KR20020076120A - Tape carrier package handler - Google Patents

Abstract

PURPOSE: A TCP(Tape Carrier Package) handler is provided to be capable of conveying a TCP tape while securing stopping position accuracy without deforming or breaking any sprocket hole in the TCP tape having a comparatively thin film base. CONSTITUTION: By means of this TCP handier, a test pad in each TCP is brought into contact connection with a measurement pin connected to a semiconductor integrated circuit testing device, while a band type TCP tape provided with a plurality of the TCP connected one by one is sequentially fed intermittently. The TCP handler is provided with transferring parts for transferring the TCP tape by turning a pair of rollers pressed to the TCP tape, transfer amount detection parts(25) for detecting a transfer amount of the TCP tape, and a control part(27) for controlling the transferring parts in order to sequentially and intermittently feed the TCP tape on the basis of the transfer amount detected by the transfer amount detection parts(25) so that each of the TCP is stopped in the position wherein it faces the measurement pin.

Description

Tape carrier package handler

FIELD OF THE INVENTION The present invention relates to a tape carrier package (TCP) handler, in particular sequential on test pads of tape carrier packages aligned together in tape-like form and in contact with the measurement pins used for semiconductor integrated circuit testing. And a TCP handler that performs intermittent transport.

Tape carrier packages (TCPs) are well known as a typical type of semiconductor chip fabricated on a film by tape automated bonding (TAB). Prior to fabrication of integrated circuits on the printed circuit boards in the transfer step, the plurality of tape carrier packages are arranged in a tape-like form. FIG. 6 shows an example of a tape-like arrangement of simply aligning tape carrier packages, referred to as TCP tape (X). The TCP tape X provides transport aid sections 1A, such as a pair of bands, in which a plurality of tape carrier packages 1 are aligned. Each of the tape carrier packages 1 provides a semiconductor chip 1c in the center of the film substrate 1a. A predetermined number of test pads 1b are formed and aligned around the film substrate 1a to surround the semiconductor chip 1c. The test pads 1b and the semiconductor chip 1c are interconnected together by leads 1d formed by etching. The transfer aid sections 1A are made of a film material similar to the film substrate 1a. In addition, sprocket holes 1e are formed along the TCP tape on the transfer aid sections 1A at equal intervals therebetween. The holes are used to sequentially transport or carry the tape carrier packages 1 on the TCP tape X in the longitudinal direction.

A specially designed TCP handler is used for the sequential and intermittent transfer of the tape carrier packages 1 on the TCP tape X in the longitudinal direction. Here, the semiconductor integrated circuit test device provides measurement pins (not shown), and the measurement pins are in proper contact with the test pads 1b of each TCP 1 to perform a predetermined performance test. In particular, the TCP handler provides sprocket transporters having a wheel and protrusions (or sprockets) formed on the circumferential surface thereof. The sprocket feeder is driven to rotate the wheels in order to engage the sprocket holes 1e sequentially. Thus, it is possible to convey the TCP tape X in the longitudinal direction with a relatively high positioning accuracy. It is particularly desirable for the TCP handler to operate the test pads 1d to contact the measurement pins as accurately as possible. Thus, the TCP handler performs sequential and intermittent transfer of the TCP tape X by the sprocket feeder which ensures the correct position of the TCPs which are intermittently stopped with respect to the measuring pins. Various documents, such as Japanese Unexamined Utility Model Publication No. Hei 4-34467, disclose improvements in the positional accuracy set between the test pads 1b and the measurement pins.

The above-mentioned publication teaches a technique for introducing position pins that establish a fixed position with respect to the TAB and the electrodes (or TCPs and measurement pins). Usually, there may be small gaps between the sprocket conveyors and the location pins; Therefore, it is difficult to establish a very accurate position with respect to the TAB and the electrodes. In recent years, the degree of integration of circuit elements in semiconductor chips has increased significantly; Thus, the number of test pads provided in each TCP is correspondingly increased. That is, the distance between the test pads tends to be narrowed. Therefore, setting a very accurate position with respect to the TAB and the electrodes may be a top priority of the TCP handler.

Recently, there is another tendency that the thickness of the film substrate 1a is reduced. For this reason, when the protrusions of the sprocket conveyors engage with the sprocket holes 1e of the TCP tape X, there is a problem that the sprocket holes 1e may be deformed or partially broken. This problem is particularly acute in the case of TCP tapes composed of relatively thin film substrates having a thickness of about 25 μm. Therefore, there is a strong demand for the development of a new technology that ensures the sequential and intermittent transfer of the TCP tape without causing deformation or breakage of the sprocket holes while ensuring a relatively high accuracy of the position at the intermittent stop of the transfer.

The technical problem to be achieved by the present invention is to provide a TCP handler that can set a very accurate position with respect to the test pins of the measurement pins and TCP in order to solve the above disadvantages.

Another technical problem to be solved by the present invention is to provide a TCP handler which guarantees sequential and intermittent transfer of a TCP tape without causing deformation or breakage of the sprocket holes while ensuring a relatively high accuracy of position during intermittent stops of transfer. have.

1 is a perspective view showing mechanical parts and electronic parts of a TCP handler according to a first embodiment of the present invention.

Figure 2a shows the initial stage of a temporary stop of TCP between a first pusher and a clamper in the TCP handler.

2B shows the clamped state of the TCP held tightly between the first pusher and the clamper in the TCP handler.

FIG. 2C shows the contact state of the TCP where the test pads of the TCP are in contact with the measuring pins on the probe card due to the further falling of the second pusher.

3 shows the positional deviations occurring between the pick-up image G1 and the reference image G2 displayed on the screen of the display.

4A is a front view showing essential parts of the mechanism of the TCP handler according to the second embodiment of the present invention.

4B is a plan view showing essential parts of the TCP handler for transporting the TCP tape in the forward direction.

4C is a side view showing rollers and motors used for conveying the TCP tape by the TCP handler.

5 is a block diagram illustrating the electronic parts necessary in the TCP handler.

6 is a front view illustrating the alignment of tape carrier packages on a TCP tape.

<Explanation of symbols for the main parts of the drawings>

1 ... tape carrier package (TCP), 2 ... 1st pusher,

3 ... clamper, 4 ... input sprocket feeder,

5 ... sprocket feeder on output side, 6 ... 2nd pusher,

7 ... X-Y moving mechanism, 8 ... probe card,

9 ... measuring pins, 10 ... CCD camera,

11 image processing unit, 12 control unit,

13 ... display.

In order to achieve the above technical problem, the present invention sequentially and intermittently transports a TCP tape (X) for aligning a plurality of tape carrier packages (1), and the test pads of each tape carrier package ( In the TCP handler which temporarily stops 1b) and makes contact with the measuring pins 9 connected with the semiconductor integrated circuit test device,

Transport means (4, 5) for transporting the TCP tape sequentially and intermittently and for temporarily stopping each tape carrier package of the TCP tape that is located opposite the arrangement of the measurement pins;

Pressing means (2, 3, 6) for pressing down said tape carrier package of said TCP tape such that said test pads of said TCP respectively contact said measuring pins;

Image pick-up means (10) fixed at a fixed position and picking up an image of the tape carrier package; And

The tape carrier in a manner such that the pick-up image G1 of the tape carrier package matches the reference image G2 indicating the standard position of the tape carrier package where the test pads of the tape carrier package are in contact with the measuring pins for testing. Provided is a TCP handler comprising position adjusting means (7, 11, 12) for adjusting the package position.

The invention also provides a semiconductor integrated circuit test by sequentially and intermittently transferring a TCP tape (X) that aligns a plurality of tape carrier packages (1) and temporarily stopping the test pads (1b) of each tape carrier package. 1. A method of arranging a TCP handler to make contact with measurement pins 9 connected with a device

Picking up an image of the tape carrier package by means of image pick-up means fixed at a fixed position; And

The pickup image G1 is stopped with respect to the measurement pins in a manner that matches the reference image G2 indicating the standard position of the tape carrier package where the test pads of the tape carrier package are in contact with the measurement pins for testing. And adjusting the tape carrier package position.

The invention also provides a semiconductor integrated circuit test device by sequentially and intermittently transferring a TCP tape X that aligns a plurality of tape carrier packages 1 and temporarily stopping the test pads 1b of each tape carrier. In the TCP handler for making contact with the measuring pins 9 connected with

Transfer means 22A, 22B, 23A, 23B, 26A, 26B which sequentially and intermittently transfer the TCP tape by rotating a pair of rollers 22A, 22B holding the TCP tape firmly in between. ;

Conveying value detecting means (4, 5) for detecting a conveying value representing a conveyed distance of said TCP tape conveyed in the longitudinal direction; And

And control means (27) for controlling the sequential and intermittent transfer of the TCP tape based on the transfer value in such a way that the tape carrier package of the TCP tape stops exactly opposite the measuring pins. Provide a handler.

The TCP handler of the present invention is basically designed to transport TCP tapes that align a plurality of TCPs on a film substrate so that the test pads of each TCP are correctly positioned with respect to the measurement pins used in semiconductor integrated circuit testing.

In a first aspect of the invention, the sprocket feeders are synchronously adapted to convey the TCP tape in the longitudinal direction such that each of the sequentially transferred TCPs is temporarily stopped at a substantially intermediate position between the first pusher and the clamper. And intermittently rotated. The TCP is held tightly and clamped between the first pusher and the clamper; Then, the TCP is pushed down as the second pusher associated with the first pusher is lowered. The test pads of the TCP are in contact with and reliably connected to the measurement pins mounted on the probe card. Here, the CCD camera picks up an image of a specific position of the TCP where the lead of the TCP is thicker from the rear side of the probe card. The pick-up image is compared with a reference image defined to perform pattern matching on its contours. In order to realize complete registration between these images, fine adjustment of the position of the TCP is performed in a two-dimensional manner. Specifically, the TCP is moved slightly horizontally to correct the detected X-axis and Y-axis positional deviations between the pickup image and the reference image.

In the second aspect of the invention, the TCP tape X is held tightly between a pair of rollers under pressure and conveyed using friction therebetween. This prevents deformation or breakage of the sprocket holes of the TCP tape, which are relatively thin in thickness. The feed value (ie the conveyed distance) of the TCP tape X is detected by a sprocket wheel and a rotary encoder. That is, the rotary encoder detects the rotation of the sprocket wheel whose protrusions sequentially engage the sprocket holes of the TCP tape during transport. In addition, the control unit performs feedback control on the rotation of the rollers rotated by the motors, respectively, in such a way that the detected feed value is usually constant or consistent with a predetermined target value. Thus, it is possible to realize a smooth transfer of the TCP tape and to ensure the desired accuracy of the position between the test pads and the measuring pins of the tape carrier package which are temporarily stopped during the test.

These and other objects, aspects, and embodiments of the present invention will be described in more detail with reference to the accompanying drawings.

First embodiment

A method of deploying TCP handlers and tape carrier packages (TCPs) will be described according to the first embodiment of the present invention. 1 is a perspective view showing essential parts, namely mechanical parts and electronic parts, with respect to the TCP handler of the first embodiment of the present invention. In this specification, reference numeral X denotes a TCP tape providing TCPs 1; Reference numeral 2 represents a first pusher; 3 represents a clamper; 4 represents the input sprocket conveyor; 5 represents the output sprocket conveyor; 6 represents a second pusher; 7 represents the X-Y movement mechanism; 8 represents a probe card; 9 represents measurement pins; 10 indicates a CCD camera, where 'CCD' stands for 'Charge Coupled Device'; 11 represents an image processing unit; 12 represents a control unit; And 13 represents a display.

The first embodiment of the invention basically comprises three means, namely a conveying means, a pressurizing means and a stop position adjusting means. In the TCP handler of Fig. 1, the input sprocket conveyor 4 and the output side sprocket conveyor 5 constitute the conveying means; Said first pusher (2), clamper (3) and second pusher (6) constitute said pressing means; And the said image processing part 11, the control part 12, and the X-Y moving mechanism 7 comprise the said stop position adjusting means.

The TCP tape X has already been described with reference to FIG. Here, a plurality of TCPs 1 are aligned and connected together in a tape-like form with a transfer aid section 1A such as a band. In addition, each TCP 1 includes a film substrate 1a, test pads 1b, a semiconductor chip 1c, and leads 1d. Moreover, the sprocket holes 1e are arranged along the conveying help sections 1A of the TCP tape X at equal intervals therebetween.

Each of the input side sprocket feeder 4 and the output side sprocket feeder 5 is composed of a cylinder having wheels at its ends. The wheels are separated from each other by a distance defined therebetween to substantially coincide with the distance between the transfer aid sections 1A of the TCP tape X. In addition, the sprocket conveyors 4, 5 are arranged substantially parallel to one another along the defined conveying direction of the TCP tape X. Thus, the TCP tape X is temporarily fixed in the longitudinal direction between the sprocket conveyors 4, 5. Projections (or sprockets) are formed on the circumferential surface of the wheels of the sprocket feeders 4, 5, wherein the projections are arranged at equal intervals therebetween. When the TCP tape X is disposed in the TCP handler, the protrusions of the circumferential surfaces of the wheels of the sprocket conveyors 4, 5 are suitably engaged with the sprocket holes 1e of the TCP tape X. All. Then, the sprocket conveyors 4 and 5 are rotated synchronously and intermittently so that the TCP tape X is conveyed sequentially and intermittently in the longitudinal direction shown by the arrows in FIG. . Thus, the TCPs 1 of the TCP tape X are sequentially and intermittently transferred from the input side sprocket conveyor 4 to the output side sprocket conveyor 5. Due to the intermittent transfer of the TCP tape X, each TCP 1 is correctly positioned and arranged substantially below an intermediate position between the input side sprocket conveyor 4 and the output side sprocket conveyor 5. Is temporarily stopped at a fixed stop position opposite the arrangement of the measuring pins 9.

The first pusher 2 and the clamper 3 are arranged between the input sprocket feeder 4 and the output side sprocket feeder 5 along the conveying direction of the TCP tape X. The clamper 3 is a hollow frame body attached to the second pusher 6 and arranged under the TCP tape X. The first pusher 2 is attached to the second pusher 6 and the first pusher can be freely moved up and down in the vertical direction. The first pusher 2 is arranged on the TCP tape X. That is, the TCP tape X is arranged between the first pusher 2 and the clamper 3 and fitted vertically. When the first pusher 2 comes down from a high position with respect to the clamper 3, both sides of the TCP tape X are firmly held between the first pusher 2 and the hollow clamper 3. Can be maintained.

The second pusher 6 moves up and down the first pusher 2 and the clamper 3 holding the TCP tape X firmly therebetween. When they come down, the TCP tape X is pressed and moved down such that the test pads 1b of the TCP 1 are in direct contact with the measuring pins 9.

The conveying means and the pressing means described above are usually constructed on the X-Y moving mechanism 7. By causing small movements of the conveying means and the pressing means in the XY plane (or horizontal plane), the XY moving mechanism 7 causes the measuring pins 9 and the TCP 1 (in detail, the test Fine adjustment is performed with respect to the positions set between the pads 1b). The X-Y moving mechanism 7 is, for example, an X-Y pulse stage that operates using two pulse motors driving the X-axis and the Y-axis. The pulse motors operate in response to driving signals (or pulse signals) output from the controller 12.

The probe card 8 is arranged and fixed substantially below the clamper 3 at a position coinciding with the intermediate position between the input side sprocket feeder 4 and the output side sprocket feeder 5. On the face of the probe card 8 there is provided a predetermined arrangement of the measuring pins 9 arranged to coincide with the test pads 1b of the TCP 1. These measuring pins are elastic contacts and are connected to a semiconductor integrated circuit test device (not shown) that tests the operation of the TCPs 1 via wires.

An opening is formed in the center of the probe card 8 to allow the pick-up of the TCP 1 by the CCD camera 10. The CCD camera 10 integrally includes a light source for illumination. The CCD camera 10 is fixedly arranged under the probe card 8 and picks up an image of the TCP 1 located thereon. In particular, the position and magnification of the CCD camera 10 are adjusted so that the lid 1d ensures image pickup for a specific portion of the thickened portion within the TCP 10.

On the basis of the image signal representing the image of the TCP 1 picked up by the CCD camera 10, the image processing unit 11 stores the image G1 of the specific portion of the TCP 1 and the previously stored A pattern matching process is performed on the reference image G2 representing the normal position of the TCP 1. The image processing unit 11 then generates a deviation signal indicating the degree of pattern matching and outputs it to the control unit 12. In detail, the image processing unit 11 extracts a contour or profile with respect to the image G1 of the specific portion picked up by the CCD camera 10, for example. Therefore, the image processing unit 11 performs the pattern matching by comparison between the extracted contour and the contour of the reference image G2. In addition, the image processing unit 11 also generates and outputs an image signal indicating the status of the pattern matching to the display 13.

The control unit 12 controls the X-Y moving mechanism 7 based on the deviation signal output from the image processing unit 11. That is, the control unit 12 controls feedback on the XY moving mechanism 7 to realize fine adjustment of the TCP 1 at a position based on the pick-up image G1 of the TCP 1. Do this. The display 13 displays the state of the pattern matching described above. In other words, the display 13 displays an image representing a difference between the pickup image G1 and the reference image G2 previously stored in the image processing unit 11. Thus, the display 13 allows a human operator to manually adjust the X-Y moving mechanism 7.

Next, the overall operation of the TCP handler of this embodiment will be described with reference to Figs. 2A to 2C and 3 as well as Fig. 1.

First, the transfer operation and the clamping operation of the TCP handler will be described with reference to FIGS. 1 and 2A to 2C. Synchronous and intermittent rotations about the TCP tape X are realized by controlling the rotations of each of the input sprocket conveyor 4 and the output side sprocket conveyor 5. Each time the TCP handler performs synchronous and intermittent rotations so that the TCP tape X is fed from the input side sprocket conveyor 4 to the output side sprocket conveyor 5 by a predetermined length, each TCP 1 ) Moves forward and stops immediately above the probe card (8). 2A-2C show between the temporarily stopped TCP 1 and the predetermined portions of the TCP handler (ie, 2, 3, 8 and 9) observed from the longitudinal side view of the TCP tape X Shows the relationship. In the initial stage of a temporary stop state of the TCP 1 that is temporarily stopped just above the probe card 8 as shown in FIG. 2A, the TCP 1 moves up the first pusher 2 and the clamper. (3) lies in a substantially intermediate position between.

Then, only the input side sprocket feeder 4 is rotated slightly in the reverse direction, and some predetermined rear tension is applied to the TCP tape X. In this state, as shown in FIG. 2B, the first pusher 2 is lowered so that the TCP 1 is held firmly between the first pusher 2 and the clamper 3. That is, the TCP 1 is sandwiched and clamped between the lower surface of the first pusher 2 and the upper surface of the clamper 3. Since the back tension is applied to the TCP tape X, the TCP tape X does not loosen and becomes substantially flat. Thus, it is possible to reliably maintain the 'planar' TCP 1 between the first pusher 2 and the clamper 3.

After the clamped state is set relative to the TCP 1, the second pusher 6 such that the TCP 1 clamped between the first pusher 2 and the clamper 3 is further moved downward. Comes down. Thus, the test pads 1b of the TCP 1 are in contact with the measuring pins 9 respectively mounted on the probe card 8 under pressure, and are shown in FIG. 2C. That is, FIG. 2C shows the contact state in which the text pads 1b of the TCP 1 are in full contact and in contact with the measurement pins 9 on the probe card 8.

Next, the TCP handler performs fine adjustment of the position of the TCP 1 with respect to the measurement pins 9 and will be described with reference to FIGS. 1, 2A to 2C and 3.

In the present embodiment, the CCD camera 10 picks up the lower surface of the specific portion of the TCP 1 in the clamped state. In other words, the CCD camera picks up the image of the TCP 1 in which the lid 1d becomes thick in thickness. Based on the pick-up image G1 of the particular part of the TCP 1, the TCP handler performs fine adjustment of the position of the TCP 1 with respect to the measuring pins 9 in a horizontal plane. The pickup image G1 is subjected to pattern matching with the reference image G2 by the image processor 11. The image processing unit 11 then generates a deviation signal indicating the degree of pattern matching and outputs it to the control unit 12. The controller 12 generates a driving signal based on the deviation signal. Thus, the X-Y moving mechanism 7 is driven in response to the drive signal.

3 shows an example of the state of pattern matching between the pickup image G1 and the reference image G2 displayed on the screen of the display 13. 3 shows the positional deviation between the pickup image G1 and the reference image G2 in the X- and Y-axis directions, where the X-axis direction is in the longitudinal direction of the TCP tape X. Correspondingly, the Y-axis direction corresponds to the width direction (or the direction perpendicular to the length direction) of the TCP tape X. FIG. Specifically, the position deviation Δx occurs in the X-axis direction, and the position deviation Δy occurs in the Y-axis direction. Here, the complete pattern matched state will be set when the contours of the pickup image G1 and the reference image G2 completely match each other. In the complete pattern matching state, the TCP 1 is optimally arranged with the probe card 8 such that all the test pads 1b are in full contact with the measuring pins 9.

The image processor 11 calculates a deviation value with respect to the pickup image G1 and the reference image G2, and generates a deviation signal corresponding to the deviation value and outputs the deviation signal to the controller 12. In order to correct the deviation value, the control unit 12 calculates the number of pulses respectively supplied to the above-mentioned pulse motors driving X-axis and Y-axis in the X-Y moving mechanism 7. Thus, the controller 12 generates drive signals having the calculated number of pulses and outputs them to the X-Y moving mechanism 7. That is, the X-axis driving pulse motor is driven corresponding to the number of pulses calculated to correct the X-axis position deviation Δx, and the Y-axis driving pulse motor is the Y-axis position deviation Δy. Is driven corresponding to the number of pulses calculated to correct. As a result, the deviation value is corrected such that the TCP 1 is at an optimum position with respect to the measuring pins 9 on the probe card 8.

Next, a supplementary explanation will be given with respect to the reference image G2. In other words, the reference image G2 is a representation of a particular portion of the 'first' TCP that is correctly positioned with respect to the measurement pins 9 before the semiconductor integrated circuit test device performs the test on the TCP tape X. Pick up image. Thus, the pickup image of the particular portion of the first TCP is stored in the memory (not shown) of the image processing unit 11 as the reference image G2. When the TCP tape X is transported sequentially and intermittently between the input sprocket feeder 4 and the output side sprocket feeder 5, the test pads are measured pins on the probe card 8. Each of the TCPs 1 is correctly arranged so as to reliably contact and connect with (9). Here, only the first TCP of the TCP tape X is arranged with respect to the measuring pins 9 by a human operator who manually manipulates the X-Y mobile mechanism 7.

In the above, the human operator visually confirms the pick-up image of the specific portion of the first TCP, and manually, on the screen of the display 13 connected with the CCD camera 10, to the measuring pins 9 manually. Are accurately placed in relation to. Then, the pickup image is stored in the memory of the image processing unit 11. With regard to the second to last TCPs, the above-described fine adjustment in position is automatically performed.

The practical way of performing the fine adjustment of the position of the TCPs may depend on the positional accuracy required and the positional accuracy realized only by the conveying means. It may be desirable not to continuously perform position refinement for all TCPs following the first TCP. That is, it may be possible to restart the fine adjustment using the stop position adjusting means only when a connection error occurs between the test pad 1b and the measuring pin 9. As an alternative, it is possible to carry out said fine tuning by a fixed number of TCPs counted after the first TCP. By using suitable means of fine tuning the position of the TCPs, it is possible to improve the test throughput of the TCP tape X.

Second embodiment

Essential parts of the mechanism of the TCP handler will be described according to the second embodiment of the present invention. 4A is a front view showing some parts of the mechanism of the TCP handler of the second embodiment. 4B is a plan view showing the mechanism of the TCP handler for transporting the TCP tape X in the forward direction. Fig. 4C is a side view showing the engagement of the rollers and motors used for the transfer of the TCP tape X by the TCP handler. In these figures, reference numerals 22A and 22B denote rollers; Reference numerals 23A and 23B denote motors; Reference numeral 24 denotes a sprocket wheel having projections (or sprockets) on its circumferential surface; And reference numeral 25 denotes a rotary encoder.

Fig. 5 shows an electronic configuration of the TCP handler of the second embodiment. Here, reference numerals 26A and 26B denote motor drives; Reference numeral 27 denotes a control unit.

The above-mentioned parts are classified into two means, that is, a conveying means and a conveying value detecting means. That is, the conveying means consists of the rollers 22A and 22B, the motors 23A and 23B and the motor drives 26A and 26B; The conveying value detecting means is constituted by the sprocket wheel 24 and the rotary encoder 25.

Both the rollers 22A and 22B are, for example, rubber rollers having a predetermined elasticity. The rollers are arranged to hold the TCP tape X firmly in between and to press the transfer aid sections 1A of the TCP tape X (see FIG. 6) at a certain pressure. By rotation, the rollers convey the TCP tape X in the longitudinal direction. Specifically, the roller 22A is attached to a rotation shaft of the motor 23A; The roller 22B is attached to the rotating shaft of the motor 23B. The controller 27 controls the rollers 22A and 22B to rotate, respectively.

The sprocket wheel 24 is arranged so that the protrusions of the sprocket wheel are sequentially arranged in the sprocket holes 1e of the transfer aid section 1A of the TCP tape X as the TCP tape X moves in the longitudinal direction. Are arranged in an interlocking manner. That is, the sprocket wheel 24 rotates in correspondence with the conveyance value (or conveyed distance) of the TCP tape X. The rotary encoder 25 is attached to the shaft of the sprocket wheel 24. That is, the rotary encoder detects the number of revolutions of the sprocket wheel 24, that is, the conveyed distance (or feed value) of the TCP tape X. The detected rotation value of the sprocket wheel 24 is transmitted to the control unit 27.

Under the control of the controller 27, the motor 23A is driven by the motor driver 26A, and the motor 23B is driven by the motor driver 26B. That is, the control unit 27 controls the feed value of the TCP tape X detected by the feed value detecting means in such a manner that the TCP 1 is stopped opposite to the measuring pins 9 (see FIG. 1). The motor drives 26A and 26B are controlled based on this.

Next, the overall operation of the TCP handler will be described in detail. The TCP handler of the second embodiment does not operate to transport the TCP tape X using the sprocket conveyors 4, 5 used by the TCP handler of the first embodiment. In other words, the TCP handler of the second embodiment uses the rollers 22A, 22B that are pressed against the TCP tape X and held firmly therebetween and are rotated by the motor drives 26A, 26B. To transfer the TCP tape X. In other words, the force for conveying the TCP tape X is in contact with the rollers 22A and 22B and under a predetermined surface area of the TCP tape X which is pressed between the rollers 22A and 22B. It is created using the friction that occurs. Thus, the TCP tape X is conveyed in the longitudinal direction in response to the conveying force generated by the rollers 22A and 22B. When the protrusions of the sprocket conveyors engage with the sprocket holes 1e of the TCP tape X sequentially during transportation, the TCP tape X is damaged by breakage of the sprocket holes 1e. There is a possibility.

This embodiment only operates to convey the TCP tape X using the friction that occurs on the TCP tape X held firmly between the rollers 22A and 22B. However, due to some 'slip' which may occur between the TCP tape X and the rollers 22A, 22B, the rotation values of the rollers 22A, 22B and the TCP tape ( Some error may occur between the transfer values of X).

In order to eliminate the above-mentioned error, the control unit 27 is based on the conveying value detected by the conveying value detecting means, that is, the physical value representing the conveyed distance of the TCP tape X (the motor driving units ( And perform feedback control on 26A, 26B). That is, the controller 27 controls the motor drives 26A and 26B in such a manner that the transfer value is usually constant or that the transfer value is matched with a target value that is normally determined. Thus, the TCP handler of the second embodiment can transport the TCP tape X sequentially and intermittently while ensuring the desired accuracy of the position set between the test pads 1b and the measuring pins 9. . By simply using the feedback control described above, this embodiment can significantly reduce the unwanted reduction in the accuracy of the position between the test pads 1b and the measuring pins 9.

As the invention can be embodied in several forms without departing from the spirit or essential features of the invention, the present embodiments are therefore to be considered as illustrative and not restrictive. Since the scope of the invention is defined by the appended claims rather than by the foregoing description, it is intended that all modifications that come within the limits or equivalents of the claims are therefore intended to be included in the claims.

As mentioned above, the TCP handler according to the invention can be used to set a very accurate position with respect to the test pins of the measuring pins and TCPs.

In addition, it is possible to ensure the sequential and intermittent transfer of the TCP tape without causing deformation or breakage of the sprocket holes while ensuring a relatively high accuracy of the position at the intermittent stop of the transfer.

Claims (24)

A semiconductor integrated circuit test device by sequentially and intermittently transporting a TCP tape X that aligns a plurality of tape carrier packages 1 and temporarily stopping the test pads 1b of each tape carrier package. In a tape carrier package (TCP) handler which is brought into contact with the measuring pins 9 connected with Transport means (4, 5) for transporting the TCP tape sequentially and intermittently and for temporarily stopping each tape carrier package of the TCP tape that is located opposite the arrangement of the measurement pins; Pressing means (2, 3, 6) for pressing down said tape carrier package of said TCP tape such that said test pads of said TCP respectively contact said measuring pins; Image pick-up means (10) fixed at a fixed position and picking up an image of the tape carrier package; And The tape carrier in a manner such that the pick-up image G1 of the tape carrier package matches the reference image G2 indicating the standard position of the tape carrier package where the test pads of the tape carrier package are in contact with the measuring pins for testing. Tape carrier package handler, characterized in that it comprises positioning means (7, 11, 12) for adjusting the package position. The method of claim 1, wherein the position adjusting means An image processing unit (11) configured to perform pattern matching between the pickup image and the reference image to generate a deviation signal indicating a degree of pattern matching; A control unit for generating a driving signal based on the deviation signal; And And an X-Y movement mechanism (7) for adjusting the two-dimensional position of the tape carrier package with respect to the measuring pins based on the drive signal. The tape carrier package handler according to claim 1, wherein the reference image is a pickup image of the first tape carrier package of the TCP tape, which is precisely disposed with respect to the measurement pins and is stored in the image processing unit in advance. The method of claim 1, wherein the image pickup means picks up an image of at least one leads 1d interconnecting the test pads and the semiconductor chip 1c in the tape carrier package. Tape carrier package handler. The tape carrier package handler of claim 1 wherein the image pickup means comprises a CCD camera and a light source used for illumination. 2. The conveying means according to claim 1, characterized in that the conveying means comprises an input sprocket transporter 4 and an output side sprocket conveyer 5 between which the TCP tape is conveyed sequentially and intermittently in the forward direction. Carrier package handler. 7. The method of claim 6, wherein when the conveying means conveys the TCP tape and then pauses the TCP tape such that the tape carrier package stops on the opposite side of the arrangement of the measuring pins, before the pressing means is actuated, And the input side sprocket feeder is rotated slightly backward so that a back tension is applied to the TCP tape. The method of claim 1 wherein the pressing means A clamper (3, clamper) disposed under the TCP tape conveyed in the forward direction; Usually placed on the TCP tape which is transported in the forward direction, to hold the TCP tape firmly at its end with the clamper when the tape carrier package of the TCP tape is temporarily stopped on the opposite side of the arrangement of the measuring pins. A first pusher 2, which goes down; And And a second pusher (6) for pressing the tape carrier package towards the measuring pins after the first pusher is in operation. 2. The apparatus according to claim 1, wherein once said positioning means has completed positioning of said first tape carrier package of said TCP tape, said positioning means are deactivated, while at least one pair of said test pad and said measuring pin And if a connection error occurs with respect to the tape carrier package handler. 2. The apparatus of claim 1, wherein once the positioning means has completed positioning of the first tape carrier package of the TCP tape, the positioning means is periodically checked by a predetermined number of tape carrier packages that are sequentially tested. Tape carrier package handler, characterized in that it is activated. The TCP tape X, which aligns the plurality of tape carrier packages 1, is transported sequentially and intermittently, and is connected to the semiconductor integrated circuit test device by temporarily stopping the test pads 1b of each tape carrier package. In a method of arranging a TCP handler to be brought into contact with the measuring pins 9, Picking up an image of the tape carrier package by means of image pick-up means fixed at a fixed position; And The pickup image G1 is stopped with respect to the measurement pins in a manner that matches the reference image G2 indicating the standard position of the tape carrier package where the test pads of the tape carrier package are in contact with the measurement pins for testing. And adjusting the tape carrier package position. 12. The method of claim 11, wherein a pattern matching process is performed based on the pickup image and the reference image. 12. The method of claim 11 wherein the tape carrier package is positioned relative to the measurement pins in a two dimensional manner. 12. The method of claim 11 wherein the reference image is a pickup image of a first tape carrier package of the TCP tape that is accurately positioned and prestored with respect to the measurement pins. 12. The tape carrier according to claim 11, wherein said pick-up image is generated with respect to at least one leads (1d) interconnecting said test pads and semiconductor chip (1c) in said tape carrier package. How to deploy a package handler. 12. The method of claim 11, further comprising applying a back tension to the TCP tape when the tape carrier package is stopped with respect to the measurement pins. The method of claim 11, Clamping the TCP tape close to the measurement pins and at the end thereof when the tape carrier package is stopped with respect to the measurement pins; And And pressing the tape carrier package toward the measuring pins. 12. The apparatus according to claim 11, wherein when the position adjustment of the first tape carrier package of the TCP tape is completed, the position adjustment is deactivated, while the position error occurs when a connection error occurs with respect to the at least one pair of the test pad and the measurement pin. And the adjustment is activated again. 12. The tape carrier package handler according to claim 11, wherein when the positioning of the first tape carrier package of the TCP tape is completed, the positioning is periodically activated by a predetermined number of tape carrier packages that are sequentially tested. Placement method. Measurement connected to the semiconductor integrated circuit test device by transferring TCP tape X, which aligns the plurality of tape carrier packages 1, sequentially and intermittently, and temporarily stopping the test pads 1b of each tape carrier. In the TCP handler for making contact with the pins 9, Transfer means 22A, 22B, 23A, 23B, 26A, 26B which sequentially and intermittently transfer the TCP tape by rotating a pair of rollers 22A, 22B holding the TCP tape firmly in between. ; Conveying value detecting means (4, 5) for detecting a conveying value representing a conveyed distance of said TCP tape conveyed in the longitudinal direction; And And control means (27) for controlling the sequential and intermittent transfer of the TCP tape on the basis of the transfer value in such a way that the tape carrier package of the TCP tape stops exactly opposite the measuring pins. Carrier Package Handler. 21. The rotating drive means according to claim 20, wherein the conveying means drives a rotation of the rollers under the control of the pair of the rollers 22A, 22B and the control means for holding the TCP tape firmly therebetween. Tape carrier package handler comprising: 23A, 23B, 26A, 26B. 22. The rotary drive means according to claim 21, characterized in that the rotary drive means comprise a pair of motors (23A, 23B) for rotating the rollers respectively and a pair of motor drives (26A, 26B) for driving the motors, respectively. Carrier package handler. The tape carrier package handler of claim 20 wherein the rollers are rubber rollers. 21. The conveying value detecting means according to claim 20, wherein the conveying value detecting means is provided as a sprocket wheel 24 and the conveying value in which projections of the sprocket wheel are sequentially engaged with the sprocket holes 1e and holes of the TCP tape during conveying. And a rotary encoder (25) attached to the shaft of the sprocket wheel to detect its rotation.