KR200464096Y1

KR200464096Y1 - Clamp for vacuum pipe

Info

Publication number: KR200464096Y1
Application number: KR2020120004401U
Authority: KR
Inventors: 차보용
Original assignee: (주)보영테크
Priority date: 2012-05-24
Filing date: 2012-05-24
Publication date: 2012-12-11

Abstract

The present invention relates to a clamp for a vacuum pipe, and more particularly, to a clamp for connecting a vacuum pipe used in a semiconductor manufacturing process to each other, a vacuum that can firmly maintain the fastening state even by vibration or external impact of the vacuum pipe. It relates to a pipe clamp.
The present invention for this purpose in the washer that is fitted to the bolt portion to improve the tightening force of the tightening nut and the tightening nut constituting the clamping device, the tightening nut and the washer is tightened to the surface in close contact with each other when the clamp is completed Rotating bumps which are inclined upward and downward in the direction of tightening or loosening of the nuts are engaged with each other, so that even if vibration of the vacuum pipe is transmitted to the tightening nuts, the tightening nuts and washers are not locked so that the tightening nuts are loosened. The clamping force of the clamp can be maintained firmly by restricting the rotation of the clamp.

Description

Clamp for vacuum piping {CLAMP FOR VACUUM PIPE}

The present invention relates to a clamp for a vacuum pipe, and more particularly, to a clamp for connecting a vacuum pipe used in a semiconductor manufacturing process to each other, a vacuum that can firmly maintain the fastening state even by vibration or external impact of the vacuum pipe. It relates to a pipe clamp.

In general, a process of depositing a thin film on a wafer or etching a thin film deposited on a wafer in a semiconductor manufacturing process or the like may be carried out in a process chamber such as silane, arsine, boron chloride, harmful gases such as hydrogen, and the like. It is carried out at a high temperature using a process gas of, and during the process, a large amount of reaction by-product gas containing various ignitable gases, corrosive foreign substances and toxic components are generated in the process chamber.

Most of the toxic chemical gases are supplied from the chemical gas supply system to the semiconductor manufacturing equipment via piping that is resistant to corrosion and chemicals. In this case, the pipe for connecting the gas supply system and the semiconductor manufacturing apparatus is ideally connected in one pipe without a joint, in terms of leakage prevention, but this is a practical aspect such as transportation and installation of the pipe and maintenance. It is impossible, and in practice, several pipes are connected to each other to be used as exhaust lines.

Here, the exhaust line is formed by connecting the pipe and the pipe to each other, and the flange extending outward is formed at one end of the pipe which is in contact with each other. Therefore, in connecting these two pipes to form an exhaust line, it is important to fix each flange so that the exhaust gas does not leak.

Therefore, a pipe connection clamp is used to closely join each flange that is a joint portion of the pipe.

However, as the pipe of the exhaust line is connected to a vacuum pump that makes the chamber vacuum, the vacuum in the pipe is maintained by the operation of the vacuum pump. As the vibration caused by the operation of the vacuum pump is transmitted to the pipe, the pipe continuously vibrates. Done.

As the vibration of the pipe continues, there is a problem in that the tight connection state of the vacuum pipe is not achieved as the clamping state is gradually loosened due to the loosening of the tightening nut of the clamp.

In order to solve this problem, Patent Document 1 (Korean Registered Patent Publication No. 10-1017961) includes a plurality of locking members and fastening nut preventing members in the clamp, so that the clamps are not released even by vibration or external impact of the pipe. The phenomenon was reduced.

However, the clamp disclosed in Patent Document 1 has a configuration in which the first spring 148 having washers on both sides of the bolt portion 142 is coupled to the locking member as shown in FIG. 1 (FIG. 3 of Patent Document 1). do.

In addition, as shown in Fig. 2 (Fig. 10 of Patent Document 1), the tooth groove of the first gear portion 145 formed on the outer circumferential surface of the nut portion 145 to prevent loosening of the nut portion 145. The reverse rotation prevention device 150 is provided with a locking protrusion 162 formed therebetween to prevent rotation of the nut part 145. At this time, for the operation of the reverse rotation prevention device 150, that is, the reverse rotation prevention device 150 is the other end in the form of a lever for engaging and releasing the operation between the teeth of the first gear 145 of the locking projection 162. Exposed to the outside of the clamp and one end is fixed to the inside of the clamp so as to be rotated up and down, the fixed shaft portion is provided with a second spring 164 to always raise the reverse rotation prevention tool 150.

As described above, the clamp of Patent Document 1 has a large number of parts, such as the first spring 148 and the second spring 164, in order to prevent the clamp from loosening, and the structure thereof is complicated, which makes the manufacturing process complicated and the manufacturing cost. There is an increasing problem.

In particular, when the release of the nut portion for the disassembly and replacement of the clamp to always rotate by pressing the anti-rotation prevention downwards there is a problem that the work is very inconvenient to reduce the workability. In this regard, Patent Document 1 discloses a configuration for adjusting the operation of the reverse rotation prevention device according to the rotation direction of the nut part by using the ball plunger 170 including the third spring 174 and the fixed ball 176, There is also a problem that the manufacturing cost is increased by the additional configuration.

Patent Document 1: Korean Registered Patent Publication No. 10-1017961 (2011. 03. 02. notification)

The present invention was created to solve the above problems, and the vacuum pipe clamp can secure the clamping force of the clamp by preventing the reverse rotation of the tightening nut constituting the clamping device by the simple structure of the vacuum pipe clamp. The purpose is to provide.

Clamp for a vacuum pipe according to the design to achieve this purpose is a vacuum pipe clamp for fixing the outer circumferential surface of each flange of the vacuum pipe to be connected to each other, the flanges are fitted together on the inner circumferential surface in a symmetrical structure Both ends are hinged to each clamp body so that each clamp body can be rotated to each other at a fixed end to which the first and second clamp bodies are connected, and a semicircular first clamp body and a fitting groove respectively formed. And a coupling device fixedly coupled to the free end of the first clamp body and detachably coupled to the free end of the second clamp body to fasten the first and second clamp bodies so as to be openable and close to each other. The fastening device has one end rotatably fixed to the first clamp body and a washer fitted to the outside. And a fastening nut screwed in a form surrounding the bolt part and received in the operation groove formed in the second clamp body to tighten or loosen the first and second clamp bodies with each other according to the forward and reverse rotation. The tightening nut and the washer are characterized in that the rotational bumps which are inclined upward and downward in the direction in which the tightening nut is tightened or released are adjacent to each other and are continuously formed.

Here, the anti-rotation jaw is characterized in that the inclination angle of the inclined surface in the direction in which the tightening nut is released is greater than the inclination angle of the inclined surface in the direction in which the tightening nut is tightened.

In addition, the outer peripheral surface of the tightening nut is formed with a plurality of engaging grooves formed in the longitudinal direction of the tightening nut at regular intervals in the circumferential direction of the tightening nut, the operation groove of the second clamp body is operated in a hemispherical shape It is characterized in that the locking projection protruding to the outside of the bottom surface of the groove is caught by the locking groove to restrain the rotation of the tightening nut.

The vacuum pipe clamp according to the present invention has the following effects.

First, the tightening nut for fastening the clamp by screw fastening force is engaged with the washer by the anti-rotation jaw having the inclined structure, so that the inclined surface of the tightening nut may be Since the fastening nut is prevented from being released in the reverse rotation direction by being caught on the inclined surface, there is an advantage that the clamping force of the clamp can be maintained firmly.

In addition, the tightening force of the clamp can be more firmly adopted by adopting a double nut anti-rotation structure in which the tightening nut is coupled to the locking groove formed on the outer circumferential surface of the clamping nut together with the locking hole formed on the clamp body. have.

Moreover, the locking structure of the tightening nut and the locking groove of the tightening nut described above has the advantage that the structure is simple and the convenience of clamping and dismantling of the clamp is improved as well as the manufacturing cost is greatly reduced.

1 is a perspective view showing an unfolded state of a conventional vacuum pipe clamp.
Figure 2 is a view of the inverted reverse rotation prevention portion of the conventional vacuum pipe clamp.
Figure 3 is a perspective view showing a state in which the clamp of the vacuum pipe clamp is released according to an embodiment of the present invention.
Figure 4 is a perspective view showing a state in which the clamp for vacuum piping according to an embodiment of the present invention is fastened.
5 is a schematic view schematically showing a state in which the reverse rotation prevention jaw provided in the tightening nut and the washer in the vacuum pipe clamp according to an embodiment of the present invention is engaged with each other.
Figure 6 is a perspective view showing an enlarged view showing a state in which the locking groove of the nut member is caught in the perspective view showing the locking hole of the clamp for vacuum pipe according to an embodiment of the present invention.

Hereinafter, with reference to the accompanying drawings the contents of the present invention through a preferred embodiment of the present invention will be described in detail.

Free ends of the first and second clamp bodies, which are terms described in the specification and utility model registration claims of the present invention, mean end portions at which the first and second clamp bodies are connected to each other, and the first and second clamp bodies. The fixed end of means the other end that is connected to open and close the first and second clamp body to each other. The direction in which the tightening nut is tightened and the forward direction mean a direction in which the fixing ends of the first and second clamp bodies are close to each other, and the direction in which the tightening nut is released and the reverse direction are the fixed ends of the silver first and second clamp bodies. This means the direction away from each other. And the upward and downward inclination directions of the inclined surface in each of the anti-rotation jaw of the tightening nut and the washer means the direction viewed from above the plane of the tightening nut and washer formed with the anti-rotation jaw.

3 and 4 are perspective views showing the unlocked state and the fastened state of the clamp for the vacuum pipe according to an embodiment of the present invention, respectively.

3 and 4, the vacuum pipe clamp basically includes a first clamp body 100, a second clamp body 200, a connection link 300, and a fastening device 400. do.

The first and second clamp bodies 100 and 200 are directly wrapped around the joint portions of the vacuum pipe (not shown), that is, the portions where the flanges of the two vacuum pipes abut (hereinafter referred to as 'flanges'). The fastening configuration is made of semi-circular structure to correspond to the flange of the vacuum pipe, respectively, and is symmetrical to be coupled to each other in a circular form when fastening to the vacuum pipe.

In addition, the inner circumferential surfaces of the first and second clamp bodies 100 and 200 are provided with fitting grooves 110 and 210 in which the respective flanges of the vacuum pipes connected to each other when the vacuum pipes are connected are fitted in the circumferential direction. do.

On the other hand, the free end side of the second clamp body 200 has a surface in contact with the first clamp body 200 is drilled and described later in the form of a groove in which the upper portion of the predetermined length is opened along the circumferential direction to the outside of the clamp body 200 The fastening nut 420 of the fastening device 400 is accommodated in a downward direction from the top, and an operating groove 220 is formed, which is a space in which the fastening operation of the reverse rotation of the fastening nut 420 is performed.

The connection link 300 is hinged at both ends so that each clamp body 100 and 200 can be rotated to a fixed end at which the first clamp body 100 and the second clamp body 200 are connected to each other.

To this end, the connecting link 300 has a hinge shaft 310 protruding a predetermined length up and down at both ends, respectively, and the connecting link 300 inside the fixed ends of the first and second clamp bodies 100 and 200. An accommodation groove is provided to accommodate a portion of the end portion thereof, and holes forming the hinge grooves 310 are rotatably fitted to the surfaces facing each other while forming the accommodation grooves.

Meanwhile, one end of the fastening device 400 is fixedly coupled to the first clamp body 100, and the other end thereof is detachably coupled to the second clamp body 200.

The fastening device 400 is substantially screwed in the form of surrounding the outside of the bolt portion 410 and the bolt portion 410 hinged to the free end of the first clamp body 100, the first and the first 2 consists of a tightening nut 420 to tighten or loosen the clamp body (100) (200).

The bolt portion 410 has a predetermined length and is formed integrally extending from one end of the bolt shaft 411, the screw shaft formed on the outer circumferential surface, and one end of the bolt shaft 411, both ends of the free end of the first clamp body 100 The hinge block 412 is rotatably fixed in the state accommodated in the receiving groove formed in the.

Hinge shafts 413 protruding a predetermined length are formed on both sides of the hinge block 412. And forming a receiving groove of the free end of the first clamp body 100, each of the hinge shaft 413 is rotatably fitted to the surface facing each other is formed.

The center ring 500 and the washer 600 are inserted to the outside of the bolt shaft 411 so as to be movable along the axial direction of the bolt shaft 411 while penetrating the bolt shaft 411. At this time, the centering ring 500 is first inserted so that the hinge block 412 is positioned, and then the washer 600 is inserted, and finally the tightening nut 420 is inserted.

Here, the center ring 500 is positioned between the free end contact surfaces of the first and second clamp bodies 100 and 200 in a state in which the clamp is fastened through the fastening device 400. ) Serves to ensure confidentiality on the contact surface of the (200). And the washer 600 is located in the operating groove 220 formed in the second clamp body 200 in the state in which the clamp is fastened through the fastening device 400, the tightening nut 420 when tightening with the tightening nut 420 The role of improving the tightening force of the.

On the other hand, the tightening nut 420 is a cylindrical shape having a predetermined length screw hole 411 long in the longitudinal direction of the inner diameter to be screwed with the screw portion formed on the outer peripheral surface of the bolt shaft 411 while the bolt shaft 411 is fitted in the center Is formed.

Accordingly, the tightening nut 420 moves forward and backward along the axial direction of the bolt shaft 411 when the reverse rotation is performed while the bolt shaft 411 is inserted into the screw hole 411 of the tightening nut 420. The first clamp body 100 and the second clamp body 200 are tightened or released from each other.

On the other hand, on the outer circumferential surface of the tightening nut 420 is formed along the longitudinal direction of the tightening nut 420 in the form of a concave groove of a semi-circular cross-section, the catching groove 422 caught by the locking hole 230 to be described later tightening nut 420 A large number is formed at regular intervals around the perimeter of).

A hexagonal gripping portion 423 is formed at the rear end of the tightening nut 420 in the opposite direction from the tightening nut 420 to the bolt shaft 411. The gripping portion 423 improves the convenience of clamping by preventing the slip when the operator rotates the tightening nut 420 by hand.

In addition, the tightening nut 420 and the washer 600 are tightened with the tightening nut 420 to reverse the rotation of the tightening nut 420 in the direction in which the tightening nut 420 is released by external force through vibration of the vacuum pipe in the state where the clamp is completed. The anti-rotation jaws 424a and 424b are formed to prevent and firmly fasten the clamping force of the clamp.

As shown in the tightening nut 420 and the washer 600 shown in the enlarged view of FIGS. 3 and 4, the anti-rotation jaws 424a and 424b include the tightening nut 420 and the washer 60. The inclined surfaces inclined upward and downward in the direction in which the tightening nut 420 is tightened or released on one surface which is in close contact with each other have a shape in which they are continuously formed adjacent to each other.

In this regard, FIG. 5 is a cross-sectional view schematically illustrating a state in which the above-mentioned tightening nut 420 and the reverse rotation preventing jaw 424a and 424b formed in the washer 600 are engaged with each other.

Referring to Figure 5 to describe in more detail the anti-rotation bumps (424a, 424b) formed in the tightening nut 420 and the washer 600, respectively, the tightening nut 420 is tightened Is composed of an inclined plane inclined upward in the direction 'A' and a downwardly inclined plane inclined again and downwardly in succession with the upward inclined plane. The anti-rotation bumps 424a and 424b formed of the upward and downward inclined surfaces are successively formed adjacent to each other over the entire circumferential direction of the tightening nut 420 and the washer 600.

At this time, the reverse rotation prevention jaw (424a) 424b is the inclination angle of the inclined surface in the direction (B) in which the tightening nut is released, that is, the inclination angle of the downward inclined surface is in the direction (A) in which the tightening nut is tightened. The inclination angle of the inclined surface, that is, the inclination angle walk of the upward inclined surface is largely formed.

That is, the direction 'A' in which the tightening nut 420 is tightened in the reverse rotation prevention jaw 424a and 424b has a gentle inclined surface in the direction, so that the tightening nut 420 can be tightened more easily. On the contrary, the reverse direction of the tightening nut 420 is not easily performed by having a sharp inclined surface in the direction 'B' where the tightening nut 420 is released, so that the tightening nut 420 is not released unless a constant force is applied. This is avoided.

As such, the present invention adopts a simple structure in which the anti-rotation jaw 424a and 424b having the upward and downward inclined structures formed in the tightening nut 420 and the washer 600 are engaged with each other to reverse the tightening nut 420. Rotation can be prevented so that the clamping force of the clamp can be firmly maintained even if an external force through the vibration of the vacuum pipe is applied to the clamp.

On the other hand, in the present invention, in addition to the anti-rotation structure of the tightening nut 420 through the tightening nut 420 and the washer 600 described above, a means for additionally preventing the reverse rotation of the tightening nut 420 is added. It was.

To this end, as shown in FIG. 6, the tightening nut 420 is accommodated when the clamp is fastened, and the outer surface of the operation groove 220 of the second clamp body 200, which is a space in which the reverse rotation operation is performed, moves outwardly. A locking hole 230 is formed to protrude to a predetermined length and engage the locking groove 422 of the tightening nut 420.

As such, when the clamp is completed, the tightening nut 420 is caught by the catching hole 250, and the rotation is constrained so that the reverse rotation of the tightening nut 420 is prevented even when an external force through the vibration of the vacuum pipe is applied to the clamp. .

At this time, the locking port 230 is also important to restrain the rotation of the tightening nut 420, but the tightening nut 420 is difficult to rotate when the binding force is increased, so that the tightening nut ( Manipulation of 420 may be difficult.

In view of this point, the locking opening 230 has a hemispherical shape as a whole of the protruding portion of the operation groove 220. As a result, the fastening nut 420 naturally rides up the locking groove 230 having the round shape when the locking groove 422 of the tightening nut 420 is rotated forward and backward when the tightening nut 420 is reversed. Since it is rotated, a large force is not required for the rotation of the tightening nut 420.

As such, the present invention is a screw part which is screwed to each other in a fastening device for fastening a clamp, and a bolt part and a fastening nut that are configured to substantially fasten and release a clamp. By adopting a double structure that prevents the screw from loosening, that is, prevents the reverse rotation of the tightening nut, not only can the clamping force of the clamp be firmer, but also the very simple structure of the tightening nut The rotation can be prevented, thereby reducing the manufacturing cost as well as the convenience of work.

100: first clamp body 200: second clamp body
110, 210: fitting groove 220: working groove
230: hook 300: link
310,413: Hinge Shaft 400: Fastening Device
410: bolt portion 411: bolt shaft
412 hinge block 420 tightening nut
421: screw hole 422: locking groove
423: holding parts 424a, 424b: anti-rotation jaw
500: Centering 600: Washer

Claims

A clamp for vacuum pipe that fixes the outer circumferential surface of each flange of the vacuum pipe connected to each other in a form of wrapping,
The semicircular first clamp body 100 and the second clamp body 200 and the first and second clamp bodies 200 are formed in the inner circumferential surface and the fitting grooves 110 and 210 into which the flanges are fitted together. A connection link 300 hinged to both ends of each clamp body 100 and 200 so that each clamp body 100 and 200 can be rotated to each other at a fixed end to which the clamp bodies 100 and 200 are connected; It is fixedly coupled to the free end of the first clamp body 100 and detachably coupled to the free end of the second clamp body 200 to fasten the first and second clamp bodies 100 and 200 so as to be open and close to each other. Is configured to include a fastening device 400,
The fastening device 400 is screwed in such a way that one end is rotatably fixed to the first clamp body 100 and the washer 600 is fitted to the outside, and the bolt part 410 is wrapped. And a tightening nut 420 which is accommodated in the operation groove 220 formed in the second clamp body 200 and tightens or releases the first and second clamp bodies 100 and 200 according to the forward and reverse rotation. Including,
In the tightening nut 420 and the washer 600, rotation preventing jaws 424a and 424b which are inclined upward and downward in a direction in which the tightening nut 420 is tightened or released on one surface facing each other are continuously adjacent to each other. Formed,
On the outer circumferential surface of the tightening nut 420 is formed a plurality of engaging grooves 422 formed long in the longitudinal direction of the tightening nut 420 at regular intervals in the circumferential direction of the tightening nut 420, the second clamp body 200 In the operating groove 220 of the () is a hemisphere (半求) protruding out of the bottom surface of the operating groove 220 is caught by the locking groove 422 to restrain the rotation of the tightening nut 420 ( 230, a vacuum pipe clamp, characterized in that provided.

2. The inclination angle of the inclined surface in the direction in which the tightening nut 420 is released is greater than the inclination angle of the inclined surface in the direction in which the tightening nut 420 is tightened. Clamp for vacuum piping.

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