 있으며, 상기 홀은 바닥벽과 측벽에 의해 한정되고, 상기 도포 단계는 상기 바닥벽 및 측벽의 최소한 일부분에 상기 조성물을 도포하는 것을 포함하는 것을 특징으로 하는 방법.
- 제 50 항에 있어서, 상기 도포 단계 후, 상기 층을 약 100-250 ℃의 온도로 베이킹하여 경화된 층을 얻는 단계를 추가로 포함하는 것을 특징으로 하는 방법.
- 제 53 항에 있어서, 상기 베이킹된 층에 포토레지스트를 도포하는 단계를 추가로 포함하는 것을 특징으로 하는 방법.
- 제 54 항에 있어서, 상기 포토레지스트의 최소한 일부분을 활성화 방사선에 노광하는 단계와; 상기 노광된 포토레지스트를 현상하는 단계를 추가로 포함하는 것을 특징으로 하는 방법.
- 제 55 항에 있어서, 상기 현상 단계에 의하여, 상기 노광된 포토레지스트에 이웃한 영역으로부터 상기 조성물이 제거되는 것을 특징으로 하는 방법.
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US10/180,625 | 2002-06-25 | ||
US10/180,625 US6740469B2 (en) | 2002-06-25 | 2002-06-25 | Developer-soluble metal alkoxide coatings for microelectronic applications |
PCT/US2003/019457 WO2004001502A1 (en) | 2002-06-25 | 2003-06-18 | Developer-soluble metal alkoxide coatings for microelectronic applications |
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US (1) | US6740469B2 (ko) |
EP (2) | EP1516226B1 (ko) |
JP (2) | JP4550573B2 (ko) |
KR (1) | KR101051617B1 (ko) |
CN (1) | CN100435026C (ko) |
AU (1) | AU2003245596A1 (ko) |
TW (1) | TWI303014B (ko) |
WO (1) | WO2004001502A1 (ko) |
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2003
- 2003-06-06 TW TW92115340A patent/TWI303014B/zh active
- 2003-06-18 KR KR1020047021093A patent/KR101051617B1/ko active IP Right Grant
- 2003-06-18 CN CNB038151987A patent/CN100435026C/zh active IP Right Grant
- 2003-06-18 AU AU2003245596A patent/AU2003245596A1/en not_active Abandoned
- 2003-06-18 EP EP03739224.8A patent/EP1516226B1/en not_active Expired - Fee Related
- 2003-06-18 WO PCT/US2003/019457 patent/WO2004001502A1/en active Application Filing
- 2003-06-18 EP EP11004386.6A patent/EP2375288B1/en active Active
- 2003-06-18 JP JP2004516000A patent/JP4550573B2/ja active Active
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Cited By (1)
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KR20140061381A (ko) * | 2011-07-07 | 2014-05-21 | 브레우어 사이언스 인코포레이션 | 리소그래피 도포를 위한 소형 분자로부터의 금속-산화물 필름 |
Also Published As
Publication number | Publication date |
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KR101051617B1 (ko) | 2011-07-26 |
US20030235786A1 (en) | 2003-12-25 |
EP1516226B1 (en) | 2016-03-16 |
JP4550573B2 (ja) | 2010-09-22 |
CN1666146A (zh) | 2005-09-07 |
EP2375288B1 (en) | 2014-10-22 |
EP2375288A2 (en) | 2011-10-12 |
AU2003245596A1 (en) | 2004-01-06 |
EP1516226A1 (en) | 2005-03-23 |
WO2004001502A1 (en) | 2003-12-31 |
CN100435026C (zh) | 2008-11-19 |
JP5023183B2 (ja) | 2012-09-12 |
JP2005537502A (ja) | 2005-12-08 |
EP1516226A4 (en) | 2010-02-17 |
TW200401166A (en) | 2004-01-16 |
JP2010224554A (ja) | 2010-10-07 |
EP2375288A3 (en) | 2012-09-05 |
TWI303014B (en) | 2008-11-11 |
US6740469B2 (en) | 2004-05-25 |
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